JPS62152692A - Dust-generation preventive vertically movable shaft mechanism - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a vertically moving shaft mechanism used in a clean environment such as a semiconductor manufacturing process, and in particular to a dust generation prevention vertically moving shaft mechanism that prevents the generation of dust. It is something.

[Conventional technology]

In recent years, with the rapid development of industrial robots, there is a tendency for them to be used in various fields. This industrial robot is provided with a vertical movement axis mechanism to vary the vertical movement position of the arm, for example.

FIG. 3 is a partially cutaway side view showing an example of a conventionally commonly used vertical movement shaft mechanism. In the same figure -1
2 is a cylindrical vertical moving shaft casing extending in the vertical direction, and 2 is a ring-shaped bearing provided at the upper end of the vertical moving shaft casing l, which is fixed by a bearing retainer 3. Reference numeral 4 denotes a vertically moving part that moves up and down while being guided inside the bearing 2, and 5 a driving part that is located inside the vertically moving shaft casing 1 and moves the vertically moving part 4 in the vertical direction.

When the drive unit 5 is driven, the vertical movement shaft mechanism configured in this manner pushes up the vertical movement unit 4, so that it extends upward and lifts, for example, an arm of a robot upward. Next, when the drive unit 5 is driven in the opposite direction, the vertical moving unit 4 moves downward and enters the contracted state, so that the robot arm described above is lowered.

[Problem that the invention seeks to solve]

However, when the vertical moving part 4 moves (particularly downward), the vertical moving part 4 enters the closed internal space of the vertical moving shaft casing 1, so that the internal air flows between the bearing 2 and the vertical moving part 4. This means that an exhaust path 7 is formed through which the air is discharged through a minute gap 6 that occurs between the two. In other words, air intake and exhaustion are performed by the pumping action accompanying the movement of the vertically moving section 4. Inside the vertically moving shaft casing 1, the vertically moving part 4 moves vertically while contacting the bearing 2.
Dust (abrasion powder) is generated from the bearing 2, the vertical moving part 4, and the driving part 5, which are in contact with each other, and this dust is discharged to the outside together with the exhaust air and diffused. For this reason, there is a problem in that it cannot be used in equipment such as robots used in clean rooms used in semiconductor factories or bio-related factories.

The present invention has been made in order to solve the above-mentioned problems, and it is an object of the present invention to provide a dust generation prevention vertical movement shaft mechanism that does not cause dust diffusion.

[Means for solving problems]

The dust generation prevention vertical movement shaft mechanism according to the present invention includes a hole in a part of the vertical movement shaft casing to be connected to the suction device, and a receiving tray connected to the suction device around the upper end of the vertical movement shaft casing. It is something that

[For production]

The dust generation prevention vertical movement shaft mechanism of this invention has a suction device connected to the hole provided in the vertical movement shaft casing, so the inside of the vertical movement shaft casing becomes negative pressure, which is caused by the bombing action. Dust emission is prevented. In addition, since a receiving tray connected to a suction device is provided around the upper end of the vertical moving shaft casing, the pumping action causes the gap between the bearing provided at the top of the vertical moving shaft casing and the vertical moving part to Even if dust is discharged from the gap, the tray will suck it up, thereby preventing the dust from dispersing.

[Embodiments of the invention]

The invention will now be explained with reference to the drawings. In FIG. 1, 8 is a hole provided on the side of the vertically moving shaft casing 1 and communicates with the inside, 9 is a duct provided to cover the hole 8 and extends downward, and the exit side thereof A suction device 10 is provided in the section. Reference numeral 11 denotes a saucer provided so as to cover the upper end of the vertically moving shaft casing 1 and is open only at the top; 12 is a duct that communicates with the bottom of the saucer 11 and extends downward; There is a suction device 13
is provided.

In the apparatus configured in this way, first, the suction device 10.
．． 13 is driven. Then the suction device 10 is the duct 9
Since the air inside the vertically moving shaft casing 1 is sucked and discharged through the holes 8 and 8, a negative pressure is created inside the vertically moving shaft casing 1. In addition, the suction device 13 is connected to the saucer 1 via the duct 12.
Since the inside of 1 is sucked from the bottom, this saucer 1
The inside of 1 is negative pressure (in the middle).

