JPH03115656U - - Google Patents

Info

Publication number
JPH03115656U
JPH03115656U JP2441190U JP2441190U JPH03115656U JP H03115656 U JPH03115656 U JP H03115656U JP 2441190 U JP2441190 U JP 2441190U JP 2441190 U JP2441190 U JP 2441190U JP H03115656 U JPH03115656 U JP H03115656U
Authority
JP
Japan
Prior art keywords
carbon evaporation
carbon
sample
cartridge
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2441190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2441190U priority Critical patent/JPH03115656U/ja
Publication of JPH03115656U publication Critical patent/JPH03115656U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2441190U 1990-03-13 1990-03-13 Pending JPH03115656U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2441190U JPH03115656U (enrdf_load_stackoverflow) 1990-03-13 1990-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2441190U JPH03115656U (enrdf_load_stackoverflow) 1990-03-13 1990-03-13

Publications (1)

Publication Number Publication Date
JPH03115656U true JPH03115656U (enrdf_load_stackoverflow) 1991-11-29

Family

ID=31527375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2441190U Pending JPH03115656U (enrdf_load_stackoverflow) 1990-03-13 1990-03-13

Country Status (1)

Country Link
JP (1) JPH03115656U (enrdf_load_stackoverflow)

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