JPH0510192B2 - - Google Patents

Info

Publication number
JPH0510192B2
JPH0510192B2 JP61041088A JP4108886A JPH0510192B2 JP H0510192 B2 JPH0510192 B2 JP H0510192B2 JP 61041088 A JP61041088 A JP 61041088A JP 4108886 A JP4108886 A JP 4108886A JP H0510192 B2 JPH0510192 B2 JP H0510192B2
Authority
JP
Japan
Prior art keywords
signal
electron
backscattered
inputs
secondary electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61041088A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62197284A (ja
Inventor
Seiichi Tsukamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP61041088A priority Critical patent/JPS62197284A/ja
Publication of JPS62197284A publication Critical patent/JPS62197284A/ja
Publication of JPH0510192B2 publication Critical patent/JPH0510192B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP61041088A 1986-02-25 1986-02-25 電子ビ−ム溶接機 Granted JPS62197284A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61041088A JPS62197284A (ja) 1986-02-25 1986-02-25 電子ビ−ム溶接機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61041088A JPS62197284A (ja) 1986-02-25 1986-02-25 電子ビ−ム溶接機

Publications (2)

Publication Number Publication Date
JPS62197284A JPS62197284A (ja) 1987-08-31
JPH0510192B2 true JPH0510192B2 (https=) 1993-02-09

Family

ID=12598715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61041088A Granted JPS62197284A (ja) 1986-02-25 1986-02-25 電子ビ−ム溶接機

Country Status (1)

Country Link
JP (1) JPS62197284A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2810137B2 (ja) * 1989-08-21 1998-10-15 株式会社日立製作所 イオンビーム加工方法

Also Published As

Publication number Publication date
JPS62197284A (ja) 1987-08-31

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