JPH04792B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrostatic micro object suction device for freely sucking and removing micro objects such as micro parts, materials, seeds, chemicals, pellets, etc.

The suction and removal of such minute objects has conventionally been carried out using a mechanical method using a gripping mechanism such as tweezers, but although this method allows collection and removal of individual objects, it is difficult to collect and remove many minute objects at the same time. It is unsuitable for attaching and detaching objects, and even if the object were to be picked up and detached one by one, when the object was extremely small, it would be extremely difficult to pick it up using the appropriate knob.
On the other hand, while suctioning air from the tip of the suction tube, it is brought close to the target object, and the negative pressure generated by the suctioned air suctions and holds it at the tip.
A so-called suction tube method has been proposed in which suction air is stopped and desorption is performed as necessary, making it possible to more freely suction and desorption of minute objects. However, it is necessary to suction a large amount of air, which increases the capacity and power required for the suction pump, resulting in a significant economic disadvantage.

The object of the present invention is to overcome all of the above-mentioned drawbacks and to provide a means for extremely easily, reliably, and economically carrying out suction and desorption of individual objects and simultaneous adsorption and desorption of a large number of objects. It is in.

The present invention achieves this object by effectively applying electrostatic force by applying a new method as described below.

First, the principle of the present invention will be explained below using FIGS. 1 to 4. Each of these figures explains the principles of the invention, but also illustrates longitudinal cross-sectional views of different embodiments of the invention.

In Fig. 1, reference numeral 1 denotes an annular power supply electrode made of a grounded conductor plate with a hole 2 in the center, and a disk-shaped metal high voltage electrode 4 is connected by a cylindrical insulator 3 having a cavity concentric with the hole 2. The micro-object gripping portions are configured to face each other. However, the power supply electrode 1 of the high voltage electrode 4
The surface of the surface 5 facing 5 is made of a high-resistance material having extremely low conductivity (e.g. silicon carbide,
Completely coated with a layer (plate-like, film-like, etc.) of silicon oxide, silicon nitride, glass, high-resistance conductive rubber, ceramic or plastic material with slight volume leakage resistance or surface leakage resistance, or cellophane or cellophane tape, etc. Covered. The high-voltage electrode 4 is embedded in a cylindrical insulator 9 so that its back surface 7 and side surfaces 8 are completely covered, and a protective high resistance 11, a cable 12, and a switch are connected through a hole 10 in the center of the high-voltage electrode 4. 13 to the negative terminal of a DC high-voltage power supply 14 whose positive terminal is grounded, thereby connecting the power supply electrode 1 and the high-voltage electrode 4 with the former connected to the positive terminal,
A high DC voltage is applied with the latter polarity being negative. 15 is grounded through a conductor casing surrounding the outside of the insulators 3 and 9. Now, a minute object 17 enters inside the internal cavity 16 of the cylindrical insulator 3,
It is assumed that the top portion thereof contacts the lower surface of the high-resistance object layer 6 at a point 18, and the lower portion or side portion of the electrode 17 contacts the inner wall of the hole 2 of the power supply electrode 1 at a point 19.
In this case, the minute object 17 is generally strongly attracted to the high-resistance object layer 6 as long as the voltage V of the DC power source is sufficiently high. For example, the inner diameter of hole 2 and cavity 16 is 4
mm, the thickness of the high-resistance object layer 6 is 0.2 mm, the thickness of the top and bottom of the insulator 3 is 2 mm, and when sucking seeds with a diameter of about 3 to 4 mm, V = 1 [KV] to almost absorb the own weight of the seeds. When the electrostatic attraction force exceeds V≧3KV, the attraction force becomes extremely strong and the seeds do not fall even if a considerable impact is applied. However, switch 13
When the seed is disconnected from the power source 14 and connected to ground, the seeds immediately fall out and are thereby free to attach and detach. In order for such attraction by electrostatic force to be possible, the minute object 17 must be a conductor or a high resistance object with slight conductivity, but most of the minute objects targeted in actual applications fall into this category. do. Its suction mechanism is as follows.

