JPH0514452Y2 - - Google Patents
Info
- Publication number
- JPH0514452Y2 JPH0514452Y2 JP215387U JP215387U JPH0514452Y2 JP H0514452 Y2 JPH0514452 Y2 JP H0514452Y2 JP 215387 U JP215387 U JP 215387U JP 215387 U JP215387 U JP 215387U JP H0514452 Y2 JPH0514452 Y2 JP H0514452Y2
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- electrode
- accelerating
- voltage
- orifice
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 39
- 238000000605 extraction Methods 0.000 claims description 22
- 230000001133 acceleration Effects 0.000 claims description 9
- 238000010884 ion-beam technique Methods 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP215387U JPH0514452Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-01-10 | 1987-01-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP215387U JPH0514452Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-01-10 | 1987-01-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63111750U JPS63111750U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-07-18 |
| JPH0514452Y2 true JPH0514452Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-04-16 |
Family
ID=30780724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP215387U Expired - Lifetime JPH0514452Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-01-10 | 1987-01-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514452Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007067296A2 (en) * | 2005-12-02 | 2007-06-14 | Alis Corporation | Ion sources, systems and methods |
| JP4991410B2 (ja) * | 2006-07-06 | 2012-08-01 | 株式会社日立ハイテクノロジーズ | 集束イオンビーム装置 |
| JP4982161B2 (ja) * | 2006-11-30 | 2012-07-25 | 株式会社日立ハイテクノロジーズ | ガス電界電離イオン源、及び走査荷電粒子顕微鏡 |
-
1987
- 1987-01-10 JP JP215387U patent/JPH0514452Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63111750U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-07-18 |