JPS6148568A - 多層硬質膜被覆工具 - Google Patents
多層硬質膜被覆工具Info
- Publication number
- JPS6148568A JPS6148568A JP16767684A JP16767684A JPS6148568A JP S6148568 A JPS6148568 A JP S6148568A JP 16767684 A JP16767684 A JP 16767684A JP 16767684 A JP16767684 A JP 16767684A JP S6148568 A JPS6148568 A JP S6148568A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- cubic
- coated
- wear resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 150000004767 nitrides Chemical class 0.000 claims abstract description 11
- 239000011248 coating agent Substances 0.000 claims abstract description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 8
- 150000001247 metal acetylides Chemical class 0.000 claims abstract description 6
- 239000000956 alloy Substances 0.000 claims abstract description 5
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 5
- -1 cermets Substances 0.000 claims description 3
- 239000006104 solid solution Substances 0.000 claims description 2
- 239000008247 solid mixture Substances 0.000 claims 1
- 239000011195 cermet Substances 0.000 abstract description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 3
- 150000001875 compounds Chemical class 0.000 abstract description 3
- 229910052593 corundum Inorganic materials 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 150000002739 metals Chemical class 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 23
- 230000000694 effects Effects 0.000 description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/342—Boron nitride
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16767684A JPS6148568A (ja) | 1984-08-09 | 1984-08-09 | 多層硬質膜被覆工具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16767684A JPS6148568A (ja) | 1984-08-09 | 1984-08-09 | 多層硬質膜被覆工具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6148568A true JPS6148568A (ja) | 1986-03-10 |
| JPH0515786B2 JPH0515786B2 (enrdf_load_stackoverflow) | 1993-03-02 |
Family
ID=15854151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16767684A Granted JPS6148568A (ja) | 1984-08-09 | 1984-08-09 | 多層硬質膜被覆工具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6148568A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0701982A1 (en) * | 1994-09-16 | 1996-03-20 | Sumitomo Electric Industries, Limited | Layered film made of ultrafine particles and a hard composite material for tools possessing the film |
| JP2007169743A (ja) * | 2005-12-26 | 2007-07-05 | Hitachi Tool Engineering Ltd | 被覆部材 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH074385U (ja) * | 1993-06-28 | 1995-01-24 | 公雄 服部 | レトルト食品収納用容器材 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52110209A (en) * | 1976-03-15 | 1977-09-16 | Mitsubishi Metal Corp | Coated hard alloy tool |
| JPS56208A (en) * | 1979-06-18 | 1981-01-06 | Mitsubishi Metal Corp | Composite sintered part for cutting tool and its manufacture |
| JPS57174453A (en) * | 1981-04-17 | 1982-10-27 | Sumitomo Electric Ind Ltd | Coated superhard alloy tool |
-
1984
- 1984-08-09 JP JP16767684A patent/JPS6148568A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52110209A (en) * | 1976-03-15 | 1977-09-16 | Mitsubishi Metal Corp | Coated hard alloy tool |
| JPS56208A (en) * | 1979-06-18 | 1981-01-06 | Mitsubishi Metal Corp | Composite sintered part for cutting tool and its manufacture |
| JPS57174453A (en) * | 1981-04-17 | 1982-10-27 | Sumitomo Electric Ind Ltd | Coated superhard alloy tool |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0701982A1 (en) * | 1994-09-16 | 1996-03-20 | Sumitomo Electric Industries, Limited | Layered film made of ultrafine particles and a hard composite material for tools possessing the film |
| JP2007169743A (ja) * | 2005-12-26 | 2007-07-05 | Hitachi Tool Engineering Ltd | 被覆部材 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0515786B2 (enrdf_load_stackoverflow) | 1993-03-02 |
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