Current now flows from the power supply electrode 1 into the minute object 17 through the contact point 19, passes through the contact point 18, passes through the high resistance object layer 6, and enters the high voltage electrode 4. In this case, the point of contact 18 has the highest electrical resistance in the current path.
With a contact resistance of , most or a considerable part of the applied DC voltage V becomes a voltage drop due to this contact resistance. This contact resistance consists of both concentrated resistance due to current concentration at the contact point 18 and boundary resistance caused by the movement of electrons or ions across the adsorbed gas layer at the contact point. As a result of the appearance of a potential difference in a portion corresponding to V in the close vicinity, the lower surface of the surrounding high-resistance object layer 6 and the upper surface of the minute object 17 form one capacitor, which corresponds to being charged by this large potential difference. Negative and positive surface charges appear, creating a large electrostatic attraction between them. As a result, the minute object 17
is strongly attracted to the lower surface of the high-resistance object layer 6. Therefore, in this case, it is necessary that the minute object 17 is in complete contact with the inner wall of the hole 2 of the power supply electrode 1 and the lower surface of the high resistance object layer 6, and that the minute object is a conductor or has a height that allows a small amount of current to flow. The condition for the attraction force generated by the above-mentioned mechanism is that the object is a resistive object and is not a perfect insulator, and if the minute object 1
When 7 is a perfect insulator, no current flows therein, so a large potential difference due to contact resistance does not appear at the contact point 18, and the electrostatic attraction cannot occur. Even if 17 has a slight conductivity, if its electrical resistance is too high, its relaxation time τ=ερ (where ε=17 has a dielectric constant, ρ=1
7 (resistivity) becomes too large, it takes too long for a sufficient voltage to be generated in the capacitor around the contact point 18, and during this time a sufficient attractive force is not developed, so that it is of no practical use. Generally, when the dielectric constant of a minute object is 1, when ρ = 10 ¹³ [Ω-cm], τ = 1
[sec], so in practical terms, the value of ρ smaller than this is a physical property condition of the target object in order for the electrostatic attractive force to be utilized.

The role of the high-resistance object layer 6 is to ensure safety by preventing the lower surface 5 of the high-voltage electrode 4 from being exposed (1) and to limit the current during suction (2) to an appropriate value. Regarding 1, if the lower surface 5 of the high voltage electrode 4 is exposed, the conductor is connected to this and the power supply electrode 1.
If you shoot the
There is also a risk that excessive current will flow and damage the power supply 14. Regarding 2, the purpose is to protect the power source 14, reduce current capacity, and prevent temperature rise and burnout due to Joule heat at the contact points 18 and 19.
However, the same thing as the resistivity ρ of the minute object 17 also applies to the electrical resistivity ρ ₁ of the high-resistance object layer 6. First, when ρ ₁ →∞, a perfect insulator does not generate sufficient attraction force. This is because the capacitor around the contact point 18 is not charged. Also, at this time, there is often 1 on the bottom of 6.
A positive charge is injected from 7 through the contact point 18, so that the potential of the lower surface approaches ground potential and the attractive force may disappear immediately. Next, even if 6 is slightly conductive, ρ ₁ 10 ¹³ [Ω−
cm] Otherwise, the development of suction force will be delayed and it will not be practical, as mentioned above. Further, the lower limit of ρ ₁ is preferably approximately 10 ⁹ [Ω-cm] or more. Cellophane or cellophane tape is an example of material 6 that satisfies these conditions and provides optimal results.

In this case, even if the surface of the power supply electrode 1 facing the hole 2 is also covered with a high-resistance material layer similar to that of the layer 6, there is almost no change in the attraction force. In addition, one or both of the power supply electrode 1 or the high voltage electrode 4 having the high resistance object layer 6 may be made of a material with sufficient resistivity such as glass, ceramic, high resistance conductive rubber, silicon carbide, silicon oxide, or silicon oxide having a silicon nitride film. Even if it is made of a high-resistance material, there is almost no change in its suction force, and it is possible to ensure the same safety and current-limiting properties as when the high-resistance material layer 6 is used. However, the upper limit of the resistivity of the high-resistance material for electrodes used in this case is 10 ¹³ [Ω-cm] or less, preferably 10 ¹¹
[Ω-cm] or less, and the lower limit is practically 10 ⁹
It is preferable that it is [Ω-cm] or more.

FIG. 2 shows an example in which a circular electrode 21 supported by a conductor support arm 20 extending from a casing 15 is used as a power supply electrode instead of the circular electrode 4 made of a perforated conductor plate shown in FIG. Item 3 has been omitted. Furthermore, since the high-resistance object layer 6 has a current-limiting protection effect, the protective resistor 11 is also omitted. The high-voltage electrode 4 is formed on the back surface 5 of the high-resistance object layer 6 using a metal vapor deposition film, a conductive paint, or a thick film printing method, and the vicinity of the connecting portion of the cables 12 and 6 is integrally formed with an insulating material. It is molded inside 9. The numbers and names of other elements are number 1.
Since it is exactly the same as that shown in the figure and there is no difference in the suction mechanism, the explanation will be omitted.

FIG. 3 is also a modification of the embodiment shown in FIG. 1, in which a bowl-shaped high-voltage electrode 22 made of a high-resistance material is used instead of the combination of the high-voltage electrode 4 and the high-resistance material layer 6.
And this is molded into the insulator 9.
Therefore, the high-voltage electrode 22 has all the functions of ensuring safety and limiting the current that the high-resistance object layer 6 has, and the high-voltage electrode 6 is omitted. However, protective resistance 1
1 is left for current limiting when the high voltage electrode 22 is damaged. Furthermore, the lower surface of the electrode 22 is shaped like a bowl to increase the capacitance between it and the minute object 17 during suction, thereby increasing the suction force. The names and functions of other elements are the same as those in FIG. 1, and the suction mechanism is also omitted because there is no difference. In the examples shown in FIGS. 1, 2, and 3, the high voltage electrode is in a recessed position relative to the power supply electrode.
These are generally referred to as concave types.

