JPH05104055A - Spinner head - Google Patents
Spinner headInfo
- Publication number
- JPH05104055A JPH05104055A JP3293919A JP29391991A JPH05104055A JP H05104055 A JPH05104055 A JP H05104055A JP 3293919 A JP3293919 A JP 3293919A JP 29391991 A JP29391991 A JP 29391991A JP H05104055 A JPH05104055 A JP H05104055A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- groove
- main body
- gas
- spinner head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、スピンコータのヘッド
部分の改良に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in the head portion of a spin coater.
【０００２】[0002]
【従来の技術】基板例えば、光ディスクの原盤、Ｍｏ膜
付ガラス基板等の上に、レジスト材や保護用樹脂液等の
コート液を均一に塗布する場合、スピンコート法が採用
されることが多い。2. Description of the Related Art A spin coating method is often employed when a coating liquid such as a resist material or a protective resin liquid is uniformly applied onto a substrate such as an optical disc master or a glass substrate with a Mo film. ..
【０００３】このスピンコート法で用いるスピンコータ
のヘッド部分（スピンナーヘッド）は、従来図５のよう
な構造をなしていた。図において、円盤状の本体１０１
の直径はコート液を塗布すべき基板１０２の直径より小
さく設計されており、本体１０１の中央にはセンター工
具１０３が嵌合する浅い孔が掘られている。一方、基板
１０２の中央にも孔が開いており、そこにセンター工具
１０３を嵌めることにより、基板１０２中心と本体１０
１中心とが合致するように基板１０２が位置決めされ
る。The head portion (spinner head) of the spin coater used in this spin coating method has conventionally been constructed as shown in FIG. In the figure, a disc-shaped main body 101
Is designed to be smaller than the diameter of the substrate 102 to which the coating liquid is applied, and a shallow hole into which the center tool 103 is fitted is formed in the center of the main body 101. On the other hand, a hole is also formed in the center of the substrate 102, and the center tool 103 is fitted into the hole so that the center of the substrate 102 and the main body 10
The substrate 102 is positioned so that it is aligned with one center.
【０００４】また、本体１０１内部には排気孔１０１ｂ
（１０１ｃは封止ビス）が形成されており、センター工
具１０３も基板１０２も真空チャックにより本体１０１
上面に固定される。円盤状の本体１０１と軸部１０１ａ
は一体に形成されていて、外部のモータ（図示せず）に
よって軸部１０１ａを回転させることにより、本体１０
１が回転する。Further, an exhaust hole 101b is provided inside the main body 101.
(101c is a sealing screw) is formed, and both the center tool 103 and the substrate 102 are vacuum chucked to the main body 101.
It is fixed on the upper surface. Disk-shaped main body 101 and shaft portion 101a
Are integrally formed, and by rotating the shaft portion 101a by an external motor (not shown), the main body 10
1 rotates.
【０００５】円盤状の上カップ１０４は、中央部に本体
１０１の外径に対応する孔を有して本体１０１を取り囲
むように配置されており、その上面側直径が基板１０２
とほぼ同径で、下面側の直径が上面側より大きくなって
いる。この上カップ１０４の上面は本体１０１上面（吸
着面）より僅かに低くなっており、上カップ１０４の内
部には上面外径側（基板１０２の外周よりは内側）に開
口する複数の通気孔１０４ａが設けられている。上カッ
プ１０４下面側には円周状の蓋１０４ｃが接合されてお
り、蓋１０４ｃには通気孔１０４ａに対応する箇所に円
周状の溝１０４ｄが掘られている。この溝１０４ｄから
は蓋１０４ｃ下面に至る通気孔１０４ｅが形成されてお
り、通気孔１０４ｅと気体導入用のチューブ（図示せ
ず）とはジョイント１０４ｂを介して接合されている。The disc-shaped upper cup 104 has a hole corresponding to the outer diameter of the main body 101 in the central portion and is arranged so as to surround the main body 101.
