JPS6241408A - Dust-rising prevention mechanism - Google Patents

Abstract

PURPOSE:To prevent dust raised in an intake pass from being discharged to outside by making intake flow relatively greater in volume than intake air flow in a device to collect dust, which is raised inside a container, by air intake. CONSTITUTION:A piston rod shaft 32, to which a piston 33 is fixed, is arranged inside a cylindrical container 31, and an intake air port 37 is provided in a penetration hole 6 of the piston rod shaft 32 in the cylindrical container 31. When the intake air port 37 is connected with a pipe, to make air intake, an intake air pass 38 inside the container 31, and an intake pass 39 for air from outside are formed. And when a contraction system, for example, a seal ring 40, is installed in the intake air pass 38, intake flow becomes greater in volume than intake air flow, and therefore, all dust raised by sliding movement of the rod shaft 32 is sucked through the intake air port 37.

Description

[Detailed description of the invention] [Technical field of invention] This invention relates to a dust prevention mechanism.

[Technical background and problems of the invention]

The development of the semiconductor industry was remarkable, resulting in 16 bits and 64 bits in memory.

256 bits and their development are remarkable. As such miniaturization progresses, the degree of cleanliness is becoming higher. For this reason, it is required that one or two people or unattended work be performed. If it is possible for humans to enter the room, automation will be considered, and the practical use of automated equipment such as robots will be considered.

However, if these devices generate dust, they cannot be used. Therefore, dust-free measures such as enclosing the equipment used are taken. However, even siege has its limits.
There are some parts that cannot be executed. For example, a piston rod opening in a cylinder or the like.

There have been many proposals in the past as measures against dust generation at the piston rod opening. For example, there is a technique in which a suction part is provided in the opening, and a seal structure is provided on the inside and outside of the suction part to exhaust dust generated inside the container to the outside of the clean room to prevent dust generation.

However, with this technology, although the dust generated inside the container is discharged, some of the dust generated at the outer seal due to the sliding of the piston rond is scattered into the outside world, for example, inside the clean room, reducing the cleanliness of the clean room. Put it away.

For this reason, there were problems such as the inability to suppress the amount of dust generated below a certain value.

[Purpose of the invention]

The present invention has been made in response to the above-mentioned problems, and provides a dust generation prevention mechanism that reduces the outflow of dust to the outside world as a measure to prevent dust generation due to intake air.

[Summary of the invention]

That is, in a mechanism in which the inflow of gas inhaled from the outside world, which occurs when the dust in the container is discharged from the intake air, is mixed with the intake air, the intake flow rate of the dust is made smaller than the flow rate of the inflowing gas. This provides a prevention mechanism.

In other words, the flow rate flowing out from inside the container to the intake hole is made smaller than the flow rate flowing in from the outside, thereby preventing dust inside the container from flowing out to the outside.

[Embodiments of the invention]

Next, an embodiment in which the dust generation prevention mechanism of the present invention is applied to an arm of a robot hand will be described with reference to the drawings.

An actuator (1) is provided for performing rotation or sliding motion, and a mechanism section (2) for performing rotation or sliding motion, such as sliding, is provided by the actuator (1), and the actuator (1) and the mechanism section are provided. A case (3) is provided for storing the mechanism (2), an intake hole (4) is provided in a part of the case (3), and a shaft (5) extending from side to side is used to transmit the movement of the mechanism (2) to the outside. ), and
3) is provided with an opening (6) in the side wall thereof.

In the arm configured in this way, the distance between the fingers (F) can be narrowed by horizontal sliding of the shaft (5),
Due to the repeated movement of spreading and gripping the article, dust is generated from the gap between the shafts (5) of the opening (6). This dust generation is prevented by using the structure shown in FIG. 1(B) in the opening (6) as a prevention mechanism. That is, a hollow part (9) is formed in the wall surface (8) in the thickness direction of the case (3) of the opening (6) facing the side wall (force) of the shaft (5), and the deep part of this hollow part (9) A conduit 0 is connected outward from qO) to form an intake hole 0z, and the air is exhausted to the outside of the clean room. When air is taken in from this intake hole H, dust generated in the case (3) is removed from the intake flow path (13).
At the same time, a suction passage (14) is formed inward from the outside of the case (3), that is, from the outside world, for example, a clean room.This suction passage (14) is mixed with the intake hole α, All the dust generated in the suction flow path (14) K due to the movement of the case (14) is exhausted from the intake hole (1).Therefore, the dust is exhausted from the intake hole Oz together with the dust generated inside the case (3). Therefore, it is not discharged into the clean room.

