JPH0479405B2 - - Google Patents
Info
- Publication number
- JPH0479405B2 JPH0479405B2 JP11534982A JP11534982A JPH0479405B2 JP H0479405 B2 JPH0479405 B2 JP H0479405B2 JP 11534982 A JP11534982 A JP 11534982A JP 11534982 A JP11534982 A JP 11534982A JP H0479405 B2 JPH0479405 B2 JP H0479405B2
- Authority
- JP
- Japan
- Prior art keywords
- angle
- incidence
- monitor
- ellipsometry
- parameters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 12
- 238000000572 ellipsometry Methods 0.000 claims description 9
- 239000010408 film Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 230000010287 polarization Effects 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11534982A JPS597226A (ja) | 1982-07-05 | 1982-07-05 | 偏光解析モニタの入射角測定法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11534982A JPS597226A (ja) | 1982-07-05 | 1982-07-05 | 偏光解析モニタの入射角測定法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS597226A JPS597226A (ja) | 1984-01-14 |
| JPH0479405B2 true JPH0479405B2 (enExample) | 1992-12-15 |
Family
ID=14660319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11534982A Granted JPS597226A (ja) | 1982-07-05 | 1982-07-05 | 偏光解析モニタの入射角測定法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS597226A (enExample) |
-
1982
- 1982-07-05 JP JP11534982A patent/JPS597226A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS597226A (ja) | 1984-01-14 |
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