JPH06325894A - Ionizer for clean room - Google Patents
Ionizer for clean roomInfo
- Publication number
- JPH06325894A JPH06325894A JP5163510A JP16351093A JPH06325894A JP H06325894 A JPH06325894 A JP H06325894A JP 5163510 A JP5163510 A JP 5163510A JP 16351093 A JP16351093 A JP 16351093A JP H06325894 A JPH06325894 A JP H06325894A
- Authority
- JP
- Japan
- Prior art keywords
- ionizer
- clean room
- electrode
- heating
- ionizer electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Elimination Of Static Electricity (AREA)
- Ventilation (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電極の放電によりクリ
ーンルーム内の空気をイオン化させ、このイオンにより
物体表面の静電気を中和させるクリーンルーム用イオナ
イザーに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ionizer for a clean room in which the air in the clean room is ionized by the discharge of electrodes and the static electricity on the surface of an object is neutralized by the ions.
【０００２】[0002]
【従来の技術】近年の技術開発の進歩により、集積回路
はその集積度を著しく高めている。しかし、集積回路の
集積度が高まると、回路の線幅が非常に微小になるた
め、製造過程において外部の影響を受けやすく、歩留ま
りが悪くなる。とくに、埃などの浮遊微粒子が回路上に
付着すると、回路の断線もしくは短絡が発生してしま
う。そこで、ＬＳＩ工場や電子機器組立工場において
は、工場全体もしくはその一部をクリーンルームにし
て、工場内の浮遊微粒子をできるだけ減少させている。
ただし、クリーンルーム内は製品の変質を押さえ、微生
物の繁殖を防ぐために、低湿度（４０〜４５％ＲＨ程
度）に保たれているので、静電気が発生しやすい。ま
た、発塵を防止し、耐薬品性を高めるために、プラスチ
ック等の絶縁体が数多く使用されているので、さらに静
電気が発生しやすい環境になっている。静電気が発生す
ると、回路を設けたウェーハが帯電してクリーンルーム
内に僅かに残った微粒子を吸引してしまうので、品質の
劣化を招く。また、放電によってウェーハ上の回路が破
壊されることがある。さらに、電磁波によって製造装置
やコンピューターの誤動作を招いたり、電撃ショックに
より作業者の作業能率が低下するおそれもある。2. Description of the Related Art Due to recent technological developments, integrated circuits have been highly integrated. However, when the degree of integration of the integrated circuit is increased, the line width of the circuit becomes extremely small, so that it is easily affected by the outside during the manufacturing process, and the yield is deteriorated. In particular, if floating particles such as dust adhere to the circuit, the circuit will be broken or short-circuited. Therefore, in an LSI factory or an electronic equipment assembly factory, the entire factory or a part thereof is made a clean room to reduce the suspended particles in the factory as much as possible.
However, since the inside of the clean room is kept at low humidity (about 40 to 45% RH) in order to suppress the deterioration of the product and prevent the growth of microorganisms, static electricity is easily generated. In addition, since many insulators such as plastics are used to prevent dust generation and enhance chemical resistance, the environment is more susceptible to static electricity. When the static electricity is generated, the wafer provided with the circuit is charged and the fine particles slightly remaining in the clean room are sucked, so that the quality is deteriorated. In addition, the circuits on the wafer may be destroyed by the discharge. Further, electromagnetic waves may cause a malfunction of a manufacturing apparatus or a computer, or an electric shock may reduce the work efficiency of a worker.
【０００３】このような静電気障害を防ぐために、クリ
ーンルーム内に発生する静電気を取り除かなければなら
ないが、静電気を除去する方法としてまず考えられるの
が、帯電する物体を接地して、個々の物体ごとに除電す
る方法である。しかし、この方法は器材が導電性で固定
されたものの場合にのみ有効なので、ウェーハやそれを
運ぶキャリアのように複数個の独立した物体で、次々に
搬送されていくものの場合は、接地によって電荷を逃が
す方法をとるのは困難である。In order to prevent such electrostatic damage, it is necessary to remove the static electricity generated in the clean room. The first possible method for removing the static electricity is to ground the charged object and ground it individually. This is a method of removing electricity. However, this method is effective only when the equipment is conductive and fixed, so in the case of multiple independent objects such as wafers and carriers that carry them, which are carried one after another, the charge is grounded. It is difficult to take the way to escape.
