JPH11311036A - Clean room building - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the vibration insulating performance of a clean room. SOLUTION: A clean room building 1 comprises internal support structure 2 and external support structure 3 surrounding the internal support structure 2. Truss beams 5, 6 are respectively laid at the external support structure 3 and internal support structure 2, and the truss beams 6 and truss beams 5 are alternately disposed stage by stage. Manufacturing equipment to be free from the influence of external vibration is installed in a process area 8 between the truss beam 5 of the external support structure 3 and the truss beam 6 of the internal support structure 2. Space between the truss beam 6 to be the floor of the process area 8 and the truss beam 5 below is a utility area 13, and a vibration generating source such as a pump to be attached to the manufacturing equipment in the process area 8 is disposed in the utility area 13. Vibration generated in the utility area 13 is transmitted to the external support structure 3 without being propagated to the internal support structure 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room building, and more particularly to a clean room building with improved vibration proof performance.

[0002]

2. Description of the Related Art In a factory for manufacturing precision machines such as semiconductors and optical machines, processes requiring a clean atmosphere are performed in a clean room, and the temperature, humidity, amount of dust and the like of the clean room are measured. In addition to properly controlling the environment, measures have been taken to reduce vibrations in the clean room. In particular, processes that dislike vibration include a pattern exposure process and a photomask inspection process in semiconductor manufacturing, and the permissible value of vibration is becoming smaller as products become more highly integrated and miniaturized.

[0003] The causes of vibrations generated in a clean room include external vibrations transmitted through the ground from transportation and the like,
There are vibrations generated by utility equipment required for manufacturing an air conditioner for supplying air to the clean room and a pump for supplying ultrapure water, and vibrations generated by the manufacturing apparatus itself in the clean room.

[0004] As an architectural structure for suppressing vibration transmitted to a clean room, an expansion joint which does not transmit vibration is provided by installing a clean room building for performing a manufacturing process and a building for installing utility equipment adjacent to each other as separate buildings. There is a known structure that connects each building. There has also been proposed a structure in which a clean room is arranged in an internal structure with a double structure of a factory, and utility equipment is arranged above an external structure surrounding the internal structure.

However, as described above, some manufacturing apparatuses installed in a clean room have a vibration source such as an electric pump. In the above-mentioned clean room, vibrations transmitted from outside or utility equipment are not generated. Although reduced, vibrations generated by the manufacturing apparatus may be a problem.

In order to eliminate the influence of the vibration generated by the manufacturing apparatus, it is necessary to insulate the vibration source attached to the manufacturing apparatus from the process area in which the manufacturing process is performed. It is not possible to structurally isolate the process area in the building from the vibration sources of the manufacturing equipment.

[0007] In order to solve the problem, the vibration source of the manufacturing equipment in the clean room and the process area are insulated from each other to reduce the vibration of the clean room as much as possible and to eliminate unstable elements in the manufacturing and inspection processes. Therefore, the present invention has an object to solve the above problems.

[0008]

SUMMARY OF THE INVENTION The present invention is proposed to achieve the above object, and comprises an internal support structure provided with a clean room, and an external support structure surrounding the internal support structure. A beam of a plurality of floors passing through the internal support structure is erected in the internal support structure, and a beam of a plurality of floors located between the upper and lower beams of the external support structure is erected in the internal support structure. And the upper and lower sides of the building are alternately arranged, wherein the beam on the internal support structure is a process area for arranging manufacturing equipment to be insulated from vibration, and the pump on the beam on the external support structure is attached to the manufacturing equipment. The present invention provides a clean room building in which manufacturing equipment is configured to be insulated from external vibration by providing a utility area in which vibration sources such as the above are arranged.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows a skeleton of a clean room building 1. The clean room building 1 includes an internal support structure 2 and an external support structure 3 surrounding the internal support structure 2, and the internal support structure 2 and the external support structure 3 are respectively foundations. 4 are separately launched.

[0010] Truss beams 5 and 6 are erected on the outer support structure 3 and the inner support structure 2, respectively, and the truss beam 5 of the uppermost layer is erected on the outer support structure 3. The two truss beams 6 and the truss beams 5 of the external support structure 3 are alternately arranged for each stage. The space of the internal support structure 2 is used as a clean room, and the external support structure 3 is used as a utility building for installing an air conditioner, an elevator, and the like.

[0011] The structure of the clean room building 1 will be described in order from the top. The truss beam 5 of the uppermost layer spanned over the external support structure 3 supports the roof R, and the space inside the truss beam 5 is:
It is used as an air supply chamber 7 for supplying air from the external support structure 3 to the internal support structure 2. Air is supplied from an air conditioner (not shown) installed in the external support structure 3 to a process area (product manufacturing room space) 8 below the truss beam 5 via an air supply chamber 7.

