JPH0511643Y2 - - Google Patents

Info

Publication number
JPH0511643Y2
JPH0511643Y2 JP6907885U JP6907885U JPH0511643Y2 JP H0511643 Y2 JPH0511643 Y2 JP H0511643Y2 JP 6907885 U JP6907885 U JP 6907885U JP 6907885 U JP6907885 U JP 6907885U JP H0511643 Y2 JPH0511643 Y2 JP H0511643Y2
Authority
JP
Japan
Prior art keywords
aperture
sample
electron
objective
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6907885U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61186158U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6907885U priority Critical patent/JPH0511643Y2/ja
Publication of JPS61186158U publication Critical patent/JPS61186158U/ja
Application granted granted Critical
Publication of JPH0511643Y2 publication Critical patent/JPH0511643Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP6907885U 1985-05-10 1985-05-10 Expired - Lifetime JPH0511643Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6907885U JPH0511643Y2 (OSRAM) 1985-05-10 1985-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6907885U JPH0511643Y2 (OSRAM) 1985-05-10 1985-05-10

Publications (2)

Publication Number Publication Date
JPS61186158U JPS61186158U (OSRAM) 1986-11-20
JPH0511643Y2 true JPH0511643Y2 (OSRAM) 1993-03-23

Family

ID=30604416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6907885U Expired - Lifetime JPH0511643Y2 (OSRAM) 1985-05-10 1985-05-10

Country Status (1)

Country Link
JP (1) JPH0511643Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013251088A (ja) * 2012-05-31 2013-12-12 Hitachi High-Technologies Corp 荷電粒子装置

Also Published As

Publication number Publication date
JPS61186158U (OSRAM) 1986-11-20

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