JP3461068B2 - Rotating cup type liquid supply device - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to SOG (Spin-On-Gl).
ass: A solution in which a silicon compound is dissolved in an organic solvent, and a rotary cup for forming a coating film such as a silicon oxide film formed by coating and baking this solution on the surface of a plate-shaped object to be processed such as a glass substrate. Type liquid supply device.

[0002]

2. Description of the Related Art An inner cup, which is rotated by a spinner, is arranged in an outer cup, and a rectifier facing the surface of a plate-shaped object set in the inner cup is placed on a lower surface of a lid that closes an upper opening of the inner cup. As an improvement of the rotary cup type liquid supply device in which a plate is attached, the present applicant has proposed a structure in which a scattering prevention ring is attached to the inner peripheral surface of the inner cup (Japanese Patent Laid-Open No. 341367/1992). Gazette).

Further, an annular spacer is provided on the inner bottom surface of the inner cup, and a small space surrounding the plate-shaped object is formed between the annular spacer and the rectifying plate. The annular spacer also serves as an air vent and a drain vent. A structure having holes is proposed (JP-A-6-170315).

[0004]

[Patent Document 1] Japanese Patent Application Laid-Open No. 4-34136
In the case of Japanese Unexamined Patent Publication No. 7, although the cleaning solution can be prevented from scattering by the scattering prevention ring, the gap between the plate-shaped object to be processed and the inner peripheral surface of the inner cup is large, and turbulent flow easily occurs to cause pressure fluctuation. It occurs and cannot sufficiently prevent scattering.

Further, in the case of Japanese Patent Laid-Open No. 6-170315, since the inner cup is rotated in a state where the plate-like object to be processed is housed in the small space, turbulent flow and pressure fluctuations occur in the small space. It is possible to suppress and suppress the spread of the coating liquid applied on the plate-shaped object. However, since a hole that serves both as an air vent and a drain vent is formed in the annular spacer, maintenance such as cleaning is troublesome.

Further, none of the prior arts can effectively deal with the case where the dimension of the plate-like object is changed,
In particular, it is not possible to sufficiently follow the change in the dimensions of a rectangular object to be processed such as a glass substrate because it is indispensable to replace parts of the device.

[0007]

In order to solve the above problems, a rotary cup type liquid supply apparatus according to the present invention is provided with an inner cup which is rotated by a spinner in an outer cup, and a plate-shaped cover is provided at the center of the inner cup. A holding means for holding the processed material is provided, and the holding means is
It is exposed inside the inner cup and the plate-shaped treatment
Equipped with board support pins to prevent bending of physical objects
A tray surrounding the plate-shaped object was fixedly mounted on the inner upper surface of the inner cup.

Here, a cover having an opening slightly larger than the plate-like object to be processed is detachably provided on the upper surface of the tray, or the tray has a substantially quadrangular shape in plan view, It is possible to adopt a configuration in which the drain guide tube is led out from each corner in parallel to the preceding side with reference to the rotation direction of the tray.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 is a longitudinal sectional view of a rotary cup type liquid supply device according to the present invention, FIG. 2 is a plan view of the rotary cup type liquid supply device, and FIG. 3 is an exploded view of a main part of the rotary cup type liquid supply device. It is a perspective view.

In the rotary cup type liquid supply apparatus 1, an inner cup 3 is arranged in an outer cup 2 fixed to a base or the like, and the inner cup 3 is rotated by a spinner 4 penetrating the outer cup 2. .

The inner cup 3 has a drain recovery passage 3a formed at the innermost outermost portion thereof, and has a plate-shaped object to be processed as a holding means for holding a plate-shaped object W such as a glass substrate or a semiconductor wafer in the central portion. The vacuum chuck 5 provided with the substrate support pins 6 for preventing the deflection of W is arranged. still,
Although the chuck 5 has a circular shape in the illustrated example, it may have a rectangular shape. Further, in the illustrated example, a vacuum chuck is used as a holding means for holding the plate-shaped object W, but the holding means is not limited to this, and a holding device such as a mechanical chuck that can fix the plate-shaped object W. Any means can be used.

A tray 7 is fixed on the inner cup 3. The tray 7 has a substantially quadrangular outer shape, an opening 8 is formed in the center, an eave-shaped wall portion 9 that is bent inward is provided in the peripheral portion, and the drain guide is provided from each corner of the tray 7. The tube 10 has been led out. The direction in which the drain guide tube 10 is led out is parallel to the leading side with respect to the rotation direction of the tray. As an example, the lead-out direction of the drain guide tube 10a and the side 7a of the tray 7 are parallel to each other.

A cover 11 is provided on the upper surface of the tray 7.
Is said to be removable. The cover 11 is fixed to the tray 7 with a screw or other locking tool, and an opening 11a slightly larger than the plate-shaped object W is formed in the central portion.
If the dimensions of the plate-shaped object W to be processed are different,
Select and replace the cover that has an aperture of the appropriate size. The shape of the opening 11a is not limited to a rectangular shape and may be a circular shape. The outer diameter shape of the cover 11 is not limited to the circular shape that matches the inner diameter of the inner cup 3, and may be a rectangular shape that matches the outer diameter shape of the tray 7 as shown in FIG. 4, for example.

On the other hand, the inner cup 3 and the outer cup
Linear movement above the flop 2, rotational movement, vertical movement or arm 12 that can these synthesized motion faces, the arm 1
A shaft 13 extending downward is attached to the tip of the shaft 2.
3, a nozzle hole 14 is bored, and the nozzle hole 14 is connected to a nitrogen gas supply source and a cleaning liquid supply source via a joint and a hose passing through the inside of the arm 12.

