JPH06239668A - Soldering material for joining and its production - Google Patents

Abstract

PURPOSE:To improve the bonding strength by uniformly and highly dispersing and attaching a bonding assistant component composed of Ti, Zr and/or Cr in a finely dispersed state to a solder material for substrate. CONSTITUTION:A solder material for substrate selected from Ag-based solder material, Au-based solder material, Pd-based solder material, Pt-based solder material, etc., having a thickness of about 0.1mm and having cleaned surface is placed in a vacuum chamber. A bonding assistant component consisting of at least one kind of substance selected from Ti, Zr and Cr is evaporated by heating at 1800-2600 deg.C with electron beam irradiation and uniformly deposited on at least a surface of the solder material for substrate in the form of uniformly dispersed particles having an average particle diameter of 0.01-5mum. The solder material for substrate is inserted between a ceramic member such as Al2O3 and a metallic member such as Ni-Fe alloy, placed in a vacuum chamber and heated in vacuum at a prescribed temperature to effect the soldering work and obtain a laminated product having high bonding strength.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a brazing filler metal used for joining, for example, a metal member / ceramics member or a ceramics member / ceramics member, and more particularly to a joint brazing material having improved joint strength and airtight jointability.

[0002]

2. Description of the Related Art Ceramics have excellent heat resistance, insulating properties and airtightness, and are used as various electric component materials by taking advantage of their characteristics.

Particularly, in the case of an airtight container, it is used in an atmosphere filled with an inert gas or in a vacuum. Therefore, in order to maintain such an internal atmosphere, the airtightness must be strictly maintained.

Conventionally, for example, when joining a metal member and a ceramic member via a silver brazing material for a substrate, generally, a metallized layer (for example, Mo-Mn) is previously applied to the end surface of the ceramics member, and this metallized layer is formed. The silver brazing is performed through. That is, as a method of joining ceramics, a method of first metallizing a ceramic member and then brazing and joining it to a metal is used. As the metallizing method, for example, the following method is well known.

(1) A method in which a powder containing Mo or W as a main component is applied to the surface of a ceramic base material and heated to, for example, 1400 to 1700 ° C. in a reducing atmosphere to react with the ceramic base material and metallize. Therefore, Ni or the like is plated on the metallized layer if necessary. (2) A method of arranging Au or Pt on the surface of the ceramic base material and heating them while applying pressure to perform metallization.

(3) Ti, Zr on the ceramic base material
And active metals such as Ni and Cu, and transition metals such as
A method of heat-treating at a temperature higher than the melting points of those alloys for metallizing (JP-A-56-163093).

[0007]

However, in the conventional method (1), there is a problem in a complicated process such that the metallizing requires treatment at a very high temperature. Even a slight variation in the processing conditions makes it difficult to obtain sufficient bonding strength, and variations in strength occur.

Further, in the method (2), since an expensive noble metal is used, there is a problem in economical efficiency, and a high pressure is required for the purpose of enhancing the adhesion, and it is not preferable to apply it to a precision part which is not susceptible to deformation. . There is also a problem in productivity (a pressurizing part for obtaining pressure occupies a space in the brazing furnace).

Further, in the method (3), the active metal hardly requires pressurization to wet the ceramic base material, and the effect of the active metal enables metallizing with a strong adhesion to the ceramic base material. it can. However, when the metal member and the ceramic member are sufficiently overlapped with each other, the silver solder shows good bonding, but there is a very small gap between the metal member and the ceramic member or the part is not sufficiently overlapped. If present, the metallization may not be performed well, and there is a problem in airtight bonding.

As described above, in any of the above (1), (2) and (3), since the metal member and the ceramic member are brazed after metallizing, the process is complicated and the joint strength is high. Either or both of the airtight bonding properties become a problem. As described above, it is necessary to separately perform the metallizing process and the brazing of the metal member, which is a disadvantage that the process is complicated. Therefore, a technique of brazing a metal member to a ceramic member without performing the above metalizing has been studied.

Therefore, as a method for joining a metal member and a ceramic member without performing metallization in advance, there is a one-step joining method as described in, for example, Japanese Patent Laid-Open No. 59-32628.

That is, at least Ti is used as the active metal.
Alternatively, an Ag brazing material containing Zr is used (this is inserted between the metal member and the ceramic member and bonded). Alternatively, an Ag brazing material in which the thin plate of the active metal and the Ag brazing material are laminated is used (the Ag brazing material is inserted between the metal member and the ceramic member and bonded).

