JPH05136287A - Chip carrier - Google Patents

Chip carrier

Info

Publication number
JPH05136287A
JPH05136287A JP29696991A JP29696991A JPH05136287A JP H05136287 A JPH05136287 A JP H05136287A JP 29696991 A JP29696991 A JP 29696991A JP 29696991 A JP29696991 A JP 29696991A JP H05136287 A JPH05136287 A JP H05136287A
Authority
JP
Japan
Prior art keywords
chip
chip carrier
integrated circuit
wiring board
printed wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP29696991A
Other languages
Japanese (ja)
Inventor
Yoshizumi Sato
由純 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP29696991A priority Critical patent/JPH05136287A/en
Publication of JPH05136287A publication Critical patent/JPH05136287A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors

Abstract

PURPOSE:To provide a chip carrier which enables easy alignment of a connection terminal during packaging and realizes highly reliable packaging of high density. CONSTITUTION:A transparent chip carrier substrate 1 whereon a semiconductor integrated circuit chip 3 is mounted and a wiring pattern 2 whose one end is electrically connected to the semiconductor integrated circuit chip 3 and the other end is electrically connected to an outside printed wiring board are provided. Since the chip carrier substrate 1 is transparent, alignment can be performed while recognizing a position directly by transmitting light from a rear of the chip carrier substrate 1 when the semiconductor integrated circuit chip 3 is mounted on the chip carrier substrate 1 by a flip chip method and when the chip carrier is packaged in the outside printed wiring board; accurate alignment can be thereby carried out.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は半導体集積回路等の電子
部品用チップキャリアに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chip carrier for electronic parts such as semiconductor integrated circuits.

【0002】[0002]

【従来の技術】半導体集積回路などを高密度に実装する
実装形態のなかで、近年、表面実装型パッケージの抬頭
が著しいが、さらに高密度な実装を可能にする実装形態
としてフリップチップやチップオンボード(COB)と
いった、半導体集積回路チップを封止されていないベア
チップの状態でプリント配線板上に直接実装する技術が
用いられている。
2. Description of the Related Art In recent years, surface mounting type packages have been remarkably popular among mounting forms for mounting semiconductor integrated circuits at a high density, but flip-chip and chip-on types are available as mounting forms enabling higher density mounting. A technique is used in which a semiconductor integrated circuit chip such as a board (COB) is directly mounted on a printed wiring board in an unsealed bare chip state.

【0003】フリップチップ実装は、ボンディングパッ
ド上にバンプが貼設された半導体集積回路チップを、そ
のバンプがプリント配線板上のパッドに当接するように
フェイスダウンの状態で直接にプリント配線板上に実装
するものである。
In flip-chip mounting, a semiconductor integrated circuit chip having bumps attached to bonding pads is directly faced down on the printed wiring board so that the bumps come into contact with the pads on the printed wiring board. It is to be implemented.

【0004】通常、半導体集積回路チップのボンディン
グパッド上に数μmφ程度の大きさの金(Au)バン
プ、あるいは導電めっき付樹脂ボールを貼設し、これを
直接プリント配線板上のパッドに若干押し潰れぎみにな
るように押し当てて、半導体集積回路チップ周辺を絶縁
樹脂で固めて、プリント配線板上に固着させている。こ
のとき、プリント配線板上のパッドの位置への、半導体
集積回路チップのボンディングパッド上のバンプの位置
の正確なアライメント(位置合わせ)が必要となる。
Usually, a gold (Au) bump having a size of about several μmφ or a resin ball with conductive plating is attached on a bonding pad of a semiconductor integrated circuit chip, and this is slightly pressed directly on the pad on the printed wiring board. It is pressed so as to be crushed, the periphery of the semiconductor integrated circuit chip is fixed with an insulating resin, and fixed on the printed wiring board. At this time, it is necessary to accurately align the position of the bump on the bonding pad of the semiconductor integrated circuit chip with the position of the pad on the printed wiring board.

【0005】またチップオンボード実装は、広義にはベ
アチップを直接プリント配線板上に実装する実装形態の
総称を指す場合もあるが、一般的には、半導体集積回路
チップをベアチップのままフェイスアップの状態で直接
にプリント配線板上に接着剤などを用いて固定し、この
半導体集積回路チップ上のボンディングパッドとプリン
ト配線板上に配設されたパッドとをAu(金)などのボ
ンディングワイヤやTABなどによる金属製リードによ
って接続する実装形態のことである。
The chip-on-board mounting may be a general term for a mounting form in which a bare chip is directly mounted on a printed wiring board in a broad sense, but in general, a semiconductor integrated circuit chip is face-up as a bare chip. In this state, it is directly fixed onto the printed wiring board with an adhesive or the like, and the bonding pad on the semiconductor integrated circuit chip and the pad arranged on the printed wiring board are bonded with Au (gold) bonding wire or TAB. It is a mounting form that is connected by metal leads such as.

