JPH0485116U - - Google Patents
Info
- Publication number
- JPH0485116U JPH0485116U JP12949890U JP12949890U JPH0485116U JP H0485116 U JPH0485116 U JP H0485116U JP 12949890 U JP12949890 U JP 12949890U JP 12949890 U JP12949890 U JP 12949890U JP H0485116 U JPH0485116 U JP H0485116U
- Authority
- JP
- Japan
- Prior art keywords
- encoder
- diffraction grating
- interference fringes
- reflecting means
- superimposing means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001427 coherent effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12949890U JPH0485116U (cs) | 1990-11-29 | 1990-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12949890U JPH0485116U (cs) | 1990-11-29 | 1990-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485116U true JPH0485116U (cs) | 1992-07-23 |
Family
ID=31876898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12949890U Pending JPH0485116U (cs) | 1990-11-29 | 1990-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485116U (cs) |
-
1990
- 1990-11-29 JP JP12949890U patent/JPH0485116U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5671050A (en) | Method and apparatus for profiling surfaces using diffracative optics | |
| JP2003232608A (ja) | 凹面及びホログラムを有する非球面測定装置及び方法 | |
| JP4023923B2 (ja) | 光学式変位測定装置 | |
| JPH0785010B2 (ja) | 位置測定装置 | |
| JPH0485116U (cs) | ||
| JPH046884B2 (cs) | ||
| JPH0485115U (cs) | ||
| JPH0416177Y2 (cs) | ||
| JP2004061186A (ja) | 軟x線干渉計 | |
| JPS62200224A (ja) | 変位測定装置 | |
| JPS5945506U (ja) | 光学式測長スケ−ル | |
| JP3067041B2 (ja) | ホログラム干渉計 | |
| JPS6167512U (cs) | ||
| JPH0485114U (cs) | ||
| JPS6350703A (ja) | 膜厚測定装置 | |
| JPH0239110U (cs) | ||
| JPS62163921A (ja) | ロ−タリ−エンコ−ダ− | |
| SU1619014A1 (ru) | Интерферометр | |
| JPH041422U (cs) | ||
| JPH0265114U (cs) | ||
| JPH0230723Y2 (cs) | ||
| Xu et al. | Grating Interferometer Using±1st Order Beams for Step-Profile Altitude Difference Measurement | |
| JPH0451607U (cs) | ||
| JPH02110812U (cs) | ||
| JPH0283416U (cs) |