Next, in this state, when the drive section 5 is operated, the vertically moving section 4 protrudes upward or descends depending on the direction of operation. When the vertically movable section 4 moves up and down in this manner, a pumping action occurs inside the vertically movable section 4, and exhaust gas containing dust is discharged from the gap 6. However, in this case, there are holes 8 in the side of the vertical moving shaft casing 1.
is provided, and this hole 8 connects to the suction device 10 through a duct 9.
, the exhaust gas containing dust generated by the pumping action is forcibly exhausted from the hole 8 through the duct 9 and the suction device 10 to the outside of the clean room, for example. As a result, the amount of dust present inside the vertically movable shaft casing l is reduced, and the amount of exhaust gas discharged to the outside from the gap 6 is also extremely reduced. And this gap 6
Even if dust-laden air is discharged from the tank, the amount of air discharged is extremely small. Further, a saucer 11 is provided at the upper end of the vertically movable shaft casing l so that only the upper part is open and surrounds the periphery, and the bottom of the saucer 11 is connected to a suction device 13 via a duct 12. Since the internal pressure tends to be negative, the discharged dust is sucked and discharged, for example, outside the clean room to prevent it from dispersing into the clean room.

FIG. 2 is a partially cutaway side view showing another embodiment of the present invention, in which the same parts as in FIG. 1 are designated by the same symbols and detailed explanation thereof is omitted. In this figure, the difference from FIG. In addition, the duct 12 and suction device 13 in FIG. 1 are removed.

With this configuration, the suction device 10 can be used for both suction inside the vertically movable shaft casing 1 and suction inside the saucer 11, thereby simplifying the device. Note that the dust diffusion prevention operation is the same as in the case of FIG. 1.

〔Effect of the invention〕

As explained above, the dust generation prevention vertical movement shaft mechanism according to the present invention includes a hole provided around the vertical movement shaft casing,
A suction device is connected to this hole via a duct, and
A saucer with only the top open is provided on the upper outer periphery of the vertical movable shaft casing, and a suction device is connected to the bottom of this saucer via a duct, so the degree of dust inside the vertical movable shaft casing is reduced. At the same time, since the dust discharged from the gap between the bearing provided at the top of the vertically moving shaft casing and the vertically moving part is sucked by the receiving tray, the amount of dust spread as a whole is significantly reduced. This has the effect of making it suitable for use in a clean room.

[Brief explanation of drawings]

Fig. 1 is a partially cutaway side view showing a dust generation prevention vertical movement shaft mechanism according to one embodiment of the present invention, Fig. 2 is a partially cutaway side view showing another embodiment, and Fig. 3 is a conventional vertical movement mechanism. FIG. 3 is a partially cutaway side view of the moving shaft mechanism. ■ is the vertical moving shaft casing, 2 is the bear link, 3 is the bearing holder, 4 is the vertical moving part, 5 is the drive part, 6 is the clearance,
8 is a hole, 9.12 is a duct, 10°13 is a suction device, 1
1 is a saucer. Agent: Masuo Oiwa (2nd year outside)
Name) Engraving of the drawing (no changes to the content) f 1 Figure to, t3: Suction 51 public l Minute 2 Figure drawing 3 Figure! -1 Procedural principal formalities (method) % formula % 1. Indication of the case 1985 Patent Application No. 295034 Tomoko 2.
Title of the invention: Dust generation prevention vertical movement shaft mechanism 5, date of correction order: March 25, 1985 (shipment date)
Procedural amendment (voluntary)

Claims (1)

[Claims] In a vertically moving shaft mechanism in which a vertically moving part moves up and down guided by a bearing provided inside a vertically moving shaft casing, a hole provided in a side part of the vertically moving shaft casing and an upper end of this vertically moving shaft casing are provided. A saucer provided to surround the surrounding area and open only at the top, a duct connected to the saucer and the hole, and a suction device provided on the outlet side of the duct to suck dust and discharge it to the outside. A vertical movement shaft mechanism to prevent dust generation.