The ceiling 9 of the process area 8 is installed at the position of the lower chord of the truss beam 5, and a fan filter unit 10 or an air filter according to the required cleanliness is installed on the ceiling. The space between the ceiling 9 and the truss beam 6 thereunder is a process area 8, and the truss beam 6 serving as the floor of the process area 8 is supported by the internal support structure 2 and is structurally insulated from the external support structure 3. ing. In the process area 8, devices that are directly involved in the manufacturing of the manufacturing equipment and that should be excluded from the influence of external vibration are installed.

A grating (perforated panel) 11 is laid on the truss beam 6 as a floor.
A local return space (not shown) is provided which is partitioned by a partition and connects the space under the floor and the space above the ceiling.

The clean air supplied from the fan filter unit 10 on the ceiling 9 to the process area 8 descends in the process area 8 and flows from the grating 11 under the floor.
It rises from the air return chamber 12 which is a space in the truss beam 6 toward the ceiling through the local return space, and is blown out to the process area again by the fan filter unit 10 on the ceiling 9. When the air conditioner in the external support structure 3 is operating, a part of the air in the process area 8 is returned to the air conditioner in the external support structure 3 through the air return chamber 12.

The space between the truss beam 6 and the truss beam 5 thereunder is a utility area 13, the floor 14 of which is supported by the truss beam 5 of the external support structure 3. In the utility area 13, vibration sources such as a pump attached to the manufacturing equipment disposed in the process area 8 and devices which are not affected by the vibration are arranged.

Therefore, the vibration generated in the utility area 13 is transmitted to the external support structure 3, and no harmful vibration is transmitted to the internal support structure 2. The truss beam 5 supporting the floor 14 of the utility area 13 becomes a beam above the ceiling of the lower process area 8, and a multilayer clean room can be constructed by repeating the above four-layer structure.

Further, as shown in FIG.
At the bottom of the truss beam 6 that supports the horizontal partition 1, a horizontal partition 15 that partitions the process area 8 and the utility area 13 below.
Is disposed, there is no need to supply clean air into the utility area 13. As a result, the supply amount of clean air can be reduced, and the utility area 13
When the maintenance of the equipment, exhaust ducts, waste liquid lines and other equipment in the interior is performed, the clean air in the process area 8 is not contaminated, and there is no problem even if the worker does not wear cleanware. Is improved. The purpose of the horizontal partition 15 is to block air, and it is not necessary to support the load of the device.

When the horizontal partition 15 is installed, the pipes and wiring from the utility area 13 to the process area 8 penetrate the horizontal partition 15, and it is necessary to seal the gap between the pipe and the hole of the horizontal partition 15. Alternatively, a hose joint or an outlet is buried in the horizontal partition 15 and air leaks are prevented by a method of connecting the partition from the upper and lower sides of the partition.

The external support structure 3 is provided with a utility room for installing utility equipment (not shown) such as an air conditioner and a pump for ultrapure water, as well as a stock area for wafers and the like in the manufacturing process, and an upper and lower process area. A transport system connecting the 8, entrances and exits of workers, elevators, offices, and the like are installed. Since the external support structure 3 surrounds the internal support structure 2, the internal support structure 2 is shielded from the wind, and the internal structure 2 can be prevented from swinging by the wind. In addition, since the external support structure 3 itself is not strictly limited with respect to vibration, the structure can be economical. External support structure 3
In order to prevent the surface of the product substrate such as silicon wafer from being contaminated with air, only the stock area inside and the transfer system must be separated from the others by partition walls to supply clean air locally. Since there is no need to constantly supply clean air to other spaces, the operation cost is economical.

FIGS. 2 and 3 show another embodiment of the foundation in the clean room building 1. FIG. 2 shows the foundation 16 of the internal support structure 2 and the foundation 17 of the external support structure 3 separated. Reference numeral 3 denotes a structure in which the external support structure 3 is supported by a latent concrete base 18, and the foundation 19 of the internal support structure 2 is formed on the ground on the latent concrete base 18. When the foundation is separated in this way, as shown in the figure, the utility area 13 on the first floor also has the external support structure 3.
If it is provided on the truss beam 5 erected in the area, and the propagation of vibration from the utility area 13 to the foundations 16 and 19 of the internal support structure 2 is cut off, the vibration isolation performance can be expected to be further improved as compared with that of the integrated foundation. .