Since this one-step joining method does not require metallizing, the process can be simplified. However, even in the case of this one-step bonding method, the same phenomenon as that observed in the above (3), that is, if the Ag brazing material is not sufficiently adhered to the metal member or the ceramic member, especially the ceramic member, good bonding strength is obtained. In some cases, airtight bonding cannot be obtained. In order to obtain sufficient adhesion, it is necessary to correct the non-uniformity of pressing force, and strong pressurization is required.

As a technique for improving this drawback, Japanese Unexamined Patent Publication No. Sho 6-62
As described in 3-49758, active metal Ti or / and Zr powder is used as a means to obtain non-uniformity of the applied pressure, and this is applied to the ceramic member surface. By pulverizing the active metal, Ti and / or Zr are evenly distributed and adhered to the ceramic member,
A joint state having both joint strength and airtight joint property is obtained.

However, when the active metal Ti or / and Zr powder is applied to the surface of the ceramic member coated with a binder such as polyvinyl alcohol or ethyl cellulose, the active metal powder is treated with an organic solvent such as ethanol or tetralin. Since the paste is used, it is necessary to take measures to reduce environmental problems caused by these binders and organic solvents.

An object of the present invention is to provide a brazing material for bonding which is capable of performing metallizing and airtight bonding at the same time and is excellent in reliability, economical efficiency and environmental protection, and a manufacturing method thereof.

[0017]

The present invention has been studied to achieve the above object, and as a result, titanium (Ti), zirconium (Zr), or chromium (Cr) is formed on at least one surface of a base brazing material. ) At least one bonding auxiliary component is attached.

In a preferred embodiment, titanium (Ti), zirconium (Z) is formed on at least one surface of the base brazing material.
r) or at least one bonding auxiliary component of chromium (Cr) is uniformly and highly dispersed and adhered, and the bonding auxiliary component has an average particle diameter (particle diameter) of 0.01 μm to 5 μm. It is characterized by having a particle shape.

Another preferred embodiment has an average particle diameter (particle size) of 0.01 on at least one side of the base brazing material.
A brazing material for bonding formed by adhering a bonding auxiliary component having a particle size of μm to 5 μm, wherein the bonding auxiliary component has a particle shape having an average particle diameter (particle diameter) of 0.01 μm to 5 μm. It is characterized by containing constituent components (Ag, Cu, etc.).

In another preferred embodiment, titanium (T) is provided on one surface of at least one of the constituents of the base brazing material.
i), at least one bonding auxiliary component of zirconium (Zr) and chromium (Cr) is finely uniformly and highly dispersed and adhered.

Another preferred embodiment is an Ag-based brazing material, an Au-based brazing material, a Pd-based brazing material, a Pt-based brazing material, a Cu-based brazing material, Ni having a form such as a thin metal plate shape, a linear shape or a powder shape.
It is one selected from the group of brazing filler metals.

Another preferred embodiment is a bonding brazing material in which a bonding auxiliary component is adhered to at least one surface of a base brazing material, and the surface on which the bonding auxiliary component is present is:
It is characterized by being provided with a protective layer which suppresses oxidation or contamination.

By adopting these joining brazing material structures, the metal member / ceramic member or the ceramic member / ceramic member can be joined easily with good airtightness.
The present invention has been completed.

In the present invention, when the metal member and the ceramic member are joined together, an active metal such as Ti, Zr or Cr powder is applied to the base brazing material in advance. This is a mere deposition, and is different from the conventional technique in that metallizing treatment is not particularly performed and active metals such as Ti, Zr, and Cr powders are deposited on the brazing material for bonding. That is, it is the active metal layer that is formed in advance and not the metallized layer, and the deposition of the active metal is performed not on the ceramic member but on the base brazing material.

Regarding the deposition of the active metal layer, not only the conventional ceramic member is replaced with the base brazing material, but also the contents and working effects are largely different. Here, the function of the brazing material for bonding of the present invention will be described.

(1) Ceramic members, which are objects to be joined, have various sizes and thicknesses, and their shapes are indefinite, and therefore there are many technical problems in quality control. Therefore, there are many disadvantages when depositing the active metal layer on ceramic members having various shapes. For example, in space equipment parts and optical parts, brazing is performed on a ceramic member having a width of 1 mm or less and a thickness of 0.3 mm or less and a minute area and a minute thickness. In this case, T on the surface to be joined of the ceramic member
Workability when depositing active metals such as i, Zr, and Cr powder,
The non-uniformity of the metallizing layer is a problem. Further, in the heat shield structure for energy equipment, brazing is performed on a ceramic member having a length of 1 m or more and having a huge area. In this case, even when the active metal Ti, Zr, Cr powder or the like is deposited on the surfaces to be joined of the ceramic member, the non-uniformity of the metalizing layer due to the non-uniformity becomes a problem. In particular, in the former ceramic member having a small area, variations are found among the individual members, and in the latter ceramic member having a large area, variations are found between places in the member.