【０００４】そこで、従来から、接地のように個々の物
体ごとに除電するのではなく、クリーンルーム内の空気
を電離し、イオン化することにより静電気を中和する方
法がおこなわれている。この空気イオン化による除電方
法は、帯電する物体に接触することなく、広範囲な空間
をまとめて除電できるので、クリーンルーム内の除電に
適している。空気をイオン化する方法には、コロナ放
電、放射線、紫外線等によるものが知られているが、中
でもコロナ放電による方法は他の方法に比べて安全で、
安価におこなうことができるので、広く利用されてい
る。Therefore, conventionally, a method of neutralizing the static electricity by ionizing and ionizing the air in the clean room instead of removing the electric charge for each individual object like grounding has been used. This static elimination method by air ionization is suitable for static elimination in a clean room because it is possible to collectively eliminate static electricity in a wide space without contacting a charged object. As a method of ionizing air, corona discharge, radiation, ultraviolet rays, etc. are known, but among them, the method by corona discharge is safer than other methods,
It is widely used because it can be performed at low cost.
【０００５】このようなコロナ放電により空気のイオン
化をおこない、物体表面の静電気を中和する装置とし
て、従来から提案されているのが、クリーンルーム用イ
オナイザーである。このクリーンルーム用イオナイザー
は、クリーンルームの天井に設けられた複数のイオナイ
ザー電極と、このイオナイザー電極に電圧を印加する装
置から構成されている。そして、このような構成を有す
るクリーンルーム用イオナイザーは、イオナイザー電極
に高電圧を印加したときに生じるコロナ放電によってイ
オンを発生させ、このイオンによって静電気を中和させ
ている。An ionizer for a clean room has been proposed as a device for neutralizing the static electricity on the surface of an object by ionizing air by such corona discharge. This clean room ionizer includes a plurality of ionizer electrodes provided on the ceiling of the clean room and a device for applying a voltage to the ionizer electrodes. The clean room ionizer having such a configuration generates ions by corona discharge that occurs when a high voltage is applied to the ionizer electrodes, and the ions neutralize static electricity.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、従来の
クリーンルーム用イオナイザーには以下のような欠点が
あった。すなわち、クリーンルーム用イオナイザーを長
期間運転していると、ＳｉＯ2 を主成分とする物質が空
中から析出され、イオナイザー電極の先端に付着するの
で、この付着物がイオナイザー電極から飛散してクリー
ンルーム内が汚染され、また除電性能の低下を招く。そ
して、この付着物をイオナイザー電極から取り除くため
にメインテナンス回数を多く要するので、不便である。However, the conventional clean room ionizer has the following drawbacks. That is, when the clean room ionizer is operated for a long period of time, a substance containing SiO 2 as a main component is precipitated from the air and adheres to the tip of the ionizer electrode. It is contaminated, and the static elimination performance is deteriorated. In addition, it takes a lot of maintenance to remove this deposit from the ionizer electrode, which is inconvenient.
【０００７】本発明は以上のような従来技術の欠点を解
決するために提案されたものであり、その目的は、イオ
ナイザー電極の先端への付着物を減少させることがで
き、クリーンルームの汚染防止が可能なクリーンルーム
用イオナイザーを提供することである。The present invention has been proposed in order to solve the above-mentioned drawbacks of the prior art, and the object thereof is to reduce the deposits on the tip of the ionizer electrode and prevent contamination of the clean room. It is to provide an ionizer for a clean room that can be used.
【０００８】[0008]
【課題を解決するための手段】上記の目的を達成するた
めに、請求項１記載の発明は、電源および前記電源に接
続されたイオナイザー電極を有し、前記イオナイザー電
極から放電させることによりイオンを発生させ、帯電し
た物体の電荷を中和させるクリーンルーム用イオナイザ
ーにおいて、前記イオナイザー電極端部に、前記イオナ
イザー電極を加熱するための加熱装置を備えたことを特
徴とする。In order to achieve the above object, the present invention according to claim 1 has a power source and an ionizer electrode connected to the power source, and discharges ions from the ionizer electrode. In a clean room ionizer for neutralizing the electric charge of a generated and charged object, a heating device for heating the ionizer electrode is provided at an end portion of the ionizer electrode.
【０００９】また、請求項２記載の発明は、前記加熱装
置は、イオナイザー電極の周囲に巻いた加熱用コイルお
よび前記加熱用コイルに接続された加熱用電源を有する
ことを特徴とする。The invention according to claim 2 is characterized in that the heating device has a heating coil wound around an ionizer electrode and a heating power source connected to the heating coil.
【００１０】[0010]
【作用】上述のような構成を有する本発明の作用は以下
の通りである。すなわち、請求項１記載の発明では、電
源からイオナイザー電極に電流を流して、イオナイザー
電極から放電させる。すると、イオナイザー電極周囲の
空気がイオン化するので、このイオンによって帯電した
物体が除電される。このとき、イオナイザー電極端部に
備えた加熱装置によってイオナイザー電極を熱すると、
熱泳動力の作用によりイオナイザー電極に不純物が付着
しにくくなる。The operation of the present invention having the above-mentioned structure is as follows. That is, according to the first aspect of the invention, a current is caused to flow from the power source to the ionizer electrode, and the ionizer electrode is discharged. Then, the air around the ionizer electrode is ionized, and the charged object is discharged by the ions. At this time, when the ionizer electrode is heated by the heating device provided at the end of the ionizer electrode,
Impurities are less likely to adhere to the ionizer electrode due to the action of thermophoretic force.