【0006】このチップオンボード実装では、フリップ
チップ実装の場合ようなアライメントの困難さはない
が、半導体集積回路チップとプリント配線板との電気的
接続にはAu(金)ボンディングワイヤや金属製リード
などの接続部材を必要とし、これらの接続部材と半導体
集積回路チップの接続パッドとの接合には、それらの材
質を適宜選んでAu−Au(金−金)、Au−Al(金
−アルミニウム)、Au−Sn(金−錫)等の共晶結合
を接合面で作る、という方法をとっているが、異金属間
のマイグレーションの問題などがあり、特に半導体集積
回路チップの接続パッドの材質に制約が大きく、一般的
なAl(アルミニウム)製パッドが用いづらい。また、
これらの接合部材は比較的高価なので、コストアップに
もつながる。またこれらの接続部材は外面に向かって装
着されているので、樹脂ポッティングにて最終的にチッ
プを封止するときなどに、樹脂の流れによってボンディ
ングワイヤが捩れて短絡したり、あるいはワイヤや金属
製リードが外れてしまう、といった不都合が生じる場合
もある。これらの点では、フリップチップ実装方式の方
が有利である。
In this chip-on-board mounting, there is no difficulty in alignment as in the case of flip-chip mounting, but Au (gold) bonding wires and metal leads are used for electrical connection between the semiconductor integrated circuit chip and the printed wiring board. For connection of these connection members and the connection pads of the semiconductor integrated circuit chip, Au-Au (gold-gold) and Au-Al (gold-aluminum) are selected by appropriately selecting their materials. , Au-Sn (gold-tin) and other eutectic bonds are formed on the joint surface, but there is a problem of migration between different metals, and especially the material of the connection pad of the semiconductor integrated circuit chip. There are large restrictions, and it is difficult to use general Al (aluminum) pads. Also,
Since these joining members are relatively expensive, the cost is increased. Further, since these connecting members are mounted toward the outer surface, the bonding wire is twisted and short-circuited by the flow of resin when the chip is finally sealed by resin potting, or the wire is made of metal or metal. In some cases, the lead may come off and other inconveniences may occur. From these points, the flip chip mounting method is more advantageous.

【0007】このようなフリップチップやチップオンボ
ードなどベアチップタイプの実装形態は、パッケージン
グのためのリードフレームが不要であり、またその他の
パッケージ形態よりもさらに小型化・薄型化を実現した
実装形態であるが、ベアチップ(封止していない半導体
チップ)のままの集積回路チップを直接プリント配線板
に実装するため、実装前にベアチップ状態の集積回路チ
ップにバーンインや電気的特性などの品質チェックを行
なって、不良チップのスクリーニングをすることが困難
である。
The bare chip type mounting form such as the flip chip and the chip on board does not require a lead frame for packaging, and the mounting form realizes further miniaturization and thinning as compared with other packaging forms. However, because the integrated circuit chip, which is a bare chip (semiconductor chip that is not sealed), is directly mounted on the printed wiring board, the quality of the bare chip integrated circuit chip such as burn-in and electrical characteristics is checked before mounting. It is difficult to go and screen for defective chips.

【0008】そしてこの場合、集積回路チップの品質チ
ェックは、それをプリント配線板に実装し終わってか
ら、その集積回路チップの実装された近傍の配線パター
ンにプローブなどを当てて行なうことになるが、この時
点で集積回路チップの品質不良が判定しても、その不良
チップの交換作業は非常に煩雑で困難であり、最悪の場
合にはその 1つの不良チップのために、良品チップが多
数実装されたその配線板ごと不良品としなければならな
くなる。
In this case, the quality check of the integrated circuit chip is performed by applying a probe or the like to the wiring pattern in the vicinity where the integrated circuit chip is mounted, after mounting the integrated circuit chip on the printed wiring board. Even if the quality of the integrated circuit chip is judged to be defective at this point, replacement of the defective chip is very complicated and difficult, and in the worst case, many defective chips are mounted due to one defective chip. All the wiring boards that have been processed will have to be rejected.

【0009】従って、このようなベアチップ実装が採用
されるのは、機器の小型化への厳しい要請があるとき
や、実装前にベアチップのままの集積回路チップを手間
をかけて検査することができる場合や、配線板が全体と
してさほど高価でない場合などに限られている。
Therefore, the adoption of such bare chip mounting makes it possible to inspect an integrated circuit chip which is a bare chip before mounting when there is a strict demand for miniaturization of equipment or before mounting. This is limited to cases where the wiring board is not so expensive as a whole.

