JP2004349619A - Interface seal - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sealing member whereby when connecting with each other a plurality of spaces located separately from an external space, the seals of these spaces for an external environment are made favorable. <P>SOLUTION: The shape of the sealing member comprises the annular shape of its main-body portion, the shape of an inner-periphery rip protruded from the annular inner-periphery portion of its main-body portion, and the shape of an outer-periphery rip protruded from the annular outer-periphery portion of its main-body portion. The sealing member is so constituted that the inner- and outer-periphery rips are deformed respectively in the different directions for their extended directions in response to the pressures of sealed regions. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention is, for example, a semiconductor, a panel for a flat panel display, an optical disk, and the like, in a manufacturing process of an article in which the process is performed in a highly clean environment, a product storage container used for storing the article, that is, It relates to a container in which the pressure inside is kept different from the pressure around it. More specifically, in a process for processing a semiconductor wafer having a diameter of 300 mm, a so-called front-opening unified pod (FOUP), which is used as an object to be stored, is used as a container, and a gas replacement system that replaces gas sealed in the container is used. And a so-called interface seal (hereinafter referred to as a seal member) used when connecting the container and the container.
[0002]
[Prior art]
Specific examples of the use of the seal member according to the present invention include a FOUP and a connection portion with a gas replacement system connected thereto as described above. In such an example of use, the sealing member is required to have a stable sealing characteristic particularly with respect to the surrounding environment. Therefore, in the following description of the present invention, techniques related to FOUP will be particularly exemplified.
[Patent Document 1] Japanese Patent Publication No. 2002-510150 [Patent Document 2] U.S. Pat. No. 6,164,664 [Patent Document 3] U.S. Pat. No. 5,988,233 [Patent Document 4] Japanese Patent Publication No. 2002-53934 [Patent Document 5] Japanese Patent Laid-Open Publication No. Hei 8-203993
Heretofore, in the manufacturing process of semiconductor devices, the entire factory for performing various processes on wafers has been made into a clean room, thereby meeting the required high cleanliness during the process. However, with the increase in the diameter of the wafer, in such a solution, obtaining an environment in terms of the configuration poses a problem in terms of cost, etc. In recent years, mini-environment ( Means for securing a space (micro environment) are taken.
[0004]
Specifically, instead of increasing the cleanliness of the entire factory, only the inside of each processing device in the manufacturing process and the storage container (hereinafter, referred to as a pod) during the movement between them are kept at a high cleanliness. . This pod is collectively referred to as FOUP as described above. In this way, the adoption of the so-called mini-environment method, which cleans only a small amount of space, achieves the same effect as if the entire factory was converted to a clean room, and reduced capital investment and maintenance costs, resulting in an efficient production process. Has been realized.
[0005]
Hereinafter, a semiconductor processing apparatus and the like that are actually used and that correspond to the so-called mini-environment method will be briefly described. FIG. 6 shows the entire semiconductor wafer processing apparatus 50. The semiconductor wafer processing apparatus 50 mainly includes a load port section 51, a transfer chamber 52, and a processing chamber 59. Each joint is defined by a partition 55a and a cover 58a on the load port side and a partition 55b and a cover 58b on the processing chamber side. In the transfer chamber 52 of the semiconductor wafer processing apparatus 50, air is generated from above the transfer chamber 52 downward by a fan (not shown) provided above the transfer chamber 52 in order to discharge dust and maintain high cleanliness. I have. The dust will always be discharged downward.
[0006]
On the load port section 51, a pod 2 as a storage container for a product to be accommodated such as a silicon wafer (hereinafter simply referred to as a wafer) is installed on a table 53. As described above, the inside of the transfer chamber 52 is maintained at a high degree of cleanliness in order to process the wafer 1, and the robot arm 54 is further provided therein. The wafer is transferred between the inside of the pod 2 and the inside of the processing chamber 59 by the robot arm 54. The processing chamber 59 usually contains various mechanisms for performing processing such as thin film formation and thin film processing on the wafer surface or the like. However, since these structures do not have a direct relationship with the present invention, they are not described here. Description is omitted.
