JPH05157304A - Clean room - Google Patents

Abstract

PURPOSE:To restrict bad influence caused by leakage of gas by a method wherein a gas piping duct is arranged below a free access floor in a vertical layered flow type clean room having the free access floor and a gas piping to be connected to a semiconductor manufacturing device or the like is placed in it. CONSTITUTION:An apertured floor panel 9 is placed through the second supporting columns on an upper floor 7 supporting some slabs 6 on supporting columns 5 vertically arranged on a building floor 4 to construct a free access floor 10, and then a semiconductor manufacturing device 12 is mounted on the free access floor 10 within the clean room 40. Air within the clean room 40 is sucked into a floor space 11 under an operation of a blower 24, thereafter the air is passed through a vertical duct 25 and supplied to a ceiling space 17, purified by a filter 16 and then circulated. Gas piping ducts 41 for use in placing gas pipings 30 to 32 or the like connected to the semi-conductor manufacturing device 12 are installed below the free access floor 10. The ducts 41 are formed in the repairing and maintenance region and their ends are connected to an air discharging duct.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room,
In particular, it relates to a gas pipe laying structure for a vertical laminar flow type clean room.

A clean room as a semiconductor manufacturing facility is required to have a high degree of cleanliness. For this reason, a vertical laminar flow system is often adopted and a system in which air is repeatedly circulated is adopted.

It is desirable that the clean room has a structure adopting the above-mentioned type and method and that the inside of the clean room is not easily contaminated even if an accident occurs.

[0004]

2. Description of the Related Art FIG. 6 shows a conventional example.

First, for convenience of explanation, a general structure of a vertical laminar flow type circulation type clean room will be described.

1 is a clean room, 2 is its floor, and 3 is its ceiling.

The floor 2 is a support column 5 standing on the building floor 4.
An upper floor 7 on which a slab 6 is supported and laid,
A free access floor 10 in which a perforated floor panel 9 is supported and laid on a support column 8 which is erected on the upper floor 7.
It is a double structure consisting of. Below the free access floor 10, a flat floor space 11 is provided between it and the floor 7.
Exists.

The semiconductor manufacturing apparatus 12 is installed on the free access floor 10.

The ceiling 3 has a structure in which the HEPA filters 16 are arranged side by side over the entire surface below the building ceiling 15.

A flat ceiling space 17 exists between the filter 16 and the building ceiling 15.

Air is blown downwards through the filter 16 as indicated by arrow 20, and as indicated by arrow 21,
It flows vertically through the clean room 1 toward the floor 2, passes through the holes in the flooring panel 9 as shown by the arrow 22, passes through the free access floor 10, and is sucked into the floor space 11.

The air sucked into the floor space 11 is blown by the blower 24, as shown by the arrow 23.
5, is blown as shown by arrow 26, is supplied into ceiling space 17, and is blown downward through filter 16 as shown by arrow 20.

As mentioned above, the air circulates repeatedly,
Flow vertically downward in the clean room 1.

Next, a conventional example will be described.

In FIG. 6, reference numerals 30A, 31A and 32A denote gas pipes connected to the device 12, respectively, and are laid in the floor space 11 in a state where they are simply placed on the upper floor 7.

[0016]

Gas pipes 30A to 32
Since A is laid out so as to be completely exposed in the floor space 11, if the gas leaks from the gas pipes 30A to 32A as indicated by an arrow 33, the leaked gas is sucked into the blower 24 side together with the air. Eventually, the clean room 1 invades and the clean room 1 is contaminated.

Further, even if there is a gas leak, the leaked gas expands into the large floor space 11 and it is difficult to find the gas leak.

The gas pipes 30A to 32A are directly affected by radiant heat from equipment (not shown) installed in the floor space 11 and locally heated, and the gas fed is liquefied gas. In the case of, there is a possibility of reliquefaction. An object of the present invention is to provide a clean room that solves the above problems.

[0019]

According to the invention of claim 1, there is provided a free access floor in which a plurality of floor panels are supported and laid by a support pillar vertically arranged, and an apparatus is provided on the access floor. In a vertical laminar flow type clean room installed, a gas pipe duct for laying a gas pipe to be connected to the device is provided below the free access floor, and the gas pipe is laid inside the duct. It is what

According to the invention of claim 2, the duct of claim 1 is
Each of the plurality of substantially U-shaped duct forming parts, each of which has the same size as one floor panel and is supported by the supporting columns and arranged in line, forms a bottom plate and side plates on both sides, and The hole-less floor panel laid over the duct-forming component and having no suction hole forms a top plate.

The invention of claim 3 further comprises means for exhausting the air in the duct.

According to a fourth aspect of the present invention, in addition to the first aspect, there is further provided means for exhausting the air in the duct,
A gas sensor is provided in the duct in the vicinity of the exhaust means.

