JPH05117032A - Production of silicon nitride sintered compact - Google Patents

Production of silicon nitride sintered compact

Info

Publication number
JPH05117032A
JPH05117032A JP3283143A JP28314391A JPH05117032A JP H05117032 A JPH05117032 A JP H05117032A JP 3283143 A JP3283143 A JP 3283143A JP 28314391 A JP28314391 A JP 28314391A JP H05117032 A JPH05117032 A JP H05117032A
Authority
JP
Japan
Prior art keywords
powder
silicon nitride
sintered body
sintering
sintered compact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3283143A
Other languages
Japanese (ja)
Other versions
JP2970131B2 (en
Inventor
Teizo Hase
貞三 長谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP3283143A priority Critical patent/JP2970131B2/en
Publication of JPH05117032A publication Critical patent/JPH05117032A/en
Application granted granted Critical
Publication of JP2970131B2 publication Critical patent/JP2970131B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To provide the silicon nitride sintered compact small in the mechanical strength drop at an elevated temperature. CONSTITUTION:A mixture of (A) 85-95wt.% of silicon nitride powder and (B) 5-15wt.% of sintering auxiliary powder comprising spinel (MgAl2O4) powder and zircon (ZrSiO4) powder is made into a form which is then sintered in a non-oxidative atmosphere at 1500-1700 deg.C to obtain the objective sintered compact. Based on the fact that a sintered compact made from the above zircon powder alone hardly varies in its mechanical strength in the temperature range from the room temperature to 1400 deg.C, the objective sintered compact is considered as being resistant to its mechanical strength drop even in the presence of the above-mentioned sintered compact as grain boundary phase after sintering.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ガスタービン部品やデ
ィーゼルエンジン部品などの耐熱性構造材料として使用
できる窒化珪素焼結体の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a silicon nitride sintered body which can be used as a heat resistant structural material for gas turbine parts, diesel engine parts and the like.

【0002】[0002]

【従来の技術】耐熱性に優れた窒化珪素焼結体は、窒化
珪素自身が共有結合性結晶であり、窒化珪素粉末単独で
は焼結が困難であるため、従来、窒化珪素粉末に各種の
焼結助剤を添加して製造されている。また、上記焼結助
剤は焼結性の促進に寄与するとともに、焼結体の強度に
も大きく影響するので、焼結助剤の種類や組合せが従来
より種々検討されている。
2. Description of the Related Art In a silicon nitride sintered body having excellent heat resistance, silicon nitride itself is a covalent bond crystal, and it is difficult to sinter with silicon nitride powder alone. It is manufactured by adding a co-agent. Further, since the above-mentioned sintering aid contributes to the promotion of sinterability and also greatly affects the strength of the sintered body, various kinds and combinations of sintering aids have been conventionally studied.

【0003】例えば、特公昭52−3647号公報や特
開昭57−77072号公報には、窒化珪素粉末に焼結
助剤としてのスピネル(MgAl2 4 )を添加した混
合粉末から成形体を成形し、この成形体を非酸化性雰囲
気中で焼結する窒化珪素焼結体の製造方法が開示されて
いる。また、特開昭59−184771号公報には、焼
結助剤としてスピネルの他にイットリヤ(Y2 3 )を
加えることにより、さらに高強度化を図った製造方法が
開示されている。
For example, in Japanese Patent Publication No. 52-3647 and Japanese Patent Publication No. 57-77072, a compact is formed from a mixed powder of silicon nitride powder to which spinel (MgAl 2 O 4 ) as a sintering aid is added. There is disclosed a method for manufacturing a silicon nitride sintered body which is formed and sintered in a non-oxidizing atmosphere. Further, Japanese Patent Application Laid-Open No. 59-184771 discloses a manufacturing method in which yttria (Y 2 O 3 ) is added as a sintering aid in addition to spinel to further increase the strength.

【0004】[0004]

【発明が解決しようとする課題】ところが、焼結助剤と
してスピネルの他にイットリヤを用いた上記従来の製造
方法により得られた焼結体は、高温での強度が低下する
ので、高温下で長期間使用することに困難を伴ってい
た。これは、焼結助剤として用いたイットリヤが酸化物
であるため、高温でのイットリヤ自身の強度低下が一因
していると考えられる。
However, since the sintered body obtained by the above-mentioned conventional manufacturing method using yttria in addition to spinel as a sintering aid has low strength at high temperature, It was difficult to use for a long time. It is considered that this is because the yttria used as a sintering aid is an oxide, and therefore the strength of the yttria itself at high temperature is reduced.

