JPS62197284A - 電子ビ−ム溶接機 - Google Patents

電子ビ−ム溶接機

Info

Publication number
JPS62197284A
JPS62197284A JP61041088A JP4108886A JPS62197284A JP S62197284 A JPS62197284 A JP S62197284A JP 61041088 A JP61041088 A JP 61041088A JP 4108886 A JP4108886 A JP 4108886A JP S62197284 A JPS62197284 A JP S62197284A
Authority
JP
Japan
Prior art keywords
signal
electron
secondary electron
slicer
deflection scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61041088A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510192B2 (https=
Inventor
Seiichi Tsukamoto
塚本　清一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61041088A priority Critical patent/JPS62197284A/ja
Publication of JPS62197284A publication Critical patent/JPS62197284A/ja
Publication of JPH0510192B2 publication Critical patent/JPH0510192B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP61041088A 1986-02-25 1986-02-25 電子ビ−ム溶接機 Granted JPS62197284A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61041088A JPS62197284A (ja) 1986-02-25 1986-02-25 電子ビ−ム溶接機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61041088A JPS62197284A (ja) 1986-02-25 1986-02-25 電子ビ−ム溶接機

Publications (2)

Publication Number Publication Date
JPS62197284A true JPS62197284A (ja) 1987-08-31
JPH0510192B2 JPH0510192B2 (https=) 1993-02-09

Family

ID=12598715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61041088A Granted JPS62197284A (ja) 1986-02-25 1986-02-25 電子ビ−ム溶接機

Country Status (1)

Country Link
JP (1) JPS62197284A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0377255A (ja) * 1989-08-21 1991-04-02 Hitachi Ltd イオンビーム加工方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0377255A (ja) * 1989-08-21 1991-04-02 Hitachi Ltd イオンビーム加工方法

Also Published As

Publication number Publication date
JPH0510192B2 (https=) 1993-02-09

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