JPH01157155U - - Google Patents

Info

Publication number
JPH01157155U
JPH01157155U JP5088888U JP5088888U JPH01157155U JP H01157155 U JPH01157155 U JP H01157155U JP 5088888 U JP5088888 U JP 5088888U JP 5088888 U JP5088888 U JP 5088888U JP H01157155 U JPH01157155 U JP H01157155U
Authority
JP
Japan
Prior art keywords
crucible
solid substance
temperature
ion source
item
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5088888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0515712Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5088888U priority Critical patent/JPH0515712Y2/ja
Publication of JPH01157155U publication Critical patent/JPH01157155U/ja
Application granted granted Critical
Publication of JPH0515712Y2 publication Critical patent/JPH0515712Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP5088888U 1988-04-18 1988-04-18 Expired - Lifetime JPH0515712Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5088888U JPH0515712Y2 (enrdf_load_stackoverflow) 1988-04-18 1988-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5088888U JPH0515712Y2 (enrdf_load_stackoverflow) 1988-04-18 1988-04-18

Publications (2)

Publication Number Publication Date
JPH01157155U true JPH01157155U (enrdf_load_stackoverflow) 1989-10-30
JPH0515712Y2 JPH0515712Y2 (enrdf_load_stackoverflow) 1993-04-26

Family

ID=31276915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5088888U Expired - Lifetime JPH0515712Y2 (enrdf_load_stackoverflow) 1988-04-18 1988-04-18

Country Status (1)

Country Link
JP (1) JPH0515712Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0515712Y2 (enrdf_load_stackoverflow) 1993-04-26

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