JPH05136573A - Manufacture of multilayer printed wiring board - Google Patents

Manufacture of multilayer printed wiring board

Info

Publication number
JPH05136573A
JPH05136573A JP29898191A JP29898191A JPH05136573A JP H05136573 A JPH05136573 A JP H05136573A JP 29898191 A JP29898191 A JP 29898191A JP 29898191 A JP29898191 A JP 29898191A JP H05136573 A JPH05136573 A JP H05136573A
Authority
JP
Japan
Prior art keywords
thermoplastic resin
wiring pattern
resin film
multilayer printed
wiring board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP29898191A
Other languages
Japanese (ja)
Inventor
Kenichi Yoshida
健一 吉田
Hiroshi Ohira
洋 大平
Naoe Sasaya
直江 笹谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP29898191A priority Critical patent/JPH05136573A/en
Publication of JPH05136573A publication Critical patent/JPH05136573A/en
Withdrawn legal-status Critical Current

Links

Landscapes

  • Screen Printers (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE:To provide a method of manufacturing a multilayer printed wiring board whose insulating base material is formed of thermoplastic resin is provided with a conductive paste wiring pattern that contains through-hole connections, where through-hole connections can be easily enhanced in reliability. CONSTITUTION:A process is provided, where a breathing type support 2 is provided onto the surface of a vacuum suction type stage 1, if necessary, and a thermoplastic resin film 4 used for the formation of a required wiring pattern which contains through-hole connections is disposed on a thermoplastic resin film 3 where a through-hole 3a is selectively bored. Furthermore, a process where a required wiring pattern of conductive paste 5 is formed on the surface of the wiring pattern forming thermoplastic resin film 4 sucked by vacuum and another process where a thermoplastic resin film 4' on which a wiring pattern is formed is aligned, laminated on the film 3, and formed into one piece through thermocompression are provided.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は多層印刷配線板の製造方
法に係り、特に熱可塑性樹脂を絶縁基材とし、かつスル
ホール接続部を有する多層印刷配線板の製造方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer printed wiring board, and more particularly to a method for manufacturing a multilayer printed wiring board which uses a thermoplastic resin as an insulating base material and has through-hole connection portions.

【0002】[0002]

【従来の技術】従来から、電子機器の小形化や高機能化
に対応し、配線の高密度化などのために多層印刷配線板
が多用されている。また、多層印刷配線板の一つの形式
として、ポリカーボネート樹脂のような熱可塑性樹脂を
絶縁基材とした多層印刷配線板が開発されており、たと
えば次のようにして製造されている。すなわち、熱可塑
性樹脂フィルムの少なくとも一主面に熱可塑性樹脂をバ
インダとする導電性ペーストにより所定の配線(回路)
パターンを、たとえばスクリーン印刷法により被着し、
乾燥して形成したものを複数枚重ね合せ、これを加熱圧
着して一体化することにより製造されている。また、こ
の多層印刷配線板においては、両面の外層配線パターン
間または外層配線パターンと内層配線パターンとの間の
電気的な接続は次のような手段でなされる。つまり、加
熱加圧されて成形された多層印刷配線板の所定の位置
に、貫通孔(スルホール)などを穿設し、この貫通孔周
辺部にランドを導電ペーストで印刷形成しておくか、あ
るいは熱可塑性樹脂フィルムの所定の位置に穿設された
貫通孔内に、導電性ペーストを充填させておき、積層し
加熱圧着して一体化する段階での熱可塑性樹脂の塑性変
形を利用して所要の層間接続することによって行われて
いる(特開昭60-137092号公報)。
2. Description of the Related Art Conventionally, multi-layer printed wiring boards have been widely used in order to cope with miniaturization and high functionality of electronic equipment and for high density wiring. Further, as one type of multilayer printed wiring board, a multilayer printed wiring board using a thermoplastic resin such as a polycarbonate resin as an insulating base material has been developed, and is manufactured as follows, for example. That is, a predetermined wiring (circuit) is formed on at least one main surface of the thermoplastic resin film by a conductive paste having a thermoplastic resin as a binder.
Deposit the pattern, for example by screen printing,
It is manufactured by stacking a plurality of dried products and then thermocompressing them to integrate them. Further, in this multilayer printed wiring board, the electrical connection between the outer layer wiring patterns on both sides or between the outer layer wiring pattern and the inner layer wiring pattern is made by the following means. That is, a through hole (through hole) is formed at a predetermined position of the multilayer printed wiring board that is heated and pressed, and a land is printed and formed on the peripheral portion of the through hole with a conductive paste. It is necessary to use the plastic deformation of the thermoplastic resin at the stage where the conductive paste is filled in the through holes formed at the predetermined positions of the thermoplastic resin film, laminated, thermocompressed and integrated. Is performed by connecting the layers (Japanese Patent Laid-Open No. 60-137092).