【0005】本発明は上記実情に鑑みてなされたもので
あり、高温での強度低下が比較的少なく、高温下でも好
適に構造部品として使用することのできる窒化珪素焼結
体を提供することを目的とする。
The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a silicon nitride sintered body which has a relatively small decrease in strength at high temperatures and can be suitably used as a structural component even at high temperatures. To aim.

【0006】[0006]

【課題を解決するための手段】本発明の窒化珪素焼結体
の製造方法は、窒化珪素粉末85〜95重量%と、スピ
ネル(MgAl2 4 )粉末及びジルコン(ZrSiO
4 )粉末よりなる焼結助剤粉末5〜15重量%とを配合
して混合し、成形体とする成形工程と、該成形体を非酸
化性雰囲気中1500〜1700℃で焼結して焼結体と
する焼結工程とからなることを特徴とする。
A method for manufacturing a silicon nitride sintered body according to the present invention comprises: 85 to 95% by weight of silicon nitride powder, spinel (MgAl 2 O 4 ) powder and zircon (ZrSiO).
4 ) A mixing step of mixing and mixing 5 to 15% by weight of a sintering aid powder made of powder to form a molded body, and sintering the molded body at 1500 to 1700 ° C. in a non-oxidizing atmosphere and firing. It is characterized by comprising a sintering step of forming a unit.

【0007】成形工程は、窒化珪素粉末に焼結助剤とし
てのスピネル粉末及びジルコン粉末を添加した混合粉末
から成形体を成形する工程である。窒化珪素粉末の粒径
としては、平均粒径を0.5μm以下とすることが、焼
結性を高め緻密な焼結体を得るために好ましい。焼結助
剤粉末の配合量は5〜15重量%である。焼結助剤粉末
の配合量が5重量%より少ないと、焼結性が高まらない
ので緻密な焼結体が得られない。焼結助剤粉末の配合量
が85重量%より多いと、緻密な焼結体が得られるもの
の、焼結体中に非晶質相(ガラス相)の粒界が多くな
り、高温域での強度低下が著しい。これは、焼結体中の
粒界に非晶質相として存在する焼結助剤成分が、高温に
さらされて再度液相を形成するためと考えられる。
The molding step is a step of molding a compact from a mixed powder obtained by adding spinel powder and zircon powder as a sintering aid to silicon nitride powder. The average particle size of the silicon nitride powder is preferably 0.5 μm or less in order to improve the sinterability and obtain a dense sintered body. The mixing amount of the sintering aid powder is 5 to 15% by weight. If the amount of the sintering aid powder blended is less than 5% by weight, the sinterability will not be improved and a dense sintered body cannot be obtained. If the mixing amount of the sintering aid powder is more than 85% by weight, a dense sintered body can be obtained, but the amorphous phase (glass phase) has many grain boundaries in the sintered body, and The strength is significantly reduced. It is considered that this is because the sintering aid component existing as an amorphous phase at the grain boundary in the sintered body is exposed to high temperature to form a liquid phase again.

【0008】焼結助剤粉末としてのスピネル粉末とジル
コン粉末との配合比率は、1/3〜3/1とすることが
好ましい。ジルコン粉末に対してスピネル粉末の配合量
が少なく、その比率が1/3より小さいと、焼結温度が
高温になり過ぎ(1700℃より高温)、粒径が粗くな
って強度低下を引き起こすので好ましくない。また、ジ
ルコン粉末に対してスピネル粉末の配合量が多く、その
比率が3/1より大きいと、焼結性は向上するが高温強
度が低下するので好ましくない。
The mixing ratio of the spinel powder as the sintering aid powder and the zircon powder is preferably 1/3 to 3/1. When the amount of the spinel powder mixed is small with respect to the zircon powder and the ratio is less than 1/3, the sintering temperature becomes too high (higher than 1700 ° C.) and the grain size becomes coarse, which causes strength reduction, which is preferable. Absent. Further, if the amount of the spinel powder mixed with the zircon powder is large and the ratio thereof is larger than 3/1, the sinterability is improved but the high temperature strength is lowered, which is not preferable.