FIG. 4 shows a configuration in which the clean room building 1 shown in FIG. 1 is used as a unit basic cell, and a plurality of basic cells are arranged side by side on a plane.
Are connected by an expansion joint (not shown) passing between the structural members of the external support structure 3. In other words, structurally, a plurality of buildings having a double structure are constructed adjacent to each other, but are characterized by functioning as one room as a clean space.

From the viewpoint of the flow of air, when one basic cell is enlarged to form a wide clean space, the pressures at the central portion and the outer peripheral portion become uneven, and the air only flows at the outer peripheral portion where the return space is arranged. Although a phenomenon occurs in which the central portion circulates and stays in the central portion, the external support structure, which is a return space in the illustrated example, is divided into six blocks by forming a large clean space by adjoining the unit basic cells. . By taking such a connection structure,
Even if a large clean area is formed, air does not stay locally and a large-sized clean room building can be constructed.

The present invention is not limited to the above embodiment, and various modifications are possible within the technical scope of the present invention, and it is natural that the present invention extends to those modifications. is there.

[0024]

As described above, the clean room building of the present invention has a double structure including an internal support structure in which a process area is provided and an external support structure in which utility equipment such as an air conditioner is arranged. Since the vibration source such as an electric pump attached to the manufacturing equipment in the process area is supported by the beam erected on the external support structure, the process area is structurally insulated from all the vibration sources and Is reduced as much as possible, and unstable factors in manufacturing and inspection processes of semiconductors and the like are eliminated, which can contribute to improvement in productivity. In addition, because of high anti-vibration performance,
This is an invention that has various effects, for example, it is possible to construct a high-rise clean room building having a multi-layered clean room, and effective use of land is achieved.

[Brief description of the drawings]

FIG. 1 shows an embodiment of the present invention and is a structural explanatory view of a clean room building.

FIG. 2 is a structural explanatory view of a clean room building, showing another embodiment of the present invention.

FIG. 3 is a structural explanatory view of a clean room building according to another embodiment of the present invention.

FIG. 4 is a plan explanatory view in which a plurality of clean room buildings are juxtaposed.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Clean room building 2 Internal support structure 3 External support structure 4 Foundation 5, 6 Truss beam 7 Air supply chamber 8 Process area 10 Fan filter unit 12 Air recirculation chamber 13 Utility area 15 Horizontal bulkhead

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Toshino Shinohara Aoba, Aoba-ku, Aoba-ku, Sendai City, Miyagi Prefecture (No address) Within the Department of Electronic Engineering, Tohoku University (72) Inventor Makoto Imai Aoba-Aoba, Aramaki-ku, Aoba-ku, Sendai City, Miyagi Prefecture (No address) Tohoku University, Faculty of Engineering, Department of Electronic Engineering (72) Inventor Takehiko Kato, Ogakikubo, Tsukuba, Ibaraki Prefecture 1043 Kumagaya Gumi Technical Research Institute Co., Ltd. Inside the research institute (72) Inventor Masayoshi Umeda 2-1 Tsukudo-cho, Shinjuku-ku, Tokyo Kumagaya Gumi Tokyo head office

Claims (4)

[Claims] 1. An internal support structure provided with a clean room, and an external support structure surrounding the internal support structure. A beam of a plurality of floors passing through the internal support structure is erected on the external support structure, and an external support structure is provided on the internal support structure. A building in which beams of multiple floors located between the upper and lower beams of the support structure are erected, and the beams of the external support structure and the beams of the internal support structure are alternately arranged up and down. A process area where manufacturing equipment to be insulated from vibration is placed, and on the beams of the external support structure,
A clean room building having a utility area for arranging a vibration source such as a pump attached to the manufacturing equipment so that the manufacturing equipment can be insulated from external vibration. 2. A fan filter unit for circulating and purifying air in a clean room in the internal support structure is disposed on a beam erected on the external support structure, and utility equipment such as an air conditioner is disposed on the external support structure. 2. The clean room according to claim 1, wherein clean air is supplied from the air conditioner to the process area through the ceiling of the process area, and the air is returned from the internal support structure to the air conditioner of the external support structure through the underfloor space of the process area. Building. 3. A process area on the beam of the internal support structure and a utility area on the beam of the external support structure are blocked by a partition wall, and clean air is supplied only from the air conditioner in the external support structure to the process area. 3. The clean room building according to claim 2, wherein the clean room building is configured to perform the following. 4. An external support structure is provided with air conditioning equipment and water supply equipment required by the process area, as well as various equipment such as a transfer system for connecting the upper and lower process areas and a product stock area. 4. The clean room building according to claim 1, wherein the clean air is locally supplied to the area and the transport system or its periphery.