FIG. 4 shows a perspective view of a protruding electrode type embodiment (generally referred to as a convex type) of the present invention, which is significantly different from the previous three examples. In this example, a strip-shaped high-voltage electrode 24 whose surface is covered with a high-resistance object layer 23 such as glass or cellophane tape, and a conductor electrode 25 of the same shape to be grounded are placed at a distance smaller than the target micro-object 17 from each other. are separated from each other and face each other, and both are embedded inside the cylindrical insulator 26, with the lower ends 27 and 28
protrudes from the lower surface 29 of 26 by a distance smaller than the target minute object 17. A negative DC high voltage is applied to the high voltage electrode 24 from the DC high voltage power supply 14 via the cable 12, the switch 13, and the protective resistor 11. Now, the minute object 17 is at the lower end 2 of both electrode parts.
When it comes into contact with 7, 28, as mentioned above, due to the electrostatic attraction force acting on the capacitor portion around the contact points 18, 19, the minute object 17 overcomes its gravity and is strongly attracted to 27, 28. Lifted up. Next, when the switch 13 is turned to the ground side, this suction force disappears and the minute object falls. In this case, if the width of the tips 27 and 28 is made approximately equal to the size of the minute object 17, and the protrusion length thereof is made smaller (approximately 1/2 or less) than the size of the minute object as described above, many minute objects Only one object can be extracted from the surface of a collection of objects by suction. Furthermore, by increasing the widths 27 and 28, the number of suction pieces can be increased to 2, 3, 4, . . . . Furthermore, if the length of the protruding portions 27 and 28 is increased, minute objects will also adhere to the sides and be attracted, making it difficult to accurately control the number of objects to be attracted. In this case, if the tips 27 and 28 are opened in a V-shape or each is cut diagonally to form a V-shape, the contact points 18 and 19
This is particularly suitable because it is possible to increase the capacitor capacity between the surrounding minute objects 17 and increase the suction force, and also to facilitate the contact between the minute objects 27 and 28.

In this case, if the electrodes 24 and 25 are made of conductive rubber with a suitable high resistance (approximately 10 ⁸ Ω-cm) to give them flexibility, the contact property will be further improved, and the effect of the above-mentioned V-shaped shape will be improved. can be further increased. In addition, in order to accurately collect only one minute object, the tip 27,
It is also preferable that the gaps between the holes 28 are narrowed downwardly, and in some cases, their widths themselves may also be formed so as to be narrowed downwardly.
Further, it goes without saying that the ground electrode 25 does not need to be embedded inside the cylindrical insulator 26, and may be arranged and fixed along the outer wall thereof in parallel with the high voltage electrode 24. In this case, the role of the insulating cylinder is to provide complete insulation between both electrodes and to limit the protruding length of the tip 27 to prevent minute objects from adhering to the sides of the electrodes or to limit them to a certain range. There is no change. Moreover, instead of the combination of the high voltage electrode 24 and the high resistance object layer 23 formed on the surface thereof, the high voltage electrode is directly formed with the above-mentioned high resistance object having slight conductivity,
It goes without saying that the high-resistance object layer 23 may be omitted. Furthermore, it goes without saying that the ground power supply electrode 25 may also be formed of the above-mentioned high-resistance material having a slight electrical conductivity instead of a conductor. It goes without saying that if necessary, the protruding length of the tips 27 and 28 of both electrodes and the gap between them may be freely changed. However, after adjusting it, you will be able to suction it.

A method for inexpensively manufacturing the high-voltage electrode covered with the high-resistance material layer used in this example is to bend an electric wire covered with enamel, cellophane, or cellophane tape into an appropriate shape such as a U-shape, and then cut both legs of the wire. It is preferable to insert and fix the electrode into the insulator 26, make the U-shaped bottom protrude, and use this as a high-voltage electrode. Alternatively, the vinyl-coated electric wire may be cut, the ends thereof insulated and sealed with the above-mentioned high-resistance object, and then bent into any suitable shape such as an L-shape or a V-shape.

The above is an explanation of the principle and structure of the novel electrostatic micro object suction device according to the present invention.

That is, in the novel electrostatic micro object suction device according to the present invention, at least the surface portion thereof has ^an
10 ^-13 It consists of a high-resistance object with an extremely low conductivity of about [υ/cm], and has a high-voltage electrode insulated and supported by an insulator, and is placed opposite to this with an appropriate gap. It has a grounded power supply electrode,
It has a DC high voltage power supply for applying a DC high voltage between the high voltage electrode and the power supply electrode, and has a switch that intervenes in the path between the high voltage electrode, the DC high voltage power supply and the power supply electrode to open and close it. Then, turn on the switch, apply a high DC voltage between the high voltage electrode and the power supply electrode, bring both electrodes into contact with the target minute object, and use the electrostatic attraction force generated at this time to strongly attract it. Then, the micro object is detached by turning off the switch at a predetermined position and time to eliminate the suction force.