The diameter of the lower surface is larger than that of the upper surface. The upper surface of the upper cup 104 is slightly lower than the upper surface (suction surface) of the main body 101, and inside the upper cup 104, there are a plurality of vent holes 104a that open to the outer diameter side of the upper surface (inward of the outer periphery of the substrate 102). Is provided. A circumferential lid 104c is joined to the lower surface side of the upper cup 104, and a circumferential groove 104d is dug in the lid 104c at a position corresponding to the ventilation hole 104a. A ventilation hole 104e is formed from the groove 104d to the lower surface of the lid 104c, and the ventilation hole 104e and a gas introducing tube (not shown) are joined via a joint 104b.
【０００６】上記のようなスピンヘッドを用いてスピン
コートを行なうには、基板１０２を本体１０１上に固定
してコート液を基板の内側から外側又はその逆に垂らし
ながら、基板１０１を回転させる。このとき、ジョイン
ト１０４ｂを介して気体を送りこむと、導入された気体
は溝１０４ｄに溜まり、上カップ１０４に設けられた複
数の通気孔１０４ａから噴き出す。これにより、余分な
コート液の基板１０１裏面への回り込みが減少する。To perform spin coating using the above spin head, the substrate 102 is fixed on the main body 101, and the substrate 101 is rotated while the coating liquid is dripped from the inside of the substrate to the outside or vice versa. At this time, when the gas is sent through the joint 104b, the introduced gas is collected in the groove 104d and is ejected from the plurality of ventilation holes 104a provided in the upper cup 104. As a result, the excess coating liquid is prevented from flowing around to the back surface of the substrate 101.
【０００７】[0007]
【発明が解決しようとする課題】しかし、上記のような
従来のスピンナーヘッドにおいては、上カップの通気孔
から気体を噴出させたとしてもコート液の基板端面や裏
面への回り込みを十分に防ぐことができず、特に、基板
端面へのコート液の付着についてはほとんど効果がなか
った。このため、従来のスピンナーヘッドでは、基板端
面や裏面にもコート膜が形成されてしまい、そのコート
膜が後の工程で剥がれてごみとなり、このごみが例えば
フォーカシングエラー、トラッキングエラー、シーク
（ビームスポットと所定の記録位置を合致させる動作）
エラー等を発生させるということが問題となっていた。However, in the conventional spinner head as described above, even if the gas is ejected from the vent hole of the upper cup, it is possible to sufficiently prevent the coating liquid from wrapping around the substrate end surface or the back surface. However, there was almost no effect on the adhesion of the coating liquid to the end face of the substrate. For this reason, in the conventional spinner head, a coating film is also formed on the end surface and the back surface of the substrate, and the coating film is peeled off in a later process to generate dust, which is, for example, a focusing error, a tracking error, or a seek (beam spot). And the operation to match the predetermined recording position)
It has been a problem to generate an error.
【０００８】この発明は、かかる点に鑑みてなされたも
のであり、コート液が基板の外周端面や裏面に回り込む
ことのないスピンナーヘッドを提供することを目的とす
るものである。The present invention has been made in view of the above points, and an object of the present invention is to provide a spinner head in which the coating liquid does not wrap around the outer peripheral end surface or the back surface of the substrate.
【０００９】[0009]
【課題を解決するための手段】本発明のスピンナーヘッ
ドは、上記の課題を達成するために、塗布すべき基板の
外径より大きな外径を有し、前記基板と一体に回転する
円盤状の本体と、該本体周辺部の前記基板外周にほぼ相
当する位置に設けられた円周状の溝と、前記本体内部を
通って前記溝内に開口した通気孔と、前記溝の外側に設
けられた円周状の突条とを備えたものである。In order to achieve the above-mentioned object, a spinner head of the present invention has a disk-like shape having an outer diameter larger than that of a substrate to be coated and rotating integrally with the substrate. The main body, a circumferential groove provided at a position substantially corresponding to the outer periphery of the substrate in the peripheral portion of the main body, a vent hole that is opened through the inside of the main body into the groove, and is provided outside the groove. And a circular protrusion.
【００１０】[0010]
【作用】本発明のスピンナーヘッドにおいては、基板外
周にほぼ相当する位置に設けられた溝に開口した通気孔
からごみを含まない清浄な気体（例えば空気やＮ2 等）
を吹き出させることにより、余分なコート液が基板外周
端面や裏面に回りこむのを防止することが可能である。
特に、円周状の溝があることで、複数の開口（通気孔）
から気体を吹き出させても溝が溜りとなって、溝全体、
即ち、基板の全周から気体が吹き出すことになり、裏面
に回り込もうとするコート液が確実に吹き飛ばされる。
また、溝の外側に突条があることで、基板端面と突条と
の間に急速な気体の流れが作られ、基板端面に回り込み
付着しようとするコート液が吹き飛ばされる。In the spinner head of the present invention, a clean gas (for example, air, N 2 etc.) containing no dust is obtained from the vent holes opened in the grooves provided at positions substantially corresponding to the outer circumference of the substrate.
