JPH0499051A - Film carrier mounting structure - Google Patents

Film carrier mounting structure

Info

Publication number
JPH0499051A
JPH0499051A JP2208598A JP20859890A JPH0499051A JP H0499051 A JPH0499051 A JP H0499051A JP 2208598 A JP2208598 A JP 2208598A JP 20859890 A JP20859890 A JP 20859890A JP H0499051 A JPH0499051 A JP H0499051A
Authority
JP
Japan
Prior art keywords
metal foil
semiconductor chip
resin
substrate
film carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2208598A
Other languages
Japanese (ja)
Other versions
JP2861322B2 (en
Inventor
Tsuneharu Katada
片田 恒春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2208598A priority Critical patent/JP2861322B2/en
Publication of JPH0499051A publication Critical patent/JPH0499051A/en
Application granted granted Critical
Publication of JP2861322B2 publication Critical patent/JP2861322B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation

Landscapes

  • Wire Bonding (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To make it possible to enhance easily a heat dissipation effect and to dispense with heat dissipation fins as well by a method wherein a surface metal foil part having an area at least wider than the occupation area of a semiconductor chip is provided in the surface of a substrate, is connected to an inner metal foil and the space between the film semiconductor chip and the surface metal foil part is filled with a high-heat conduction resin. CONSTITUTION:Heat generated in a semiconductor chip 10 is conducted to a surface conductor 21 of a substrate 17 via a surface protective resin 15 on the chip 10 and a high-heat conduction resin 19. The heat is further conducted to an inner metal film 23 via through holes 22a to 22d and is dissipated by the foil 23 having a remarkedly large area. A heat dissipation effect following a third path, that is, the path of the resin 15 on the chip 10, the resin 19, the conductor 21, the holes 22a and 22d and the foil 23 is remarkedly large compared to that following other paths. In particular, the effect is remarkable by making thin the resin 15 on the chip 10 and the resin 19.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は電子機器の半導体装に使用するフィルムキャリ
ア実装構造体に関し、とくに半導体チップの放熱構造の
改良に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a film carrier mounting structure used in a semiconductor package of an electronic device, and particularly relates to an improvement in a heat dissipation structure of a semiconductor chip.

従来の技術 近年、フィルムキャリアパッケージは電子機器の小形化
、薄形化の実装技術として広く使用されている。
2. Description of the Related Art In recent years, film carrier packages have been widely used as a packaging technology for making electronic devices smaller and thinner.

以下に従来のフィルムキャリア実装構造体について説明
する。
A conventional film carrier mounting structure will be described below.

第2図は従来のフィルムキャリアパッケージの基板への
実装状態における断面図を示すものである。
FIG. 2 shows a cross-sectional view of a conventional film carrier package in a state where it is mounted on a board.

第2図において、30は半導体チップ、31はフィルム
キャリア、32はインナーリード、33は導体、34は
基板への接続をするアウターリード、35は半導体チッ
プ3oの表面保護樹脂、36はフィルムキャリアパッケ
ージの保護コート樹脂、37は基板である。
In FIG. 2, 30 is a semiconductor chip, 31 is a film carrier, 32 is an inner lead, 33 is a conductor, 34 is an outer lead for connection to the substrate, 35 is a surface protection resin for the semiconductor chip 3o, and 36 is a film carrier package. 37 is a protective coating resin, and 37 is a substrate.

第3図は第2図のフィルムキャリアパッケージに放熱フ
ィンを取り付けた実装構造図を示し、38はその放熱フ
ィン、39は熱伝導樹脂である。
FIG. 3 shows a mounting structure diagram in which a radiation fin is attached to the film carrier package of FIG. 2, 38 is the radiation fin, and 39 is a heat conductive resin.

以上のように構成されたフィルムキャリア実装構造体に
ついて、以下その放熱動作について説明する。
The heat dissipation operation of the film carrier mounting structure configured as described above will be explained below.

半導体チップ3oで発生した熱は大別して3通シの熱伝
導によって放熱される。第1は半導体チップ3oから保
護コート樹脂36を介して空気中に熱伝導される。第2
は半導体チップ30に接続したインナーリード32.導
体33.アウターリード34を介して基板の導体40に
熱伝導される。
The heat generated in the semiconductor chip 3o is roughly divided into three ways and radiated by heat conduction. First, heat is conducted from the semiconductor chip 3o into the air via the protective coating resin 36. Second
are inner leads 32 . connected to the semiconductor chip 30 . Conductor 33. Heat is conducted to the conductor 40 of the board via the outer lead 34.

