JP2005519467A - Mounting base for mounting semiconductor manufacturing equipment - Google Patents

Abstract

【Task】
In a mounting base (3) for mounting a semiconductor manufacturing apparatus (4) in a clean room, when a base frame (3a) mounted on a waffle slab and the semiconductor manufacturing apparatus are mounted on the mounting base, Easily connected to semiconductor manufacturing equipment, installed on the outer periphery of this mounting base to define the range of the maintenance inspection area from the surroundings, or installed across a part of the surface of this mounting base A multi-purpose connection (5);

Description

The present invention relates to a mounting base for a semiconductor manufacturing apparatus.
(Background technology)

  The semiconductor manufacturing apparatus is large and requires various multipurpose connection portions.

  This accommodates multi-purpose connections and piping (branch pipes and the like) that are connected to the main frame on the floor, which is a normal modular assembly part and on a tall floor. It was designed assuming a large mainframe.

  This design is designed to enable quick maintenance and access to multipurpose connections and equipment support parts, but this makes the equipment very complex and difficult to install in production facilities. In addition, the connecting part has become complicated.

  As a representative example of the above structure, there is a so-called one-box system shown in FIGS. 5, 6, 7, 8, 12, 13, 14, 15, 16, 18 in EP-A-1107288.

  An alternative proposal is the so-called two-box system. In this system, the manufacturing system is divided into a main system and, for example, a second cabinet that houses electronic equipment racks, power supplies, electrical wiring, etc. and is probably placed on the floor or suspended on a wall. ing.

  The two-box concept has the advantage of ease of access and maintenance, but significantly increases the footprint of the equipment.

The mounting area of all these devices that must be installed in the clean room significantly affects the construction and maintenance costs of the board manufacturing facility.
(Disclosure of the Invention)

  According to one aspect of the present invention, there is provided a base for mounting a semiconductor manufacturing apparatus in a clean room, a base frame mounted on a waffle slab, and when the semiconductor manufacturing apparatus is mounted on the mounting base, A multi-purpose connection that is easy to connect and is installed on the outer periphery of the mounting base to define the range of the maintenance inspection area from the surroundings, or installed across a part of the surface of the mounting base; Consists of a mounting base including

  In high quality clean rooms, the floor is usually a floor supported by a support on a perforated structure support known as a waffle slab or a suspended floor.

  This structure is intended to allow laminar flow to pass through the raised or suspended floor, through the waffle slab, and return to the air supply space below it. And then the air is recirculated to the air conditioner.

  The space between the waffle slab and the raised floor (typically 600 mm) is usually not utilized effectively.

  However, in exceptional cases, a large pedestal may be assigned a pedestal for transmitting the load directly to the waffle slab, but most manufacturing equipment is supported on a raised floor.

  In the presently preferred embodiment, in order to reduce the footprint required for the manufacturing equipment described above without significantly increasing the footprint of the equipment, the mounting base is placed between the waffle slab and the raised or suspended floor. It is dimensioned to fit within the space. This is because the mounting base is not surrounded by components such as a multipurpose connection section.

  However, the mounting area of the mounting base is not limited to the size of the apparatus, and may be larger or smaller than this.

  It is particularly desirable that the mounting base is formed in the shape of an open frame structure such as a box frame. In addition, for convenience, it is preferable that the mounting base is arranged such that the base frame is arranged at a certain distance from the upper frame and is connected to each other by the legs.

  The open frame structure makes it easy to access the base frame from the air supply space below the waffle slab level, and also allows easy maintenance of the multipurpose supply part or connection part. The access to the bottom of the has become very simple.

  The length of the leg is preferably adjustable so that the support frame can be leveled. This leveling is particularly for making the level of the upper support frame the same level as the floor.

  Further adjustments are possible between the support frame and the manufacturing equipment in order to maintain an accurate horizontal standard so that gravity acts vertically on the substrate handled in the equipment.

  You may make it position the tile of a suspended floor or a raised floor with an upper support frame.

  The base frame supports a floor, which may be configured as a liquid receiving tray for convenience.

  Multipurpose connections may be gathered around the frame to allow for a hanging connection around multiple manufacturing equipment groups.

  The fixture may contain, for example, a vacuum pump, cooling circulator, heat exchanger, power source, control system, and other accessory devices. However, these accessory devices should be positioned so as not to interfere with maintenance access and to be readily accessible to the accessory device itself from the maintenance area.

  The present invention according to another embodiment is a mounting base having an open frame structure which is used by being mounted on a waffle slab for mounting a semiconductor manufacturing apparatus in a clean room, and which accommodates the multipurpose connection part and / or the accessory device. It is configured.

  A further form of the invention is a semiconductor manufacturing comprising a waffle slab level, a raised floor on the waffle slab, and a mounting base as defined above, mounted on the waffle slab and positioned between the waffle slab and the raised floor. Consists of a clean room for equipment.

  In addition to the advantages already pointed out, there are significant economic advantages for buyers of semiconductor devices.

  Currently, semiconductor devices tend to be assembled in a single facility. Because these facilities tend to be in high-wage areas of the world. The reason for this is that the overall complex device must be assembled and tested by a skilled and knowledgeable engineer.

