JPS642436U - - Google Patents

Info

Publication number
JPS642436U
JPS642436U JP9765487U JP9765487U JPS642436U JP S642436 U JPS642436 U JP S642436U JP 9765487 U JP9765487 U JP 9765487U JP 9765487 U JP9765487 U JP 9765487U JP S642436 U JPS642436 U JP S642436U
Authority
JP
Japan
Prior art keywords
temperature
heating chamber
heating
heater
contacting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9765487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9765487U priority Critical patent/JPS642436U/ja
Publication of JPS642436U publication Critical patent/JPS642436U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP9765487U 1987-06-25 1987-06-25 Pending JPS642436U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9765487U JPS642436U (enrdf_load_stackoverflow) 1987-06-25 1987-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9765487U JPS642436U (enrdf_load_stackoverflow) 1987-06-25 1987-06-25

Publications (1)

Publication Number Publication Date
JPS642436U true JPS642436U (enrdf_load_stackoverflow) 1989-01-09

Family

ID=31323268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9765487U Pending JPS642436U (enrdf_load_stackoverflow) 1987-06-25 1987-06-25

Country Status (1)

Country Link
JP (1) JPS642436U (enrdf_load_stackoverflow)

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