JP3313385B2 - Clean room - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a clean room,
In particular, the present invention relates to a gas pipe laying structure for a vertical laminar flow type clean room.

[0002] A clean room as a semiconductor manufacturing facility is required to have a high degree of cleanliness. For this reason, a vertical laminar flow type is often used, and a method of repeatedly circulating air is used.

It is desirable that the clean room has a structure adopting the above-described type and system, and that the clean room is less likely to be contaminated even when an accident occurs.

[0004]

2. Description of the Related Art FIG. 6 shows a conventional example.

First, for convenience of explanation, a general structure of a vertical laminar flow type and a circulation type clean room will be described.

[0006] 1 is a clean room, 2 is its floor, and 3 is its ceiling. The floor 2 is an upper floor 7 in which a slab 6 is supported and laid on support columns 5 erected on a building floor 4.
And a free access floor 10 in which a perforated floor panel 9 is supported and laid on support columns 8 erected on the upper floor 7. Free access floor 10
A flat floor space 11 exists between the floor and the floor 7 below the floor. The semiconductor manufacturing device 12 is installed on the free access floor 10. The ceiling 3 is an architectural ceiling 15
The HEPA filters 16 are arranged side by side over the entire surface under the HEPA filter. A planar ceiling space 17 exists between the filter 16 and the building ceiling 15.

The air blows downward through the filter 16 as indicated by arrow 20 and
The air flows vertically through the clean room 1 toward the floor 2, passes through the holes in the floor-panel 9, passes through the free access floor 10, and is sucked into the floor space 11 as shown by arrows 22.

The air sucked into the floor space 11 is blown by a blower 24 as shown by an arrow 23 in the vertical duct 2.
5, the air is blown as indicated by an arrow 26, supplied to the ceiling space 17, and blown downward through the filter 16 as indicated by an arrow 20.

As mentioned above, the air circulates repeatedly,
It flows vertically downward in the clean room 1.

Next, a conventional example will be described. In FIG.
Reference numerals 30A, 31A, and 32A denote gas pipes connected to the apparatus 12, respectively, and are laid in the floor space 11 while being simply placed on the upper floor 7.

[0011]

SUMMARY OF THE INVENTION Gas pipes 30A to 32
Since A is completely exposed and laid in the floor space 11, when leaking from the gas pipes 30A to 32A as indicated by arrows 33, the leaked gas is sucked into the blower 24 side together with air. Eventually, it enters the clean room 1 and the clean room 1 is contaminated.

Also, even if there is a gas leak, the leaked gas expands into the large floor space 11, making it difficult to detect the gas leak.

The gas pipes 30A to 32A are directly affected by radiant heat from equipment (not shown) installed in the floor space 11, and are locally heated and supplied gas is liquefied gas. In the case of (1), there is a possibility that the liquid is re-liquefied.

An object of the present invention is to provide a clean room which has solved the above problems.

[0015]

SUMMARY OF THE INVENTION according to claim 1 invention comprises a raised floor in which a plurality of floor panels, which are laid and is supported by the upright arranged support post, said raised floor <br / > In a vertical laminar flow type clean room with equipment installed above, a plurality of substantially U-shaped
Forming parts and the floor panels should not be combined and aligned.
A duct provided that, a gas pipe connected with the device is obtained by a structure in which laid in the duct.

According to a second aspect of the present invention, the duct of the first aspect is
Each of the plurality of substantially U-shaped duct forming parts, each having the same size as one floor panel and arranged in alignment while being supported by the support columns, forms a bottom plate and side plates on both sides, The holeless floor panel having no suction hole and laid over the duct forming component has a configuration in which a top plate is formed.

According to a third aspect of the present invention, there is provided the duct according to the first aspect,
For the above-arranged devices,
An extending main duct and a branch installed from the main duct
And a branch duct located below the above device.
That's what I did.

According to a fourth aspect of the present invention, there is provided the gas pipe according to the first aspect.
Consists of a main gas pipe and a branch gas pipe.
Is laid along the main duct along the
The pipe is where the main duct and the branch duct intersect
Is connected to the main gas pipe and
Along with the bottom of the above equipment
That's what I did.

According to a fifth aspect of the present invention, the apparatus further comprises a means for exhausting the air in the duct.

According to a sixth aspect of the present invention, the apparatus further comprises means for exhausting the air in the duct, and a gas sensor (52) provided in the duct near the exhaust means.

[0021]

According to the first aspect of the present invention, the gas pipe is laid in a duct provided below the free access floor, so that the gas pipe acts so as to be thermally shielded from the outside and the gas pipe is provided. Even if gas leaks from the pipe, it acts so that the gas does not mix with the repeatedly circulated air.

In the second aspect of the present invention, the configuration in which the floor panel forms the top plate of the duct acts to facilitate the access floor to the gas piping by removing the floor panel as needed.

In the invention according to claim 3, the branch duct is:
Allows gas pipes to run under each device
You.

According to the fourth aspect of the present invention, the branch duct and
Branch gas piping simplifies the gas supply path to each device.
You.