  However, the proposed installation stand is relatively easy to assemble and can be made in a less technical factory in a low wage area.

  Therefore, the installation stand provides an opportunity for price reduction of manufacturing costs.

  Furthermore, the user can install the mounting base in the clean room before the device arrives, thus reducing the time for device installation and commissioning.

  And the user could also leave the mounting stand stationary while testing equipment from different sources, or when replacing one manufacturing equipment with another.

  Although the present invention is defined as described above, it is understood to include any combination of the following inventions.

  The invention may be implemented in various ways, as illustrated by the examples mentioned in the accompanying drawings.

Fig. 1 is a schematic diagram of a semiconductor device mounted on a mounting table in a clean room.
FIG. 2 is a diagram showing the mounting table in another form in detail.

  In FIG. 1, a floor 1 is supported on a waffle slab 2 by a support (not shown).

  An installation frame 3 having an open frame structure is installed on a waffle slab and is located in a space between the floor 1 and the waffle slab 2.

  The mounting base supports a semiconductor manufacturing apparatus schematically shown at 4.

  Multipurpose connections (eg, cooling water, process fluids, extract piping, power supplies, etc.) are generally shown in 5 and connected to a branch pipe 6 having multiple connections for necessary maintenance. Also good.

  Since both the connecting part 5 and the branch pipe 6 pass through the floor in an accessible manner, maintenance can be easily performed.

  Since the branch pipe 6 basically extends so as to cross a part of the upper surface of the mounting base 3, access to the maintenance inspection area is not restricted.

  However, as shown in FIG. 2, these facilities are preferably arranged around the frame 3.

  According to FIG. 2, it can be seen that the liquid, vacuum, and gas branch pipes and cable wirings shown in 7 extend so as to surround either the periphery inside the mounting base or the periphery outside the mounting base.

  Further, an attachment device indicated by 7a may be attached to the frame 3.

  The mounting base 3 itself may be formed in a box frame shape having a base frame 3a, an upper frame 3b, and legs 3c.

  This open structure can fix various pipes and the like in a suspended state, and facilitates maintenance and inspection access.

  The use of the base frame 3a has the following additional effects.

  First, the leg 3c can be installed anywhere in the waffle slab layer without matching the holes of the waffle slab layer.

  Second, by adjusting the floor around the mounting base or around the base frame system, the mouth for access can be opened. In addition, it is particularly easy to install the floor 8 in the base frame 3a, which functions as a liquid receiving tray for reliably reducing the liquid that gets into the laminar flow or contaminates the waffle slab area.

The fixture 9 is slidably installed on the frame 3a so that the position can be adjusted to fix the horizontal column supporting the waffle slab layer. The support frame 3b (see FIG. 1) on which the device 4 is installed is installed. May provide an outer peripheral flange 10 for supporting the tiles of the raised floor 1.

  The apparatus 4 shown in FIG. 1 is not perfect, and the main central unit including the substrate processing apparatus and the control apparatus is shown in an easy-to-understand manner.

  A group of manufacturing equipment selected by the customer may be placed around the central unit 4a for accessing the substrate through the slot valve 4b.

  The maintenance connections for these devices are gathered at appropriate locations around the frame 3 to match the location of the devices attached to the central unit 4a.

  Such an arrangement of connections is illustrated at 11.

FIG. 1 is a schematic view of a semiconductor device mounted on a mounting base in a clean room.

FIG. 2 is a diagram showing the mounting table in another form in detail.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Floor 2 Waffle slab 3 Mounting stand 4 Semiconductor manufacturing apparatus 5 Multipurpose connection part 6 Branch pipe 7 Attached apparatus 8 Liquid receiving tray floor 9 Fixing tool

Claims (8)

In the mounting table (3) for mounting the semiconductor manufacturing equipment (4) in the clean room,
When installing the semiconductor manufacturing equipment on the base frame (3a) mounted on the waffle slab and the mounting base, this installation is easy so that the semiconductor manufacturing equipment can be easily connected and the range of the maintenance inspection area is defined from the surroundings. A multi-purpose connection (5) installed on the outer periphery of the table or installed across a part of the surface of the table.   An upper support frame (3c) disposed at a predetermined interval from the base frame (3a), and the upper support frame and the base frame are connected to each other by legs (3c) to form a box frame shape. Item 1. Mounting base.   3. The pedestal of claim 2, wherein the legs (3c) can be adjusted to allow the support frame (3b) to be leveled.   The pedestal of claim 2 or 3, wherein the support frame (3b) determines the position of the tiles of the suspended floor (1).   The mounting base according to any one of claims 2 to 3, wherein the base frame (3a) supports the floor (1).   6. The multipurpose connection portion (5) is collected around the base frame (3 a) and arranged so as to coincide with a position around the plurality of manufacturing apparatus groups 4. Mounting base.   Installation of an open frame structure that is mounted and used on a waffle slab (2) for installing a semiconductor manufacturing apparatus (4) in a clean room and accommodates the multi-purpose connection (5) and / or the accessory (7a) Stand. A waffle slab in a horizontal position, a raised floor above the waffle slab, and the mounting base according to any one of the preceding claims, located between the waffle slab and the raised floor, and placed on the waffle slab; Clean room for semiconductor manufacturing equipment.

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