[0007]
The pod 2 has a space for accommodating the wafer 1 as an object to be processed, and includes a box-shaped main body 2a having an opening on any one surface, and a lid 4 for sealing the opening. ing. A shelf having a plurality of steps for stacking the wafers 1 in one direction is arranged inside the main body 2a, and the wafers 1 placed here are housed in the pod 2 at a constant interval. . Note that, in the example shown here, the direction in which the wafers 1 are stacked is a vertical direction. The opening 10 is provided on the load port 51 side of the transfer chamber 52. The opening 10 is arranged at a position facing the opening of the pod 2 when the pod 2 is arranged on the load port 51 so as to approach the opening 10. An opener (not shown) is provided near the opening 10 inside the transfer chamber 52. After the opener removes the lid 4 from the pod 2, the operation of carrying out or carrying in the wafer 1 by the robot arm 54 is performed.
[0008]
FIG. 7 schematically shows the configuration of the pedestal 53 shown in FIG. 6 and the pod 2 placed thereon, which are observed in their cross sections. At the lower part of the pod 2, a concave portion 5, an air supply port 7, and an exhaust port 9 are provided. Also, on the surface of the base 53, a positioning pin 12 that regulates the mounting position of the pod 2 by fitting into the recess 5, an air supply port 14 on the base 53 that contacts the air supply port 7 on the pod 2, Further, an exhaust port 16 on the side of the table 53 that contacts the exhaust port 9 on the pod 2 side is provided. At the openings of the supply / exhaust ports 14 and 16 on the table 53 side, a sealing member 18 for increasing the airtightness of these parts when these ports come into contact with the ports on the pod 2 side is arranged. A filter member 11 is disposed near the openings of the supply / exhaust ports 7 and 9 on the pod side, and prevents dust and the like from entering the pod 2 through the ports. The supply port 14 and the exhaust port 16 on the table 53 side are connected to an external device (not shown) such as a replacement gas supply source and a replacement gas exhaust source via a check valve (not shown) and a flow meter (not shown). I have.
[0009]
The configuration described above, for example,
Patent Literature 4 or Patent Literature 5 roughly discloses the configuration. Usually, a wafer 1 in which dust and the like are suppressed is brought into such a pod 2 for accommodating the product, and the inside atmosphere thereof is replaced with an inert gas such as clean nitrogen, and the wafer in the accommodated state is removed. It suppresses chemical changes such as natural oxidation on the surface and the occurrence of organic contamination. Such a replacement operation of the internal atmosphere is performed through the gas flow path formed from the supply / exhaust port provided in each of the pod 2 and the table 53 in a state where the pod 2 is placed on the table 53. Be done. Therefore, it is necessary to ensure that the gas flow path is large enough to allow a sufficient amount of the replacement gas or the internal atmosphere to flow, and that the gas flow path is sufficiently confidential so as not to contaminate the replacement gas or the internal atmosphere. The sealing member 18 is required to ensure sufficient sealing characteristics to satisfy these requirements.
[0010]
[Problems to be solved by the invention]
A so-called packing having a ring shape has been conventionally used as a seal member. FIGS. 8A and 8B are schematic cross-sectional views of the pod-side exhaust (air supply) port and the table-side exhaust (air supply) port when the packing is used. FIG. 8A shows a case where a seal member 18a having a so-called dome shape is used as the seal member, having a curved inner surface shape whose inner diameter decreases toward the upper opening. FIG. 8B shows a case where a seal member 18b having a so-called funnel shape is used as the seal member, which has a curved inner surface shape whose inner diameter increases toward the upper opening.