【0010】このようなベアチップ実装の欠点を補いつ
つ、その高密度実装を生かすことができる実装形態とし
て、表面実装型パッケージの一種であるチップキャリア
がある。
There is a chip carrier which is a kind of surface mount type package as a mounting form that can make use of the high density mounting while compensating for the drawbacks of the bare chip mounting.

【0011】チップキャリアは、フラットパッケージを
リードレスにして、より小型化し実装密度を高めたもの
である。その形態は、図5に示すように、セラミック製
または合成樹脂製の基板401上のほぼ中央に集積回路
チップ402が貼設され、その集積回路チップの同一面
上および四周に、一端が集積回路チップ402に接続し
他端の端子部403が外部のプリント配線板406に接
続するように配設された配線パターン404を有し、前
述の集積回路チップ402を合成樹脂製の封止材405
で被服して封止したものである。このチップキャリアの
集積回路チップ402上のボンディングパッドと基板4
01上に配設された配線パターン404との電気的接
続、および集積回路チップ402のプリント配線板40
6上への固定には、前述のフリップチップの方式やチッ
プオンボードの方式の実装技術が用いられており、この
図5では、上述の電気的接続にはAuボンディングワイ
ヤ407を、そして固定には接着剤408を用いたとき
の一例を示している。
The chip carrier is a leadless flat package, which is more compact and has a higher packaging density. As shown in FIG. 5, as shown in FIG. 5, an integrated circuit chip 402 is attached to a ceramic or synthetic resin substrate 401 at approximately the center thereof, and one end of the integrated circuit chip 402 is provided on the same surface and on four sides. The integrated circuit chip 402 has a wiring pattern 404 that is arranged so as to be connected to the chip 402 and the terminal portion 403 at the other end is connected to an external printed wiring board 406.
It is the one that is covered with and sealed. Bonding pads on the integrated circuit chip 402 of this chip carrier and the substrate 4
01, the electrical connection with the wiring pattern 404, and the printed wiring board 40 of the integrated circuit chip 402.
The above-mentioned mounting technique of the flip-chip method or the chip-on-board method is used for fixing to the top of FIG. 6. In FIG. 5, the Au bonding wire 407 is used for the above-mentioned electrical connection, and the fixing technology is fixed. Shows an example when the adhesive 408 is used.

【0012】従来、このチップキャリアの基板には主に
セラミックが用いられていたが、近年、合成樹脂の研究
開発が進み、その耐熱性や耐湿性などの信頼性が向上し
たことで、エポキシをはじめ各種のプラスチックが用い
られるようになってきた。
Conventionally, ceramics have been mainly used for the substrate of this chip carrier, but in recent years, research and development of synthetic resins have progressed, and the reliability such as heat resistance and moisture resistance has been improved. At the beginning, various types of plastics were used.

【0013】[0013]

【発明が解決しようとする課題】上述のようなチップキ
ャリアは配線パターン404上にプローブを接続させて
電気的特性チェックを行なうことができ、プリント配線
板に実装する前にその良、不良をチェックできるので、
不良チップを実装してしまう心配が少ない。また、その
実装密度は普通のフラットパッケージよりも高いものと
なっている。
In the above chip carrier, a probe can be connected on the wiring pattern 404 to check the electrical characteristics, and the goodness and the defectiveness can be checked before mounting on the printed wiring board. Because you can
There is little concern about mounting a defective chip. Also, its packaging density is higher than that of ordinary flat packages.

【0014】しかしながら、このようなチップキャリア
は、プリント配線板にその接続端子をはんだ付けして実
装する際に、プリント配線板上の端子とチップキャリア
の端子とのアライメントを行なっているが、接続が行な
われる端子部分は、そのチップキャリアとプリント配線
板との間に挟まれた部分にあり、プリント配線板の上か
らは黒色や緑色の合成樹脂製または白色や褐色のセラミ
ック製の不透明なチップキャリアの陰になってしまい、
目視での位置合わせが困難であり、また光学式アライナ
を用いて実装を行なう場合でも、接続が行なわれる端子
部分がチップキャリアの陰になって光がそこまで届か
ず、光学式アライナがその端子部分を認識できないため
に自動実装が困難である、という問題があった。そし
て、もし自動実装を行なう場合には、チップキャリアの
基板を通してプリント配線板が透視できるような特殊で
高価な認識装置を備えたアライナを用いなくてはならな
い。
However, in such a chip carrier, when the connection terminals are mounted on the printed wiring board by soldering, the terminals on the printed wiring board and the terminals of the chip carrier are aligned. The terminal part where the wiring is carried out is located between the chip carrier and the printed wiring board, and from the top of the printed wiring board is an opaque chip made of black or green synthetic resin or white or brown ceramic. I ’m behind my career,
Even if it is difficult to align visually, and even when mounting using an optical aligner, the terminal part to be connected is behind the chip carrier and the light does not reach there. There is a problem that automatic mounting is difficult because the part cannot be recognized. If automatic mounting is performed, an aligner equipped with a special and expensive recognition device that allows the printed wiring board to be seen through the substrate of the chip carrier must be used.

