JPH0492878A - Ceramic member and production thereof - Google Patents
Ceramic member and production thereofInfo
- Publication number
- JPH0492878A JPH0492878A JP20986590A JP20986590A JPH0492878A JP H0492878 A JPH0492878 A JP H0492878A JP 20986590 A JP20986590 A JP 20986590A JP 20986590 A JP20986590 A JP 20986590A JP H0492878 A JPH0492878 A JP H0492878A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film layer
- ceramics
- ceramic
- nonoxidizing atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000002184 metal Substances 0.000 claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims abstract description 23
- 230000001590 oxidative effect Effects 0.000 claims description 13
- 238000007750 plasma spraying Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 abstract description 9
- 238000005219 brazing Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 7
- 239000007921 spray Substances 0.000 abstract 3
- 239000010408 film Substances 0.000 abstract 1
- 239000010936 titanium Substances 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 6
- 238000005304 joining Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910017709 Ni Co Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003262 Ni‐Co Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- -1 vacuum equipment Chemical class 0.000 description 1
Landscapes
- Coating By Spraying Or Casting (AREA)
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
Ａ、産業上の利用分野
本発明は、表面に金属薄層を備えたセラミックス部材と
その製造方法に関したものである。DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a ceramic member having a thin metal layer on its surface and a method for manufacturing the same.
Ｂ１発明の概要
本発明は、表面にチタン（Ｔｉ）を主成分とする金属の
薄層を備えたセラミックス部材であり、金属薄層をプラ
ズマ溶射にて施すことにより密着強度、気密性の高い金
属薄層を得、他の構造部材との接合においてロウ材を不
要とするセラミックス部材を得るものである。B1 Overview of the Invention The present invention is a ceramic member having a thin layer of metal mainly composed of titanium (Ti) on the surface.The thin metal layer is applied by plasma spraying to create a metal with high adhesion strength and airtightness. The present invention provides a thin layer and a ceramic member that does not require a brazing material when joining with other structural members.
Ｃ０従来の技術 セラミックスと他の構成部材（セラミックス。C0 conventional technology Ceramics and other components (ceramics.
金属）との接合は、水素炉中等の雰囲気でセラミックス
の表面にＭｏ（モリブデン）等のメタライズ層を形成し
ておき、そして所定のロウ材を用いて接合することが一
般に行われている。In general, bonding with metals is performed by forming a metallized layer of Mo (molybdenum) or the like on the surface of the ceramic in an atmosphere such as a hydrogen furnace, and then bonding using a predetermined brazing material.
Ｄ０発明が解決しようとする課題
セラミックス表面にメタライズ層を形成することは、多
くの工程を必要とし、しかも各工程の作業が煩雑である
ことから価格、歩留まり、生産性の点で解決すべきこと
が多くあり一層の改善が必要とされている。D0 Problems to be solved by the invention Forming a metallized layer on the surface of ceramics requires many steps, and the work in each step is complicated, which should be solved in terms of cost, yield, and productivity. There are many problems and further improvements are needed.
しかも、セラミックスに他の構成部材を接合する場合に
は、新たにロウ材を用いなければならず、−層生産性低
下、高価格の要因となっている。Moreover, when joining other components to the ceramic, a new brazing material must be used, which causes a decrease in layer productivity and a high price.
Ｅ０課題を解決するための手段
発明者らは、Ｔｉの粉末を非酸化性雰囲気中でプラズマ
溶射（減圧プラズマ溶射）してセラミックス表面に薄膜
状の金属層を形成することを試みた。Means for Solving the E0 Problem The inventors attempted to form a thin metal layer on the surface of a ceramic by plasma spraying (low-pressure plasma spraying) Ti powder in a non-oxidizing atmosphere.
その結果、ボイドの少ない非酸化性のＴｉ薄膜層が形成
でき、しかも加熱処理によって一層密着強度、気密性を
向上でき、更には他の構成部材との接合も良好な結果が
得られることを見いだした。As a result, it was found that a non-oxidizing Ti thin film layer with few voids could be formed, and that the adhesion strength and airtightness could be further improved by heat treatment, and good results could be obtained for bonding with other structural members. Ta.