In this case, charge is accumulated in the capacitance between the high-voltage electrode and the grounded power supply electrode and other grounded parts when the switch is turned on, and this charge is retained for a long time even after the switch is turned off, resulting in an attractive force. does not disappear, and minute objects are retained without being detached. Therefore, a mechanism is required to ground the high voltage electrode immediately upon switch-off. The switch 13 in the examples shown in FIGS. 1 to 4 has this mechanism. However, when inserting the switch into the ground terminal side of the high voltage power supply 14, a separate mechanism is required to ground the high voltage output terminal of the high voltage power supply when the switch is turned off.

The novel electrostatic micro object suction device according to the present invention can collect micro parts, materials, seeds, chemical pellets, etc.
The present invention can be applied to any operation for collecting any minute object that is difficult to collect, moving and placing or inserting it in a predetermined position, and can also be applied to a device for that purpose. Examples include a seeding device that collects a predetermined number of seeds from a seed container and sows them in a predetermined location, a seeding device that collects a predetermined number of seeds from a seed container, and sows the seeds in a predetermined location. It can be used as a manual or automatic tweezers device for picking out minute contacts one by one and placing them on the tip of a metal rod, or as a collection part for a robot that performs such operations. It can also be used as a tweezers device for collecting material particles, gemstones, and mineral particles. Examples are shown below considering some applications of the present invention.

FIG. 5 is a longitudinal sectional view of an electrostatic seeding device configured by applying the novel electrostatic micro object suction device of the present invention to a seeding device, FIG. 6 is a view of this as seen from below, and FIG. FIG. 7 is a vertical cross-sectional view of the main part of the electrostatic suction panel. In the figure, a seed gripping part assembly (hereinafter referred to as an electrostatic suction panel in the embodiments shown in Figures 5 to 9) is equipped with a plurality of seed gripping parts each consisting of a pair of a power supply electrode and a high-voltage electrode, and is spaced at regular intervals. A feeding electrode plate 32 made of a metal plate having a group of holes 31, 31', 31'' arranged in a grid pattern, an insulating plate 3 having a group of cylindrical cavities 33, 33', 33'' concentric with these hole groups.
4. High-resistance layer 3 made of a high-resistance object with very little electrical conductivity, such as a cellophane tape layer, for example.
5. High voltage electrode layer 3 made of aluminum tape, etc.
6, and an insulating plate 37 are layered one after another as shown in the figure, and their mutual contact surfaces are adhered with an adhesive, and the periphery 37 of the high voltage electrode plate layer is a certain distance (5
The gap between the two is molded with an insulating material 38, and the entire back surface 39 of the insulating plate 37, 34, 35, 36, 3
A coated conductor plate (or conductive paint) 41 covers the entire periphery 40 of the electrostatic suction panel 30, thereby protecting the outer surface of the electrostatic suction panel 30.
Safety is ensured by keeping this at ground potential.
However, the covered conductor plate 41 has a circular hole 42 in a part of the back surface of the insulating plate 37, and a terminal 43 is fixedly disposed in the center of the hole 37, and is connected to the high voltage electrode plate 36 by a conductor 44. has been done. Also,
A conductor ring 45 for mitigating the electric field is provided at the periphery of the hole 42.
is provided. This electrostatic suction panel 30
is detachably attached and fixed from below inside a grounded lid-like casing 48 having a power supply box 46 and a handle 47 so that the power supply electrode plate 32 faces outward. At this time, the terminal 43 is connected to the output terminal 50 of the high voltage power supply 49 via the protective resistor 51, and when the switch 52 is pressed, the high voltage electrode layer 36 and the power supply electrode plate 3 are connected to each other.
A DC high voltage is applied between the two. Therefore, each hole group and cavity group 31-33, 31'-33'3
1"-33", ... each represent the same function as 2-16 in FIG. It is attracted and held here by the electric attraction force. 49 is a high voltage power supply consisting of a high voltage transformer and a rectifier, and conductors 54 and 5 are connected from a low voltage high frequency oscillator 53
5 through low voltage high frequency voltage (e.g. 24V,
20KHz) is supplied through the handle 47, and a positive or negative DC high voltage is supplied to the output terminal 50 thereof. Another output terminal 56 is connected to the power supply box 46 and grounded. The switch 52 intervenes in one of the power supply terminals 57, 58 of the high-frequency oscillator 53 via conductors 59, 60 and a contact 61. When the switch 52 is pressed, the contact 61 is turned on, the high-frequency oscillator 53 is activated, and the high-voltage power source A DC high voltage appears between the output terminals 50 and 56 of 49. Also, if you turn this off,
The operation of the high frequency oscillator is stopped, and at the same time, the high voltage output terminal 50 is connected to the 56 through a mechanism not shown in the figure.
The potential difference between the high-voltage electrode 36 and the power supply electrode is immediately returned to zero, the suction force is eliminated, and the seeds to be suctioned fall to a predetermined position below. However, this device does not allow seeds to be placed in holes and cavities 31-33, 31'.
-33', 31''-33'' does not have the effect of sucking into the inside from the outside, so it is necessary to insert the seeds into the inside by some method. FIG. 8 shows one method, in which the device is turned upside down, the hook 62 is attached, and the seeds 63 are placed on the power supply electrode plate 32, and the device is swung left and right.
Seeds are 31-33, 31'-33', 31''-3
Once inserted, a strong electrostatic attraction force is applied, so the device is reversed again and returned to its original position, and the seedbed group 64, as shown in FIG. 9, is inserted. 64', 64''..., turn off the switch 52, and place each seed in the seeding hole 65, 64'' in the nursery.
65', 65'' to complete the seeding operation.