[0023]

In the invention of claim 1, the gas pipe is laid inside the duct provided under the free access floor, so that the gas pipe is thermally insulated from the outside and Even if the gas leaks from the pipe, the gas does not mix with the air that is repeatedly circulated.

According to the second aspect of the present invention, the structure in which the floor panel forms the ceiling plate of the duct acts by facilitating the access floor to the gas pipe by removing the floor panel as necessary.

In the invention of claim 3, the structure provided with the exhaust means acts so that even if the gas leaks from the gas pipe, the gas does not leak out of the duct.

In the invention of claim 4, the gas pipe is laid in the duct, and the gas sensor is also provided in the duct, and the gas leak from the gas pipe can be constantly monitored. ..

[0027]

1 to 3 show a clean room 40 according to an embodiment of the present invention.

In each of the drawings, the parts substantially corresponding to those shown in FIG. 6 are designated by the same reference numerals.

Reference numeral 41 denotes a gas pipe duct for laying the gas pipes 30 to 32 and the like, which is formed below the free access floor 10.

Most of the free access floor 10 is formed by laying perforated floor panels 9.

The device 12 is designated by reference numeral 12 _-1 , 1 in FIG.
As indicated by 2 _-2 , 12 _-3 , and 12 _-4 , they are arranged in two rows with a predetermined distance D therebetween. The elongated portion between both rows is the maintenance area 45.

The duct 41 is formed in the above maintenance area 45, and the main duct 41a extending vertically in FIG. 3 at the center of the maintenance area 45 and each device 12a installed branching from the main duct 41a. It is composed of a branch duct 41b extending to the lower side of ~ 12d.

The main gas pipes 30a, 31a, 32a are laid along the main duct 41a.

The branch gas pipes 30b, 31b and 32b are
In a portion where the main duct 41a and branch duct 41b intersect, the main gas pipe 30a, 31a, is connected to 32a, it is laid along which in the branch duct 41b, the respective devices 12 _-1 to 12 _-4 Connected to the bottom.

Valves 35, 36 and 37 are provided on the respective branch gas pipes 30b, 31b and 32b.

An exhaust duct 51 is connected to the end 50 of the main duct 41a.

A gas sensor 52 is provided in the exhaust duct 51. The gas sensor 52 is connected to an external analyzer 53.

The air flow in the clean room 40 is
It is the same as the case of FIG. 6 except that the air is not sucked into the duct 41 portion of the free access floor 10.

The air in the duct 41 is exhausted to the outside through the exhaust duct 51.

Next, the features of the clean room having the above structure, particularly the duct 41, will be described.

Motor 5 installed in floor space 1
Radiant heat 56 from 5 and the like is blocked by the duct 41,
It does not reach the gas pipes 30a to 32a and 30b to 32b.

Therefore, even when the liquefied gas flows in the gas pipe 30a or the like, the gas is not reliquefied.

As indicated by reference numeral 33, the gas pipe 30 a
Even if the gas leaks from .about.32a, 30b to 32b, the leaked gas 33 stays in the duct 41 and does not reach the floor space 11 because the duct 41 exists. Therefore, the inside of the green room 40 is not contaminated.

The air in the duct 41 is the exhaust duct 51.
More exhausted to the outside. As a result, the leaked gas 33 is less likely to come out of the floor space 11 through the duct 41, and the contamination in the clean room 40 is reliably prevented.

The air in the duct 41 is exhausted from the exhaust duct 51.
Since the gas sensor 52 is further exhausted to the outside and the gas sensor 52 is provided in the exhaust duct 51, when the above gas leak occurs, the leaked gas is guided to the gas sensor 52 portion regardless of where the gas leak occurs. The gas sensor 52 operates immediately. That is, the gas leakage can be constantly monitored, the gas leakage can be detected early, and the countermeasures can be taken early, whereby the occurrence of a major accident can be prevented.

Next, regarding the structure of the duct 41,
Description will be made with reference to FIGS.

The duct 41 includes a combination of the duct forming component 42 and the non-perforated floor panel 43 shown in FIG.
The duct forming part 44 and the holeless floor panel 4 are also shown in FIG.
The combination with 3 is a configuration in which they are properly combined and aligned as shown in FIGS. 1 and 3.

The non-perforated floor panel 43 is a perforated floor panel 9
Has the same size as.

In addition, the duct forming component 42 is shown in FIG.
As shown in FIG. 7, the plan view has the same size as the floor panel 43 (9), the front view has a substantially U shape, and the bottom plate portion 42a
And the side plate portions 42b and 42c that are raised from the left and right sides.
And side portions 42b and 42c, and flange portions 42d and 42e projecting outward from the tops of the side plate portions 42b and 42c, which form a part of a later-described duct.