Further, a boss portion 15 is rotatably fitted to the shaft 13 via a bearing and a magnetic seal, and the disc-like lid body 16 for closing the upper surface opening of the inner cup 3 in the boss portion 15. A rectifying plate 17 for preventing turbulent flow in the inner cup 3 is attached to the lower surface of the lid 16. The rectifying plate 17 is slightly larger than the glass substrate W and has a similar shape or a circular shape. Also, the lid 16
A lid 19 that closes the upper opening of the outer cup 2 is fixed to the lower surface of the tip of the upper arm 12.

In the above, in order to uniformly apply the resist solution or the like to the surface of the plate-shaped object to be processed W such as a glass substrate, an opening 11a having a size corresponding to the plate-shaped object to be processed W is previously formed on the upper surface of the tray 7. The cover 11 which it has is fixed.

In this state, the upper surfaces of the outer cup 2 and the inner cup 3 are opened, the plate-shaped object W is transferred onto the vacuum chuck 5 and suction-fixed, and then the surface of the plate-shaped object W is ejected from the nozzle. After dropping the resist solution etc.,
Arm 12 on outer cup 2 and inner cup 3
Is rotated to expose the lids 16 and 19.

Then, by lowering the arm 12, the upper surface of the inner cup 3 is closed by the lid body 16, and the lid body 19 is closed.
If the upper opening of the outer cup 2 is closed by
The chuck 5 and the inner cup 3 are integrally rotated by a spinner, and the resist solution or the like is uniformly diffused and coated on the surface of the plate-shaped object W by a centrifugal force.

The resist solution or the like scattered from the surface of the plate-shaped object W collects on the inside of the wall of the tray 7 by centrifugal force, propagates along the inside of the wall in the rotation direction, and from the drain guide tube 10. It is discharged to the drain recovery passage 3a of the inner cup. Then, the discharged drain is collected by the suction pipe 20 or the like after opening the lid.

In the above process, since the inner cup 3 is in a depressurized state, if the plate-shaped object W is taken out with the lid open as it is, the air in the inner cup is disturbed and the resist solution is spotted. There is a possibility that it will adhere to the surface of the glass substrate W. Therefore, in order to take out the plate-shaped object W to which the resist solution or the like is uniformly applied, first, nitrogen gas or the like is introduced into the space between the lid body 16 and the current plate 17 through the nozzle to release the depressurized state. To do.

[0021]

As described above, according to the present invention,
A holding means for holding a plate-shaped object to be processed is provided at the center of the inner cup of the rotary cup type liquid supply device.
, The while exposed to the inside of the inner cup
Equipped with board support pins to prevent bending of plate-shaped objects
Moreover, by fixing the tray surrounding the plate-shaped object on the inner upper surface of the inner cup, the coating liquid or the like from the plate-shaped object can be received at a closer position, and the scattering is effectively performed. Can be prevented.

Further, by providing a detachable cover having an opening slightly larger than the plate-like object to be treated on the upper surface of the tray, the scattering of the coating liquid can be prevented more effectively, and
It is possible to replace the cover with an opening size that matches the size of the plate-shaped object.

Further, in the case where the shape of the tray is a quadrangle adapted to the rectangular object, the effect can be obtained by deriving the drain guide tube from each corner in parallel with the preceding side on the basis of the rotation direction of the tray. The coating liquid or the like scattered from the surface of the object to be treated can be discharged to the drain groove or the like.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a rotary cup type liquid supply device according to the present invention.

FIG. 2 is a plan view of the rotary cup type liquid supply device.

FIG. 3 is an exploded perspective view of a main part of the rotary cup type liquid supply device.

FIG. 4 is a view similar to FIG. 3 showing another embodiment.

[Explanation of symbols]

1 ... Rotating cup type liquid supply device, 2 ... Outer cup,
3 ... inner cup, 4 ... spinner, 5 ... vacuum chuck, 6 ... substrate support pin, 7 ... tray, 8 ... tray opening, 9 ... tray wall, 10 ... drain guide tube, 11
... cover, 11a ... opening of cover, W ... plate-shaped object to be processed.

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Koichi Nagasawa, 150 Nakamaruko, Nakahara-ku, Kawasaki-shi, Kanagawa Tokyo Ohka Kogyo Co., Ltd. (56) References JP-A-5-169003 (JP, A) JP-A-6- 170315 (JP, A) JP-A-4-74564 (JP, A) JP-A-4-66159 (JP, A) Actually open flat 6-39165 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB name) B05C 11/08 G03F 7/16 H01L 21/027 H01L 21/31 H01L 21/316

Claims (3)

(57) [Claims] 1. An inner cup, which is rotated by a spinner, is provided in the outer cup, and a drain recovery passage is formed in an outermost portion inside the inner cup.
In addition, the plate-shaped workpiece is enclosed on the inner top surface of the inner cup.
The tray is fixed, and the tray is
Holding means such as a vacuum chuck faces the tray.
A rotary cup type liquid supply device, characterized in that the holding means is provided with a substrate support pin for preventing the plate-shaped workpiece from bending. 2. The rotary cup type liquid supply device according to claim 1, wherein a cover is detachably provided on the upper surface of the tray, and the cover is formed with an opening slightly larger than a plate-shaped object to be processed. A rotating cup type liquid supply device. 3. The rotary cup type liquid supply device according to claim 1, wherein the shape of the tray is substantially quadrangular in a plan view, and the drain guide tube is led out from each corner, and the drain guide tube A rotating cup type liquid supply device characterized in that the pulling-out direction is parallel to the preceding side with respect to the rotating direction of the tray.