【0015】また、チップキャリアの本体基板上に前述
のフリップチップ方式で集積回路チップを装着させる場
合、集積回路チップをフェイスダウンの状態にして、こ
のチップキャリアの本体基板上の接続端子と集積回路チ
ップ上のバンプとをアライメントさせながら接続させる
が、このとき、その接続部分はやはりチップキャリアの
本体基板と集積回路チップとの間に挟まれて、その陰と
なってしまう。このため、目視や自動実装機の光学式ア
ライナではそのアライメントを実行することは困難であ
る、という問題があった。
When mounting the integrated circuit chip on the main body substrate of the chip carrier by the above-mentioned flip chip method, the integrated circuit chip is placed face down and the connection terminals and the integrated circuit on the main body substrate of the chip carrier are mounted. The bumps on the chip are connected while being aligned, but at this time, the connecting portion is also sandwiched between the main body substrate of the chip carrier and the integrated circuit chip, and becomes a shadow. For this reason, there is a problem that it is difficult to perform the alignment visually or by an optical aligner of an automatic mounting machine.

【0016】本発明はこのような問題に鑑みて成された
もので、その目的とするところは、チップキャリアと外
部のプリント配線板との間のアライメントの困難さおよ
びチップキャリア本体基板と半導体チップとの間のアラ
イメントの困難さの問題を解消して、高密度で信頼性の
高い実装を実現しかつ実装時に接続端子のアライメント
が簡易であるチップキャリアを提供することにある。
The present invention has been made in view of the above problems, and an object of the present invention is to make it difficult to align the chip carrier with an external printed wiring board, and to mount the chip carrier body substrate and the semiconductor chip. It is an object of the present invention to provide a chip carrier that solves the problem of difficulty in alignment between the two, realizes high-density and high-reliability mounting, and facilitates alignment of connection terminals during mounting.

【0017】[0017]

【課題を解決するための手段】前述した目的を達成する
ために本発明のチップキャリアは、半導体回路チップが
搭載される透明な基板と、一端が前記半導体回路チップ
の接続部に電気的に接続され他端が外部のプリント配線
板の接続部に電気的に接続される、前記基板の面上に配
設された配線パターンと、を具備することを特徴として
いる。
In order to achieve the above-mentioned object, a chip carrier of the present invention has a transparent substrate on which a semiconductor circuit chip is mounted and one end electrically connected to a connecting portion of the semiconductor circuit chip. And a wiring pattern disposed on the surface of the substrate, the other end of which is electrically connected to a connection portion of an external printed wiring board.

【0018】[0018]

【作用】本発明のチップキャリアは、半導体回路チップ
が搭載される透明な熱可塑性プラスチック製の基板を有
する。これにより、このチップキャリアをプリント配線
板上に実装する際のチップキャリアの接続部材とプリン
ト配線板の接続部材とのアライメント時に、目視あるい
は自動マウント装置の光学式アライナの光センシングに
よって、チップキャリアの上からチップキャリアの基板
を光学的に透過して前述のアライメントを簡易に行なう
ことができる。
The chip carrier of the present invention has a transparent thermoplastic resin substrate on which a semiconductor circuit chip is mounted. Thereby, at the time of alignment between the connecting member of the chip carrier and the connecting member of the printed wiring board when mounting the chip carrier on the printed wiring board, the chip carrier of the chip carrier can be visually detected or optically sensed by the optical aligner of the automatic mounting device. The above alignment can be easily performed by optically transmitting through the substrate of the chip carrier from above.

【0019】また、半導体回路チップをこのチップキャ
リアの基板にフリップチップ法によってフェイスダウン
の状態で搭載する際、その半導体回路チップの接続部材
とこのチップキャリアの接続部材とのアライメント時に
は、チップキャリアの半導体回路チップを搭載する面の
裏面から、このチップキャリアの透明基板を光学的に透
過して、目視あるいは自動マウント装置の光学式アライ
ナにより前述のアライメントを簡易に行なうことができ
る。
When the semiconductor circuit chip is mounted face down on the substrate of the chip carrier by the flip chip method, the chip carrier of the chip carrier is aligned when the connecting member of the semiconductor circuit chip is aligned with the connecting member of the chip carrier. The transparent substrate of the chip carrier is optically transmitted from the back side of the surface on which the semiconductor circuit chip is mounted, and the above alignment can be easily performed visually or by an optical aligner of an automatic mounter.

