JP3302121B2 - Manufacturing method of vacuum valve - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a vacuum valve.

[0002]

2. Description of the Related Art Ceramics have excellent heat resistance, insulation properties,
Because of its airtightness, it is used as a material for various electric parts by utilizing its properties. For example, in the case of an insulating container of a vacuum valve, it is necessary to strictly maintain airtightness in order to maintain the inside in a vacuum, and ceramics are often used.

Conventionally, when the ceramic insulating container and the sealing metal are joined via a silver brazing material, a metallized layer (for example,
Mo-Mn), and silver brazing is performed through the metallized layer. That is, as a method of joining ceramics, a method of first performing metallizing on a ceramic member and then brazing to a metal is performed. On the other hand, as a metallizing method, the following method is generally known.

(1) Mo or W is formed on the surface of the ceramic base material.
Is applied in a reducing atmosphere, for example,
A method of heating to 1400 to 1700 ° C and reacting with the ceramic base material to metallize. Ni on the metallization layer if necessary
And the like.

(2) A method of arranging Au or Pt on the surface of a ceramic base material and performing metallization by heating while applying pressure thereto. (3) A method of disposing an active metal such as Ti and Zr and a transition metal such as Ni and Cu on a ceramic base material, and performing a heat treatment at a temperature higher than the melting point of the alloy to perform metallizing (Japanese Patent Application Laid-Open No. 56-163093). issue).

[0006]

However, in the case of the above-mentioned method, the method (1) has a problem in a complicated process such as requiring a high-temperature treatment at the time of metallizing. Further, it is difficult to obtain a sufficient bonding strength even with a slight change in the processing conditions, and the strength varies. In particular, the problem of variation relates to a decrease in airtightness, and has a significant effect on long-term reliability (breaking performance, pressure resistance performance) of a vacuum valve.

In the method (2), an expensive noble metal is used, so that there is a problem in economical efficiency. In addition, a high pressure is required for the purpose of enhancing the adhesion, which is not preferable. There is also a problem with productivity (the pressurized part for obtaining pressure occupies a certain space in the brazing furnace).

On the other hand, in the method (3), since the active metal wets the ceramic base material, almost no special pressurization is required, and the effect of the active metal causes the metallizing with strong adhesion to the ceramic base material. can do. However, where the metal member and the ceramic member overlap sufficiently, the silver brazing shows good bonding, but there is a gap between the metal member and the ceramic member even if there is a slight gap or the portion does not sufficiently overlap. If metal is present, metallization may not be satisfactorily performed, and there is a problem in airtight bonding.

As described above, in any of the methods (1), (2), and (3), the metallizing is performed and then the ceramic insulating container and the sealing metal are brazed, so that the process becomes complicated. One or both of the bonding strength and the hermetic bonding may become a problem. This is probably because the metallizing step and the joining of the ceramic insulating container and the sealing metal member need to be performed separately.
Therefore, techniques for brazing metal to ceramics without prior metallization as described above have been studied.

As a method for joining a metal member and a ceramic member, the following one-step joining method is already known (Japanese Patent Laid-Open No. 59-32628). That is, T as an active metal
An Ag brazing material containing i or / and Zr is used (inserted and joined between a metal member and a ceramic member). Alternatively, an Ag brazing material obtained by laminating the thin plate of the active metal and the Ag brazing material is used (inserted and joined between the metal member and the ceramic member).

[0011] This one-step joining method does not require metallizing, so that the steps can be simplified. However, even in the case of this one-step bonding method, good bonding can be achieved if the same phenomenon as that observed in the above (3), that is, the Ag brazing material is not sufficiently adhered to the metal member or the ceramic member, particularly the ceramic member. In some cases, strength and airtight bonding cannot be obtained. In order to obtain sufficient adhesion, it is necessary to correct the non-uniformity of the pressing force, and there is a problem that a strong pressurization is required.

[0012] As a technique for improving this disadvantage, Japanese Unexamined Patent Publication No.
Japanese Patent Application No. 49758 discloses a method in which active metal Ti and / or Zi powder is used and applied to the surface of a ceramic member as means for obtaining non-uniformity of the pressing force. Since the active metal is powdered, Ti and / or Zr are uniformly distributed and closely adhered to the ceramic member.
A joining state having both joining strength and airtight joining properties is obtained.

