JPH0513799B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a vertically moving shaft mechanism used in a clean environment such as a semiconductor manufacturing process, and in particular to a dust generation prevention vertically moving shaft mechanism that prevents the generation of dust. It is something.

[Conventional technology]

In recent years, with the rapid development of industrial robots,
It tends to be used in various fields. This industrial robot is provided with a vertical movement shaft mechanism to vary the vertical movement position of the arm, for example.

FIG. 3 is a partially cutaway side view showing an example of a conventionally commonly used vertical movement shaft mechanism. In the figure, 1 is a cylindrical vertical moving shaft casing extending in the vertical direction, and 2 is a ring-shaped bearing provided at the upper end of the vertical moving shaft casing 1, which is fixed by a bearing retainer 3. There is. Reference numeral 4 denotes a vertically moving part that moves up and down while being guided inside the bearing 2, and 5 a driving part that is located inside the vertically moving shaft casing 1 and moves the vertically moving part 4 in the vertical direction.

When the drive unit 5 is driven, the vertical movement shaft mechanism configured in this manner pushes up the vertical movement unit 4, so that it extends upward and lifts, for example, an arm of a robot upward. Next, when the driving section 5 is driven in the opposite direction, the vertically moving section 4 moves downward and enters the contracted state, so that the aforementioned robot arm is lowered.

[Problem that the invention seeks to solve]

However, when the vertical moving part 4 moves (particularly downward), the vertical moving part 4 enters the closed internal space of the vertical moving shaft casing 1.
An exhaust path 7 is formed through which internal air is exhausted through a minute gap 6 created between the bearing 2 and the vertically moving section 4. In other words,
Intake and exhaust are performed by the pumping action accompanying the movement of the vertically moving section 4. Inside the vertical moving shaft casing 1, a vertical moving section 4 is provided.
Since the bearing 2 moves up and down while contacting the bearing 2, dust (abrasion powder) is generated from the bearing 2, the vertical moving part 4, and the drive part 5, where the two come into contact, and this dust is released to the outside together with the exhaust air. and spread. For this reason, there was a problem in that it could not be used in equipment such as robots used in clean rooms used in semiconductor factories or bio-related factories.

The present invention has been made in order to solve the above-mentioned problems, and it is an object of the present invention to provide a dust generation prevention vertical movement shaft mechanism that does not cause dust diffusion.

[Means for solving problems]

The dust generation prevention vertical movement shaft mechanism according to the present invention includes a hole in a part of the vertical movement shaft casing to be connected to the suction device, and a receiving tray connected to the suction device around the upper end of the vertical movement shaft casing. It is something that

[Effect]

The dust generation prevention vertical movement shaft mechanism of this invention has a suction device connected to the hole provided in the vertical movement shaft casing, so the inside of the vertical movement shaft casing becomes negative pressure, which is caused by the pumping action. Dust emission is prevented. In addition, since a receiving tray connected to a suction device is provided around the upper end of the vertical moving shaft casing, the pumping action allows the bearing provided at the top of the vertical moving shaft casing to connect with the vertical moving section. Even if dust is discharged from the gap between the two, the dust is absorbed by the tray, thereby preventing the dust from spreading.

[Embodiments of the invention]

The invention will now be explained with reference to the drawings. In FIG. 1, 8 is a hole provided in the side of the vertically moving shaft casing 1 and communicates with the inside, and 9 is a duct provided so as to cover the hole 8 and extends downward, and the exit side thereof A suction device 10 is provided in the section. Reference numeral 11 denotes a saucer provided so as to cover the upper end of the vertically moving shaft casing 1 and is open only at the top; 12 is a duct that communicates with the bottom of the saucer 11 and extends downward; the outlet side portion thereof; is provided with a suction device 13.

In the apparatus configured in this way, first, the suction devices 10 and 13 are driven. Then the suction device 10
Since the air in the vertical moving shaft casing 1 is sucked and discharged through the duct 9 and the hole 8, the inside thereof is under negative pressure. In addition, the suction device 13
Since the inside of the tray 11 is sucked from the bottom through the duct 12, the inside of the tray 11 tends to have a negative pressure.

Next, in this state, when the drive section 5 is operated, the vertically moving section 4 protrudes upward or descends depending on the direction of operation. When the vertical moving section 4 moves up and down in this manner, a pumping action is generated inside the vertical moving section 4, and exhaust gas containing dust is discharged from the gap 6. However, in this case, a hole 8 is provided on the side of the vertically moving shaft casing 1, and this hole 8 is connected to the suction device 10 through a duct 9.
, the exhaust gas containing dust generated by the pumping action is forcibly exhausted from the hole 8 through the duct 9 and the suction device 10 to the outside of the clean room, for example.
As a result, the amount of dust present inside the vertical moving shaft casing 1 is reduced, and the amount of exhaust gas discharged to the outside from the gap 6 is also extremely reduced. Even if dust-containing air is exhausted from this gap 6, the amount of air exhausted is extremely small. Further, a saucer 11 is provided at the upper end of the vertically movable shaft casing 1 so that only the upper part is open and surrounds the periphery, and the bottom of the saucer 11 is further connected to a suction device 13 via a duct 12. Since the internal pressure tends to be negative, the discharged dust is sucked,
For example, by discharging it outside the clean room, it prevents it from spreading inside the clean room.

FIG. 2 is a partially cutaway side view showing another embodiment of the present invention, in which the same parts as in FIG. 1 are designated by the same symbols and detailed explanation thereof is omitted. In this figure, the difference from FIG. In addition, the duct 12 and suction device 13 in FIG. 1 are removed.

With this configuration, the suction device 10 can be used both for suction to the vertically movable shaft casing 1 and for suction inside the saucer 11, thereby simplifying the device. Note that the dust diffusion prevention operation is the same as in the case of FIG. 1.

[Effects of the Invention] As explained above, the dust generation prevention vertical movement shaft mechanism according to the present invention has a hole around the vertical movement shaft casing, a suction device is connected to this hole through a duct, and the vertical movement A receiving tray with only the upper side open is provided on the upper outer periphery of the shaft casing, and a suction device is connected to the bottom of this receiving tray via a duct, which reduces the dust concentration inside the vertically moving shaft casing and reduces the dust concentration inside the vertically moving shaft casing. Since the dust discharged from the gap between the bearing provided at the top of the vertical moving shaft casing and the vertical moving part is sucked by the catch tray, the overall amount of dust spread is significantly reduced, making it easier to clean rooms. This has the effect of making it suitable for use in

[Brief explanation of the drawing]

FIG. 1 is a partially cutaway side view showing a dust generation prevention vertical movement shaft mechanism according to an embodiment of the present invention;
The figure is a partially cutaway side view showing another embodiment, and FIG. 3 is a partially cutaway side view of a conventional vertical movement shaft mechanism. 1 is the vertical moving shaft casing, 2 is the bearing, 3
is the bearing holder, 4 is the vertical moving part, 5 is the drive part, 6 is the clearance, 7 is the exhaust path, 8 is the hole, 9, 1
2 and 14 are ducts, 10 and 13 are suction devices, and 11
is a saucer. In the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] 1 In a vertically moving shaft mechanism in which a vertically moving part moves up and down guided by a bearing provided inside a vertically moving shaft casing, a hole provided in a side part of the vertically moving shaft casing and a hole in the vertically moving shaft casing A saucer provided to surround the upper end and open only at the top, a duct connected to the saucer and the hole, and a suction device provided on the outlet side of the duct to suck dust and discharge it to the outside. A vertical movement mechanism for preventing dust generation.