JPH052162B2 - - Google Patents

Info

Publication number
JPH052162B2
JPH052162B2 JP61093568A JP9356886A JPH052162B2 JP H052162 B2 JPH052162 B2 JP H052162B2 JP 61093568 A JP61093568 A JP 61093568A JP 9356886 A JP9356886 A JP 9356886A JP H052162 B2 JPH052162 B2 JP H052162B2
Authority
JP
Japan
Prior art keywords
scanning beam
parallel
light receiving
reflecting mirror
reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61093568A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62250303A (ja
Inventor
Masamichi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP9356886A priority Critical patent/JPS62250303A/ja
Publication of JPS62250303A publication Critical patent/JPS62250303A/ja
Publication of JPH052162B2 publication Critical patent/JPH052162B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP9356886A 1986-04-23 1986-04-23 光学式測定装置 Granted JPS62250303A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9356886A JPS62250303A (ja) 1986-04-23 1986-04-23 光学式測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9356886A JPS62250303A (ja) 1986-04-23 1986-04-23 光学式測定装置

Publications (2)

Publication Number Publication Date
JPS62250303A JPS62250303A (ja) 1987-10-31
JPH052162B2 true JPH052162B2 (enrdf_load_stackoverflow) 1993-01-11

Family

ID=14085857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9356886A Granted JPS62250303A (ja) 1986-04-23 1986-04-23 光学式測定装置

Country Status (1)

Country Link
JP (1) JPS62250303A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04105006A (ja) * 1990-08-24 1992-04-07 Tokyo Seimitsu Co Ltd 非接触測定装置
JP2009244175A (ja) * 2008-03-31 2009-10-22 Sunx Ltd 測定装置の受光ユニット、姿勢検出センサの受光ユニット及びその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612746Y2 (enrdf_load_stackoverflow) * 1977-11-07 1981-03-24
JPS5960609U (ja) * 1982-10-14 1984-04-20 三秀プレス工業株式会社 反射鏡の角度微調整台
JPS6098119U (ja) * 1983-12-05 1985-07-04 シャープ株式会社 ガルバノミラ−の固定位置の調整装置

Also Published As

Publication number Publication date
JPS62250303A (ja) 1987-10-31

Similar Documents

Publication Publication Date Title
US4461576A (en) Optical measuring system
JP2789741B2 (ja) レーザレーダ走査装置
JP2586121B2 (ja) ロータリーエンコーダの原点検出系
JPH052162B2 (enrdf_load_stackoverflow)
JPS6341484B2 (enrdf_load_stackoverflow)
US4639141A (en) Scanning ray beam generator for optical measuring device
US5196956A (en) Beam deflector and laser beam printer using only two inclined reflecting surfaces
JPH0430485Y2 (enrdf_load_stackoverflow)
JP2001027527A (ja) 傾斜測定装置
JP2580824Y2 (ja) 焦点調整装置
JP2000266567A (ja) ロータリエンコーダ
KR100317644B1 (ko) 초점 미세조정이 가능한 비전장치
JP3374941B2 (ja) 透明板の厚み測定装置
JPH0637283Y2 (ja) 光学式測定機の回転ミラー取付構造
RU2018792C1 (ru) Способ юстировки интерферометра фабри - перо и устройство для его осуществления
JP3017998B2 (ja) ポリゴンミラーの動的面形状測定器
JP2822255B2 (ja) 走査光学装置
JP2023101823A (ja) 光学装置
JPS5991307A (ja) 光学式測定装置
JPH09189545A (ja) 距離測定装置
SU1589059A1 (ru) Устройство дл юстировки оси излучател оптического узла относительно базовых поверхностей основани
JPH08166209A (ja) 多面鏡評価装置
JPS6363910A (ja) 距離測定装置
WO1986006159A1 (fr) Instrument de mesure optique
JPH0420914A (ja) 望遠鏡の副反射鏡移動機構