【0003】[0003]

【発明が解決しようとする課題】しかし、このような熱
可塑性樹脂を絶縁基材とした多層印刷配線板の製造方法
においては、スルホール接続を形成するための導電性ペ
ーストによる2次的なランド形成や導電性ペーストの充
填など作業工程が煩雑ないし複雑であるばかりでなく、
スルホール接続の信頼性にも問題ある。すなわち、前記
作業工程の煩雑ないし複雑性は、結果的に製造コストの
上昇を招くとともに、歩留まり低減の原因となり、ま
た、前記充填された導電性ペーストは貫通孔内壁面にし
か濡れないため、積層し加熱・加圧一体化の段階でも、
所要のスルホール接続が形成されない場合があって、多
層印刷配線板として信頼性の点でなお問題があるといえ
る。
However, in the method of manufacturing a multilayer printed wiring board using such a thermoplastic resin as an insulating base material, secondary land formation by a conductive paste for forming a through hole connection is formed. Not only is the work process complicated and complicated, such as filling in and conductive paste,
There is also a problem with the reliability of the through-hole connection. That is, the complexity or complexity of the working process results in an increase in manufacturing cost and causes a reduction in yield, and the filled conductive paste wets only the inner wall surface of the through hole, so that the laminated Even at the stage of heating and pressure integration,
Since the required through-hole connection may not be formed in some cases, it can be said that the multilayer printed wiring board is still problematic in terms of reliability.

【0004】本発明は上記事情に対処してなされたもの
で、熱可塑性樹脂を絶縁基材とし、かつスルホール接続
を含む導電性ペースト系の配線パターンを備えた多層印
刷配線板において、スルホール接続の信頼性を容易に高
め得る多層印刷配線板の製造方法提供を目的とする。
The present invention has been made in consideration of the above circumstances, and in a multilayer printed wiring board having a conductive paste type wiring pattern including a through hole connection as a base material of a thermoplastic resin, a through hole connection is performed. An object of the present invention is to provide a method for manufacturing a multilayer printed wiring board that can easily improve reliability.

【0005】[0005]

【課題を解決するための手段】本発明に係る多層印刷配
線板の製造方法は、減圧吸引型ステージ面に要すれば通
気型の支持体を配置する工程と、前記減圧吸引型ステー
ジ面もしくは支持体面上に厚さ方向への貫通孔が選択的
に穿設された熱可塑性樹脂フィルムを介してスルホール
接続部を含む所要の配線パターン形成用熱可塑性樹脂フ
ィルムを配置する工程と、前記配線パターン形成用熱可
塑性樹脂フィルムを減圧吸引しながらそのフィルム上面
に導電性ペーストで所要の配線パターンを被着形成する
工程と、前記配線パターンを被着形成した熱可塑性樹脂
フィルムを位置合わせ・積層して加熱・加圧成型により
一体化する工程とを具備することを特徴とする。
A method of manufacturing a multilayer printed wiring board according to the present invention comprises a step of disposing a ventilation type support on the surface of a vacuum suction type stage, if necessary, and a step of supporting the vacuum suction type stage surface or the support. A step of arranging a thermoplastic resin film for forming a required wiring pattern including a through-hole connecting portion through a thermoplastic resin film in which through holes in the thickness direction are selectively formed on the body surface; and the wiring pattern formation Step of forming a required wiring pattern with a conductive paste on the upper surface of the thermoplastic resin film while suctioning it under reduced pressure, and aligning and laminating the thermoplastic resin film with the wiring pattern formed thereon and heating. -It is characterized by including a step of integrating by pressure molding.