[0011]
When the pressure inside the packing, that is, the pressure on the gas flow path side is higher than the pressure outside the packing, a pressure is applied to the seal member 18a shown in FIG. 8A to deform the dome shape outward. As such a situation, there is a case where the seal member 18a is used on the air supply port side. In this case, the deformation pressure is applied so that the sealing surface of the sealing member 18a is more closely attached to the port end on the pod 2 side, and the sealing characteristics are further strengthened and stabilized. However, when the internal pressure of the packing is smaller than the external pressure, that is, when the seal member 18a is used on the exhaust port side, the pressure difference causes the dome shape as shown by the arrow in the figure to move inward. Deformation pressure to be deformed is given. As a result, the adhesion between the sealing surface of the sealing member 18a and the port end of the pod 2 is reduced, and in extreme cases, a gap or the like may be generated.
[0012]
When the pressure inside the packing is smaller than the pressure outside the packing, a pressure is applied to the seal member 18b shown in FIG. 8B so as to deform the funnel-shaped shape inward. As such a situation, there is a case where the seal member 18b is used on the exhaust port side. In this case, a deformation pressure is applied so that the sealing surface of the sealing member 18b is more closely attached to the port end on the pod 2 side, and the sealing characteristics are further strengthened and stabilized. However, when the internal pressure of the packing is higher than the external pressure, that is, when the seal member 18a is used on the air supply port side, the funnel-shaped shape as indicated by the arrow in the drawing changes due to this pressure difference. Is applied. As a result, the adhesion between the sealing surface of the sealing member 18b and the port end of the pod 2 is reduced, and in extreme cases, a gap or the like may be generated.
[0013]
Therefore, it is difficult to use the dome-shaped seal member and the funnel-shaped seal member in common, and it is necessary to use the seal member properly depending on whether the environment to be sealed is positive pressure or negative pressure. Furthermore, since the environment in which these seal members should be noted generally changes in pressure, individual seal characteristics change with changes in environmental pressure. Therefore, in order to ensure constant seal characteristics, these seal members are required. It is necessary to apply a weight that crushes this to give a certain deformation or more. In this case, it is necessary to add to a large weight, but for this reason, the seal member is plastically deformed while being repeatedly deformed, and there is a problem that the frequency of replacing the seal member increases. In order to uniformly deform these seal members and secure good sealing characteristics, it is necessary to always maintain the surface accuracy of the pod side, the pedestal side, and the sealing surface of the seal member. Was leading up.
[0014]
Patent Documents 1 to 3 disclose a curved dome type grommet or a bellows type sealing member for the purpose of preventing plastic deformation due to such repeated loading. It is thought that these shapes can exhibit a favorable effect from the viewpoint of preventing plastic deformation. However, it is considered that there is no particularly effective effect on the problem to be solved by the present invention in which the sealing characteristics change due to the pressure change of the environment inside the seal.
[0015]
The present invention has been made in view of the above problems, and has as its object to provide a seal member that can exhibit good sealing characteristics regardless of changes in the pressure of the environment inside the seal, such as positive pressure and negative pressure. is there. Another object of the present invention is to provide a seal member capable of exhibiting good sealing characteristics without achieving a large deformation load for excessively deforming the seal member and strict sealing surface accuracy.
[0016]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, a seal member according to the present invention is provided with a first space having an opening and a second space having an opening capable of holding an internal pressure at a pressure different from the surrounding pressure while being separated from the surroundings. When connecting the spaces, a seal member is disposed between the opening forming surface of the first space and the opening forming surface of the second space to separate the first and second spaces from the surroundings. A ring-shaped main body fixed around the outer periphery of the opening on one of the opening forming surface of the first space and the opening forming surface of the second space; and the main body. A first lip portion extending substantially in the direction of the other opening forming surface different from the opening forming surface on the side where the main body portion is fixed from the inner peripheral portion of the ring shape, and a ring-shaped outer peripheral portion of the main body portion The other opening shape different from the opening forming surface on the side where the main body is fixed A first lip portion and a second lip portion extending substantially in a plane direction, wherein the first lip portion and the second lip portion correspond to the first and second spaces according to the pressure of the first and second spaces. It is characterized in that it is deformed in different directions in which the lip portions extend.