By blowing out, it is possible to prevent the excess coating liquid from flowing around to the outer peripheral end surface and the back surface of the substrate.
In particular, the presence of a circumferential groove allows multiple openings (vents)
Even if the gas is blown out from the
That is, the gas is blown out from the entire circumference of the substrate, and the coating liquid that tries to get around to the back surface is surely blown off.
Further, since there is a ridge on the outer side of the groove, a rapid gas flow is created between the substrate end face and the ridge, and the coating liquid that wraps around the substrate end face and tends to adhere is blown off.
【００１１】また、本発明では、従来、本体とは別に設
けていたコート液吹き飛ばしのための手段を本体に一体
化されており、基板を載置する本体の外径が基板外径よ
り大きくなっているので、吸着面積が従来に比べて増大
し、基板がより確実に固定される。基板が安定して固定
されることにより、塗布むらも少なくなる。Further, in the present invention, the means for blowing off the coating liquid, which is conventionally provided separately from the main body, is integrated into the main body, and the outer diameter of the main body on which the substrate is placed becomes larger than the outer diameter of the substrate. Therefore, the adsorption area is increased as compared with the conventional case, and the substrate is more reliably fixed. Since the substrate is stably fixed, uneven coating is reduced.
【００１２】[0012]
【実施例】以下図面を参照して本発明の実施例を説明す
る。図１は本実施例によるスピンナーヘッドの平面図、
図２は図１のＡＡ’断面図である。図において、本体１
は外径は３０７〜３１０ｍｍ，板厚１０〜２０ｍｍの円
盤形状をなしており、中心には軸部１ａが一体に設けら
れている。軸部の外径は２５〜５０ｍｍ，内径は２０〜
４５ｍｍ、外径の長さは２５〜６０ｍｍ，内径の深さは
２０〜５５ｍｍとした。軸部１ａは、外部のモータ（図
示せず）と接続されており、モータによって軸部１ａを
回転させることにより円盤状の本体１も回転するように
なっている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view of a spinner head according to this embodiment,
2 is a sectional view taken along the line AA ′ of FIG. In the figure, the main body 1
Has a disk shape with an outer diameter of 307 to 310 mm and a plate thickness of 10 to 20 mm, and a shaft portion 1a is integrally provided at the center. The shaft has an outer diameter of 25 to 50 mm and an inner diameter of 20 to
The length of the outer diameter was 45 mm, the length of the outer diameter was 25 to 60 mm, and the depth of the inner diameter was 20 to 55 mm. The shaft portion 1a is connected to an external motor (not shown), and the disc-shaped main body 1 is also rotated by rotating the shaft portion 1a by the motor.
【００１３】本体の中央部には、後述するセンター治具
を嵌合するための浅い孔が掘られており（１ｆは孔底面
にあるＯリング）、嵌合孔底面とその外側には吸着用の
溝１ｈが設けられている。この溝１ｈには、本体１内部
を通って外部の真空ポンプ（図示せず）に連通している
排気孔１ｂが開口している。A shallow hole for fitting a center jig, which will be described later, is dug in the center of the main body (1f is an O-ring on the bottom surface of the hole), and the bottom surface of the fitting hole and the outside thereof are for adsorption. Groove 1h is provided. An exhaust hole 1b, which communicates with an external vacuum pump (not shown) through the inside of the main body 1, is opened in the groove 1h.