第3は半導体チップ30から半導体チップ30の表面保
護樹脂35.保護コート樹脂36を介して、実装基板3
7に熱伝導される。
The third is the surface protection resin 35 of the semiconductor chip 30. Mounting board 3 via protective coat resin 36
Heat is conducted to 7.

一方、放熱フィンを取り付けた第3図においては、前記
第1の熱伝導経路は半導体チップ3oから高熱伝導樹脂
39.放熱フィン38を介して放熱される。第2.第3
の放熱経路は放熱フィン38を設けていないものと同じ
である。
On the other hand, in FIG. 3 in which the radiation fins are attached, the first heat conduction path is from the semiconductor chip 3o to the high heat conductive resin 39. Heat is radiated via the heat radiating fins 38. Second. Third
The heat radiation path is the same as that without the radiation fins 38.

これらの熱伝導はおのおの単独に発生するものではなく
、複合的に発生し、その総合的な熱伝導によって半導体
チップ30の放熱が行なわれる。
These heat conductions do not occur individually, but occur in combination, and the heat dissipation of the semiconductor chip 30 is performed by the overall heat conduction.

一般的に放熱フィン38を使用しない場合は、前記第2
のフィルムキャリア実装構造体リードからの熱伝導と前
記第3の実装基板への熱伝導とによる放熱経路が効果的
であり、放熱フィン38を使用する場合は放熱フィン3
8を経由する第1の放熱が効果的である。
Generally, when the radiation fins 38 are not used, the second
The heat radiation path by the heat conduction from the film carrier mounting structure lead and the heat conduction to the third mounting board is effective, and when the radiation fin 38 is used, the radiation fin 3
The first heat dissipation via 8 is effective.

発明が解決しようとする課題 しかしながら上記の従来の構成では、消費電力の大きい
半導体チップ3oの場合は十分でなく、その放熱のため
にフィルムキャリア実装構造体上に大きい放熱フィン3
8を取り付けねばならず、コストも高くなるばかシか、
その構造も複雑になるという欠点を有していた。
Problems to be Solved by the Invention However, the above-mentioned conventional configuration is not sufficient for the semiconductor chip 3o, which consumes a large amount of power.
8 would have to be installed and the cost would be high, right?
The structure also had the disadvantage of being complicated.

本発明は上記従来の欠点を解決するもので、簡単な構成
で容易に放熱効果を高めることができ、放熱フィンをも
不要にすることが可能となる優れたフィルムキャリア実
装構造体を提供することを目的とする。
The present invention solves the above-mentioned conventional drawbacks, and provides an excellent film carrier mounting structure that can easily improve the heat dissipation effect with a simple configuration and eliminate the need for heat dissipation fins. With the goal.

課題を解決するための手段 この目的を達成するために本発明のフィルムキャリア実
装構造体は、内層金属箔と表面に信号配線を持った基板
の表面に、少なくとも半導体チップの占有する面積以上
の面積を持った表面金属箔部を設け、この表面金属箔部
をフルーホールによって前記基板の前記内層金属箔に接
続し、フィルムキャリアパッケージの前記半導体チップ
と前記基板の前記基面金属箔部との間を高熱伝導樹脂に
よって充填する構成を有している。
Means for Solving the Problems In order to achieve this object, the film carrier mounting structure of the present invention has an inner layer of metal foil and a surface area of a substrate having signal wiring on the surface, at least an area larger than the area occupied by the semiconductor chip. A surface metal foil portion having a surface metal foil portion is provided, and the surface metal foil portion is connected to the inner layer metal foil of the substrate through a full hole, and the surface metal foil portion is connected to the inner layer metal foil portion of the substrate, and the surface metal foil portion is connected to the inner layer metal foil portion of the substrate. It has a structure in which it is filled with high heat conductive resin.

作   用 この構成によって本発明のフィルムキャリア実装構造体
は、半導体チップで発生した熱が高熱伝導樹脂を介し、
基板表面に設けた表面金属箔部に伝導され、さらにスル
ーホールを介して内層金属箔に伝導される。この内層金
属箔は半導体チップに比べ著しく大きい面積を有してお
シ、非常に大きい放熱フィンとして機能することとなる
Effect With this configuration, the film carrier mounting structure of the present invention allows heat generated in the semiconductor chip to pass through the high heat conductive resin.
It is conducted to the surface metal foil portion provided on the surface of the substrate, and is further conducted to the inner layer metal foil via the through hole. This inner layer metal foil has a significantly larger area than the semiconductor chip, and functions as a very large heat dissipation fin.

