JPH0513375B2 - - Google Patents

Info

Publication number
JPH0513375B2
JPH0513375B2 JP60233205A JP23320585A JPH0513375B2 JP H0513375 B2 JPH0513375 B2 JP H0513375B2 JP 60233205 A JP60233205 A JP 60233205A JP 23320585 A JP23320585 A JP 23320585A JP H0513375 B2 JPH0513375 B2 JP H0513375B2
Authority
JP
Japan
Prior art keywords
microwave
processing
processing chambers
plasma
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60233205A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6293937A (ja
Inventor
Masaharu Saikai
Yoshifumi Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP23320585A priority Critical patent/JPS6293937A/ja
Publication of JPS6293937A publication Critical patent/JPS6293937A/ja
Publication of JPH0513375B2 publication Critical patent/JPH0513375B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP23320585A 1985-10-21 1985-10-21 マイクロ波プラズマ処理装置 Granted JPS6293937A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23320585A JPS6293937A (ja) 1985-10-21 1985-10-21 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23320585A JPS6293937A (ja) 1985-10-21 1985-10-21 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6293937A JPS6293937A (ja) 1987-04-30
JPH0513375B2 true JPH0513375B2 (enrdf_load_stackoverflow) 1993-02-22

Family

ID=16951398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23320585A Granted JPS6293937A (ja) 1985-10-21 1985-10-21 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS6293937A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666268B2 (ja) * 1986-06-18 1994-08-24 日本電気株式会社 マイクロ波プラズマｃｖｄ装置
JP2597876B2 (ja) * 1988-03-19 1997-04-09 三洋電機株式会社 薄膜形成方法
CA2510332A1 (en) * 2002-12-18 2004-07-01 Biotage Ab Microwave heating system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61189642A (ja) * 1985-02-18 1986-08-23 Mitsubishi Electric Corp プラズマ反応装置

Also Published As

Publication number Publication date
JPS6293937A (ja) 1987-04-30

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