【００１４】吸着用の溝１ｈの外側の基板外周にほぼ相
当する位置には、円周状の溝１ｅが設けられており、溝
１ｅ内には本体１内を通って外部のボンベ等と連通する
通気孔１ｃが多数開口している。溝１ｅの寸法は、内径
３００〜３０５ｍｍ，外径３０６〜３０９ｍｍ，基板吸
着面１ｇからの深さ１〜３ｍｍとし、通気孔の孔径は１
〜６ｍｍとした。更に、溝１ｅの外側には、同じく円周
状の突状１ｄが設けられており、突条の高さは基板吸着
面１ｇより０．５〜１．２ｍｍとなっている。A circumferential groove 1e is provided at a position substantially outside the suction groove 1h, which corresponds to the outer circumference of the substrate. The groove 1e communicates with an external cylinder or the like through the main body 1 inside. A large number of vent holes 1c are opened. The groove 1e has an inner diameter of 300 to 305 mm, an outer diameter of 306 to 309 mm, and a depth of 1 to 3 mm from the substrate suction surface 1g.
-6 mm. Further, a circumferential projection 1d is also provided outside the groove 1e, and the height of the projection is 0.5 to 1.2 mm from the substrate suction surface 1g.
【００１５】次に、上述したスピンナーヘッドの動作を
図３，図４を参照して説明する。なお、図４は図３のＢ
部分を拡大した拡大断面図である。まず、塗布すべき基
板３の孔にセンター治具２を嵌め込み（センター治具２
の鍔部に基板２を載せる）、センター治具２の把手部を
持って本体１中央部の孔にセンター治具２の鍔部を嵌合
する。これにより、基板３と本体１の中心が合致するこ
とになる。この状態で排気孔１ｃから空気を排出してセ
ンター治具３及び基板２を本体１に吸着固定し、コート
液を基板２の内側から外側又はその逆に垂らしながら
（もちろん一箇所に滴下しても良い）、本体１（即ち基
板２）を回転させる。これにより、コート液は遠心力に
よって均一に広がり、塗膜が形成される。Next, the operation of the above spinner head will be described with reference to FIGS. In addition, FIG. 4 shows B of FIG.
It is the expanded sectional view which expanded the part. First, the center jig 2 is fitted into the hole of the substrate 3 to be coated (center jig 2
The substrate 2 is placed on the collar portion of the center jig 2), and the collar portion of the center jig 2 is fitted into the hole in the central portion of the main body 1 while holding the grip portion of the center jig 2. As a result, the centers of the substrate 3 and the main body 1 are aligned with each other. In this state, air is exhausted from the exhaust hole 1c to adsorb and fix the center jig 3 and the substrate 2 to the main body 1, while the coating liquid is dripping from the inside of the substrate 2 to the outside or vice versa (of course, drop it on one place. Also, the main body 1 (that is, the substrate 2) is rotated. As a result, the coating liquid is evenly spread by the centrifugal force to form a coating film.
【００１６】このとき、通気孔１ｃにはボンベ（図示せ
ず）からごみのない清浄な気体（空気やＮ2 等）を導入
する。導入された気体は軸部１ａ内部を通って溝１ｅ内
の開口から吹き出し、溝１ｅ内に溜まる。溝１ｅ内に
は、図４に示されるように、基板２端部が突き出してお
り、溝１ｅの外側にある突条１ｄと基板２端面との間に
狭い隙間ができているので、溝１ｅ内に溜った気体はそ
の隙間から吹き出すことになる。このように気体が基板
２端面に沿って吹き出すことにより、遠心力によって振
り払われる余分なコート液が基板２の外周方向に流れる
ことになり、基板２の外周端面や裏面に回り込まなくな
る。At this time, a clean gas (air, N 2 or the like) free from dust is introduced into the ventilation hole 1c from a cylinder (not shown). The introduced gas is blown out from the opening in the groove 1e through the inside of the shaft portion 1a and is collected in the groove 1e. As shown in FIG. 4, the end portion of the substrate 2 projects into the groove 1e, and a narrow gap is formed between the protrusion 1d outside the groove 1e and the end surface of the substrate 2 so that the groove 1e is formed. The gas accumulated inside will blow out from the gap. As the gas is blown out along the end surface of the substrate 2 in this manner, the excess coating liquid that is shaken off by the centrifugal force flows in the outer peripheral direction of the substrate 2 and does not flow around to the outer peripheral end surface or the back surface of the substrate 2.