本発明は、
（１）セラミックスの表面にＴｉを主成分とする金属薄
層を固着したセラミックス部材。The present invention provides: (1) A ceramic member in which a thin metal layer containing Ti as a main component is fixed to the surface of the ceramic.
（２）非酸化性雰囲気中でプラズマ溶射手段にてセラミ
ックスの表面にＴｉを主成分とする金属薄層を設ける製
造方法。(2) A manufacturing method in which a thin metal layer containing Ti as a main component is provided on the surface of ceramics by plasma spraying in a non-oxidizing atmosphere.
（３）この金属薄層を設けた後に非酸化性雰囲気中にて
熱処理する製造方法。(3) A manufacturing method in which the metal thin layer is provided and then heat treated in a non-oxidizing atmosphere.
（４）この金属薄層上に他の構成部材を乗せた後に非酸
化性雰囲気中にて加熱処理して接合する製造方法。(4) A manufacturing method in which other components are placed on this metal thin layer and then heat treated in a non-oxidizing atmosphere to bond them.
であり、他の構成部材接合に際して新たなロウ材を不要
としたものである。This eliminates the need for additional brazing material when joining other structural members.
なお、
■ 溶射する金属は、Ｔｉを主成分とするもので、Ｔｉ
又はＴｉ合金が該当する。Note that: ■ The metal to be thermally sprayed is mainly composed of Ti.
Or Ti alloy is applicable.
Ｔｉ合金としては、Ｃｕ、Ａ ｉ、Ａｇ、Ｎ ｉ、Ｚ
ｒを一部含有するものが該当し、セラミックスの種類、
接合する構成部材の種類等により接合特性改善等を主目
的として添加するものである。Examples of Ti alloys include Cu, A i, Ag, Ni, Z
Those that partially contain r are applicable, and the types of ceramics,
It is added primarily to improve bonding characteristics depending on the type of component parts to be bonded.
■ 金属薄層の厚さは、５〜５００μｍとするのが好ま
しい。(2) The thickness of the metal thin layer is preferably 5 to 500 μm.
Ｆ６作用
非酸化性雰囲気中でのプラズマ溶射であるので、ボイド
が少なく、酸化していない金属薄膜層を高い密着強度の
状態で得ることができる。しかも加熱処理することによ
り一層密着強度が向上し、更には他の構成部材を乗せて
同時加熱処理することにより特別にロウ材を用いること
なく接合でき、しかもその際の加熱温度により一層密着
強度、気密性が向上する。Since plasma spraying is performed in a non-oxidizing F6 atmosphere, it is possible to obtain an unoxidized metal thin film layer with few voids and high adhesion strength. Moreover, the adhesion strength is further improved by heat treatment, and furthermore, by placing other components and heat treatment at the same time, it is possible to join without using a special brazing material, and the adhesion strength is further improved by the heating temperature at that time. Improves airtightness.
Ｇ、実施例 本発明を実施例に基づいて詳細に説明する。G. Example The present invention will be explained in detail based on examples.
粒径が３２５メツシユ以下（−３２５メツシユ）のＴｉ
粉末を用意する。この粉末を、−船釣に知中でのプラズ
マ溶射（減圧プラズマ溶射）にてＴｉられているプラズ
マ溶射装置を用いて、真空雰囲気中に置いたターゲット
（アルミナセラミックスからなる円筒部材の端面）に溶
融噴射して、Ｔｉの薄い膜を形成してセラミックス部材
を得る。Ti with a particle size of 325 mesh or less (-325 mesh)
Prepare the powder. This powder is applied to a target (the end face of a cylindrical member made of alumina ceramics) placed in a vacuum atmosphere using a plasma spraying device that is coated with Ti using plasma spraying (low-pressure plasma spraying), which is known for boat fishing. A thin film of Ti is formed by melting and spraying to obtain a ceramic member.