According to the fifth aspect of the present invention, the structure provided with the exhaust means functions to prevent the gas from leaking out of the duct even if the gas leaks from the gas pipe.

According to the sixth aspect of the present invention, the configuration in which the gas pipe is laid in the duct and the gas sensor is also provided in the duct operates so as to constantly monitor the gas leak from the gas pipe. .

[0027]

1 to 3 show a clean room 40 according to an embodiment of the present invention.

In the respective drawings, parts substantially corresponding to the components shown in FIG. 6 are denoted by the same reference numerals.

Reference numeral 41 denotes a gas pipe duct for laying the gas pipes 30 to 32 and the like, and is formed below the free access floor 10. Free access floor 1
Most of the zeros are formed by laying perforated floor panels 9.

The device 12 in FIG.
As shown by -2, 12-3, and 12-4, they are arranged in two rows at a predetermined distance D apart. The elongated portion between both rows is the maintenance area 45.

The duct 41 is formed in the above-mentioned maintenance area 45, and the center of the maintenance area 45 extends vertically in FIG. 3 and each device 12a which is installed by branching off from the main duct 41a. And a branch duct 41b extending to the lower side of １２12d.

The main gas pipes 30a, 31a and 32a are laid along the main duct 41a. The branch gas pipes 30b, 31b, and 32b are portions at which the main duct 41a and the branch duct 41b intersect with each other.
a, 31a, 32a, and are laid along the branch duct 41b along the branch duct 41b.
4 is connected to the bottom.

The branch gas pipes 30b, 31b and 32b are provided with valves 35, 36 and 37, respectively. Main duct 41a
An exhaust duct 51 is connected to the end portion 50 of the air conditioner. A gas sensor 52 is provided in the exhaust duct 51. The gas sensor 52 is connected to an external analyzer 53.

The air flow in the clean room 40 is as follows:
6 is the same as FIG. 6 except that air is not sucked into the duct 41 of the free access floor 10. Further, the air in the duct 41 is exhausted to the outside through the exhaust duct 51.

Next, the features of the clean room having the above structure, particularly regarding the duct 41 will be described.

Motor 5 installed in floor space 1
Radiation heat 56 from 5 etc. is blocked by the duct 41,
It does not reach the gas pipes 30a to 32a and 30b to 32b. Therefore, even when the liquefied gas flows in the gas pipe 30a or the like, the gas does not re-liquefy.

As indicated by reference numeral 33, the gas pipe 30a
Even if a gas leaks from .about.32a and 30b.about.32b, the leaked gas 33 stays in the duct 41 and does not reach the floor space 11 because the duct 41 exists. For this reason, the inside of the green room 40 is not contaminated.

The air in the duct 41 is exhausted by the exhaust duct 51.
It is more exhausted to the outside. This makes it difficult for the leaked gas 33 to flow out of the duct 41 into the floor space 11, so that contamination in the clean room 40 is reliably prevented.

The air in the duct 41 is exhausted by the exhaust duct 51.
Since the gas is exhausted further to the outside and the gas sensor 52 is provided in the exhaust duct 51, when the above-described gas leakage occurs, the leaked gas is guided to the gas sensor 52 portion regardless of the location, The gas sensor 52 operates immediately. That is, a gas leak can be constantly monitored, a gas leak can be detected at an early stage, and a countermeasure can be taken at an early stage, whereby a large accident can be prevented from occurring.

Next, regarding the structure of the above-mentioned duct 41,
This will be described with reference to FIGS.

The duct 41 has a combination of a duct forming part 42 and a perforated floor panel 43 shown in FIG.
Duct forming part 44 and non-perforated floor panel 4 shown together
1 and FIG. 3 are appropriately combined and aligned as shown in FIG. 1 and FIG.

The non-perforated floor panel 43 is a perforated floor panel 9.
Has the same size as.

The above-mentioned duct forming part 42 is similar to that shown in FIG.
As shown in the plan view, it has the same size as the floor panel 43 (9) in a plan view, has a substantially U-shape in a front view, and has a bottom plate portion 42a.
And side plate portions 42b, 42c rising from the left and right sides.
And flanges 42d, 42e projecting outward from the tops of the side plates 42b, 42c, and form a part of a duct, which will be described later.

As shown in FIG. 5, another duct forming part 44 has the same size as the floor panel 43 (9) in a plan view, and is formed by removing one side plate of a rectangular box. And a bottom plate portion 44a and a side plate portion 4 rising from the three sides.
4b, 44c, and 44d, and a flange 44e that protrudes outward from the top of each of the side plates 44b to 44d, and forms a terminal end of the duct, as described later.

The duct 41 (41 a, 41 b) is constructed under the same influence as when the perforated floor panel 9 is laid to construct the free access floor 10. That is, the duct 41
First, the duct forming part 4
2 are arranged side by side in the same manner as floor panel 9 and duct 4
A duct forming component 44 is disposed at the end portion of the unit 1. Duct forming parts 42 and 44 are provided with flanges 42d, 42e and 4 respectively.
The grooves 4e are supported on the tops of the support columns 8 and are arranged side by side. Thereafter, the perforated floor panel 43 is opposed to the duct forming parts 42, 44, and the flanges 42d, 42e, 44e.
And lay it down to cover the above groove.