FIG. 10 is a longitudinal cross-sectional view of another electrostatic seeding device using the present invention, in which seed gripping parts 66, 66, 66 having the structure shown in FIG. 4 are arranged in a grid pattern at predetermined intervals. It is fixed to the conductor holder plate 67 to constitute a seed grip assembly, which is connected to the power supply box 4.
6. It is mounted in a grounded lid-like conductor casing 48 having a handle 47 and a switch 52 as shown. 49' is a transistor high frequency oscillator,
This is a high-voltage DC power supply consisting of a step-up transformer and a rectifier, and is supplied with low-voltage DC voltage (for example, 12V) from a low-voltage DC power supply 68 through conductors 69 and 70 and the contact 61 of the switch 52, and when the switch 52 is turned on, the A DC high voltage is generated between output terminals 50 and 56. Among these, 56 is grounded, and 50 is a high-voltage electrode covered with a high-resistance material layer of each electrode protruding electrostatic suction device 66, 66', 66'', . . . via a protective resistor 51 and a conductor 71. Group 24', 24'', 2
High resistance conductors 72, 72', 7 made of high resistance rubber, etc., which also serve as protective resistance where connected to 4'',...
2'', . . . , and the lower ends of the grounding electrodes 25', 25'', 25, . . . are made of high resistance rubber and are cut into a V-shape.
and high-voltage electrode group) whose surfaces are covered with cellophane tape layer 23) 24', 24'', 24'',...
A high DC voltage is applied between. In this state, approach each electrode 24-2 to the seeds in the seed box from above.
When the V-shaped tips 5, 24'-25', and 24''-25'' are brought into contact with seeds and then lifted, one seed is sucked into each tip. When this is moved to the seeding position as shown in FIG. 9 and the switch 52 is turned off, the input power to the high voltage power source 67 is cut off, and at the same time, the output terminals 50 and 56 are connected by a mechanism not shown in the figure. Immediately after the short circuit, the electrostatic attraction disappears, and the seeds fall into the designated seeding hole, completing the seeding operation.

FIG. 11 is a longitudinal sectional view showing another structure of the novel convex electrostatic particle suction device according to the present invention. 26 is an insulating cylinder housed in a grounded metal cylindrical casing 73, and has a conductor 74 along its axis, the upper end of which is connected to the output terminal of a high voltage power source via a high voltage cable 75 that is partially inserted into 26. Its lower end is connected to a spring-type contactor 77 installed at the tip of a chevron-shaped protrusion 76 at the lower end of the insulating cylinder 26. Reference numeral 78 denotes an insulating cap that fits into the chevron-shaped protrusion, the lower part of which narrows into a conical shape, and the high-voltage electrode 24 whose entire surface is covered with the high-resistance material layer 23 is inserted and fixed at the center of the lower end, and from now on the shaft. A conductor rod 79 is disposed above the recess, protrudes from the upper surface of the recess, and contacts the spring-type contact 77.
As a result, a DC high voltage is applied to the high voltage electrode 24. 80 is a metal cylindrical casing which houses the base cylindrical part of the insulating cap 78 and is bonded thereto, which is fitted with another metal cylindrical casing 73 above through a screw groove 81 and is fixed thereto and grounded. There is. Reference numeral 82 denotes a grounded power supply electrode fixed to the tip of a strip-shaped spring 83, and the base portion 84 of 83 is fixed near the lower end of the metal cylindrical casing 80 so as to be parallel to the cylindrical axis thereof. The pair of the high voltage electrode 24 and the power supply electrode 82 constitutes a micro object gripping section. 85 is a metal cylinder with a narrowed lower end that is fitted to the outside of the metal cylindrical casing 80 via a threaded groove 86, and its lower end 87 contacts the spring 83 in such a way as to press and bend it inward, thereby rotating the metal cylinder 80. As a result, the lower end 87 moves up and down, thereby changing the inclination of the spring 83 and making it possible to freely change the distance between the power supply electrode 82 and the high voltage electrode 24. Therefore, when the size of the target micro-object changes variously, this can be handled by adjusting the distance between the electrodes accordingly. In this case, if both the power supply electrode 82 and the high voltage electrode 24 are shaped so that their tips 88 are narrowed as shown in FIG. 12, this is particularly suitable for collecting one minute object. The metal cylindrical casing 73 is fixed at its upper part to a ground conductor holder 67 by a nut 89.

