JPH0510606B2 - - Google Patents

Info

Publication number
JPH0510606B2
JPH0510606B2 JP59067359A JP6735984A JPH0510606B2 JP H0510606 B2 JPH0510606 B2 JP H0510606B2 JP 59067359 A JP59067359 A JP 59067359A JP 6735984 A JP6735984 A JP 6735984A JP H0510606 B2 JPH0510606 B2 JP H0510606B2
Authority
JP
Japan
Prior art keywords
filter
probe
vehicle
movable part
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59067359A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60211315A (ja
Inventor
Yasuo Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Obayashi Corp
Original Assignee
Obayashi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Obayashi Corp filed Critical Obayashi Corp
Priority to JP59067359A priority Critical patent/JPS60211315A/ja
Publication of JPS60211315A publication Critical patent/JPS60211315A/ja
Publication of JPH0510606B2 publication Critical patent/JPH0510606B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Navigation (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Ventilation (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
JP59067359A 1984-04-06 1984-04-06 クリ−ンル−ムの検査装置 Granted JPS60211315A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59067359A JPS60211315A (ja) 1984-04-06 1984-04-06 クリ−ンル−ムの検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59067359A JPS60211315A (ja) 1984-04-06 1984-04-06 クリ−ンル−ムの検査装置

Publications (2)

Publication Number Publication Date
JPS60211315A JPS60211315A (ja) 1985-10-23
JPH0510606B2 true JPH0510606B2 (enrdf_load_stackoverflow) 1993-02-10

Family

ID=13342736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59067359A Granted JPS60211315A (ja) 1984-04-06 1984-04-06 クリ−ンル−ムの検査装置

Country Status (1)

Country Link
JP (1) JPS60211315A (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62203017A (ja) * 1986-03-04 1987-09-07 Toshiba Eng Co Ltd 移動式室内環境監視装置
JPS62162626U (enrdf_load_stackoverflow) * 1986-04-04 1987-10-16
JPS637820A (ja) * 1986-06-27 1988-01-13 Komatsu Ltd クリ−ンル−ムの防塵フイルタ検査装置
JPS6379188A (ja) * 1986-09-23 1988-04-09 Yamatake Honeywell Co Ltd 環境測定デ−タ処理システム
JPH01128540A (ja) * 1987-11-13 1989-05-22 Nec Corp ウェハー搬送車
WO2008127310A2 (en) * 2006-11-13 2008-10-23 Raytheon Sarcos Llc Unmanned ground robotic vehicle having an alternatively extendible and retractable sensing appendage
CN105388034B (zh) * 2015-12-30 2018-06-08 东旭科技集团有限公司 基板颗粒物的取样装置和玻璃基板颗粒物的取样方法
IT201900020248A1 (it) * 2019-11-04 2021-05-04 Particle Measuring Systems S R L Dispositivo di monitoraggio mobile per aree a contaminazione controllata
US12311550B2 (en) 2020-12-31 2025-05-27 Sarcos Corp. Smart control system for a robotic device
JPWO2023162038A1 (enrdf_load_stackoverflow) * 2022-02-22 2023-08-31
US20250110011A1 (en) * 2023-09-28 2025-04-03 CertAir LLC Cleanroom certification and hepa filter scanning

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142499A (ja) * 1982-02-18 1983-08-24 株式会社東芝 移動式点検監視システム
JPS58186889U (ja) * 1982-06-08 1983-12-12 三菱電機株式会社 エア−シヤワ−室

Also Published As

Publication number Publication date
JPS60211315A (ja) 1985-10-23

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