JPH0513003Y2 - - Google Patents

Info

Publication number
JPH0513003Y2
JPH0513003Y2 JP1983170926U JP17092683U JPH0513003Y2 JP H0513003 Y2 JPH0513003 Y2 JP H0513003Y2 JP 1983170926 U JP1983170926 U JP 1983170926U JP 17092683 U JP17092683 U JP 17092683U JP H0513003 Y2 JPH0513003 Y2 JP H0513003Y2
Authority
JP
Japan
Prior art keywords
gas
nozzle
vapor phase
phase growth
inner cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1983170926U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6079734U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17092683U priority Critical patent/JPS6079734U/ja
Publication of JPS6079734U publication Critical patent/JPS6079734U/ja
Application granted granted Critical
Publication of JPH0513003Y2 publication Critical patent/JPH0513003Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP17092683U 1983-11-04 1983-11-04 気相成長装置におけるガス噴出ノズル Granted JPS6079734U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17092683U JPS6079734U (ja) 1983-11-04 1983-11-04 気相成長装置におけるガス噴出ノズル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17092683U JPS6079734U (ja) 1983-11-04 1983-11-04 気相成長装置におけるガス噴出ノズル

Publications (2)

Publication Number Publication Date
JPS6079734U JPS6079734U (ja) 1985-06-03
JPH0513003Y2 true JPH0513003Y2 (enrdf_load_stackoverflow) 1993-04-06

Family

ID=30373000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17092683U Granted JPS6079734U (ja) 1983-11-04 1983-11-04 気相成長装置におけるガス噴出ノズル

Country Status (1)

Country Link
JP (1) JPS6079734U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0658880B2 (ja) * 1985-11-12 1994-08-03 日本電気株式会社 気相エピタキシヤル成長装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524424A (en) * 1978-08-09 1980-02-21 Kokusai Electric Co Ltd Forming device of pressure-reduced epitaxial layer

Also Published As

Publication number Publication date
JPS6079734U (ja) 1985-06-03

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