JPH0514201B2 - - Google Patents

Info

Publication number
JPH0514201B2
JPH0514201B2 JP20097782A JP20097782A JPH0514201B2 JP H0514201 B2 JPH0514201 B2 JP H0514201B2 JP 20097782 A JP20097782 A JP 20097782A JP 20097782 A JP20097782 A JP 20097782A JP H0514201 B2 JPH0514201 B2 JP H0514201B2
Authority
JP
Japan
Prior art keywords
light beam
base
collimator lens
optical axis
rotating mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20097782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5991307A (ja
Inventor
Yoshiharu Kuwabara
Hiroyoshi Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP20097782A priority Critical patent/JPS5991307A/ja
Priority to US06/550,292 priority patent/US4639141A/en
Publication of JPS5991307A publication Critical patent/JPS5991307A/ja
Publication of JPH0514201B2 publication Critical patent/JPH0514201B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP20097782A 1982-11-12 1982-11-16 光学式測定装置 Granted JPS5991307A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP20097782A JPS5991307A (ja) 1982-11-16 1982-11-16 光学式測定装置
US06/550,292 US4639141A (en) 1982-11-12 1983-11-09 Scanning ray beam generator for optical measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20097782A JPS5991307A (ja) 1982-11-16 1982-11-16 光学式測定装置

Publications (2)

Publication Number Publication Date
JPS5991307A JPS5991307A (ja) 1984-05-26
JPH0514201B2 true JPH0514201B2 (enrdf_load_stackoverflow) 1993-02-24

Family

ID=16433457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20097782A Granted JPS5991307A (ja) 1982-11-12 1982-11-16 光学式測定装置

Country Status (1)

Country Link
JP (1) JPS5991307A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4812568B2 (ja) * 2006-09-07 2011-11-09 株式会社ミツトヨ 光学式測定装置、光学式測定方法、及び光学式測定処理プログラム

Also Published As

Publication number Publication date
JPS5991307A (ja) 1984-05-26

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