【0009】焼結助剤粉末の粒径としては、平均粒径を
0.5μm以下することが、焼結性を高め緻密な焼結体
を得るために好ましい。焼結工程は、成形工程で得られ
た成形体を非酸化性雰囲気中1500〜1700℃で焼
結して焼結体とする工程である。非酸化性雰囲気は、窒
化珪素の窒素及び珪素を酸化させない、例えば窒素ガス
を採用することができる。
Regarding the particle size of the sintering aid powder, it is preferable that the average particle size is 0.5 μm or less in order to improve the sinterability and obtain a dense sintered body. The sintering step is a step of sintering the molded body obtained in the molding step at 1500 to 1700 ° C. in a non-oxidizing atmosphere to obtain a sintered body. As the non-oxidizing atmosphere, for example, nitrogen gas which does not oxidize nitrogen of silicon nitride and silicon can be adopted.

【0010】焼結温度が1500℃より低いと、充分に
緻密化した焼結体を得られない。また焼結温度が170
0℃より高いと、窒化珪素粒子の異常粒成長により組織
が微細化しないので、強度が低下する。焼結工程は、常
圧下の窒素中で充分に緻密な焼結体を得ることができる
が、例えば1000気圧程度の窒素雰囲気の加圧下で行
うことが、焼結体の表層が緻密化後圧力を高めて焼結体
のさらなる高強度化を図れるので好ましい。
If the sintering temperature is lower than 1500 ° C., a sufficiently densified sintered body cannot be obtained. The sintering temperature is 170
If the temperature is higher than 0 ° C, the structure will not be refined due to abnormal grain growth of silicon nitride particles, and the strength will decrease. In the sintering step, a sufficiently dense sintered body can be obtained in nitrogen under normal pressure. For example, it should be performed under pressure in a nitrogen atmosphere of about 1000 atm after the surface layer of the sintered body has been densified. Is preferable, and the strength of the sintered body can be further enhanced, which is preferable.

【0011】[0011]

【作用】本発明の窒化珪素焼結体の製造方法は、窒化珪
素粉末に、焼結助剤としてのスピネル及びジルコンを所
定量配合して成形するとともに、非酸化性雰囲気中15
00〜1700℃で焼結するものである。本発明で焼結
助剤として用いたジルコン粉末は次のような特徴を有す
る。すなわち、ジルコン粉末のみからなる焼結体は、室
温から1400℃までの間でほとんどその強度が変化し
ないことが確認されている。このため、焼結助剤として
スピネルとともに添加されるジルコンは、焼結後に粒界
相として存在しても、強度低下に抵抗性があるものと考
えられる。
According to the method for producing a silicon nitride sintered body of the present invention, silicon nitride powder is mixed with a predetermined amount of spinel and zircon as a sintering aid, and the mixture is molded in a non-oxidizing atmosphere.
It is sintered at 00 to 1700 ° C. The zircon powder used as a sintering aid in the present invention has the following features. That is, it has been confirmed that the strength of a sintered body composed only of zircon powder hardly changes from room temperature to 1400 ° C. Therefore, it is considered that zircon, which is added together with spinel as a sintering aid, is resistant to strength reduction even if it exists as a grain boundary phase after sintering.

【0012】したがって、本発明方法により製造された
窒化珪素焼結体は、室温強度が高く、しかも高温での強
度低下も比較的少ない。
Therefore, the silicon nitride sintered body produced by the method of the present invention has a high room temperature strength and a relatively small decrease in strength at high temperatures.

【0013】[0013]

【実施例】以下、実施例により具体的に説明する。Si
3 4 粉末(平均粒径:0.5μ以下、α化率:92〜
97%)に、焼結助剤としてMgAl2 4 粉末(平均
粒径:0.3μm、純度:99.9%)、及びZrSi
4 粉末(平均粒径:0.5μm以下、純度:97%以
上)を表1に示す配合割合で添加し、Si3 4 製のボ
ールミルでエタノール中で均一に混合した後、乾燥して
混合粉末を得た。
EXAMPLES The present invention will be specifically described below with reference to examples. Si
3 N 4 powder (average particle size: 0.5 μ or less, α-formation ratio: 92-
97%), MgAl 2 O 4 powder (average particle size: 0.3 μm, purity: 99.9%) as a sintering aid, and ZrSi.
O 4 powder (average particle size: 0.5 μm or less, purity: 97% or more) was added in the mixing ratio shown in Table 1, and uniformly mixed in ethanol with a ball mill made of Si 3 N 4 and then dried. A mixed powder was obtained.