To solve these problems, by using the base brazing material as a bonding brazing material having an active metal layer,
Variation and non-uniformity occurred. This is due to the effect of the bonding brazing material structure in which the bonding auxiliary component in the active state is finely and uniformly dispersed and adhered to at least one surface of the base brazing material, thereby obtaining good airtightness and bonding strength.

(2) T to the surface to be joined of the ceramic member
In the case of the conventional method of depositing an active metal such as i, Zr, Cr powder, the adhesion strength of Ti, Zr, Cr powder, etc. is not sufficient just by depositing, and heating for metallization is inevitable. Requires processing.

On the other hand, T is formed on one surface of the base brazing material.
In the case of the joining brazing material of the present invention for depositing an active metal such as i, Zr, Cr powder, the base brazing material is much softer than the ceramic member, so that Ti, Zr, C is used.
Since r and the like are sufficiently well-adhered to and adhere to the base brazing material, Ti, Zr, Cr powder and the like are finely and uniformly adhered and dispersed to the base brazing material without excessive pressing force. As a result, due to the effect of the brazing material structure for joining, good heat tightness and joining strength can be obtained without the need for heat treatment for metalizing.

(3) In the brazing material for bonding of the present invention, T
The bonding auxiliary component such as i, Zr, and Cr powder is in the form of particles having an average particle diameter (particle diameter) of 0.01 μm to 5 μm. When the particle size is 0.01 μm or less, the activity of the powder is remarkably high, and there is a technical difficulty in handling as a brazing material.
When the particle size is 5 μm or more, the existence state of the bonding auxiliary component such as Ti, Zr, Cr or the like becomes coarse distribution, which is not preferable.

(4) 7 as a typical base brazing material
Eutectic silver wax with a melting temperature of 79 ° C (72 Wt% Ag-C
u alloy) is known. The typical constitution of the brazing material for bonding of the present invention is, for example, that a bonding auxiliary component such as Ti, Zr, Cr powder is attached to one surface (both surfaces are acceptable) of a plate-shaped eutectic silver brazing plate having a thickness of 0.1 mm. I am allowed to. However, the present invention is not limited to this structure, and the constituents Ag and Cu of the eutectic silver wax are separately prepared as Ag thin plates and Cu thin plates, and the Ag thin plates (or Cu thin plates), Ti, Zr,
72 Wt% Ag-
A brazing material structure made of a Cu alloy may be used.

The base brazing material is not limited to the silver brazing material, but by adopting the joining brazing material of the present invention, Au based brazing material, Pd based brazing material, Pt based brazing material, C
It may be a u-based brazing material or a Ni-based brazing material.

(5) T to the surface to be joined of the ceramic member
In the case of the conventional method of depositing an active metal such as i, Zr, or Cr powder, the binder is likely to adhere to a portion other than the predetermined joint portion during the binder coating work performed on the joint surface of the ceramic member, and the active metal is not attached to a necessary portion. This results in the deposition of powder.
Furthermore, since the active metal powder is in a paste state with an organic solvent, it may flow out to a portion other than a predetermined joint portion of the surfaces to be joined of the ceramic member depending on the concentration of the organic solvent. Will result in deposition. As a method for preventing these, in the conventional method, complicated masking is applied to the unnecessary portions. In the brazing material of the present invention, the brazing material is arranged only in the bonding-required portions, so that the process is simplified and the reliability is improved.

(6) T to the surface to be joined of the ceramic member
In the case of the conventional method of depositing an active metal such as i, Zr, or Cr powder, since the paste and the organic solvent are used as described above, the inside of the heating furnace, the exhaust device, and the surface of the article to be joined are contaminated. However, since no paste or organic solvent is used in the method of the present invention, these concerns do not occur.