However, when the active metal Ti and / or Zr powder is applied to the surface of the ceramic member coated with a binder such as polyvinyl alcohol or ethyl cellulose, the active metal powder is pasteurized with an organic solvent such as ethanol or tetralin. Therefore, measures to reduce environmental problems caused by these binders and organic solvents have become an issue. An object of the present invention is to provide a method of manufacturing a vacuum valve which can perform metallizing and hermetic bonding at the same time, and is useful in terms of reliability, economy and environmental measures.

[0014]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a vacuum vessel having a pair of electrodes which can be separated from each other inside, and hermetically seals an insulating vessel with a sealing metal. In the manufacturing method of the vacuum valve, at least the metal foil Cu
Is coated on one surface with Ag having a thickness of 5 to 1000 μm.
g having an average particle size of 0.01 μm to 5 μm on at least one surface.
An active metal layer made of at least one of Ti, Zr, and Cr on a surface of an insulating container and a sealing metal between the insulating container and the sealing metal; The gist of the present invention is that a brazing connection between the insulating container and the sealing metal is performed while the inside of the insulating container is evacuated and evacuated while being inserted so as to contact the side joint surface.

[0015]

In the present invention, when joining the sealing metal and the insulating container, an active metal such as Ti, Zr, Cr powder or the like is previously applied to the Ag-plated metal foil . This is just a deposit, no metallizing process in particular,
That is, the active metal layer is formed in advance, not the metallized layer, and the deposition of the active metal such as Ti, Zr, and Cr powder is performed not on the ceramic insulating container but on the metal foil. The feature is the point. Further, by performing the Ag plating, it is possible to prevent and reduce the generation of a compound between the metal foil and the active metal.

More specifically, as compared with the conventional one,
By applying the active metal layer to the metal foil, the following effects can be obtained. (1) Insulating containers for vacuum valves (for example, ceramic members) vary in size (outer diameter, inner diameter) and
Since the height is not fixed, there are many technical problems in quality control. Therefore, there are many disadvantages when the active metal layer is applied to ceramic members of various sizes and shapes. For a vacuum valve, for example, a very small thickness of about 5 mm or less and a height of 30 to 10 mm
Brazing to the end face of the ceramic insulating container of 00 mm is performed. In this case, the workability and the non-uniformity of the metallizing layer when attaching an active metal such as Ti, Zr, and Cr powder to the surface to be joined of the end surface of the insulating container made of ceramics are problems.

In order to solve these problems, the metal foil is formed into a bonding brazing material structure having an active metal layer, thereby causing variation and non-uniformity. This is a vacuum having good airtightness and bonding strength by using a bonding brazing material in which active metal (bonding auxiliary component) in an active state is finely and uniformly dispersed and adhered to at least one surface of a metal foil. It can be a valve.

(2) In the case of the conventional method in which an active metal such as Ti, Zr, or Cr powder is applied to a surface to be joined of a ceramic insulating container for a vacuum valve, Ti and Z are simply applied.
The adhesion strength of r, Cr powder and the like is not sufficient, and a heat treatment for metallizing is absolutely necessary.

On the other hand, Ti, Z
In the case of the manufacturing method of the present invention in which an active metal such as r, Cr powder or the like is applied, since the metal foil is much softer than the ceramic member, Ti, Zr, and Cr are sufficiently familiar with the metal foil, In addition, due to the close contact, the Ti, Zr, and Cr powders are finely and uniformly adhered and dispersed to the metal foil without applying an excessive pressing force. As a result, good airtightness and bonding strength can be obtained without the need for heat treatment for metallizing.

(3) The active metal powder such as Ti, Zr, and Cr powders must be in the form of particles having an average particle diameter (particle diameter) of 0.01 μm to 5 μm. If the particle size is 0.01 μm or less, the activity of the powder becomes extremely large, and there is technical difficulty in handling as a brazing filler metal. If the particle size is 5 μm or more, Ti, Z
The existence state of the active metal powders such as r and Cr is not preferable because of a coarse distribution.