【0020】[0020]

【実施例】以下、図面に基づいて本発明の一実施例を詳
細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings.

【0021】図1は本発明に係るチップキャリアを示す
斜視図、図2はその側面断面図である。
FIG. 1 is a perspective view showing a chip carrier according to the present invention, and FIG. 2 is a side sectional view thereof.

【0022】本発明のチップキャリアは、基板1と、こ
の基板1上に配設された配線パターン2と、この基板1
上に搭載された半導体集積回路チップ3とを有してい
る。
The chip carrier of the present invention comprises a substrate 1, a wiring pattern 2 arranged on the substrate 1, and the substrate 1.
It has a semiconductor integrated circuit chip 3 mounted thereon.

【0023】基板1は、図1に示すように、ポリカーボ
ネートやポリスチレンなどの透明な熱可塑性プラスチッ
クを射出成形したもので、中央部に凹部4を有し、この
凹部4に半導体集積回路チップ3が搭載されている。そ
の半導体集積回路チップ3が搭載されている側の面上に
は、半導体集積回路チップ3と外部のプリント配線板と
を電気的に接続する配線パターン2が貼設されている。
この基板1は、図4に示すような射出成形金型400を
用いて、配線パターン2と共に以下に述べる要領で形成
される。
As shown in FIG. 1, the substrate 1 is formed by injection molding a transparent thermoplastic such as polycarbonate or polystyrene, and has a recess 4 in the center, and the semiconductor integrated circuit chip 3 is placed in the recess 4. It is installed. On the surface on which the semiconductor integrated circuit chip 3 is mounted, a wiring pattern 2 for electrically connecting the semiconductor integrated circuit chip 3 and an external printed wiring board is attached.
This substrate 1 is formed together with the wiring pattern 2 using an injection molding die 400 as shown in FIG.

【0024】即ち、この射出成形金型400は、WC
(炭化タングステン)+CO基(炭酸基)の超硬合金を
母材として、これをザグリ加工して雌型の射出金型本体
401とし、この内面全体に薄膜形成プロセスによりi
−カーボン膜を被着させ、形成したい配線パターン部分
のi−カーボン膜をレーザーにて除去して残りの部分が
電気めっきレジスト402となるようにしたもので、ま
ず電気銅めっきを施して電気めっきレジスト402の被
着していない部分にCu(銅)を析出させて必要な配線
パターン2を形成し、一旦この射出金型本体401に被
着させておき、この射出成形金型400の下部に設けら
れた注入口405からポリカーボネートなどの透明な熱
可塑性樹脂を射出成形金型400内に注入して、チップ
キャリア基板1を所定の形態に射出成形する。このとき
射出成形と同時に、一旦、射出金型本体401に被着さ
せておいた前述の配線パターン2が、射出成形されたチ
ップキャリア基板1上に転写される。この場合、離型剤
は用いる必要はなく、チップキャリア基板1と配線パタ
ーン2との食い付きによって、このCu(銅)製の配線
パターン2は射出金型本体401から離型してチップキ
ャリア基板1に被着する。こうして射出成形され配線パ
ターンを貼設されて、射出成形金型400から取り出さ
れてのち下部のバリを取り去されて、チップキャリア基
板1は形成される。
That is, this injection molding die 400 is
Using a cemented carbide of (tungsten carbide) + CO group (carbonate group) as a base material, this is subjected to counterbore processing to form a female injection die body 401, and the entire inner surface of the die is formed by a thin film forming process.
-A carbon film is deposited, and the i-carbon film of the wiring pattern portion to be formed is removed by laser so that the remaining portion becomes the electroplating resist 402. First, electroplating is performed and then electroplating is performed. Cu (copper) is deposited on the non-adhered portion of the resist 402 to form the necessary wiring pattern 2, and the wiring pattern 2 is once attached to the injection mold main body 401. A transparent thermoplastic resin such as polycarbonate is injected into the injection molding die 400 through the injection port 405 provided, and the chip carrier substrate 1 is injection molded into a predetermined shape. At this time, simultaneously with the injection molding, the wiring pattern 2 previously attached to the injection mold body 401 is transferred onto the injection-molded chip carrier substrate 1. In this case, it is not necessary to use a release agent, and due to the bite between the chip carrier substrate 1 and the wiring pattern 2, the Cu (copper) wiring pattern 2 is released from the injection mold main body 401 and the chip carrier substrate. Put on 1. In this way, the chip carrier substrate 1 is formed by injection molding, attaching a wiring pattern, taking it out from the injection molding die 400, and then removing the burrs at the bottom.