【0006】なお、上記の構成において通気型の支持体
としは、厚さ30〜 100μm 程度に選択設定するのが好ま
しく、またこの通気型の支持体面上に、いわばダミーの
厚さ方向への貫通孔が選択的に穿設された熱可塑性樹脂
フィルムを介在させたのは、配線パターン形成用熱可塑
性樹脂フィルム面に導電性ペーストで所要の配線パター
ンを被着形成するとき、良好なスルホール接続部を形成
し易いことが実験的に確認されたからである。さらに、
前記において通気型の支持体の配置を省略しても、被印
刷体である配線パターン形成用熱可塑性樹脂フィルムに
穿設された孔は、導電性ペーストで容易に充填されて所
要の導体領域を形成することも実験的に確認した。
In the above structure, it is preferable that the ventilation type support is selectively set to have a thickness of about 30 to 100 μm, and the so-called dummy is pierced on the surface of this ventilation type support in the thickness direction. The thermoplastic resin film having the holes selectively formed is interposed so that a desired through-hole connection portion can be formed when the required wiring pattern is formed by the conductive paste on the surface of the wiring pattern forming thermoplastic resin film. This is because it has been experimentally confirmed that it is easy to form further,
Even if the arrangement of the ventilation type support is omitted in the above, the holes formed in the wiring pattern forming thermoplastic resin film, which is the object to be printed, are easily filled with a conductive paste to form a desired conductor region. Formation was also confirmed experimentally.

【0007】[0007]

【作用】本発明の製造においては、多層印刷配線板を構
成する配線パターン形成用熱可塑性樹脂フィルム面に導
電性ペースト系の配線パターンを被着形成するに当た
り、前記配線パターン形成用熱可塑性樹脂フィルムを他
面側から減圧(真空)吸引した状態に設置しているた
め、スルホール接続部を形成する貫通孔内にも容易に、
かつ確実・緻密に導電性ペーストが充填・被着される。
したがって、所要の配線パターンを形成した後、積層し
て加熱・加圧成型により一体化した場合も、信頼性の高
いスルホール接続を備えた多層印刷配線板を歩留まりよ
く得ることができる
In the production of the present invention, the thermoplastic resin film for forming a wiring pattern is formed when the conductive paste-based wiring pattern is formed on the surface of the thermoplastic resin film for forming a wiring pattern forming the multilayer printed wiring board. Is installed under reduced pressure (vacuum) from the other side, so it can be easily installed even in the through hole that forms the through-hole connection.
In addition, the conductive paste is reliably and precisely filled and applied.
Therefore, even when the required wiring patterns are formed and then laminated and integrated by heating and pressure molding, it is possible to obtain a multilayer printed wiring board having a highly reliable through-hole connection with high yield.

【0008】[0008]

【実施例】以下、図1および図2を参照して本発明の実
施例を説明する。
Embodiments of the present invention will be described below with reference to FIGS.

【0009】図1は本発明の製造方法において、スルホ
ール接続部を含む所要の配線パターン形成用熱可塑性樹
脂フィルム面に、前記所要の配線パターを被着形成する
状態を模式的に示したもので、この段階までは次のよう
な工程を経て行われる。
FIG. 1 schematically shows a state in which the required wiring pattern is adhered and formed on a surface of a required wiring pattern forming thermoplastic resin film including through-hole connecting portions in the manufacturing method of the present invention. Up to this stage, the following steps are performed.

【0010】先ず、真空ポンプ(図示せず)によって減
圧吸引機能を呈し得るように、たとえば直径0.5mm 、ピ
ッチ10mmに真空引き孔1aが設けられている減圧吸引型ス
テージ1の面上に通気型の支持体2、たとえば厚さ50μ
m 程度の上質紙を配置する。ここで通気型の支持体2と
して、前記上質紙に限らず繊維状の紙もしくは布などで
あってもよい。
First, in order to be able to exhibit a vacuum suction function by a vacuum pump (not shown), for example, a vacuum type is provided on the surface of the vacuum suction stage 1 having vacuum suction holes 1a with a diameter of 0.5 mm and a pitch of 10 mm. Support 2, for example 50 μm in thickness
Place m high-quality paper. Here, the ventilation type support 2 is not limited to the above-mentioned high-quality paper, and may be fibrous paper or cloth.