実施例 以下本発明の一実施例のフィルムキャリア実装構造体に
ついて、図面を参照しながら説明する。
EXAMPLE Hereinafter, a film carrier mounting structure according to an example of the present invention will be described with reference to the drawings.

第1図は本発明の一実施例におけるフィルムキャリア実
装状態の断面図を示すものである。
FIG. 1 shows a sectional view of a film carrier mounted state in an embodiment of the present invention.

第1図において、21は基板表面の金属箔、22a 、
22b 、22c 、22dはスルーホーp。
In FIG. 1, 21 is a metal foil on the surface of the substrate, 22a,
22b, 22c, and 22d are through holes p.

23.24は内層金属箔である。23 and 24 are inner layer metal foils.

以上のように構成されたライlレムキャリア実装構造体
について、以下その動作について説明する。
The operation of the rail carrier mounting structure configured as above will be described below.

半導体チップ1oで発生した熱は、半導体チップ1oの
表面保護樹脂16.高熱伝導樹脂19を介して基板17
の表面導体21に伝導される。熱はさらにスルーホール
22a〜22dを介して内層金属箔23に伝導され、著
しく大きい面積を有する内層金属箔23によシ放熱され
る。
The heat generated in the semiconductor chip 1o is transferred to the surface protection resin 16. of the semiconductor chip 1o. Substrate 17 via high heat conductive resin 19
is conducted to the surface conductor 21 of. The heat is further conducted to the inner layer metal foil 23 via the through holes 22a to 22d, and is radiated by the inner layer metal foil 23 having a significantly large area.

この実施例による放熱経路も従来と同じく大別して3通
りあり、その経路は前述したとおりである。しかしなが
ら、本実施例による放熱効果は、第3の経路、すなわち
半導体チップ100表面保護樹脂16.高熱伝導樹脂1
91表面導体21゜スルーホー1v22a 〜22d、
内層金属箔23の経路による放熱効果が他の経路に比べ
著しく大きい。特に半導体チップ10の表面保護樹脂1
6゜高熱伝導樹脂19を薄くすることによってその効果
は著しい。
The heat dissipation paths according to this embodiment can be roughly divided into three types as in the conventional case, and the paths are as described above. However, the heat dissipation effect according to this embodiment is achieved through the third path, that is, the semiconductor chip 100 surface protection resin 16. High thermal conductivity resin 1
91 surface conductor 21° through hole 1v22a ~ 22d,
The heat dissipation effect through the path of the inner layer metal foil 23 is significantly greater than through other paths. In particular, the surface protection resin 1 of the semiconductor chip 10
By making the high heat conductive resin 19 thinner by 6°, the effect is remarkable.

以上のように本実施例によれば、内層金属箔23を持っ
た基板17の表面に少なくとも半導体装置プ1oの占有
する面積以上の面積を持った金属箔部21を設け、この
金属箔部21をスルーホール22a〜22dによって基
板17の内層金属箔23に接続し、フィルムキャリアパ
ッケージの半導体チップ1oと基板17の表面金属箔部
21との間を半導体チップの表面保護樹脂15.高熱伝
導樹脂19を充填する構成を設けることによシ、半導体
チップ1oで発生した熱を半導体チップ10の表面保護
樹脂15.高熱伝導樹脂19.金属箔21゜スルーホー
1v22a〜22dを介して内層金属箔23に伝導し、
半導体チップ1oの放熱効果を著しく向上せしめ、消費
電力の大きい半導体チップのフィルムキャリア実装構造
体を可能にするとともに、従来必要としていた放熱フィ
ンを不要にでき、低コスト化が実現できるものである。
As described above, according to this embodiment, the metal foil portion 21 having an area at least larger than the area occupied by the semiconductor device plate 1o is provided on the surface of the substrate 17 having the inner layer metal foil 23, and this metal foil portion 21 are connected to the inner layer metal foil 23 of the substrate 17 through through holes 22a to 22d, and the surface protective resin 15. of the semiconductor chip is connected between the semiconductor chip 1o of the film carrier package and the surface metal foil portion 21 of the substrate 17. By providing a configuration in which the high heat conductive resin 19 is filled, the heat generated in the semiconductor chip 1o is transferred to the surface protection resin 15 of the semiconductor chip 10. High thermal conductive resin 19. Conducted to the inner layer metal foil 23 via the metal foil 21° through holes 1v22a to 22d,
This significantly improves the heat dissipation effect of the semiconductor chip 1o, enables a film carrier mounting structure for a semiconductor chip that consumes a large amount of power, and eliminates the need for heat dissipation fins, which were conventionally required, resulting in cost reduction.