【００１１】また、請求項２記載の発明では、イオナイ
ザー電極からの放電時に、加熱用電源からコイルに電流
を流すとコイルが発熱してイオナイザー電極が熱せら
れ、熱泳動力の作用によりイオナイザー電極に不純物が
付着しにくくなる。According to the second aspect of the invention, when a current is supplied from the heating power source to the coil at the time of discharging from the ionizer electrode, the coil heats up and heats the ionizer electrode, and the thermophoretic force acts on the ionizer electrode. Impurities are less likely to adhere.
【００１２】[0012]
【実施例】請求項１および請求項２記載の本発明に対応
する一実施例を、図面にしたがって以下に説明する。な
お、請求項１記載の電源は直流パルス電源とし、請求項
２記載の加熱用コイルは加熱用ニクロム線、加熱用電源
は交流１００Ｖ電源とする。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment corresponding to the present invention described in claims 1 and 2 will be described below with reference to the drawings. The power supply according to claim 1 is a DC pulse power supply, the heating coil according to claim 2 is a nichrome wire for heating, and the power supply for heating is an AC 100V power supply.
【００１３】（１）実施例の構成 本実施例の構成を以下に説明する。すなわち、図１に示
すように、クリーンルームの天井に本体ケース１が設け
られ、この本体ケース１内に直流パルス電源２が内蔵さ
れている。この直流パルス電源２はイオナイザー用電源
供給トランス２ａを介して交流１００Ｖ電源に接続され
ている。また、本体ケース１には、下方に伸びた左右一
対の正負のイオナイザー電極３が設けられている。イオ
ナイザー電極３は、棒状のトリウムタングステンの下端
を、円錐形に加工した部材で、その上端は直流パルス電
源２に接続されている。(1) Configuration of the Embodiment The configuration of this embodiment will be described below. That is, as shown in FIG. 1, a main body case 1 is provided on the ceiling of a clean room, and a DC pulse power supply 2 is built in the main body case 1. The DC pulse power supply 2 is connected to an AC 100V power supply via an ionizer power supply transformer 2a. The body case 1 is provided with a pair of left and right positive and negative ionizer electrodes 3 extending downward. The ionizer electrode 3 is a member obtained by processing the lower end of rod-shaped thorium tungsten into a conical shape, and its upper end is connected to the DC pulse power supply 2.
【００１４】そして、このイオナイザー電極３の下端周
囲には加熱装置が設けられている。以下、この加熱装置
の構成を説明する。すなわち、図２に示すように、正負
のイオナイザー電極３の下端には、それぞれ絶縁材４が
巻き付けられている。この絶縁材４の周囲には、加熱用
ニクロム線５がコイル状に巻き付けられていて、この加
熱用ニクロム線５の周囲には、断熱材６が巻き付けられ
ている。加熱用ニクロム線５の両端は、図３に示すよう
に、断熱材６の上下から引き出されている。このように
正負のイオナイザー電極３のそれぞれの断熱材６から引
き出された加熱用ニクロム線５の端部は、図１に示すよ
うに、正負それぞれ独立に加熱用高耐圧絶縁トランス７
に接続されている。さらに、加熱用高耐圧絶縁トランス
７は交流１００Ｖ電源に接続されている。A heating device is provided around the lower end of the ionizer electrode 3. The configuration of this heating device will be described below. That is, as shown in FIG. 2, the insulating material 4 is wound around the lower ends of the positive and negative ionizer electrodes 3. A heating nichrome wire 5 is wound around the insulating material 4 in a coil shape, and a heat insulating material 6 is wound around the heating nichrome wire 5. Both ends of the heating nichrome wire 5 are drawn out from above and below the heat insulating material 6, as shown in FIG. As shown in FIG. 1, the end portions of the heating nichrome wire 5 drawn out from the respective heat insulating materials 6 of the positive and negative ionizer electrodes 3 are independent of each other as shown in FIG.
It is connected to the. Further, the heating high voltage insulating transformer 7 is connected to an AC 100V power source.
【００１５】（２）実施例の作用 以上のような構成を有する本実施例の作用は以下の通り
である。すなわち、交流１００Ｖ電源からの電流を、イ
オナイザ電源供給トランス２ａおよび直流パルス電源２
を介して直流パルス電流に変換し、イオナイザー電極３
に流す。すると、イオナイザー電極３からコロナ放電が
発生し、イオナイザー電極周囲の空気がイオン化され
る。このイオン化された空気８が帯電した物質に照射す
ることによって、帯電物質が除電される。(2) