JPH0480046U - - Google Patents
Info
- Publication number
- JPH0480046U JPH0480046U JP12465390U JP12465390U JPH0480046U JP H0480046 U JPH0480046 U JP H0480046U JP 12465390 U JP12465390 U JP 12465390U JP 12465390 U JP12465390 U JP 12465390U JP H0480046 U JPH0480046 U JP H0480046U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- heating furnace
- manufacturing apparatus
- semiconductor device
- device manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010926 purge Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12465390U JPH0480046U (OSRAM) | 1990-11-27 | 1990-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12465390U JPH0480046U (OSRAM) | 1990-11-27 | 1990-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0480046U true JPH0480046U (OSRAM) | 1992-07-13 |
Family
ID=31872290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12465390U Pending JPH0480046U (OSRAM) | 1990-11-27 | 1990-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0480046U (OSRAM) |
-
1990
- 1990-11-27 JP JP12465390U patent/JPH0480046U/ja active Pending
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