【0014】上記混合粉末を200kgf/cm2 の圧
力で加圧成形し、その成形体を薄ゴムにつめ、真空封入
後、CIP(Cold Isostatic Pres
s)処理にて3000kgf/cm2 の圧力で加圧し
て、所定形状(6mm×5mm×45mm)の成形体を
得た。上記成形体を表1に示す最高加熱温度で4時間、
窒素雰囲気中の炉内で焼結して、焼結体を得た。なお、
このときの昇温速度は1℃/minとした。
The above-mentioned mixed powder is pressure-molded at a pressure of 200 kgf / cm 2 , the molded body is packed in a thin rubber, vacuum-enclosed, and then CIP (Cold Isostatic Pres).
In the process (s), a pressure of 3000 kgf / cm 2 was applied to obtain a molded product having a predetermined shape (6 mm × 5 mm × 45 mm). The above-mentioned molded body was heated at the maximum heating temperature shown in Table 1 for 4 hours,
Sintering was performed in a furnace in a nitrogen atmosphere to obtain a sintered body. In addition,
The heating rate at this time was 1 ° C./min.

【0015】これらの焼結体について、室温4点曲げ強
度(JIS R 1601)、高温(1000℃)4点
曲げ強度(JIS R 1604)を各20本ずつ測定
して、平均強度を求めた。その結果を表1に示す。な
お、表1中の密度とは、n−ブタノール置換法で求めた
嵩密度を理論密度で除して得た焼結体の相対密度(%T
D)のことである。
For each of these sintered bodies, room temperature 4-point bending strength (JIS R 1601) and high temperature (1000 ° C.) 4-point bending strength (JIS R 1604) were measured for each 20 pieces, and the average strength was determined. The results are shown in Table 1. The density in Table 1 means the relative density (% T) of the sintered body obtained by dividing the bulk density obtained by the n-butanol substitution method by the theoretical density.
D).

【0016】[0016]

【表1】 表1に示す結果からも明らかなように、本実施例に係る
焼結体は、いずれも室温強度が1000MPa以上と高
く、しかも1000℃における高温強度もいずれも80
0MPa以上を確保できた。また、本実施例では、常圧
焼結でも充分な強度性向上の効果が得られた。これは、
ジルコンが焼結性の向上に貢献しているためと考えられ
る。なお、加圧下で焼結した本実施例6〜8に係る焼結
体は、さらに高強度化を図ることができ、高温強度も1
000MPa以上を確保できた。これに対し、焼結助剤
の総添加量が少なすぎる比較例1の焼結体は、緻密に焼
結しなかった。また、焼結助剤の総添加量が多すぎる比
較例2に係る焼結体は、強度が低下した。また焼結温度
が低すぎる比較例3に係る焼結体は、緻密に焼結しなか
った。また焼結温度が高すぎる比較例4に係る焼結体
は、強度が低下した。またジルコン粉末でなくZrO2
粉末、SiO2 粉末を単独で添加した比較例5に係る焼
結体は、緻密に焼結しなかった。またジルコン粉末でな
くZrO2 粉末を添加した比較例6に係る焼結体、及び
ジルコン粉末でなくSiO2 粉末を添加した比較例7に
係る焼結体も緻密に焼結しなかった。
[Table 1] As is clear from the results shown in Table 1, all of the sintered bodies according to the present examples have a high room temperature strength of 1000 MPa or more, and a high temperature strength of 1000 ° C. of 80%.
It was possible to secure 0 MPa or more. Further, in the present example, the effect of sufficiently improving the strength was obtained even by pressureless sintering. this is,
It is considered that zircon contributes to the improvement of sinterability. The sintered bodies according to Examples 6 to 8 which were sintered under pressure can be further strengthened and have a high temperature strength of 1.
000 MPa or more could be secured. On the other hand, the sintered body of Comparative Example 1 in which the total amount of the sintering aid added was too small did not sinter densely. In addition, the strength of the sintered body according to Comparative Example 2 in which the total amount of the sintering aid added was too large decreased. Further, the sintered body according to Comparative Example 3 having a too low sintering temperature did not sinter densely. The strength of the sintered body according to Comparative Example 4, which had an excessively high sintering temperature, decreased. ZrO 2 instead of zircon powder
The sintered body according to Comparative Example 5 in which the powder and the SiO 2 powder were added alone did not sinter densely. Further, the sintered body according to Comparative Example 6 in which ZrO 2 powder was added instead of zircon powder and the sintered body according to Comparative Example 7 in which SiO 2 powder was added instead of zircon powder did not sinter densely.