(7) The adhesion strength of the active metal to the brazing material surface affects the stability as a brazing material, and is therefore important for the bonding strength and airtightness after brazing. One of the factors affecting the adhesion strength of the active metal is the cleanliness of the active metal and the cleanliness of the adhered surface. However, in general, it is difficult to completely clean the surface of ceramics, and usually ceramics have remarkably poor wettability with metals. For this reason, the adhesion strength is inferior in the ceramic member used in the conventional method for the adherend surface. On the other hand, with the brazing material (metal) targeted by the present invention as the surface to be adhered,
Since it has good wettability, it has a higher adhesion strength to the ceramic member, so that a stable joining result can be obtained. Next, a method for obtaining the joining brazing material structure of the present invention will be described. The gist of the brazing material for bonding of the present invention is that a bonding auxiliary component is finely and uniformly dispersed at a high degree on at least one surface of the brazing material. Therefore, the point is what kind of condition the joining auxiliary component is made to adhere to the surface of the base brazing material to form the joining brazing material structure.

As described above, the joining auxiliary component on one surface of the base brazing material is made of particulate active metal powder such as Ti, Zr, Cr having an average particle diameter of 0.01 μm to 5 μm.
The joining auxiliary components under such conditions are made of vaporized Ti, Zr, and Cr, and then prepared separately as a base brazing material plate (Ag-C).
u plate, etc.) or base brazing material component plate (Ag-plate, C)
u plate, etc.) to solidify and adhere. The means for vaporizing the active metal is a high energy density beam, such as electron beam heating, laser heating, arc heating, resistance heating, etc., as long as it can obtain a predetermined vapor temperature, and the heating means is a problem. Not. The heating atmosphere is an inert atmosphere such as a vacuum or a high-purity gas in order to prevent oxidative combustion of the active metal.

The amount of active metal powder deposited is extremely important for ensuring airtightness and bonding strength.
It is controlled by the vapor temperature of r, the transfer distance and time from the evaporation source to the base brazing material plate adhering surface, and the temperature of the base brazing material plate adhering surface.

By the way, the active metal as a raw material and the base brazing material plate to which the active metal is adhered may be arranged in the same container chamber, or they may be arranged in separate container chambers to connect the container chambers. It is also possible to adopt a configuration in which they are arranged so as to be connected by parts.

Further, to accelerate the active metal being transferred by applying an electric field, a magnetic field, a gas or the like to the active metal being guided from the evaporation source to the base brazing material plate adhering surface, It is effective in controlling the amount and distribution of the active metal deposited on the adhesion surface and enhancing the adhesion strength.

In this way, the active metal powder on the brazing material plate adhering surface obtained by transferring and depositing the active metal from the evaporation source to the base brazing material plate adhering surface has a cleanliness level suitable for brazing work. And maintain activity. The conventional method of applying the active metal powder to the surfaces to be joined of the ceramic member, or the method of applying the active material powder to the brazing material plate cannot secure the cleanliness and the activity which are preferable for the brazing work.

[0041]

EXAMPLES Before explaining the examples, the evaluation method will be described.

As a method for evaluating the bonding strength and the airtightness, the airtightness was evaluated by measuring the vacuum degree inside the airtight container immediately after the production for all of the 40 airtight containers produced, and the inside of the airtight container after being left for 30 days. The degree of vacuum was measured to determine the airtightness.

Evaluation The bonding strength is evaluated after the airtightness is evaluated. 42% N of the top surface of the alumina cylinder
Tensile metal fittings preliminarily attached by a welding method to the i-Fe alloy disk and the lower end 42% Ni-Fe alloy disk were subjected to a tensile test with an Instron universal testing machine, and their breaking strength,
The joint strength was judged based on the fracture location and fracture surface condition. The fracture surface condition is also referred to in the judgment of the airtightness evaluation. Hereinafter, examples of the present invention will be described with reference to Tables 1 to 4. (Examples: 1 to 3, comparative examples: 1 to 3)

(1) As a metal member, in order to reduce the thermal stress at the time of joining, 42% Ni-Fe having a diameter of 60 mm and a thickness of 7 mm whose coefficient of thermal expansion is similar to that of ceramics.
Prepare an alloy disc. One disc was equipped with an exhaust cock, and the other disc was left as a pair to form a pair. (2) As a ceramic member, the surface roughness of the end face is 0.
Finished to 1 μm, outer diameter 60 mm, wall thickness 5 mm, purity 9
Prepare a 6.2% test alumina cylinder.

(3) As a base brazing material, a eutectic silver brazing plate (JIS, BA) having a thickness of 0.1 mm, an outer diameter of 60 mm and an inner diameter of 50 mm, the surface of which has been cleaned by heat treatment in a hydrogen atmosphere.
G-8, composition 72% Ag-Cu) is prepared.