【0025】配線パターン2は、上記のようにしてチッ
プキャリア基板1上に貼設されるCu(銅)製の配線パ
ターンで、その一端はチップキャリア基板1の外周に沿
って列設された外部との接続端子5を有し、他端はチッ
プキャリア基板1の中央の凹部4の下段に配設された半
導体集積回路チップ3との接続端子6を有している。半
導体集積回路チップ3は、前述のチップキャリア基板1
中央の凹部4にフリップチップ方式によりフェイスダウ
ンの状態で搭載され、Au(金)バンプ7を介して配線
パターン2の端部の接続端子6に接続され、絶縁性の紫
外線硬化型接着剤8にてチップキャリア基板1に固着さ
れている。この紫外線硬化型接着剤8を硬化させる時に
も、このチップキャリア基板1が透明であることが有利
に働いている。即ち、このチップキャリア基板1を透過
して紫外線硬化型接着剤8に紫外線を照射させること
で、より短時間の硬化を可能としている。
The wiring pattern 2 is a wiring pattern made of Cu (copper) attached on the chip carrier substrate 1 as described above, and one end of the wiring pattern 2 is externally arranged along the outer periphery of the chip carrier substrate 1. And a connecting terminal 6 for connecting to the semiconductor integrated circuit chip 3 arranged in the lower stage of the recess 4 in the center of the chip carrier substrate 1. The semiconductor integrated circuit chip 3 is the chip carrier substrate 1 described above.
It is mounted face down in the central recess 4 by a flip chip method, is connected to the connection terminal 6 at the end of the wiring pattern 2 via the Au (gold) bump 7, and is attached to the insulating ultraviolet curable adhesive 8. And is fixed to the chip carrier substrate 1. Even when the ultraviolet curable adhesive 8 is cured, it is advantageous that the chip carrier substrate 1 is transparent. That is, by irradiating the ultraviolet curable adhesive 8 with ultraviolet rays through the chip carrier substrate 1, curing can be performed in a shorter time.

【0026】この半導体集積回路チップ3をチップキャ
リア基板1に搭載する際、半導体集積回路チップ3の接
続パッド9とチップキャリア基板1の接続端子6とのア
ライメントに光学式アライメント装置を用いて、チップ
キャリア基板1の半導体集積回路チップ3の搭載面の裏
側から光をあて、光をチップキャリア基板1を透過させ
て半導体集積回路チップ3の接続パッド9の位置をセン
シングし、アライメントを実行させている。これによ
り、従来のように半導体集積回路チップの外形と接続パ
ッドの位置をマウンターに認識させ、これにより間接的
に接続パッドを接続端子にアライメントさせていた場合
とは異なり、直接に接続パッドを接続端子にアライメン
トできるので、アライメント精度の大幅な向上を実現す
ることができた。
When the semiconductor integrated circuit chip 3 is mounted on the chip carrier substrate 1, an optical alignment device is used for alignment between the connection pads 9 of the semiconductor integrated circuit chip 3 and the connection terminals 6 of the chip carrier substrate 1, and a chip is used. Light is applied from the back side of the mounting surface of the semiconductor integrated circuit chip 3 of the carrier substrate 1, the light is transmitted through the chip carrier substrate 1, the position of the connection pad 9 of the semiconductor integrated circuit chip 3 is sensed, and the alignment is executed. .. This allows the mounter to directly recognize the outer shape of the semiconductor integrated circuit chip and the position of the connection pad, unlike the case where the connection pad is indirectly aligned with the connection terminal. Since the terminals can be aligned, the alignment accuracy was greatly improved.

【0027】その後、凹部4に封止用樹脂10をポッテ
ィングして半導体集積回路チップ3を完全に樹脂封止
し、チップキャリア基板1の外周の接続端子5に半導体
集積回路試験装置のプローブを接触させて、半導体集積
回路としての動作試験等、品質保証試験を行なう。
After that, the semiconductor integrated circuit chip 3 is completely resin-sealed by potting the sealing resin 10 in the recess 4, and the probe of the semiconductor integrated circuit testing device is brought into contact with the connection terminals 5 on the outer periphery of the chip carrier substrate 1. Then, a quality assurance test such as an operation test of the semiconductor integrated circuit is performed.