発明の効果 以上の実施例の説明で明かなように本発明のフィルムキ
ャリア実装構造体によれば内層金属箔と表面配線金属箔
とを持った基板の表面に少なくとも半導体チップの占有
する面積以上の面積を持つた表面金属箔部が設けられ、
この表面金属箔部が複数個のヌル−ホールによって基板
の内層金属箔に接続され、前記フィルムキャリアパッケ
ージの前記半導体チップと前記基板の前記表面金属箔部
との間を高熱伝導樹脂によって充填する構成を設けるこ
とによシ前記半導体チップの放熱効果を著しく向上せし
め、消費電力の大きい半導体チップのフィルムキャリア
実装構造体を可能にするとともに、従来必要としていた
放熱フィンを不要にでき、低コスト化を実現できる優れ
たフィルムキャリア実装構造体を提供するものである。
Effects of the Invention As is clear from the description of the embodiments above, the film carrier mounting structure of the present invention has an area on the surface of the substrate having the inner layer metal foil and the surface wiring metal foil that is at least as large as the area occupied by the semiconductor chip. A surface metal foil portion with an area is provided,
The surface metal foil portion is connected to the inner layer metal foil of the substrate through a plurality of null holes, and the space between the semiconductor chip of the film carrier package and the surface metal foil portion of the substrate is filled with a high heat conductive resin. By providing this, the heat dissipation effect of the semiconductor chip is significantly improved, making it possible to form a film carrier mounting structure for a semiconductor chip that consumes a large amount of power, and also eliminating the need for heat dissipation fins that were conventionally required, resulting in lower costs. This provides an excellent film carrier mounting structure that can be realized.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例におけるフィルムキャリア実
装構造体の構成を示す断面図、第2図。 第3図は従来のフィルムキャリア実装構造体の構成を示
す断面図である。 1o・・・・・・半導体チップ、17・・・・・・基板
、19・・・・・・高熱伝導樹脂、21・・・・・・表
面金属箔部、22a〜22d・・・・・・スルーホール
、23・・・・・・内層金属箔。
FIG. 1 is a cross-sectional view showing the structure of a film carrier mounting structure according to an embodiment of the present invention, and FIG. FIG. 3 is a sectional view showing the configuration of a conventional film carrier mounting structure. 1o...Semiconductor chip, 17...Substrate, 19...High heat conductive resin, 21...Surface metal foil portion, 22a-22d... -Through hole, 23...Inner layer metal foil.

Claims (1)

【特許請求の範囲】[Claims] ポリイミドによるフィルムキャリアテープからなる基板
に取り付けた半導体チップで構成されるフィルムキャリ
アパッケージにおいて、前記基板の表面に少なくとも前
記半導体チップの占有する面積以上の面積を持った表面
金属箔部を設け、この表面金属箔部が複数個のスルーホ
ールによって前記基板の内層金属箔に接続され、前記フ
ィルムキャリアパッケージの前記半導体チップと前記基
板の前記表面金属箔部との間を高熱伝導樹脂によって充
填してなるフィルムキャリア実装構造体。
In a film carrier package consisting of a semiconductor chip attached to a substrate made of a film carrier tape made of polyimide, a surface metal foil portion having an area at least larger than the area occupied by the semiconductor chip is provided on the surface of the substrate, and this surface A film in which a metal foil portion is connected to an inner layer metal foil of the substrate through a plurality of through holes, and a space between the semiconductor chip of the film carrier package and the surface metal foil portion of the substrate is filled with a high heat conductive resin. Carrier mounting structure.
JP2208598A 1990-08-06 1990-08-06 Film carrier mounting structure Expired - Fee Related JP2861322B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2208598A JP2861322B2 (en) 1990-08-06 1990-08-06 Film carrier mounting structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2208598A JP2861322B2 (en) 1990-08-06 1990-08-06 Film carrier mounting structure

Publications (2)

Publication Number Publication Date
JPH0499051A true JPH0499051A (en) 1992-03-31
JP2861322B2 JP2861322B2 (en) 1999-02-24

Family

ID=16558858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2208598A Expired - Fee Related JP2861322B2 (en) 1990-08-06 1990-08-06 Film carrier mounting structure

Country Status (1)