【0011】次に、前記支持体2面上に厚さ方向への貫
通孔が選択的に穿設された熱可塑性樹脂フィルム3、た
とえば直径0.4mm の貫通孔3aが穿設された厚さ 100μm
のポリサルホン樹脂フィルムを配置する。しかる後、前
記熱可塑性樹脂フィルム3面上に、スルホール接続部を
含む所要の配線パターン形成用の熱可塑性樹脂フィルム
4、たとえば厚さ75μm程度で、直径0.2mm の貫通孔4a
が穿設されたポリフェニレンサルファイド樹脂フィルム
を配置する。なお、前記熱可塑性樹脂フィルム3の貫通
孔3aが穿設された位置と配線パターン形成用の熱可塑性
樹脂フィルム4に穿設された貫通孔4aの位置とはほぼ一
致させてある。
Next, a thermoplastic resin film 3 having through holes in the thickness direction selectively formed on the surface of the support body 2, for example, a through hole 3a having a diameter of 0.4 mm and a thickness of 100 μm.
Place the polysulfone resin film of. Then, on the surface of the thermoplastic resin film 3, a thermoplastic resin film 4 for forming a required wiring pattern including through-hole connecting portions, for example, a through hole 4a having a thickness of about 75 μm and a diameter of 0.2 mm is formed.
The polyphenylene sulfide resin film having the holes formed therein is placed. The position where the through hole 3a is formed in the thermoplastic resin film 3 and the position of the through hole 4a formed in the thermoplastic resin film 4 for forming the wiring pattern are substantially aligned with each other.

【0012】このように、配置された配線パターン形成
用の熱可塑性樹脂フィルム4を減圧吸引しながら、その
フィルム4上面に導電性ペースト5、たとえばポリサル
ホン樹脂をバインダとした銀ペースト(粘度50000 〜75
000cPs) を、たとえばスクリーン印刷して所要の配線パ
ターンを被着形成する。次いで、前記所要の配線パター
ンを被着形成した熱可塑性樹脂フィルム4′を、前記支
持体3面上から取り外し、たとえば150 ℃で 1h 程度乾
燥する。
As described above, while suctioning the arranged thermoplastic resin film 4 for forming a wiring pattern under reduced pressure, a conductive paste 5, for example, a silver paste having a binder of polysulfone resin (viscosity 50000 to 75) is applied to the upper surface of the film 4.
000 cPs) is screen-printed, for example, to form the required wiring pattern. Then, the thermoplastic resin film 4'on which the required wiring pattern is formed is removed from the surface of the support 3 and dried at 150 ° C. for about 1 hour.

【0013】前記に準じた工程を繰り返して、目的とす
る多層印刷配線板の製造に要する所要の配線パターンを
被着形成した熱可塑性樹脂フィルム4′をそれぞれ得た
後、これらの熱可塑性樹脂フィルム4′を位置合わせ・
積層して加熱・加圧成型により一体化することによっ
て、所望の多層印刷配線板が製造される。図2はこのよ
うにして製造した多層印刷配線板の構造の要部を断面的
に示したもので、スルホール接続部を含む各配線パター
ン層5′は、いずれも緻密に形成されており、機能的に
信頼性の高い配線パターンを成していた。
The steps according to the above are repeated to obtain the thermoplastic resin films 4'on which the required wiring patterns required for the production of the intended multilayer printed wiring board are formed, and then these thermoplastic resin films 4'are obtained. Align 4 '
A desired multilayer printed wiring board is manufactured by laminating and integrating by heating and pressure molding. FIG. 2 is a cross-sectional view showing the main part of the structure of the multilayer printed wiring board manufactured in this way, in which each wiring pattern layer 5'including through-hole connecting parts is formed densely and has a function. The wiring pattern was highly reliable.

【0014】上記製造例において、減圧吸引型ステージ
1の面上への通気型の支持体2の配置を省略した他は、
同一の条件で多層印刷配線板を製造し、断面的にスルホ
ール接続部を含む各配線パターン層を観察・評価したと
ころ、前記製造例の場合と同様な結果が認められた。
In the above manufacturing example, the arrangement of the ventilation type support 2 on the surface of the vacuum suction type stage 1 is omitted, except that
When a multilayer printed wiring board was manufactured under the same conditions and each wiring pattern layer including a through-hole connecting portion in cross section was observed and evaluated, the same results as in the case of the above-mentioned manufacturing example were recognized.