【００１７】この際、突条１ｄの高さが基板２上面より
高いと、気体の流れが基板２側に向かい基板２端部の塗
布状態に影響することが考えられるので、突条１ｄの高
さは基板２上面とほぼ同じかわずかに低い程度とするこ
とが好ましい。また、通気孔１ｃに導入する気体の流量
は、コート液の粘度や基板２の回転数等に応じて、コー
ト液の回り込みを確実に阻止できるように適宜調節する
と良い。At this time, if the height of the ridge 1d is higher than the upper surface of the substrate 2, it is considered that the gas flow is directed to the substrate 2 side and influences the coating state at the end of the substrate 2, so that the height of the ridge 1d is high. It is preferable that the thickness is approximately the same as or slightly lower than the upper surface of the substrate 2. Further, the flow rate of the gas introduced into the ventilation hole 1c may be appropriately adjusted depending on the viscosity of the coating liquid, the rotation speed of the substrate 2, and the like so as to reliably prevent the coating liquid from wrapping around.
【００１８】上記のようにしてコート液を塗布した基板
を次の工程（乾燥工程等）に移動する際には、センター
治具３に基板を嵌めたままセンター治具２の把手部を持
って運べば良い。このセンター治具３（実願昭２−２２
３６２号に詳しい）は必ずしも必要なものではなく、本
体１中央部に突部を設けてそこに基板２を嵌め込むよう
にしても良いが、基板２の持ち運びの点では本実施例の
ようにセンター治具３を用いる構成とすることが好まし
い。When the substrate coated with the coating liquid as described above is moved to the next step (drying step, etc.), hold the handle portion of the center jig 2 while the substrate is fitted in the center jig 3. You can carry it. This Center Jig 3 (Actual Application Sho 2-22)
(Detailed in No. 362) is not always necessary, and a protrusion may be provided in the central portion of the main body 1 and the substrate 2 may be fitted therein, but in terms of portability of the substrate 2, as in the present embodiment, the central treatment is performed. It is preferable to use the tool 3.
【００１９】なお、上記の実施例では、通気孔の開口形
状は円形となっており、溝内に複数の開口が設けられて
いるが、開口形状は上記のものに限定されるものではな
く、例えば、溝に沿ってスリット状の開口を設けても良
い。また、基板を吸着する手段についても、必ずしも真
空吸着でなくとも良く、場合によっては粘着テープ等を
用いても良い。In the above embodiment, the vent hole has a circular opening shape and a plurality of openings are provided in the groove, but the opening shape is not limited to the above. For example, a slit-shaped opening may be provided along the groove. Also, the means for sucking the substrate is not necessarily vacuum suction, and an adhesive tape or the like may be used depending on the case.
【００２０】[0020]
【発明の効果】以上のように、本発明においては、基板
の外周位置に相当する箇所に円周状の溝を設けるととも
に、その外側に円周状の突条を設けて、基板外周端面と
突条の間の隙間から気体を吹き出させる構成としている
ので、基板の外周端面や裏面に余分なコート液が回り込
むことがない。従って、不要なコート膜の剥離に起因す
るごみの発生が防止され、ごみによるフォーカンシング
エラー、トラッキングエラー、シークエラー等の問題が
解消される。また、本発明のスピンナーヘッドは基板を
載置する本体が基板外径より大きくなっているので、基
板が安定的に固定されることになり、塗布むらを低減す
る上でも有利である。As described above, in the present invention, a circumferential groove is provided at a position corresponding to the outer peripheral position of the substrate, and a circumferential ridge is provided on the outer side of the groove so as to form the outer circumferential end surface of the substrate. Since the gas is blown out from the gap between the protrusions, the excess coating liquid does not flow around the outer peripheral end surface and the back surface of the substrate. Therefore, generation of dust due to unnecessary peeling of the coat film is prevented, and problems such as focusing error, tracking error, and seek error due to dust are eliminated. Further, in the spinner head of the present invention, since the main body on which the substrate is placed is larger than the outer diameter of the substrate, the substrate is stably fixed, which is also advantageous in reducing uneven coating.
【図１】本発明実施例によるスピンナーヘッドの平面図
である。FIG. 1 is a plan view of a spinner head according to an embodiment of the present invention.
【図２】図１のスピンナーヘッドのＡＡ’断面図であ
る。2 is a cross-sectional view of the spinner head of FIG. 1 taken along AA '.