(4) Eutectic silver brazing (72 Wt% Ag-Cu alloy) having a melting temperature of 779 ° C. is known as a typical brazing material. In the joining of the present invention, for example, a thickness of 0.1 mm
One side (or both sides) of eutectic silver brazing plate
Active metal powders such as Zr and Cr powders are adhered.
However, the present invention is not limited to this structure. The components Ag and Cu of the eutectic silver solder are separately formed into an Ag thin plate and a Cu thin plate.
After adhering r and Cr powders and laminating and integrating, a Cu thin plate may be arranged so that the composition ratio becomes 72 Wt% Ag-Cu alloy.

The brazing material is not limited to the silver brazing material, but can be made of the Au brazing material, the Pd brazing material, the Pt brazing material, the Cu brazing material by adopting the joining brazing material structure of the present invention.
It may be a brazing filler metal or a Ni brazing filler metal.

(5) Apply T to the surface to be joined of the ceramic member.
In the case of the conventional method in which an active metal such as i, Zr, or Cr powder is adhered, at the time of the binder application work performed on the surface to be joined of the ceramic member, the binder easily adheres to a portion other than a predetermined joint portion, and the active material is activated at a portion other than a necessary portion. This results in the deposition of metal powder. Furthermore, since the active metal powder is made into a paste state with an organic solvent, depending on the concentration of the organic solvent, the active metal powder may flow out of a predetermined joining portion of the surface to be joined of the ceramic member. The result is powder deposition. Such adhesion to places other than the necessary places causes a withstand voltage failure of the vacuum valve. As a method of preventing these, in the conventional method, a complicated masking is applied to a portion which is not required to be joined.

In the brazing material structure according to the present invention, since the brazing material is disposed only at the portion where bonding is required, simplification of the process such as no masking and improvement in reliability are obtained. (6) Ti, Zr, Cr
In the case of the conventional method of depositing an active metal such as powder, as described above, since a paste and an organic solvent are used, the inside of the heating furnace, the exhaust device, the contamination of the surface of the article to be joined, Although influences and the like cannot be avoided, in the method of the present invention, these concerns do not arise because no paste or organic solvent is used.

(7) The adhesion strength of the active metal to the metal foil is as follows:
Since it affects the stability as a brazing material, it is important for the joining strength and airtightness after brazing. One of the factors affecting the adhesion strength of the active metal is the cleanliness of the active metal and the surface to be adhered. However, in general, it is difficult to completely clean the ceramic surface, and usually, ceramics have extremely poor wettability with metal.
For this reason, the ceramic member used when the surface to be adhered is the conventional method has poor adhesion strength.

On the other hand, since the brazing material (metal), which is the object of the present invention, has good wettability as the surface to be adhered, it has a higher adhesion strength to the ceramic member, so that a stable bonding result can be obtained.

[0027]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail.
The gist of the production method of the present invention is that the active metal powder is finely and uniformly coated on at least one surface of a metal foil (plate, wire, powder) or a sealing metal provided with a plating layer such as Ag if necessary. Highly dispersed and adhered.

Therefore, it is important to determine under what conditions the active metal powder is adhered to the surface of the metal foil or brazing material. As described above, the T on one surface of the metal foil
i, Zr, Cr, etc. have an average particle diameter (particle size) of 0.01μ.
It is composed of active metal powder having a particle size of m to 5 μm. When a powdery active metal prepared in advance is used, such an active metal powder is extremely active, so it is necessary to strictly control the steps from storage to application to a metal foil.

On the other hand, as another method, when using a lump of active metal, the lump of Ti, Zr, or Cr is made into a vapor state, and then the lump is guided to a separately prepared metal foil (Ag, Cu, Ag-Cu plate or the like). Then, a method of solidifying and attaching the surface may be used.

The means for converting the active metal into a vapor form may be any means as long as a predetermined vapor temperature can be obtained, such as a high energy density beam such as electron beam heating, laser heating, arc heating, or resistance heating. Does not matter. The heating is performed in an inert atmosphere such as a vacuum or a high-purity gas in order to prevent the active metal from oxidizing and burning.

The amount of the active metal powder deposited is extremely important for ensuring airtightness and bonding strength.
It is controlled by the vapor temperature of Cr, the transfer distance and time from the evaporation source to the surface where the brazing material plate is adhered, the temperature of the surface where the brazing material plate is adhered, and the like.

The active metal as a raw material and the metal foil to which it is applied may be arranged in the same container chamber, or they may be arranged in separate container chambers and connected between the container chambers by connecting portions. You may arrange so that it may be.