FIG. 13 shows a simplified version of the device shown in FIG. 11, in which a high-voltage electrode 90 made of high-resistance rubber covered with a high-resistance material layer 23 such as Sellotape is inserted and fixed into the conical top of an insulator cap 78. , the upper part of which is in contact with the contact 77 of the chevron-shaped protrusion of the insulating cylinder 26 that is fitted with the insulating cylinder 78, and a high DC voltage is applied through the conductor 74 and cable 75 made of high-resistance rubber that also serves as a protective resistance. . Reference numeral 91 is a grounding power supply electrode made of high-resistance rubber, which is connected to the screw 9 together with the grounding conductor 92.
3 to the base cylindrical portion of the insulator cap 78, and the screw 93 further partially enters into the chevron-shaped protrusion 76 at the lower end of the insulator cylinder 26 to fix 78 to 76. The screw 94 is used to adjust the inclination of the power supply electrode 91, and thereby the distance between the electrodes 90 and 91 can be adjusted in accordance with the size of the target minute object. Both electrodes 90 and 91 have their tips 95 and 9 as shown in the figure.
6 are each cut diagonally to form a V-shape, and a minute object can be easily brought into contact between them to separate it into 1.
It is structured so that it can be collected individually. 97 is a holder, and 98 is a cap for ensuring insulation of the insertion portion of the cable 75.

FIG. 14 also shows another simplified version of the device shown in FIG. 11, in which the lower end of the insulating cylinder 26 is a cylindrical cavity 98 with a screw groove, which is filled with a high-resistance material layer 23 such as cellophane tape. High-voltage electrode (made of a high-resistance object that also serves as a protective resistance, such as high-resistance rubber) 90
A chevron-shaped protrusion 100 of a truncated conical insulator head 99 having a ground power supply electrode 91 having the same structure at its tip is fitted and fixed by a screw groove. The high voltage electrode 90 is connected to a disc-shaped contact 102 at the upper end of 100 by a conducting wire 101 passing through 99 and 100, and further connected to an insulating cylinder 2
A spring-type contact 77 fixed to the base of the cavity 98 at the lower end of 6, a conductor rod 103 connected to it and passing through it along the axis of 26, and a screw 10 at the top thereof.
4 and a cable 75 to a high voltage terminal of a DC high voltage power supply. The power supply electrode 91 is connected to a conductor ring 106 fitted and bonded to 99 at the base of 100 via a conductor 105 passing through 99, and further connected to 2
A conductor ring 107 of the same shape to be adhesively fixed to the lower end of 6,
It is grounded via a conducting wire 108 connected thereto. 97 is a holder plate. As a result, a DC high voltage is applied between the flexible electrodes 90 and 91, each of which has a V-shaped opening at its lower end, and minute objects that come into contact with these are attracted, which does not require any explanation. Therefore, it will be omitted.

Figures 15, 17, and 18 are the first
This shows an example of a modified structure of the insulator head shown in FIG. 4, and FIG. 16 is a view of the electrode section shown in FIG. 15 viewed from below.

In Fig. 15, the grounding power supply electrode is the high-resistance object layer 2.
Rod-shaped electrodes 91', 91'', 91 are made of four high-resistance objects arranged at an angle of 90° surrounding a high-voltage electrode 90 made of a high-resistance conductor with a height of 3. ,91′′′′,
Each conductor wire 1 is supported at its base by a ring 109 made of a high-resistance object and passes through the inside of the ring 109.
05 to the conductor ring 106.

In FIG. 17, a circular electrode 21 as shown in FIG. 2 is used as the ground power supply electrode, and this is connected to the support rod 11.
A high-voltage electrode 90 made of a high-resistance object supported by
arranged concentrically with and surrounding this, 1
10 penetrates through 99 and is connected to conductor ring 106 to be grounded.

In FIG. 18, the insulator head 99 has a cylindrical structure with a screw in the upper part 100, and the high-resistance object layer 23 is connected to the center of the lower cylindrical part 111 having a slightly smaller diameter.
A high-voltage electrode 90 made of a high-resistance conductor that expands in the air protrudes, a collar-shaped ground ring conductor 112 is fixed to the base of the electrode 111, a power supply electrode 113 made of a grounded high-resistance object protrudes downward, and a screw 114 is attached.
This makes it possible to adjust the distance between the tips 115, which are open to each other in a V-shape, and the tip of the high-voltage electrode 90. The heads shown in FIGS. 15 to 18 can all be used by being screwed into the head 26 in place of the head 99 in FIG. 14, and the suction mechanism thereof will be omitted as it is obvious.