【0015】なお、本発明において使用する熱可塑性樹
脂としては、回路基板に通常要求される電気絶縁性、耐
熱性、耐湿性などの諸特性を兼備えたものであることが
望ましく、たとえば、ポリカーボネート樹脂、ポリスル
ホン樹脂、ポリアリルサルホン樹脂、ポリエーテルエー
テルケトン樹脂、ポリエーテルイミド樹脂、ポリフェニ
ルサルファイド樹脂、ポリフェニレンオキサイド樹脂な
どが挙げられる。
The thermoplastic resin used in the present invention preferably has various characteristics such as electrical insulation, heat resistance and moisture resistance which are usually required for circuit boards. For example, polycarbonate. Resin, polysulfone resin, polyallyl sulfone resin, polyether ether ketone resin, polyether imide resin, polyphenyl sulfide resin, polyphenylene oxide resin and the like can be mentioned.

【0016】また、回路基板の絶縁層を構成する熱可塑
性樹脂と、導電ペーストのバインダとして使用される熱
可塑性樹脂とは、同種のものであることが望ましいが、
ほぼ同等な可塑性を有するものであれば異種のものの組
合わせでもよい。しかして、導電ペーストは、前記熱可
塑性樹脂に金、銀、銅、ニッケル、タングステン、モリ
ブデン、アルミニウム、白金などの金属粉末や、カーボ
ン粉、炭化ケイ素粉、五酸化バナジウム粉などの半導電
性粉末を添加・混合されたものである。
It is desirable that the thermoplastic resin forming the insulating layer of the circuit board and the thermoplastic resin used as the binder of the conductive paste are of the same kind.
A combination of different types may be used as long as they have substantially the same plasticity. Then, the conductive paste is a metal powder such as gold, silver, copper, nickel, tungsten, molybdenum, aluminum or platinum in the thermoplastic resin, or carbon powder, silicon carbide powder, semiconductive powder such as vanadium pentoxide powder. Is added and mixed.

【0017】さらに、上記では通気型の支持体2上に配
置した熱可塑性樹脂フィルム3の貫通孔3aの径を、所要
の配線パターン形成用の熱可塑性樹脂フィルム4の貫通
孔4aよりも大きく設定したが、これらは逆の関係であっ
てもよいし、また必ずしも同軸的な位置関係になくとも
よい。
Further, in the above, the diameter of the through hole 3a of the thermoplastic resin film 3 arranged on the breathable support 2 is set to be larger than that of the required through hole 4a of the thermoplastic resin film 4 for forming the wiring pattern. However, these may have the opposite relationship, or may not necessarily have the coaxial positional relationship.

【0018】[0018]

【発明の効果】以上説明したように本発明の多層印刷配
線板の製造方法によれば、スルホール接続部を形成(構
成)する貫通孔内に、容易かつ確実に導電性ペーストが
緻密に充填され、結果的に信頼性の高い層間接続部が形
成された多層印刷配線板を容易に製造し得ることにな
る。換言すると繁雑な工程など要せずに歩留まりよく、
信頼性の高い多層印刷配線板を常に得ることが可能とな
る。
As described above, according to the method for manufacturing a multilayer printed wiring board of the present invention, the conductive paste is densely and easily filled in the through holes forming (configuring) the through-hole connecting portions. As a result, it is possible to easily manufacture a multilayer printed wiring board in which a highly reliable interlayer connection portion is formed. In other words, the yield is good without the need for complicated processes,
It is possible to always obtain a highly reliable multilayer printed wiring board.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係わる多層印刷配線板の製造方法の実
施態様例を模式的示す断面図。
FIG. 1 is a cross-sectional view schematically showing an embodiment example of a method for manufacturing a multilayer printed wiring board according to the present invention.

【図2】本発明に係わる多層印刷配線板の製造方法で製
造した多層印刷配線板の構成例を示す断面図。
FIG. 2 is a cross-sectional view showing a configuration example of a multilayer printed wiring board manufactured by the method for manufacturing a multilayer printed wiring board according to the present invention.