An electric field, a magnetic field, heat, a gas, or the like is applied to the active metal being guided from the evaporation source to the surface to which the metal foil is attached, thereby accelerating or decelerating the active metal being transferred.
Providing the required energy is effective for controlling the amount and distribution of the active metal on the surface where the brazing material plate is attached, and for increasing the adhesion strength.

In this manner, the active metal powder on the metal foil surface obtained by moving and depositing the active metal from the evaporation source to the surface where the brazing material plate is adhered has a cleanness that is preferable for the brazing operation. Maintains activity and quantity. In the conventional method of applying active metal powder to the surface to be joined of the ceramic member or the method of applying the active metal powder to a brazing material plate, there are many variations, and it is possible to ensure cleanliness, activity, and amount that are favorable for brazing work. Can not.

According to the present manufacturing method, the insulating container and the sealing metal were joined under the following various conditions.
These will be specifically described with reference to Table 4. In addition, # 1 of Table 1 or Table 2 is on the metal foil Cu,
30 μm Ag plating, active metal deposited thereon, # 2 when active metal Ti was deposited simultaneously with Cu deposition, # 3 after active metal Ti deposition,
An example in which Cu is applied thereon is shown.

[0036]

[Table 1]

[0037]

[Table 2]

[0038]

[Table 3]

[0039]

[Table 4]

(Examples 1-4, Comparative Examples 1-2) Outer Diameter
A ceramic insulating container (main component: AL ₂ O ₃ ) having a size of 6.7 cm, an inner diameter of 5.6 cm and a height of 10 cm was prepared, and the surface roughness of the end face was polished to about 0.2 μm. A 42% Ni-Fe alloy having a thickness of 2 mm was prepared as a sealing metal. As metal foil,
A Cu foil having an outer diameter of 6.7 cm, an inner diameter of 5.6 cm, and a plate thickness of 0.1 mm was prepared. 72% Ag with 0.1mm thickness as Ag brazing material
-A Cu alloy plate was prepared.

An arc-melted Ti target is used as an active metal source, and as a heating means, arc discharge, ion plating, electron impact, sputtering, etc. are appropriately selected or combined, and the evaporated or ionized Ti is converted into the metal foil (Cu). (Foil) to the surface. The average particle diameter of the Ti particles on the metal foil surface was controlled to 0.01 to 20 μm while controlling the injection energy for evaporation or ionization (Example 1).
-4, Comparative Examples 1-2). While controlling the working time, the amount of Ti particles on the metal foil surface was about 1 mg / cm ² .

Then, the Ti on the metal foil is placed so as to be in close contact with the end surface of the ceramic insulating container, and the sealing metal and the ceramic insulating container are hermetically bonded at a temperature of 1020 ° C. in a hydrogen atmosphere. went. In this case, there is no problem if the brazing material for bonding is arranged on any side between the metal foil and the ceramic member or between the metal foil and the metal member (sealing metal). There is no problem if the metal foil is flat or corrugated.

The peeling force of the metal / ceramic bonding portion of the ceramic insulating container after the hermetic bonding was measured using an Instron universal testing machine. A tripping force of 700 kg or more when using a ceramic insulating container of the above dimensions was judged to be acceptable.

The airtightness was evaluated by using a He leak detector to determine that the leak amount was 5 × 10 ⁻¹⁰ (Torr · L /
sec) The following were accepted. In addition, withstand voltage characteristics evaluation was performed at both ends of the ceramic insulating container after the hermetically sealed bonding.
The withstand voltage characteristics when an impulse voltage of 0 to 120 KV was applied 10 times were measured, and the voltage value and the number of times of dielectric breakdown when dielectric breakdown was indicated were shown. A case where the dielectric breakdown voltage value was 95 KV and the number of times of dielectric breakdown was zero was regarded as acceptable.

The evaluation results are shown in Tables 1 and 2 (Examples 1 to 4 and Comparative Examples 1 and 2). As is clear from Tables 1 and 2, in the case where there is no Ti particle on the metal foil surface, not only the bonding strength (tripping force) is low, and the problem is easily caused, but also the internal due to insufficient bonding. The predetermined withstand voltage characteristics cannot be maintained due to a decrease in the degree of vacuum (Comparative Example 1). If the average particle diameter of the Ti particles is 5 μm or more, a problem is likely to occur in the uniform distribution of the Ti particles on the metal foil surface, so that the airtightness varies and the bonding strength also varies ( Comparative Example 2). Therefore, the average particle diameter of the Ti particles on the metal foil surface is preferably in the range of 0.01 to 5 μm (Examples 1 to 4). Further, within this range, a predetermined withstand voltage characteristic is maintained.