FIG. 19 shows a configuration of tweezers for collecting minute objects by applying the novel electrostatic particle suction device according to the present invention. Longitudinal cross-sectional view of electrostatic tweezers, 2nd
Figure 0 shows its side view. 116 is a casing made of a conductor cylinder, and a removable cap 1 is attached to the upper end.
17, and inside it are dry batteries 11 in order from the top.
8. A transistor high frequency oscillator 119, a step-up transformer 120, and a Cotscroft type multi-stage rectifier 121 are connected, and the DC high voltage (relative to the casing 116) generated at the output terminal 122 appears on the protective resistor 123 and the contactor 124, switch 12
When you press 5, switch contact 126, contact 127,
It is connected to a high-voltage electrode 131 made of a high-resistance conductor expanded by a high-resistance object layer 23 attached and fixed to the tip of the conductor 129 through a conductor 130 passing through a conductor 128 and an insulating head 128 having the same shape as that shown in FIG. , which is supplied with high DC voltage. However, 12
0, 121, and 123 are molded in an insulator 132, and 128 is embedded in an insulator 134 having a recess into which the screw of the upper chevron-shaped projection 133 of 129 fits. The switch 125 is supported by a strip-shaped spring 135 and is normally in an OFF state, and a contact 137 supported by another spring 136 comes into contact with the switch 127, which causes the switch 125 to close to the casing 1.
It is shorted to 16. When you press 125, 126 becomes 1
While bridging 24 and 127, spring 136 is pushed by arm 138 and separates from 127. In addition, 139
is another switch for turning on/off the input to dry battery 118 and 119, and is turned on only when in use. 140 is a conductor ring that is adhesively fixed to the insulator head at the base of 133 and is connected to the casing 11.
A power supply electrode 141 is fixed to 140 and extends downward parallel to the high voltage electrode 131, so that the tips of both electrodes constitute a micro object gripping part with tweezers, and a DC high voltage is applied between the two electrodes. is applied, and the minute object 144 that comes into contact with the tip portions 142, 143 is attracted. Next, when the switch 125 is released, the DC high voltage between the two electrodes immediately disappears, and the 14
4 falls. 145 is a screw that connects the tips 14 of both electrodes.
You can freely adjust the distance between 2,143. In this electrostatic tweezers, the power supply parts 118, 119, 12
0,121,123 are placed outside the casing 116, and a DC high voltage is applied to the contact 1 using a cable.
It goes without saying that you can lead to 24.

[Brief explanation of drawings]

1, 2, 3, and 4 are longitudinal cross-sectional views showing the principle of the present invention and various embodiments thereof. FIG. 5 is a longitudinal cross-sectional view of an example of a seeding device in which the present invention can be implemented, FIG. 6 is a view of this from below, and FIG. 7 is a vertical cross-sectional view of an electrostatic suction panel that is the main part thereof. FIG. 8 is a diagram showing a method of loading seeds into this seeding device, and FIG. 9 is a diagram showing a method of dropping seeds from this seeding device which can suck seeds into a seed hole in a nursery bed and sowing them. FIG. 10 shows a longitudinal sectional view of another embodiment of a seeding device to which the present invention is applied. FIG. 11 is a longitudinal sectional view of another embodiment of the present invention, FIG. 12 is a side view of the high voltage electrode, and FIGS. 13 and 14 are longitudinal sectional views of another embodiment of the invention, respectively. Figure 15, Figure 17, Figure 18
14 is a longitudinal cross-sectional view showing a different configuration example of the insulating head shown in FIG. 14, and FIG. 16 is a view of the electrode section shown in FIG. 15 viewed from below. FIG. 19 is a longitudinal sectional view of an electrostatic tweezers to which the present invention is applied, and FIG. 20 is a side view thereof. The names of the main elements in the diagram are as follows. 1, 21, 25, 32, 82, 91, 91'9
1″, 91, 91′′″, 25′, 25″…113
，
141...Power supply electrode, 3, 9, 26, 34, 3
7,132,134,...Insulator, 4,24,3
6...High voltage electrode, 6,23...High resistance object layer, 1
2,75...cable, 13,52,125,1
39...Switch, 14,49,49'...DC high voltage power supply, 15,48,73,116...Casing, 17,144...Minute object, 22,90,
131, 24', 24''...High voltage electrode made of a high resistance object, 51, 123...Protective resistor, 53,1
19...Low voltage high frequency oscillator, 63...Seed, 64
...Seed bed, 65, 65', 65'' ...Seeding hole, 68
...Low voltage DC power supply.