【0028】本発明に係る、このような構成のチップキ
ャリアは、図3に示すように、半導体集積回路チップ3
の搭載面をプリント配線板に対向するような形でプリン
ト配線板11に実装される。
The chip carrier having such a structure according to the present invention has a semiconductor integrated circuit chip 3 as shown in FIG.
It is mounted on the printed wiring board 11 such that the mounting surface of is opposed to the printed wiring board.

【0029】即ち、チップキャリア基板1の外周に沿っ
て列設された外部との接続端子5がアライメントされて
プリント配線板11上に配設された接続端子12上に盛
られたクリームはんだ13に当接し、このクリームはん
だがリフロー工程を経てチップキャリア基板1の接続端
子5とプリント配線板11上に配設された接続端子12
とを接続している。
That is, the external connection terminals 5 arranged along the outer periphery of the chip carrier substrate 1 are aligned to the cream solder 13 placed on the connection terminals 12 arranged on the printed wiring board 11. This cream solder comes into contact with the connection terminal 5 of the chip carrier substrate 1 and the connection terminal 12 provided on the printed wiring board 11 through a reflow process.
And are connected.

【0030】このチップキャリアとプリント配線板との
アライメント時にも、光学式アライメント装置を用い
て、チップキャリア基板1の半導体集積回路チップ3の
搭載面の裏側から光をあて、チップキャリア基板1を透
過させた光でプリント配線板11の接続端子12および
チップキャリアの接続端子5の位置をセンシングしてア
ライメントさせ、自動マウント装置により実装させてい
る。
At the time of alignment between the chip carrier and the printed wiring board, an optical alignment device is used to irradiate light from the back side of the mounting surface of the semiconductor integrated circuit chip 3 of the chip carrier substrate 1 and transmit the chip carrier substrate 1. The positions of the connection terminals 12 of the printed wiring board 11 and the connection terminals 5 of the chip carrier are sensed and aligned by the emitted light, and they are mounted by an automatic mounting device.

【0031】これにより、従来のようにチップキリアの
外形と接続端子の位置をマウンターに認識させ、これに
より間接的にチップキリアの接続端子をプリント配線板
の接続端子にアライメントさせていた場合とは異なり、
直接にチップキリアの接続端子とプリント配線板の接続
端子とをアライメントできるので、アライメント精度の
大幅な向上を実現することができた。
As a result, unlike the conventional case where the mounter recognizes the outer shape of the chip carrier and the positions of the connection terminals, and thereby indirectly aligns the connection terminals of the chip carrier with the connection terminals of the printed wiring board,
Since the connection terminal of the chip carrier and the connection terminal of the printed wiring board can be directly aligned, the alignment accuracy can be significantly improved.

【0032】このように、チップキャリアとこれに搭載
される半導体集積回路チップとのアライメント精度、お
よびチップキャリアとこれを実装するプリント配線板と
のアライメント精度の大幅な向上が実現されるので、本
発明のチップキャリアによれば半導体集積回路の更なる
多ピン化とプリント配線板の更なる高密度化に対応する
ことができる。
As described above, since the alignment accuracy between the chip carrier and the semiconductor integrated circuit chip mounted thereon and the alignment accuracy between the chip carrier and the printed wiring board on which the chip carrier is mounted are significantly improved, According to the chip carrier of the invention, it is possible to cope with a further increase in the number of pins of the semiconductor integrated circuit and a further increase in the density of the printed wiring board.

【0033】なお、本実施例では、チップキャリア基板
を射出成形によって形成しているがこれには限定されな
い。透明で平坦な樹脂板にザグリ加工にて凹部を形成さ
せ、配線パターンを無電解銅めっきなどの化学めっきに
て形成させてもよい。
Although the chip carrier substrate is formed by injection molding in this embodiment, the invention is not limited to this. A recess may be formed in a transparent and flat resin plate by spot facing, and the wiring pattern may be formed by chemical plating such as electroless copper plating.

【0034】また、本実施例ではチップの搭載および接
続にフリップチップ方式を用いているが、チップオンボ
ードや、TAB方式を用いてもよい。その場合、チップ
はフェイスアップの状態で搭載し、接続用のボンディン
グワイヤ201やリードのための空間が必要なので、図
2(b)に示すように、チップ搭載用の凹部204を2
段にしなければならない。
Further, although the flip chip method is used for mounting and connecting the chips in this embodiment, a chip on board or a TAB method may be used. In that case, the chip is mounted face up, and a space for the bonding wire 201 for connection and the lead is required. Therefore, as shown in FIG.
You have to step.