(4) A brazing material having the following conditions is prepared as a brazing material having a brazing structure for joining. That is, high-purity sponge Ti was placed in a water-cooled copper crucible having a melted raw material storage portion having a diameter of 10 mm and a depth of 5 mm installed in a vacuum container, and the Ti was irradiated with an electron beam to a temperature of about 2000 ° C to 2 ° C.
It was heated to 200 ° C. (crucible temperature). Evaporated Ti vapor was deposited on the brazing material surface to obtain a new brazing structure for bonding. When the surface to be adhered was observed by a scanning electron microscope, the shape of the Ti particles was almost spherical, and the average size thereof was about 0.01 to 0.1 μm (Example- 1) The temperature of the crucible was changed between about 1800 ° C. and 2600 ° C. while adjusting the irradiation energy of the electron beam, the distance between the crucible / wax material, and the degree of vacuum, and the Ti particles were coated on the eutectic silver brazing plate. When deposited and observed, each Ti particle has an average size of about 0.01 μm or less (Comparative Example-1), about 0.1 to 1 μm (Example-2), 1 to 5 μm.
(Example-3) and a brazing material having a brazing structure for bonding having a thickness of 5 μm or more (Comparative Example-2) were obtained. As a reference, a similar airtight container was manufactured by a conventional method of applying Ti powder to a ceramic member. (Comparative example-3).

The soldering work is as follows. That is, the ceramic member (alumina cylinder) is placed in a vacuum container equipped with a high-frequency heating coil so that the upper end surface and the lower end surface of the ceramic member are covered with the metal member (42% Ni—Fe alloy disc). did. Each brazing material having the above-mentioned bonding structure was separately inserted and arranged between the ceramic member and the metal member to manufacture an airtight container (ceramic member / brazing material / metal member). In the disposition, in the brazing material having only one surface coated with Ti, the brazing material was disposed so that the surface coated with Ti was in contact with the ceramic member. An airtight container was manufactured by performing a brazing process while exhausting the inside of the container under the condition that the degree of vacuum was 10 ⁻⁶ Torr and the temperature was 830 ° C. Forty airtight containers were produced under the same conditions, but no environmental problems occurred during production.
About the obtained airtight container, alumina cylinder and 42% Ni
The bonding strength with the -Fe alloy disc and the airtightness were evaluated, and the results are shown in the table.

The particle size of the active metal is about 0.01 μm to 5 μm.
In the range of, good bonding strength and airtightness were exhibited (Example: 1
~ 3). However, when the particle diameter of the active metal is about 0.01 μm or less, the bonding strength is not sufficient and the airtightness is significantly deteriorated. As a result of examination of the interface after joining, it was considered that the active metal was too fine and the quantitative lack of the active metal was the cause (Comparative Example: 1). On the other hand, the particle size of the active metal is about 5μ
Even in the case of m or more, a small amount of leak was found after standing for 30 days (Comparative Example: 1).

As a reference, Ti powder having a diameter of 1 μm mixed in an ethylene glycol solution of polyvinyl alcohol was applied to the upper end surface and the lower end surface of the ceramic member (alumina cylinder). A ceramic member is installed with the metal member (42% Ni-Fe alloy disc) as a lid, and a eutectic silver brazing plate (JIS, BAG-8) is inserted between the end face of the ceramic member and the metal member. After the placement, the degree of vacuum is 10 ⁻⁶ Torr. A brazing process was performed while exhausting the inside of the container at a temperature of 830 ° C. to manufacture an airtight container. Forty airtight containers were manufactured under the same conditions. About the obtained airtight container, an alumina cylinder and 42% Ni-Fe
The bonding strength with the alloy disc and the airtightness were evaluated (Comparative Example: 3), but there was no problem in terms of characteristics. However, this is not preferable because the inside of the vacuum furnace is contaminated by the binder (ethylene glycol solution of polyvinyl alcohol) used at the time of manufacture and the environment around the vacuum furnace chamber is caused by the organic solvent (ethanol). (Example: 4 to 6)

Examples (1 to 3) and Comparative Examples (1 to 3)
In the above, the case where only Ti was put in the water-cooled copper crucible was shown, but the present invention is not limited to this, and Ti and other constituent elements such as Ag and Cu are mixed together, and Ti is obtained by the same operation. , Ag, Cu, etc. may be simultaneously deposited to form a brazing material having a brazing structure for bonding (Example: 4). Also in this case, the diameter of the deposited particles is preferably in the range of 0.01 to 5 μm at the same time as the active metal Ti.