[0017]
In the above-described seal member, the main body preferably has a hole between the first and second lip portions that penetrates an end surface on which the first and second lip portions are not formed. Further, in the above-mentioned sealing member, the first lip has a shape whose inner diameter decreases as the distance from the main body increases, and the second lip has a shape whose inner diameter increases as the distance from the main body increases. Is preferred.
[0018]
Further, in order to solve the above problems, the seal member according to the present invention is capable of holding the internal pressure at a pressure different from the surrounding pressure by separating from the surroundings, a first space having an opening, and When connecting the second space, a seal disposed between the opening forming surface of the first space and the opening forming surface of the second space to separate the first and second spaces from the surroundings A member having a ring-shaped body fixed around the outer periphery of the opening on one of the opening forming surface of the first space and the opening forming surface of the second space; and A first lip extending substantially in the direction of the other opening forming surface different from the opening forming surface on the side where the main body is fixed from the inner peripheral portion of the ring shape of the portion, and a ring-shaped outer periphery of the main body The other opening different from the opening forming surface on the side where the main body is fixed from the part A second lip extending generally in the surface direction, wherein the main body penetrates between the first and second lip portions at an end surface where the first and second lip portions are not formed. It is characterized by having a hole to be formed.
[0019]
Embodiment
An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view and a partial cross-sectional view of a seal member according to the present invention, and FIG. 2 is a cross-sectional view taken along line 2-2 of the seal member shown in FIG. The seal member 20 according to the present invention has a double seal structure, and has a substantially ring-shaped main body portion 20a, and the above-described first lip portion formed on an inner peripheral side on one end surface of the main body portion 20a. And an outer peripheral lip 20c corresponding to the above-mentioned second lip portion further formed on the outer peripheral side on the end surface of the main body 20a where the inner peripheral lip 20b is formed. Further, between the inner peripheral lip 20b and the outer peripheral lip 20c of the main body portion 20a, a plurality of suction holes 20d are provided to pass from one end surface to the other end surface of the main body portion 20a.
[0020]
The inner peripheral lip 20b has a dome shape with respect to the central axis of the seal member 20, the inner diameter of which becomes smaller as it goes upward. The outer peripheral lip 20c has a funnel shape with respect to the central axis, the inner diameter of which increases as it goes upward. With these configurations, the inner peripheral lip 20b having a dome shape is formed when the environment inside the seal is maintained at a positive pressure, and the funnel-shaped shape is formed when the environment inside the seal is maintained at a negative pressure. Since the outer peripheral lip 20c having the above-mentioned structure preferably exhibits a sealing action, good sealing characteristics can be obtained irrespective of the pressure of the environment inside the seal. Further, since the two types of lips perform different operations, good sealing characteristics can be obtained even when the sealing surface accuracy is low or when the load for crushing the sealing member is slight.
[0021]
Further, as described above, the seal member 20 shown in the present embodiment is provided with the intake hole 20d. When the inner peripheral lip 20b and the outer peripheral lip 20c of the seal member 20 come into contact with the pod-side port ends through the intake holes 20, the inner peripheral lip 20b, the outer peripheral lip 20c, and the port ends are formed. It is possible to exhaust the inside of the space. By this evacuation operation, the seal member 20 comes into tighter contact with the pod-side port end, and the sealing characteristics can be further improved. In addition, by performing the operation, even when the accuracy of the sealing surface is low, or even when the load for crushing the sealing member is slight, the sealing member itself actively exhibits the sealing action, thereby providing a good sealing effect. It is possible to obtain sealing characteristics.