(Examples 5 to 6 and Comparative Example 3) A Cu metal foil and a Ti electrode were opposed to each other, and the distance between the electrodes, the parallelism between the electrodes, the arc current at the time of arc discharge, the applied voltage, etc. were adjusted. An active metal (Ti) having an average particle diameter of 0.05 μm was applied to one surface of the Cu metal foil. 0.1 ~ 10mg / cm ²
(Examples 5 to 6) and 45 mg / cm ² (Comparative Example 3) were selectively controlled. In this way, a predetermined amount of the active metal (Ti) is applied to one surface of the metal foil (Cu), and the surface on which the Ti is applied is brought into close contact with the ceramic member (ceramic insulating container). Arrangement: The other surface of the metal foil (Cu) was arranged so as to be in contact with the metal member (sealing metal). That is, a metal foil having an active metal layer was disposed so as to be interposed between both members. In this way, the hermetically sealed bonding between the sealing metal and the ceramic insulating container was performed at a temperature of 1020 ° C. in a hydrogen atmosphere (Examples 5 to 6, Comparative Example 3).

Then, the ceramic insulating container after the hermetic bonding was evaluated in the same manner as described above. The evaluation results are shown in Tables 1 and 2. As is clear from Tables 1 and 2, the amount of the active metal deposited on the metal foil surface was 0.1 to 10 mg / cm.
^In the case of ² , stable bonding strength, airtightness and predetermined withstand voltage characteristics are maintained. However, when the deposition amount is 45 mg / cm ² , the active metal is often deposited on unnecessary portions on the ceramic member surface, and as a result, there is no problem in the bonding strength and airtightness. Degradation of withstand voltage characteristics (reduction of withstand voltage value, occurrence of variation) is remarkable. Therefore,
The amount of the active metal deposited on the metal foil surface is preferably in the range of 0.1 to 10 mg / cm ² (Examples 5 to 6).

(Examples 7 to 10) In the above Examples 1 to 6 and Comparative Examples 1 to 3, examples were given in which Ti was selected as the active metal.

However, the present invention is not limited to this, and the type of active metal is not limited to Ti, but may be Zr, Cr (Examples 7 to 8), Ti-Zr, Ti-Cr.
Similar effects were obtained even in the case of mixing as in (Examples 9 to 10).

(Examples 11 to 15) In Examples 1 to 10 and Comparative Examples 1 to 3, examples were given in which Cu was selected as the metal foil.

However, the present invention is not limited to this, and the type of metal foil is not limited to Cu, but may be Ag (Example 11), Ag-Cu, Ag-Cu-In, Ag-
Similar effects were obtained even with a mixture such as Cu-Sn and Cu-Mn (Examples 12 to 15).

Since the metal foil used here is also an excellent brazing material, it is not necessary to insert a brazing material for joining in the hermetic joining operation. (Examples 16 to 18) In Examples 1 to 15 and Comparative Examples 1 to 3, the active metal Ti was directly adhered to the metal foil surface.

However, the present invention is not limited to this, and for the purpose of inhibiting and reducing the formation of a compound between the metal foil and the active metal, an Ag layer having a thickness of, for example, about 30 μm is formed on the metal foil surface.
Plating is useful for further stabilizing the airtightness and bonding strength (Example 16). That is, when the temperature is increased, the Ag plating on the metal foil Cu is melted and mixed with the active metal Ti to form Ag-Cu-Ti. If the metal foil Cu not yet melted is present, this Cu Acts as a weight (weighting), so that Ag-Cu-
Ti is pressed against a ceramic member (ceramic insulating container). Because it is in a liquid state, it spreads so as to closely contact and penetrate into the details, and is hermetically sealed.

When the metal foil is made of Cu, when the thickness (Ag amount) of the Ag plating is adjusted so as to become the composition of the Ag-Cu brazing material after dissolution, it is not necessary to insert the brazing material. Joining work is possible.