In the above-mentioned Example 4, the case was shown in which Ti, Ag, and Cu were put into one water-cooled copper crucible at the same time and heated, but the vapor pressures were significantly different between Ti, Ag, and Cu. Therefore, the deposition condition (ratio, deposition amount) on the base brazing material was not constant, and it was necessary to control each evaporation rate to some extent. On the other hand, according to the method of installing a plurality of water-cooled copper crucibles, the deposition condition on the base brazing material can be easily controlled by controlling the heating temperature of each crucible (Example 5).

On the other hand, in the above-mentioned Examples 4 to 5, a plurality of water-cooled copper crucibles were simultaneously heated to produce a brazing material having a brazing structure for joining. However, the brazing material of the present invention is simultaneously heated in this way. Not only can it be manufactured, but it can also be attached separately. That is, Ti is put in one water-cooled copper crucible, Ni is put in another crucible, Ti is first deposited on the base brazing material, and after a predetermined time, Ni is deposited on Ti. This makes it possible to stabilize highly active Ti deposited on the base brazing material (Example: 6).
(Example: 7-8)

In the above Examples: 1 to 5 and Comparative Examples: 1 to 3, Ti was shown as a representative example, but the brazing material having the brazing structure for bonding of the present invention is not limited to Ti, and Zr may be used. , Cr, it is possible to obtain almost the same bonding strength and airtightness (Examples: 7 to 8). (Example:
9-12)

In the above Examples: 1 to 8 and Comparative Examples: 1 to 3, the eutectic silver brazing plate was shown as a typical example as the base brazing material, but the brazing material having the bonding brazing structure of the present invention is the base. The brazing material for use is not limited to Ag-based brazing material,
Even if it is a u-based brazing material, a Pd-based brazing material, a Pt-based brazing material, a Cu-based brazing material, or a Ni-based brazing material, the same effect can be obtained with respect to the bonding strength and airtightness (Example: 9). ~ 12).

[0055]

[Table 1]

[0056]

[Table 2]

[0057]

[Table 3]

[0058]

[Table 4]

[0059]

As described above, according to the first aspect of the present invention, the bonding auxiliary component composed of at least one of Ti, Zr and Cr is finely and uniformly dispersed and adhered to at least one surface of the base brazing material. So no need for metalizing,
It is possible to obtain a brazing material for bonding which is excellent in bonding strength, airtight bonding and environmental protection.

According to the second invention, Ti, Zr, Cr
At least one of the bonding auxiliary components is heated in an inert atmosphere, and the heated bonding auxiliary component is applied to the base brazing material, so that the manufacturing process can be simplified and the bonding A brazing material can be obtained.

Claims (8)

[Claims] 1. A T material on at least one surface of a base brazing material.
A brazing material for joining characterized in that a joining auxiliary component comprising at least one of i, Zr and Cr is finely and uniformly dispersed and adhered. 2. The bonding auxiliary component has an average particle size of 0.0.
The brazing material for bonding according to claim 1, wherein the brazing material has a particle size of 1 to 5 μm. 3. The bonding auxiliary component has an average particle size of 0.0.
The brazing material for joining according to claim 1 or 2, which contains the component of the brazing material for a substrate in the form of particles of 1 to 5 µm. 4. The bonding auxiliary component is uniformly and highly dispersed and adhered to one surface of at least one of the components of the base brazing material.
The brazing material for joining according to any one of 1. 5. The base brazing material is an Ag brazing material, an Au brazing material, a Pd brazing material, a Pt brazing material, a Cu brazing material in any of a thin metal plate shape, a linear shape or a powder shape. Material,
The brazing material for joining according to any one of claims 1 to 4, which is one kind selected from the group of Ni brazing materials. 6. The bonding brazing material according to claim 1, wherein the bonding auxiliary component has a protective layer formed thereon. 7. A T material on at least one surface of the base brazing material.
A method for producing a brazing material for bonding, in which a bonding auxiliary component comprising at least one of i, Zr, and Cr is finely and uniformly dispersed and adhered, wherein the bonding auxiliary component is heated in an inert atmosphere. A method for producing a brazing material for bonding, characterized in that a heated bonding auxiliary component is applied to the brazing material for a substrate. 8. The method of manufacturing a brazing material for bonding according to claim 7, wherein an electric field, a magnetic field or a gas is applied to the heated auxiliary component for bonding to deposit the brazing material for substrate.