[0022]
In the present embodiment, the suction hole is provided in the seal member. However, a configuration may be adopted in which these suction holes are not provided and only a plurality of lips are provided. In the present embodiment, the individual lips in the double seal have a dome shape and a funnel shape, respectively, but the present invention is not limited thereto. Specifically, similar effects can be obtained if each lip is deformed in a different direction by the pressure in the environment inside the seal. Further, even when the individual lip shapes have the same shape, the seal member and the port end are provided by providing a configuration having the same operation as the intake hole in the present embodiment between the plurality of lips. The effect of increasing the adhesion to the part is obtained.
[0023]
An actual system using the seal member according to the present invention will be briefly described below with reference to the drawings. FIG. 9 shows the system. The system includes a first space 31 and a second space 41 which are separated from the surrounding space. The first space 31 is connected to a first gas introduction system 32 used to increase the internal pressure and a first exhaust system 33 used to reduce the internal pressure. Similarly, a second gas introduction system 42 used to increase the internal pressure and a second exhaust system 43 used to reduce the internal pressure are also connected to the second space 41. . The first space 31 has an opening 35 on the opening forming surface 31a, and the second space 41 has an opening 45 on the opening forming surface 41a.
[0024]
The seal member 20 according to the present invention is disposed between the two openings 35 and 45, and is suitably used when separating the system from the surroundings. Although omitted in the figure, it is possible to have a system that is connected to the intake hole 20d in the seal member 20 according to the present invention, separately from the gas introduction system and the exhaust system associated with the first and second spaces. good. Further, the present invention can be applied to a case where the first and second spaces are variously modified, such as a configuration in which the first space does not have a gas introduction system and an exhaust system and the second space has only an exhaust system. Can be suitably used.
[0025]
(Application example)
Next, a case where the seal member according to the present invention is applied to a FOUP system currently used will be described below with reference to the drawings. The schematic configuration of the semiconductor wafer processing apparatus and the pod to which the present invention is applied is substantially the same as the configuration described in the related art, and the description of the same configuration will be omitted. Also, since there is no direct relationship with the present invention with respect to a device for opening and closing the lid 4 of the pod 2 such as an opener, the description relating to the prior art is referred to, and detailed description is omitted here. I do. In this application example, it is considered that the first space described above corresponds to the pod, and the air supply port and the exhaust port on the table side correspond to the openings in the individual spaces respectively corresponding to the second space.
[0026]
FIG. 3 shows a schematic perspective view of the table 53. Positioning pins 12, air supply ports 14, and exhaust ports 16 are provided on the surface of the table 53. The seal member 20 according to the present invention is disposed in the openings of the supply / exhaust ports 14 and 16. 4 and 5 schematically show the cross section of the pedestal 53 and the pod 2 placed thereon. FIG. 4 shows a state immediately before the pod 2 is fixed, and FIG. The respective mounted states are shown. In this application example, the suction line 19 for reducing the pressure of the space formed between the seal member 20 and the supply / exhaust port end of the pod 2 is provided inside the table 53. The intake line 19 communicates with the above-described space through an intake hole 20d, and the intake line 19 is connected to a vacuum exhaust system (not shown) which is an external device.
[0027]
Hereinafter, a purge operation and the like in a FOUP system to which the present invention is applied will be described with reference to the drawings. First, the semiconductor wafer 1 is housed therein, and the pod 2, the inside of which is a closed space, is carried by the lid 4 to a position above the table 53. The pod 2 is placed on the table 53 in a state where the positioning pins 12 protruding above the table 53 are substantially fitted into the concave portions 5 provided at the lower part of the pod 2. In this state, the supply port 7 and the exhaust port 9 on the pod side are in contact with the supply port 14 and the exhaust port 16 on the table 53 via the seal member 20, respectively.