Claims (1)

[Claims] 1. An exposed high-voltage electrode made of a high-resistance object with at least a very small surface conductivity and supported by an insulator, and an exposed ground power supply placed opposite the electrode with a small gap. It has a micro object gripping part composed of an electrode, has a DC high voltage power supply connected between the high voltage electrode and the power supply electrode, and applies a DC high voltage between both electrodes, and has a DC high voltage power supply for applying a DC high voltage between the high voltage electrodes. An electrostatic micro-object suction device characterized by having a switch for intervening in a DC high-voltage power source-feeding electrode electrical path to open and close it. 2 The resistivity of the high-resistance object is 10 ⁹ to 10 ¹³ [Ω-cm]
The electrostatic micro object suction device according to claim 1, wherein the electrostatic fine object suction device is within the range of . 3. Claim 1 or 2, wherein, like the high-voltage electrode, at least the surface portion of the power feeding electrode is made of the high-resistance material described above.
The electrostatic micro object suction device according to any one of the above. 4. A separate switch is provided that is connected between the high voltage electrode and the power supply electrode, bridges the two electrodes immediately after the switch is turned off, and opens the gap between the two electrodes immediately before the switch is turned on. An electrostatic micro object suction device according to any one of claims 1 to 3, characterized in that: 5. Any one of claims 1 to 4, characterized in that the power feeding electrode is exposed to the outside and the high voltage electrode is drawn inward.
The electrostatic micro object suction device described in . 6. The power feeding electrode is a plate-shaped electrode having a hole, and the high-voltage electrode is disposed deep therein through an insulator having a cavity with the same diameter as the hole,
An electrostatic micro object suction device according to any one of claims 1 to 4. 7. The power feeding electrode is an annular electrode, and the high voltage electrode is disposed deep therein,
An electrostatic micro object suction device according to any one of claims 1 to 4. 8 Support the power supply electrode and the high voltage electrode by an insulating support, fix at least the high voltage electrode among both electrodes to the tip of the insulator support, and then extend both electrodes toward the same with approximately the same protrusion length. The electrostatic micro object suction device according to any one of claims 1 to 4, characterized in that the suction device protrudes. 9. The power supply electrode and the high-voltage electrode are formed of flexible, high-resistance conductive rubber, and the lower ends of both electrodes are formed in a V-shape with respect to each other, and at least the surface of the high-voltage electrode is formed. 9. The electrostatic micro object suction device according to claim 8, characterized in that the device is coated with a high resistance material layer. 10. The electrostatic micro object suction device according to any one of claims 1 to 9, characterized by comprising a mechanism that can variably adjust the gap between the power supply electrode and the high voltage electrode. 11. The electrostatic microscopic device according to any one of claims 1 to 10, characterized in that it is provided with a plurality of microscopic object gripping parts each consisting of a pair of the power supply electrode and the high-voltage electrode. Object suction device. 12 A plurality of electrodes consisting of an exposed high-voltage electrode made of a high-resistance object with at least a very small surface conductivity and supported by an insulator, and an exposed grounded power supply electrode placed opposite the electrode with a small gap. It has a DC high voltage power source connected between the high voltage electrode and the power supply electrode and for applying a DC high voltage between both electrodes, and the high voltage electrode
1. An electrostatic seed sowing device characterized by having a switch for intervening in a DC high-voltage power source-feeding electrode electrical path to open and close it. 13 The feeding electrode is a plate-shaped electrode having holes on grid points at regular intervals, and an insulating layer having holes concentrically and with the same diameter and arranged at the same intervals as the holes is placed on the plate-shaped electrode between the two holes. The high-voltage electrode is provided on the insulating layer so that the high-resistance object layer is exposed toward the hole in the plate-like insulating layer, and the high-voltage electrode is placed behind the high-voltage electrode. The electrostatic type according to claim 12, characterized in that the seed gripping part assembly is constructed by providing a plate-like insulating layer that spreads, and then attaching this to the main body casing. Seed sowing equipment. 14 The power supply electrode and the high voltage electrode are supported by an insulating support, and within both electrodes, at least the high voltage electrode is fixed to the tip of the insulating support, and both electrodes are extended outward with substantially the same protruding length. This is attached to a plate-shaped conductor holder on grid points at regular intervals with the tips of both electrodes facing in that direction to form a seed gripping part assembly. The electrostatic seed sowing device according to claim 12, characterized in that it is attached to a main body casing. 15. The electrostatic seed sowing device according to claim 13 or 14, wherein the seed gripping assembly is detachably attached to the main body casing. 16 An exposed high-voltage electrode made of a high-resistance material having at least a very small surface conductivity, and an exposed grounded power supply electrode placed opposite to this with a small gap are supported by an insulating support, and both electrodes are wherein at least a high-voltage electrode is fixed to the tip of the insulating support, and both electrodes are made to protrude outward with substantially the same protrusion length to form a micro object gripping part;
A DC high-voltage power supply is connected between the high-voltage electrode and the power supply electrode and applies a DC high voltage between the two electrodes; An electrostatic tweezers characterized by having a switch for opening and closing.