As shown in FIG. 5, another duct forming part 44 has the same size as the floor panel 43 (9) in plan view, and has a shape obtained by removing one side plate of the rectangular box. Has a bottom plate portion 44a and side plate portions 4 that stand upright from these three sides.
4b, 44c and 44d, and a flange portion 44e protruding outward from the tops of the side plate portions 44b to 44d, and form the end portion of the duct as described later.

The duct 41 (41a, 41b) is constructed with the same influence as when the perforated floor panel 9 is laid to construct the free access floor 10.

That is, regarding the portion where the duct 41 is to be formed, first, the duct forming parts 42 are arranged side by side in the same manner as the floor panel 9, and the duct forming part 44 is arranged at the end part of the duct 41.

The duct forming parts 42 and 44 are respectively formed on the collar part 4.
2d, 42e, and 44e are supported on the top of the support column 8 to form a lined groove.

Thereafter, the floor panel 43 without holes is made to face the duct forming parts 42 and 44, and the collar parts 42d and 42 are formed.
e, 44e are laid and supported to cover the above groove.

Thus, the duct forming parts 42 and 44 form the bottom plate 41a and the side plates 41b and 41c on both sides, and the non-perforated floor panel 43 forms the top plate 41d.
Is formed.

Since the duct 41 has the above structure, it further has the following features.

The work of constructing the duct 41 can be performed together with the work of laying the floor panel 9, and the work is simple.

By simply removing the floor panel 43, the gas pipes 30a to 32a, 30b to 32b and the valves 35 to 37 are exposed, and maintenance work and valve opening / closing work on the gas pipes can be easily performed.

[0059]

As described above, according to the invention of claim 1, the following effects can be obtained.

Even if the gas leaks from the gas pipe, the pollution does not spread to the outside of the duct 31, and the inside of the clean room can be prevented from being polluted.

It is possible to prevent the gas pipe from being affected by radiant heat from various equipments installed under the access floor, whereby the temperature of the gas pipe is kept constant, for example, liquefied gas is reliquefied. It can be surely prevented.

According to the second aspect of the present invention, the duct can be easily assembled, the gas pipe can be easily accessed, and the maintenance and inspection of the gas pipe can be easily performed.

According to the third aspect of the invention, since the air in the duct is constantly exhausted, even if the gas leaks from the gas pipe, the leaked gas is exhausted to the outside and pollutes the clean room. This can be prevented more reliably.

According to the invention of claim 4, it is possible to detect early that gas has leaked from the gas pipe.

[Brief description of drawings]

FIG. 1 is a perspective view showing a clean room according to an embodiment of the present invention with a gas pipe duct partly disassembled.

FIG. 2 is an elevational view of the clean room of FIG.

FIG. 3 is a plan view of the clean room of FIG.

FIG. 4 is a diagram showing a part of the duct in FIG. 1 in an exploded manner.

FIG. 5 is an exploded view of a part of the duct in FIG.

FIG. 6 is a diagram showing a conventional example.

[Explanation of symbols]

2 floors 3 ceilings 4 building floors 5 supporting columns 6 slabs 7 upper floors 8 supporting columns 9 perforated floor panels 10 free access floors 11 floor spaces 12 _{-1 to} 12 _-4 semiconductor manufacturing equipment 15 building ceilings 16 HEPA filters 17 ceiling spaces 24 Blower 25 Vertical duct 30a, 31a, 32a Main gas piping 30b, 31b, 32b Branch gas piping 35-37 Valve 40 Clean room 41 Gas piping duct 41a Main duct 41b Branch duct 42,44 Duct forming part 42a, 44a Bottom plate part 42b, 42c, 44b, 44c, 44d Side plate part 42d, 42e, 44e Collar part 43 Holeless floor panel 50 End part 51 Exhaust duct 52 Gas sensor 53 Analyzing device 55, 56 Motor

Claims (4)

[Claims] 1. A free access floor comprising a plurality of floor panels laid by being supported by a support pillar vertically arranged,
In a vertical laminar flow type clean room in which a device is installed on the access floor, a gas pipe duct (41) for laying a gas pipe connected to the device is provided below the free access floor, A clean room characterized in that gas pipes (30a to 32a, 30b to 32b) are laid inside the duct (41). 2. The duct forming component according to claim 1, wherein each of the ducts has the same size as that of one floor panel, and a plurality of substantially U-shaped duct forming parts which are supported by the support pillars and are arranged in alignment ( 42,4
4) has a structure in which a bottom plate and side plates on both sides are formed, and a holeless floor panel which is laid so as to cover the duct forming component and has no suction hole (43) forms a top plate. A characteristic clean room. 3. A means (5) for exhausting air in the duct.
2. The structure according to claim 1, further comprising 1).
Clean room described. 4. A means (5) for exhausting air in the duct.
The gas sensor (52) is further provided in the duct in the vicinity of the exhaust means in the duct, and the gas sensor (52) is further provided.
Clean room described.