[0028]
Here, an operation of exhausting the inside of the space 20 e formed between the seal member 20 and the end of the supply / exhaust port on the pod 2 side is performed using the intake line 19. By this operation, the pressure in the space 20e is reduced, and the seal member 20 is firmly adhered to the end of the supply / exhaust port on the pod 2 side to be brought into contact by the effect of the reduced pressure space 20e. After the operation is completed or while the operation is continued, a purge operation inside the pod 2 is performed. In the purging operation, the air supply port 14, the seal member 20, the pod 2 side intake port 7, the filter 11, the inside of the pod 2, the filter 11, the pod 2 side exhaust port 9, the seal member 20, the table 53 side By circulating the replacement gas in the order of the exhaust port 16, the atmosphere inside the pod 2 is replaced.
[0029]
By using the seal member according to the present invention for the load port as described above, even though the air supply and exhaust lines are maintained at either positive pressure or negative pressure, these lines are sufficient for the external environment. This state can be maintained while maintaining the sealing characteristics. Therefore, the atmosphere can be more effectively replaced such that the replacement gas can be sent to the inside of the pod 2 at a higher flow rate than in the related art. Further, by monitoring the internal pressure of the above-described decompression space 20 e via the intake line 19, it is possible to monitor the sealing state of the seal member 20.
[0030]
Note that, in this application example, the table 53 in which only one system is formed for each of the supply port and the exhaust port, and the pod 2 corresponding thereto are shown. However, the configuration to which the present invention can be applied is not limited thereto, and it is preferable to appropriately increase or decrease the number in consideration of the required gas replacement speed, the internal capacity of the pod 2, and the like. Further, a configuration including only the air supply port may be adopted. In this case, the replacement gas is supplied to the inside of the pod through the port, and the pressure inside the pod is made higher than the outside atmospheric pressure by the replacement gas or the like, so that the sealing force between the lid 4 and the pod body 2a is reduced. In this manner, the inside of the pod 2 may be evacuated by causing the atmosphere inside the pod 2 to flow out from between the lid 4 and the pod main body 2a generated due to the reduced sealing force.
[0031]
Further, in this application example, the seal member according to the present invention is arranged on the table side, but the arrangement of the seal member is not limited to this, and it may be arranged on the pod side. In this case, the intake hole is not provided in the seal member, and an exhaust for exhausting the inside of the space is provided on a portion of the base-side seal surface that contacts the space formed between the inner peripheral lip and the outer peripheral lip. The system may be connected. Further, in this application example, the description is made for the FOUP, but the application example of the present invention is not limited to the system. A system having a container accommodating a plurality of held objects therein and a transfer chamber for transferring the held objects from the container and transferring the held objects to an apparatus for processing the held objects, wherein the atmosphere inside the container is purged. It is possible to apply the seal member according to the present invention as long as the system needs to be performed.
[0032]
【The invention's effect】
The seal member according to the present invention is characterized in that the seal member has a plurality of lips each having a different deformation direction caused by a pressure applied to the inner peripheral portion of the lip. By having this configuration, when obtaining the sealing characteristics, excellent sealing properties are obtained without requiring excessive deformation of the lip due to a large load or precise surface accuracy between the sealing surface and the surface facing the sealing surface. It becomes possible. Further, regardless of whether the pressure in the space separated from the outside by the sealing member is positive or negative with respect to the external pressure, it is possible to obtain excellent sealing characteristics.
[0033]
Further, the seal member according to the present invention has a structure in which a space is formed between the main body and the plurality of lips, and a seal surface of the member facing the lip, and an intake for exhausting the inside of the space. Has holes. With this configuration, the inside of the space described above is evacuated, and the sealing member is more firmly adhered to the sealing surface facing the sealing member, so that excellent sealing properties can be obtained. As described above, since the sealing surface of the sealing member and the sealing surface of the opposing member are in close contact with each other due to the physical suction action, the surface accuracy required for these sealing surfaces is smaller than the surface accuracy required for the conventional sealing surface. Can be tolerated even at low levels. Further, by monitoring the internal pressure of the space described above, it is possible to confirm the sealing state.