【0017】[0017]

【発明の効果】以上詳述したように、本発明の窒化珪素
焼結体の製造方法は、室温強度が高く、かつ高温での強
度低下の比較的少ない窒化珪素焼結体を製造することが
でき、高温下でも好適に構造部品として使用することの
できる窒化珪素焼結体を提供することが可能となる。
As described above in detail, the method for producing a silicon nitride sintered body of the present invention can produce a silicon nitride sintered body having a high room temperature strength and a relatively small decrease in strength at a high temperature. Thus, it becomes possible to provide a silicon nitride sintered body that can be suitably used as a structural component even at high temperatures.

【0018】また、本発明の製造方法は、常圧焼結によ
っても充分に焼結体の高強度性を得ることができ、生産
性が向上する。
Further, according to the manufacturing method of the present invention, the high strength of the sintered body can be sufficiently obtained even by the normal pressure sintering, and the productivity is improved.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 窒化珪素粉末85〜95重量%と、スピ
ネル(MgAl2 4 )粉末及びジルコン(ZrSiO
4 )粉末よりなる焼結助剤粉末5〜15重量%とを配合
して混合し、成形体とする成形工程と、 該成形体を非酸化性雰囲気中1500〜1700℃で焼
結して焼結体とする焼結工程とからなることを特徴とす
る窒化珪素焼結体の製造方法。
1. 85-95% by weight of silicon nitride powder, spinel (MgAl 2 O 4 ) powder and zircon (ZrSiO).
4 ) A molding step of mixing and mixing 5 to 15% by weight of a sintering aid powder consisting of powder to form a molded body, and sintering the molded body at 1500 to 1700 ° C. in a non-oxidizing atmosphere and firing. A method of manufacturing a silicon nitride sintered body, which comprises a sintering step of forming a unit.
JP3283143A 1991-10-29 1991-10-29 Method for producing silicon nitride sintered body Expired - Lifetime JP2970131B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3283143A JP2970131B2 (en) 1991-10-29 1991-10-29 Method for producing silicon nitride sintered body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3283143A JP2970131B2 (en) 1991-10-29 1991-10-29 Method for producing silicon nitride sintered body

Publications (2)

Publication Number Publication Date
JPH05117032A true JPH05117032A (en) 1993-05-14
JP2970131B2 JP2970131B2 (en) 1999-11-02

Family

ID=17661784

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2970131B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995012764A1 (en) * 1993-11-02 1995-05-11 Koyo Seiko Co., Ltd. Ball-and-roller bearing
WO2023171510A1 (en) * 2022-03-10 2023-09-14 デンカ株式会社 Ceramic sintered body, method for manufacturing same, and sintering aid powder
WO2023171511A1 (en) * 2022-03-10 2023-09-14 デンカ株式会社 Sintered ceramic object, production method therefor, and sintering-aid powder

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995012764A1 (en) * 1993-11-02 1995-05-11 Koyo Seiko Co., Ltd. Ball-and-roller bearing
US5575571A (en) * 1993-11-02 1996-11-19 Koyo Seiko Co., Ltd. Rolling bearing
WO2023171510A1 (en) * 2022-03-10 2023-09-14 デンカ株式会社 Ceramic sintered body, method for manufacturing same, and sintering aid powder
WO2023171511A1 (en) * 2022-03-10 2023-09-14 デンカ株式会社 Sintered ceramic object, production method therefor, and sintering-aid powder

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