【符号の説明】[Explanation of symbols]

1…減圧吸引型ステージ 1a…真空引き孔 2…通
気型の支持体 3…通気型の支持体面上に配置される
熱可塑性樹脂フィルム 3a…通気型の支持体面上に配
置される熱可塑性樹脂フィルムに穿設された貫通孔
4…所要の配線パターンが被着形成される熱可塑性樹脂
フィルム 4a…所要の配線パターンが被着形成される
熱可塑性樹脂フィルムに穿設された貫通孔(スルホール
接続部形成部) 4′…配線パターンが被着形成され
た熱可塑性樹脂フィルム 5…導電性ペースト
5′…配線パターン
DESCRIPTION OF SYMBOLS 1 ... Vacuum suction stage 1a ... Vacuum suction hole 2 ... Breathable support 3 ... Thermoplastic resin film disposed on the ventilation support surface 3a ... Thermoplastic resin film disposed on the ventilation support surface Through hole
4 ... Thermoplastic resin film on which required wiring pattern is adhered and formed 4a ... Through hole (through hole connection portion forming portion) formed in thermoplastic resin film on which required wiring pattern is adhered and formed 4 '... Wiring Thermoplastic resin film on which pattern is formed 5. Conductive paste
5 '... wiring pattern

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 減圧吸引型ステージ面上に厚さ方向への
貫通孔が選択的に穿設された熱可塑性樹脂フィルムを介
してスルホール接続部を含む所要の配線パターン形成用
熱可塑性樹脂フィルムを配置する工程と、 前記配線パターン形成用熱可塑性樹脂フィルムを減圧吸
引しながらそのフィルム上面に導電性ペーストで所要の
配線パターンを被着形成する工程と、 前記配線パターンを被着形成した熱可塑性樹脂フィルム
を位置合わせ・積層して加熱・加圧成型により一体化す
る工程とを具備することを特徴とする多層印刷配線板の
製造方法。
1. A thermoplastic resin film for forming a required wiring pattern including a through-hole connecting portion via a thermoplastic resin film having through holes in the thickness direction selectively formed on a surface of a vacuum suction type stage. A step of arranging, a step of depositing a required wiring pattern with a conductive paste on the upper surface of the wiring pattern forming thermoplastic resin film under vacuum suction, and a thermoplastic resin having the wiring pattern deposited thereon A method for manufacturing a multilayer printed wiring board, comprising the steps of aligning and laminating films and integrating them by heating and pressure molding.
【請求項2】 請求項1記載の多層印刷配線板の製造方
法において、減圧吸引型ステージ面と厚さ方向への貫通
孔が選択的に穿設された熱可塑性樹脂フィルムとの間に
通気型の支持体を配置・介在させることを特徴とする多
層印刷配線板の製造方法。
2. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein a vacuum type is provided between the vacuum suction type stage surface and the thermoplastic resin film in which through holes in the thickness direction are selectively formed. A method for manufacturing a multilayer printed wiring board, comprising: disposing and interposing the support of 1.
JP29898191A 1991-11-14 1991-11-14 Manufacture of multilayer printed wiring board Withdrawn JPH05136573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29898191A JPH05136573A (en) 1991-11-14 1991-11-14 Manufacture of multilayer printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29898191A JPH05136573A (en) 1991-11-14 1991-11-14 Manufacture of multilayer printed wiring board

Publications (1)

Publication Number Publication Date
JPH05136573A true JPH05136573A (en) 1993-06-01

Family

ID=17866693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29898191A Withdrawn JPH05136573A (en) 1991-11-14 1991-11-14 Manufacture of multilayer printed wiring board

Country Status (1)

Country Link
JP (1) JPH05136573A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102794979A (en) * 2011-05-27 2012-11-28 高正科技有限公司 Vacuum coating device
CN110493960A (en) * 2019-08-12 2019-11-22 珠海杰赛科技有限公司 A kind of method and its machining tool of macroporous plate filling holes with resin

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102794979A (en) * 2011-05-27 2012-11-28 高正科技有限公司 Vacuum coating device
CN110493960A (en) * 2019-08-12 2019-11-22 珠海杰赛科技有限公司 A kind of method and its machining tool of macroporous plate filling holes with resin

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Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 19990204