JPH0498844A - Probe for probing use - Google Patents
Probe for probing useInfo
- Publication number
- JPH0498844A JPH0498844A JP21613190A JP21613190A JPH0498844A JP H0498844 A JPH0498844 A JP H0498844A JP 21613190 A JP21613190 A JP 21613190A JP 21613190 A JP21613190 A JP 21613190A JP H0498844 A JPH0498844 A JP H0498844A
- Authority
- JP
- Japan
- Prior art keywords
- probes
- contact
- probe
- insulator
- probing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 title claims abstract description 47
- 239000012212 insulator Substances 0.000 claims abstract description 10
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 2
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はプロービング用探針に関し、特に半導体素子上
のパッド内ピッチの小さいプロービング用探針に関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a probing probe, and more particularly to a probing probe having a small pitch within pads on a semiconductor element.
従来のこの種のプロービング探針は、第３図（ａ）、第
３図（ｂ）のように、−本一本がかなり離間して独立し
た構造となっていた。Conventional probing probes of this type have a structure in which each tip is separated from the probe by a considerable distance and is independent, as shown in FIGS. 3(a) and 3(b).
このプロービング用探針２は、先端１が、それぞれ半導
体素子上の電極に接触する。The tips 1 of the probing probes 2 come into contact with electrodes on the semiconductor elements, respectively.
前述した従来の探針２は、単独構造の為、ＩＣパッドの
ピッチが縮小された場合、隣接する探針同士が接触する
危険がある。また、強度〈耐久性）が低く、各探針間の
バラツキも大きくなりやすい等の欠点がある。Since the conventional probe 2 described above has a single structure, there is a risk that adjacent probes will come into contact with each other when the pitch of the IC pads is reduced. In addition, it has drawbacks such as low strength (durability) and a tendency to have large variations between probes.
本発明の目的は、前記欠点を解決し、探針同士が接触せ
ず、良好な接触が保てるようにしたプロービング用探針
を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned drawbacks and to provide a probing probe in which the probes do not come into contact with each other and can maintain good contact.
本発明のプロービング用探針の構成は、多数の探針が配
列されているプロービング用探針において、前記探針同
士が接触しないように、となり合った前記探針間に絶縁
物を介在させたことを特徴とする。The configuration of the probing probe of the present invention is such that in a probing probe in which a large number of probes are arranged, an insulator is interposed between adjacent probes to prevent the probes from coming into contact with each other. It is characterized by
次に図面を参照しながら本発明を説明する。第１図（ａ
）は本発明の第１の実施例のプロービング用探針を示す
正面図、第１図（ｂ）は第１図（ａ）の側面図である。Next, the present invention will be explained with reference to the drawings. Figure 1 (a
) is a front view showing a probing probe according to the first embodiment of the present invention, and FIG. 1(b) is a side view of FIG. 1(a).
第１図（ａ）、（ｂ）において、本実施例は、探針２間
に、絶縁物３が介在している。In FIGS. 1(a) and 1(b), an insulator 3 is interposed between the probes 2 in this embodiment.
これにより、接触を防止し、同時に先端１の間隔を一定
に保っている。This prevents contact and at the same time keeps the distance between the tips 1 constant.
第２図（ａ＞は本発明の第２の実施例のプロービング用
探針を示す正面図、第２図（ｂ）は第２図（ａ）の側面
図である。FIG. 2(a) is a front view showing a probing probe according to a second embodiment of the present invention, and FIG. 2(b) is a side view of FIG. 2(a).
第２図（ａ）、（ｂ）において、本実施例の探針２は、
上下間隔に絶縁物３を介在させている。In FIGS. 2(a) and 2(b), the probe 2 of this embodiment is
An insulator 3 is interposed between the top and bottom.
これは、半導体素子の前後２列に配列されたパッドに対
応して設けられている。These pads are provided corresponding to the pads arranged in two rows on the front and back of the semiconductor element.
以上説明したように、本発明は、探針同士が絶縁物で固
定されることにより、強度（耐久性）を向上させ、バラ
ツキ（高さや位置）を低減できる効果があり、またパッ
ド間ピッチが小さいものに対しては、あらかじめ固定さ
れている為、近隣の探針と接触する電気的短絡を防ぐ効
果がある。As explained above, the present invention has the effect of improving strength (durability) and reducing variations (height and position) by fixing the probes with an insulator, and also reduces the pitch between pads. For small probes, since they are fixed in advance, they are effective in preventing electrical short circuits due to contact with neighboring probes.
第１図（ａ）は本発明の第１の実施例のプロービング用
探針を示す正面図、第１図（ｂ）は第１図（ａ＞の側面
図、第２図（ａ＞は本発明の第２の実施例の正面図、第
２図（ｂ）は第２図（ａ）の側面図、第３図（ａ）は従
来のプロービング用探針を示す正面図、第３図（ｂ）は
第３図（ａ）の側面図である。
１・・・プロービング用探針先端（パ・ンド接触部）、
２・・・探針、３・・・絶縁物。FIG. 1(a) is a front view showing a probing probe according to the first embodiment of the present invention, FIG. 1(b) is a side view of FIG. 1(a>), and FIG. FIG. 2(b) is a front view of the second embodiment of the invention, FIG. 2(b) is a side view of FIG. 2(a), FIG. 3(a) is a front view of a conventional probing probe, and FIG. b) is a side view of Fig. 3(a). 1... Probing probe tip (patch-dot contact part);
2... Probe, 3... Insulator.
Claims (1)
いて、前記探針同士が接触しないように、となり合った
前記探針間に絶縁物を介在させたことを特徴とするプロ
ービング用探針。1. A probing probe in which a large number of probes are arranged, characterized in that an insulator is interposed between adjacent probes so that the probes do not come into contact with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21613190A JPH0498844A (en) | 1990-08-16 | 1990-08-16 | Probe for probing use |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21613190A JPH0498844A (en) | 1990-08-16 | 1990-08-16 | Probe for probing use |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0498844A true JPH0498844A (en) | 1992-03-31 |
Family
ID=16683752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21613190A Pending JPH0498844A (en) | 1990-08-16 | 1990-08-16 | Probe for probing use |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0498844A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5685725A (en) * | 1992-12-25 | 1997-11-11 | Yamaichi Electronics Co., Ltd. | IC socket |
-
1990
- 1990-08-16 JP JP21613190A patent/JPH0498844A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5685725A (en) * | 1992-12-25 | 1997-11-11 | Yamaichi Electronics Co., Ltd. | IC socket |
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