[Brief description of the drawings]
FIG. 1 is a diagram showing a state in which a seal member according to an embodiment of the present invention is viewed obliquely and a partial cross section.
FIG. 2 is a diagram showing a cross-sectional shape of the seal member shown in FIG.
FIG. 3 is a diagram showing a schematic configuration of a state where the seal member according to the present invention is viewed from obliquely above when the seal member is installed on a table in a load port for FOUP.
FIG. 4 is a view schematically showing a cross section of each configuration in a state where a FOUP is arranged on a table shown in FIG. 3;
5 is a view schematically showing a cross section of each configuration in a state where the FOUP is placed on the table shown in FIG. 3;
FIG. 6 is an overall side view showing a schematic configuration of a general semiconductor wafer processing apparatus to which the present invention and the prior art are applied.
FIG. 7 is a view schematically showing the configuration of each section in a state where a conventional seal member is used for a table in a FOUP load port, and the FOUP is placed on the table.
FIG. 8A is a schematic cross-sectional view of a conventional seal member, a supply / exhaust port end of a base using the same, and a supply / exhaust port end of an opposing pod.
FIG. 8B is a view schematically showing a cross section of a conventional seal member, an end of an air supply / exhaust port in a table using the same, and an end of an air supply / exhaust port in an opposing pod.
FIG. 9 is a view schematically showing a system in which the seal member according to the present invention is suitably used.
[Explanation of symbols]
1: wafer 2: pod 3: opener 4: lid 5: frame 7: pod side gas supply port 9: pod side gas exhaust port 10: transfer chamber opening 11: filter 12: positioning pin 14: table side gas supply Port 16: table-side gas exhaust ports 18, 20: seal member 31: first space 41: second space 50: semiconductor processing apparatus 51: load port 52: transfer chamber 53: table

Claims (4)

When connecting the first space and the second space having an opening that can be separated from the surrounding and maintain the internal pressure at a pressure different from the surrounding pressure, the opening of the first space A seal member disposed between the portion forming surface and the opening forming surface of the second space to separate the first and second spaces from the surroundings,
In any one of the opening forming surface of the first space and the opening forming surface of the second space, a ring-shaped main body fixed around the outer periphery of the opening,
From the ring-shaped inner peripheral portion of the main body portion, a first lip portion extending generally toward the other opening forming surface direction different from the opening forming surface on the side where the main body portion is fixed,
A second lip portion extending substantially in the direction of the other opening forming surface different from the opening forming surface on the side where the main body is fixed, from the ring-shaped outer peripheral portion of the main body;
The first lip portion and the second lip portion are different directions in which the first and second lip portions extend in accordance with the pressure of the first and second spaces. A seal member characterized by being deformed into: The seal according to claim 1, wherein the main body has a hole between the first and second lip portions, the hole penetrating an end surface on which the first and second lip portions are not formed. Element. The first lip portion has a shape whose inner diameter decreases as the distance from the main body portion increases, and the second lip portion has a shape whose inner diameter increases as the distance from the main body portion increases. Item 3. The seal member according to item 1 or 2. When connecting the first space and the second space having an opening that can be separated from the surrounding and maintain the internal pressure at a pressure different from the surrounding pressure, the opening of the first space A seal member disposed between the portion forming surface and the opening forming surface of the second space to separate the first and second spaces from the surroundings,
In any one of the opening forming surface of the first space and the opening forming surface of the second space, a ring-shaped main body fixed around the outer periphery of the opening,
From the ring-shaped inner peripheral portion of the main body portion, a first lip portion extending generally toward the other opening forming surface direction different from the opening forming surface on the side where the main body portion is fixed,
A second lip portion extending substantially in the direction of the other opening forming surface different from the opening forming surface on the side where the main body is fixed, from the ring-shaped outer peripheral portion of the main body;
The sealing member, wherein the main body has a hole between the first and second lip portions, the hole penetrating through an end surface on which the first and second lip portions are not formed.

Images