JPH0515712Y2 - - Google Patents
Info
- Publication number
- JPH0515712Y2 JPH0515712Y2 JP5088888U JP5088888U JPH0515712Y2 JP H0515712 Y2 JPH0515712 Y2 JP H0515712Y2 JP 5088888 U JP5088888 U JP 5088888U JP 5088888 U JP5088888 U JP 5088888U JP H0515712 Y2 JPH0515712 Y2 JP H0515712Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- temperature
- contactor
- source
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims description 10
- 239000011343 solid material Substances 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 7
- 230000008016 vaporization Effects 0.000 claims description 5
- 239000007787 solid Substances 0.000 description 12
- 239000000126 substance Substances 0.000 description 12
- 150000002500 ions Chemical class 0.000 description 11
- 238000010884 ion-beam technique Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000000605 extraction Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5088888U JPH0515712Y2 (enrdf_load_stackoverflow) | 1988-04-18 | 1988-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5088888U JPH0515712Y2 (enrdf_load_stackoverflow) | 1988-04-18 | 1988-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01157155U JPH01157155U (enrdf_load_stackoverflow) | 1989-10-30 |
| JPH0515712Y2 true JPH0515712Y2 (enrdf_load_stackoverflow) | 1993-04-26 |
Family
ID=31276915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5088888U Expired - Lifetime JPH0515712Y2 (enrdf_load_stackoverflow) | 1988-04-18 | 1988-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0515712Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-04-18 JP JP5088888U patent/JPH0515712Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01157155U (enrdf_load_stackoverflow) | 1989-10-30 |
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