JPH0252432U - - Google Patents

Info

Publication number
JPH0252432U
JPH0252432U JP13265888U JP13265888U JPH0252432U JP H0252432 U JPH0252432 U JP H0252432U JP 13265888 U JP13265888 U JP 13265888U JP 13265888 U JP13265888 U JP 13265888U JP H0252432 U JPH0252432 U JP H0252432U
Authority
JP
Japan
Prior art keywords
susceptor
output
temperature
longitudinal direction
infrared lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13265888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13265888U priority Critical patent/JPH0252432U/ja
Publication of JPH0252432U publication Critical patent/JPH0252432U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP13265888U 1988-10-11 1988-10-11 Pending JPH0252432U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13265888U JPH0252432U (enrdf_load_stackoverflow) 1988-10-11 1988-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13265888U JPH0252432U (enrdf_load_stackoverflow) 1988-10-11 1988-10-11

Publications (1)

Publication Number Publication Date
JPH0252432U true JPH0252432U (enrdf_load_stackoverflow) 1990-04-16

Family

ID=31389827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13265888U Pending JPH0252432U (enrdf_load_stackoverflow) 1988-10-11 1988-10-11

Country Status (1)

Country Link
JP (1) JPH0252432U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6355427B2 (enrdf_load_stackoverflow) * 1981-02-23 1988-11-02 Brother Ind Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6355427B2 (enrdf_load_stackoverflow) * 1981-02-23 1988-11-02 Brother Ind Ltd

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