次にＦｅ−Ｎｉ−Ｃｏ合金からなるカップ状の構成部材
をセラミックス表面上の金属層上に乗せ、更に重しを乗
せて真空中にて加熱排気して接合する。Next, a cup-shaped constituent member made of an Fe-Ni-Co alloy is placed on the metal layer on the ceramic surface, and a weight is further placed thereon, and the members are heated and evacuated in a vacuum to be bonded.
上記のようにして得られた接合構成物の接合面をＸ線マ
イクロアナライザで観察すると強固に接合されているこ
とが判り、密着強度、気密性の充分なものが得られた。When the bonded surfaces of the bonded structures obtained as described above were observed using an X-ray microanalyzer, it was found that they were firmly bonded, and sufficient adhesion strength and airtightness were obtained.
Ｈ６発明の効果
本発明のセラミックス部材は、非酸化性雰囲気を主成分
とする金属薄層をセラミックスの表面に溶射密着して形
成しているので、ボイドが少なく、酸化していない金属
薄膜層を高い密着強度の状態で得ることができる。しか
も更に非酸化性雰囲気中で熱処理することにより一層密
着強度がます。H6 Effects of the Invention The ceramic member of the present invention is formed by thermally spraying a thin metal layer whose main component is a non-oxidizing atmosphere onto the surface of the ceramic, so there are fewer voids and a non-oxidized metal thin film layer is formed. It can be obtained in a state with high adhesion strength. In addition, heat treatment in a non-oxidizing atmosphere further increases adhesion strength.
更に他の構成部材を乗せて加熱処理することにより特別
にロウ材を用いることなく接合でき、しかもその際の加
熱温度により一層密着強度、気密性が向上する。Furthermore, by placing other constituent members and heat-treating them, it is possible to join without using a special brazing material, and the adhesion strength and airtightness are further improved by the heating temperature at that time.
従って、セラミックスと金属とを接合した構造部材、例
えば真空機器等に適用すれば価格低減、品質及び耐久性
の向上を図ることができる。Therefore, if applied to structural members made by bonding ceramics and metals, such as vacuum equipment, it is possible to reduce costs and improve quality and durability.
外１名1 other person
Claims (4)
層を密着したことを特徴とするセラミックス部材。(1) A ceramic member characterized in that a thin metal layer containing Ti as a main component is adhered to the surface of the ceramic.
ックスの表面にＴｉを主成分とする金属薄層を密着する
ことを特徴とするセラミックス部材の製造方法。(2) A method for manufacturing a ceramic member, characterized in that a thin metal layer containing Ti as a main component is adhered to the surface of the ceramic by plasma spraying in a non-oxidizing atmosphere.
ックスの表面にＴｉを主成分とする金属薄層を密着した
後に非酸化性雰囲気中にて熱処理することを特徴とする
セラミックス部材の製造方法。(3) A method for manufacturing a ceramic member, which comprises applying a thin metal layer containing Ti as a main component to the surface of the ceramic using plasma spraying in a non-oxidizing atmosphere, and then heat-treating it in a non-oxidizing atmosphere. .
ックスの表面にＴｉを主成分とする金属薄層を密着し、
この金属薄層上に他の構成部材を乗せた後に非酸化性雰
囲気中にて加熱処理して接合することを特徴とするセラ
ミックス部材の製造方法。(4) A thin metal layer mainly composed of Ti is adhered to the surface of the ceramic by plasma spraying in a non-oxidizing atmosphere,
A method for manufacturing a ceramic member, which comprises placing other constituent members on the thin metal layer and then heat-treating and bonding them in a non-oxidizing atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20986590A JPH0492878A (en) | 1990-08-08 | 1990-08-08 | Ceramic member and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20986590A JPH0492878A (en) | 1990-08-08 | 1990-08-08 | Ceramic member and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0492878A true JPH0492878A (en) | 1992-03-25 |
Family
ID=16579911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20986590A Pending JPH0492878A (en) | 1990-08-08 | 1990-08-08 | Ceramic member and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0492878A (en) |
-
1990
- 1990-08-08 JP JP20986590A patent/JPH0492878A/en active Pending
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