【図３】本発明実施例によるスピンナーヘッドの動作を
説明するための断面図である。FIG. 3 is a sectional view for explaining the operation of the spinner head according to the embodiment of the present invention.
【図４】本発明実施例によるスピンナーヘッドの要部拡
大断面図である。FIG. 4 is an enlarged sectional view of a main part of a spinner head according to an embodiment of the present invention.
【図５】従来のスピンナーヘッドの構成を示す断面図で
ある。FIG. 5 is a cross-sectional view showing a configuration of a conventional spinner head.
１ 本体 １ａ 軸部 １ｂ 排気孔 １ｃ 通気孔 １ｄ 突条 １ｅ 溝 １ｆ Ｏリング １ｇ 吸着面 ２ 基板 ３ センター治具 1 Main body 1a Shaft part 1b Exhaust hole 1c Vent hole 1d Projection 1e Groove 1f O-ring 1g Adsorption surface 2 Substrate 3 Center jig
Claims (1)
有し、前記基板と一体に回転する円盤状の本体と、該本
体周辺部の前記基板外周にほぼ相当する位置に設けられ
た円周状の溝と、前記本体内部を通って前記溝内に開口
した通気孔と、前記溝の外側に設けられた円周状の突条
とを備えたことを特徴とするスピンナーヘッド。1. A disk-shaped main body having an outer diameter larger than that of a substrate to be coated and rotating integrally with the substrate, and provided at a position substantially corresponding to the outer periphery of the substrate in the peripheral portion of the main body. A spinner head comprising: a circumferential groove; a vent hole that passes through the inside of the main body and opens into the groove; and a circumferential projection provided outside the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3293919A JPH05104055A (en) | 1991-10-15 | 1991-10-15 | Spinner head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3293919A JPH05104055A (en) | 1991-10-15 | 1991-10-15 | Spinner head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05104055A true JPH05104055A (en) | 1993-04-27 |
Family
ID=17800861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3293919A Pending JPH05104055A (en) | 1991-10-15 | 1991-10-15 | Spinner head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05104055A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09232206A (en) * | 1996-02-22 | 1997-09-05 | Hitachi Ltd | Coating apparatus |
| JP2001212492A (en) * | 2000-01-31 | 2001-08-07 | Shin Sti Technology Kk | Spin coater |
| JP2007044669A (en) * | 2005-08-12 | 2007-02-22 | Dainippon Printing Co Ltd | Method and apparatus for applying coating liquid |
| JP2007253017A (en) * | 2006-03-22 | 2007-10-04 | Dainippon Printing Co Ltd | Coating apparatus and base material supporting-base |
| JP2008034768A (en) * | 2006-08-01 | 2008-02-14 | Tokyo Electron Ltd | Device and method for thin film elimination |
| KR100853927B1 (en) * | 2001-04-17 | 2008-08-25 | 도쿄엘렉트론가부시키가이샤 | Apparatus for forming coating film and spin chuck |
-
1991
- 1991-10-15 JP JP3293919A patent/JPH05104055A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09232206A (en) * | 1996-02-22 | 1997-09-05 | Hitachi Ltd | Coating apparatus |
| JP2001212492A (en) * | 2000-01-31 | 2001-08-07 | Shin Sti Technology Kk | Spin coater |
| KR100853927B1 (en) * | 2001-04-17 | 2008-08-25 | 도쿄엘렉트론가부시키가이샤 | Apparatus for forming coating film and spin chuck |
| JP2007044669A (en) * | 2005-08-12 | 2007-02-22 | Dainippon Printing Co Ltd | Method and apparatus for applying coating liquid |
| JP4679298B2 (en) * | 2005-08-12 | 2011-04-27 | 大日本印刷株式会社 | Coating equipment |
| JP2007253017A (en) * | 2006-03-22 | 2007-10-04 | Dainippon Printing Co Ltd | Coating apparatus and base material supporting-base |
| JP2008034768A (en) * | 2006-08-01 | 2008-02-14 | Tokyo Electron Ltd | Device and method for thin film elimination |
| US8016976B2 (en) | 2006-08-01 | 2011-09-13 | Tokyo Electron Limited | Film removing device and film removing method |
| US8343284B2 (en) | 2006-08-01 | 2013-01-01 | Tokyo Electron Limited | Film removing device and film removing method |
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