【0035】[0035]

【発明の効果】以上、詳細に説明したように、本発明に
よれば、チップキャリアと外部のプリント配線板との間
のアライメントの困難さおよびチップキャリア本体基板
と半導体チップとの間のアライメントの困難さの問題を
解消して、高密度で信頼性の高い実装を実現しかつ実装
時に接続端子のアライメントが簡易であるチップキャリ
アを提供することができる。
As described above in detail, according to the present invention, it is difficult to perform the alignment between the chip carrier and the external printed wiring board and the alignment between the chip carrier body substrate and the semiconductor chip. It is possible to provide a chip carrier that solves the problem of difficulty, realizes high-density and highly reliable mounting, and has easy alignment of connection terminals during mounting.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るチップキャリアを示す斜視図。FIG. 1 is a perspective view showing a chip carrier according to the present invention.

【図2】本発明に係るチップキャリアの側面断面図。FIG. 2 is a side sectional view of a chip carrier according to the present invention.

【図3】本発明に係るチップキャリアをプリント配線板
に実装したときの状態を示す側面断面図。
FIG. 3 is a side sectional view showing a state in which the chip carrier according to the present invention is mounted on a printed wiring board.

【図4】本発明に係るチップキャリアの射出成形および
配線パターン転写用金型を示す側面断面図。
FIG. 4 is a side sectional view showing a die for injection molding and wiring pattern transfer of a chip carrier according to the present invention.

【図5】従来技術に係るチップキャリアの側面断面図。FIG. 5 is a side sectional view of a chip carrier according to a conventional technique.

【符号の説明】[Explanation of symbols]

1…チップキャリア基板 2…配線パターン 3…半導体集積回路チップ 4…凹部 5…外部との接続端子 6…半導体集積回路チップとの接続端子 7…Auバンプ 8…絶縁性の紫外線硬化型接着剤 9…接続パッド 10…ポッティング樹脂 11…プリント配線板 12…プリント配線板上の接続端子 13…クリームはんだ DESCRIPTION OF SYMBOLS 1 ... Chip carrier substrate 2 ... Wiring pattern 3 ... Semiconductor integrated circuit chip 4 ... Recessed portion 5 ... External connection terminal 6 ... Semiconductor integrated circuit chip connection terminal 7 ... Au bump 8 ... Insulating UV-curable adhesive 9 Connection pad 10 Potting resin 11 Printed wiring board 12 Connection terminals on printed wiring board 13 Cream solder

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 半導体回路チップが搭載される透明な基
板と、 一端が前記半導体回路チップの接続部に電気的に接続さ
れ、他端が外部のプリント配線板の接続部に電気的に接
続される、前記基板の面上に配設された配線パターンと
を具備することを特徴とするチップキャリア。
1. A transparent substrate on which a semiconductor circuit chip is mounted, one end of which is electrically connected to a connecting portion of the semiconductor circuit chip and the other end of which is electrically connected to a connecting portion of an external printed wiring board. And a wiring pattern arranged on the surface of the substrate.
【請求項2】 前記基板が前記半導体回路チップを搭載
する凹部を有し、前記半導体回路チップが搭載された前
記基板の面と同一側の面上に前記配線パターンが配設さ
れ、前記半導体回路チップと前記配線パターンとの接続
がフリップチップ法によりフェイスダウンの状態で接続
された請求項第1項記載のチップキャリア。
2. The substrate has a recess for mounting the semiconductor circuit chip, and the wiring pattern is arranged on a surface on the same side as the surface of the substrate on which the semiconductor circuit chip is mounted. The chip carrier according to claim 1, wherein the chip and the wiring pattern are connected face down by a flip chip method.
JP29696991A 1991-11-13 1991-11-13 Chip carrier Withdrawn JPH05136287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29696991A JPH05136287A (en) 1991-11-13 1991-11-13 Chip carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29696991A JPH05136287A (en) 1991-11-13 1991-11-13 Chip carrier

Publications (1)

Publication Number Publication Date
JPH05136287A true JPH05136287A (en) 1993-06-01

Family

ID=17840549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29696991A Withdrawn JPH05136287A (en) 1991-11-13 1991-11-13 Chip carrier

Country Status (1)

Country Link
JP (1) JPH05136287A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980026262A (en) * 1996-10-08 1998-07-15 김광호 Film Carrier in Tab Package
JP2002033410A (en) * 2000-05-11 2002-01-31 Mitsutoyo Corp Function device unit and its manufacturing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980026262A (en) * 1996-10-08 1998-07-15 김광호 Film Carrier in Tab Package
JP2002033410A (en) * 2000-05-11 2002-01-31 Mitsutoyo Corp Function device unit and its manufacturing method
JP4555504B2 (en) * 2000-05-11 2010-10-06 株式会社ミツトヨ Functional device unit and manufacturing method thereof

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Effective date: 19990204