Further, when depositing the active metal (Ti) on the surface of the metal foil, it is beneficial to lower the melting point of Ti by mixing and depositing Cu simultaneously with the deposition of Ti. This contributes to improvement in reliability (Example 17).

In depositing the active metal (Ti) on the metal foil surface, Cu may be coated on the metal foil surface after the Ti deposition (Example 18). (Examples 19 to 21) In Examples 1 to 18 and Comparative Examples 1 to 3, a metal foil (Cu, Ag, A) was placed between a ceramic member (ceramic insulating container) and a metal member (sealing metal).
g-Cu-In, Ag-Cu-Sn, Cu-Mn).

However, the present invention is not limited to this.
Active metal Ti may be directly applied to the surface of a metal member (sealing metal) such as u-Ni, Fe-Co, Fe-Ni (Examples 19 to 21).

[0058]

As described above, according to the present invention, at least the metal foil Cu is used for joining the insulating container and the sealing metal.
One surface is coated with a 5- to 1000-μm-thick Ag, and the Ag
On at least one surface of an average particle size of 0.01μm~5μm
An active metal layer made of at least one of Ti, Zr, and Cr on a surface of an insulating container and a sealing metal between the insulating container and the sealing metal; Since it was inserted and installed so as to be in contact with the side joint surface, and the inside of the insulating container was evacuated and the brazing was performed between the insulating container and the sealing metal, metallizing and airtight joining could be performed simultaneously, It can improve reliability, economy, and environmental friendliness.

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masako Nakahashi 1 Toshiba-cho, Komukai Toshiba-cho, Saisaki-ku, Kawasaki-shi, Kanagawa Prefecture (72) Inventor Takashi Kusano 1-Toshiba-cho, Fuchu-shi, Tokyo (56) References JP-A-1-102822 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) H01H 33/66

Claims (5)

(57) [Claims] 1. A method for manufacturing a vacuum interrupter to hermetically sealed insulating container sealing metal to form a vacuum vessel equipped with a detachably pair of electrodes inside, less metal foil Cu
In addition, one surface is coated with Ag having a thickness of 5 to 1000 μm,
The average particle diameter on at least one surface of the Ag is 0.01 μm or more.
An active metal-coated brazing material having a surface-coated active metal layer made of at least one of Ti, Zr, and Cr having a thickness of 5 μm is provided between the insulating container and the sealing metal. A method of manufacturing a vacuum valve, comprising interposing and installing the insulating container so as to be in contact with the insulating container side joining surface, and performing brazing between the insulating container and a sealing metal while evacuating the inside of the insulating container. 2. A true having a pair of electrodes which can be separated from each other inside.
Hermetically seal insulating container with sealing metal to form empty container
In the method for manufacturing a vacuum valve, at least
Ti, Zr having an average particle size of 0.01 μm to 5 μm on one surface;
And an active metal layer comprising at least one of Cr and
Surface coating, oxidation or contamination of the surface of the active metal layer
Active metallized brazing material coated with a protective layer that inhibits progress
Between the insulating container and the sealing metal,
Inserted and installed so as to contact the insulating container side joint surface,
While the inside of the insulating container is evacuated,
Manufacturing method of vacuum valve characterized by performing brazing
Law. 3. An active metal-deposited brazing material having an acid on its surface.
That a protective layer that suppresses the progress of
The method for manufacturing a vacuum valve according to claim 1, wherein: 4. An average thickness of the active metal layer is 0.01 μm.
It is a main component of wax material exhibiting a particle size of ~ 5 μm.
2. The composition according to claim 1, wherein the composition contains Ag or Cu.
4. The method for producing a vacuum valve according to any one of claims 1 to 3. 5. A true having a pair of electrodes which can be separated from each other inside.
Hermetically seal insulating container with sealing metal to form empty container
In the method for manufacturing a vacuum valve, at least
Ti, Zr having an average particle size of 0.01 μm to 5 μm on one surface;
And at least one of Cr and an average of 0.01
It is the main constituent of wax material with particle size of μm ~ 5μm.
An active metal layer containing a certain Ag or Cu
Activated metal-deposited brazing material, said insulating container and sealing metal
Between the active metal layer to contact with the insulating container side bonding surface
So that the inside of the insulating container is evacuated and evacuated.
It is characterized by performing brazing between the insulating container and the sealing metal.
Method of manufacturing a vacuum valve.