Therefore, in the embodiment of the present invention, by making the flow rate formed in the suction flow path (14) larger than the flow rate formed in the suction flow path 04, the dust generated in the suction flow path α is discharged to the clean room. Exhaust without any problem.

A specific example is the wall (8) of the intake flow path Q3) and the wall (8) of the intake flow path Q3).
(5) A throttle mechanism is provided in the gap. An example of a throttling mechanism is to provide a sealing ring (IQ) on the inner wall of the wall (8) of the container (3) in the above-mentioned gap.

Another example of the above throttling mechanism is that, as shown in FIG. 2, the shaft (5) of the intake channel (1'5) and the wall (8) Gap between (17
) may be made narrower than K. Furthermore, the mechanism of the present invention can also be applied to an air cylinder as shown in FIG. That is, a piston rod shaft (32) is provided in a cylindrical container (31), a piston (33) is provided at the tip of this Rondo shaft (32), and a piston (33) is provided outside the movement range (34) of this piston (33). Air introduction pipe (35) (3
6) is provided. The following measures are taken to prevent the dust generated by the sliding of the piston (33) from being emitted to the outside.

That is, an intake hole (37) is provided, a pipe (not shown) is connected to this intake hole (37), and the air is discharged into a clean room.

In this configuration, when air is taken from the intake hole (37),
An intake flow path (38) for air from inside the container (31) and an intake flow path (39) for air from outside are generated. in this case,
A throttle mechanism is provided in the intake flow path (38). For example, a seal ring (40) is provided.

With this structure, the intake flow rate becomes larger than the intake flow rate, and since the seal ring (40) is not provided between the rod shaft (32) and the support surface that constitutes the container (31), the rod shaft (32) All the dust generated by the sliding of the air is sucked into the air intake hole (37), and the amount of dust discharged into the outside world, for example, a clean room, can be significantly reduced.

〔Effect of the invention〕

As explained above, according to the present invention, since the suction flow rate is relatively larger than the intake flow rate in the structure that actually collects the dust generated inside the container by suction air, the dust generated in the suction flow path is transferred to the outside world, for example, in a clean room. It has the effect of significantly reducing emissions.

That is, it is particularly effective as a dust generation prevention structure for equipment used in ultra-clean rooms.

2 is an explanatory diagram of another embodiment of FIG. 1, and FIG. 3 is an explanatory diagram of another embodiment of FIG. 1.

12, 37... Intake hole, 13.38... Intake flow path.

14, 39... Suction channel, 15.40... Seal ring.

Agent: Patent Attorney Noriyuki Chika Same Bamboo Flower Kikuo ] Figure 1 Figure 2

Claims (3)

[Claims] (1) A mechanism in which the inflow of gas inhaled from the outside world that occurs when exhausting the dust in the container by inhalation is mixed with the inhalation, and a means for making the intake flow rate of the dust smaller than the inflowing gas flow rate. A dust generation prevention mechanism is featured. (2) A container having an opening through which the sliding body passes, a hollow part provided in the side wall of the opening, an intake hole provided in the hollow part so as to discharge air to the outside of the container, and Claim 1, further comprising a mechanism that makes the air flow path between the inner side wall of the container and the sliding body narrower than the air flow path between the outer side wall of the container and the sliding body.
Dust generation prevention mechanism described in section. (3) The dust generation prevention mechanism according to claim 2, characterized in that an O-ring is interposed in the air flow path between the inner side wall of the container in the hollow portion and the sliding body.