Thus, the duct forming parts 42 and 44 form the bottom plate 41a and the side plates 41b and 41c on both sides, and the non-perforated floor panel 43 forms the top plate 41d.
Is formed.

Since the duct 41 has the above structure, the duct 41 has the following features.

The work of constructing the duct 41 can be performed together with the work of laying the floor panel 9, and the work is simple.

By simply removing the floor panel 43, the gas pipes 30a to 32a, 30b to 32b and the valves 35 to 37 are exposed, and maintenance work and valve opening / closing work on the gas pipes can be easily performed.

[0050]

As described above, the first aspect of the present invention has the following effects.

Even in the event that gas leaks from the gas pipe, the contamination does not spread to the outside of the duct 31, so that the contamination in the clean room can be prevented.

The gas pipes can be prevented from being affected by radiant heat from equipment installed below the access floor, so that the temperature of the gas pipes is kept constant, for example, the liquefied gas is reliquefied. Can be reliably prevented.

According to the second aspect of the present invention, the duct can be easily assembled, and the access to the gas pipe is facilitated, so that the maintenance and inspection of the gas pipe can be easily performed.

According to the third aspect of the present invention, with respect to the main duct,
Gas pipes for each device
Can easily be brought to the lower side of the court.

According to the invention of claim 4, with respect to the main duct,
Connected to the branch duct and main gas pipe
Supply of gas to each device because of the branched gas piping
The route can be easily configured.

According to the fifth aspect of the invention, since the air in the duct is constantly exhausted, even if the gas leaks from the gas pipe, the leaked gas is exhausted to the outside and the clean room is contaminated. This can be more reliably prevented.

According to the sixth aspect of the invention, it is possible to early detect that gas has leaked from the gas pipe.

[Brief description of the drawings]

FIG. 1 is a perspective view of a clean room according to an embodiment of the present invention, in which a part of a gas pipe duct is partially exploded.

FIG. 2 is an elevation view of the clean room of FIG. 1;

FIG. 3 is a plan view of the clean room of FIG. 1;

FIG. 4 is an exploded view showing a part of the duct in FIG. 1;

FIG. 5 is an exploded view showing a part of the duct in FIG. 1;

FIG. 6 is a diagram showing a conventional example.

[Explanation of symbols]

 2 floor 3 ceiling 4 building floor 5 support pillar 6 slab 7 upper floor 8 support pillar 9 perforated floor panel 10 free access floor 11 floor space 12-1 to 12-2 semiconductor manufacturing equipment 15 building ceiling 16 HEPA filter 17 ceiling space 24 Blower 25 Vertical duct 30a, 31a, 32a Main gas pipe 30b, 31b, 32b Branch gas pipe 35-37 Valve 40 Clean room 41 Gas pipe duct 41a Main duct 41b Branch duct 42,44 Duct forming part 42a, 44a Bottom plate 42b, 42c, 44b, 44c, 44d Side plate 42d, 42e, 44e Flange 43 Non-perforated floor panel 50 End 51 Exhaust duct 52 Gas sensor 53 Analyzer 55, 56 Motor

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-58-164859 (JP, A) JP-A-64-15373 (JP, A) Fully open Showa 62-169136 (JP, U) Really open Showa 61- 189245 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) F24F ^7/ 04-7/06

Claims (6)

(57) [Claims] 1. A support column on which a plurality of floor panels are erected.
Has a free access floor laid and supported by
The free access floorVertical laminar flow type with equipment installed on top
In the lean room, below the raised floor,Multiple substantially U-shaped formations
A part and a floor panel
And set up Connected to the above device Gas distributionTubeDuck aboveInsideLaid in
Clean room characterized by adopting a different configuration. Ducts of 2. A method according to claim 1, has the same size each are a one floor panel, a substantially U-shaped duct formed arranged supported by alignment of the plurality of the supporting column part article, to form a bottom plate and side plates, the duct forming part of the overlying holes without floor panels having no laid down by the suction holes, characterized in that the formed comprising constituting the top plate Clean room. 3. The duct of claim 1, wherein the ducts are arranged in a line.
A main duct extending in the row direction of the row,
And installed under the above-mentioned device, branched from the main duct.
Characterized in that it consists of a branch duct located at the side
Clean room. 4. The gas pipe according to claim 1 is separate from the main gas pipe.
The main gas pipe is located in the main duct.
It is laid along this, and the branch gas pipe is connected with the main duct.
At the part where the above branch duct intersects,
And is laid along and within the branch duct.
And connected to the bottom of the device.
Clean room. 5. A clean room according to claim 1, characterized in that a structure having a further <br/> a means to exhaust the air in the duct. With 6. have a further <br/> a means to exhaust the air in the duct, characterized in that a configuration in which a gas sensor in the vicinity of the exhaust means of the above duct according Item 7. A clean room according to item 1.