Country Link
JP (1) JP2861322B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5844310A (en) * 1996-08-09 1998-12-01 Hitachi Metals, Ltd. Heat spreader semiconductor device with heat spreader and method for producing same
US5930117A (en) * 1996-05-07 1999-07-27 Sheldahl, Inc. Heat sink structure comprising a microarray of thermal metal heat channels or vias in a polymeric or film layer
WO1999059205A1 (en) * 1998-05-12 1999-11-18 Mitsubishi Gas Chemical Company, Inc. Semiconductor plastic package and method for producing printed wiring board
US6265772B1 (en) 1998-06-17 2001-07-24 Nec Corporation Stacked semiconductor device
KR100391093B1 (en) * 2001-01-04 2003-07-12 삼성전자주식회사 Ball Grid Array package mounting heat sink
US6898084B2 (en) * 2003-07-17 2005-05-24 The Bergquist Company Thermal diffusion apparatus
KR100474193B1 (en) * 1997-08-11 2005-07-21 삼성전자주식회사 BG Package and Manufacturing Method
US7760507B2 (en) 2007-12-26 2010-07-20 The Bergquist Company Thermally and electrically conductive interconnect structures
CN106647114A (en) * 2016-12-02 2017-05-10 北京小米移动软件有限公司 Camera module

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5930117A (en) * 1996-05-07 1999-07-27 Sheldahl, Inc. Heat sink structure comprising a microarray of thermal metal heat channels or vias in a polymeric or film layer
US5844310A (en) * 1996-08-09 1998-12-01 Hitachi Metals, Ltd. Heat spreader semiconductor device with heat spreader and method for producing same
US6032362A (en) * 1996-08-09 2000-03-07 Hitachi Metals, Ltd. Method for producing a heat spreader and semiconductor device with a heat spreader
KR100474193B1 (en) * 1997-08-11 2005-07-21 삼성전자주식회사 BG Package and Manufacturing Method
WO1999059205A1 (en) * 1998-05-12 1999-11-18 Mitsubishi Gas Chemical Company, Inc. Semiconductor plastic package and method for producing printed wiring board
US6350952B1 (en) 1998-05-12 2002-02-26 Mitsubishi Gas Chemical Company, Inc. Semiconductor package including heat diffusion portion
US6265772B1 (en) 1998-06-17 2001-07-24 Nec Corporation Stacked semiconductor device
KR100391093B1 (en) * 2001-01-04 2003-07-12 삼성전자주식회사 Ball Grid Array package mounting heat sink
US6898084B2 (en) * 2003-07-17 2005-05-24 The Bergquist Company Thermal diffusion apparatus
US7760507B2 (en) 2007-12-26 2010-07-20 The Bergquist Company Thermally and electrically conductive interconnect structures
CN106647114A (en) * 2016-12-02 2017-05-10 北京小米移动软件有限公司 Camera module

Also Published As

Publication number Publication date
JP2861322B2 (en) 1999-02-24

Similar Documents

Publication Publication Date Title
US6713856B2 (en) Stacked chip package with enhanced thermal conductivity
US6559525B2 (en) Semiconductor package having heat sink at the outer surface
US5486720A (en) EMF shielding of an integrated circuit package
US5594234A (en) Downset exposed die mount pad leadframe and package
JP3854054B2 (en) Semiconductor device
JP3407971B2 (en) Integrated circuit package and assembly structure thereof
JPH06252285A (en) Circuit board
JP2901835B2 (en) Semiconductor device
US6933602B1 (en) Semiconductor package having a thermally and electrically connected heatspreader
JPH0499051A (en) Film carrier mounting structure
JPH02276264A (en) Ceramic package provided with heat sink
JPS61144855A (en) Package for semiconductor circuit
US20060055029A1 (en) Integrated heatspreader for use in wire bonded ball grid array semiconductor packages
JPH04316357A (en) Resin-sealed type semiconductor device
JPH07321471A (en) Multilayer board
JP2001007280A (en) Semiconductor device and mounting structure thereof
JP2748778B2 (en) Hybrid integrated circuit device
JPS63292660A (en) Multilayered printed wiring substrate
JPH07235633A (en) Multi-chip module
JP2828385B2 (en) IC package structure
JPH07273462A (en) Electronic part mounting substrate
CN219696446U (en) Radiating fin and chip packaging structure
JPH08250650A (en) Semiconductor device
JPH041738Y2 (en)
JPH04171848A (en) Semiconductor device

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071211

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081211

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091211

Year of fee payment: 11

LAPS Cancellation because of no payment of annual fees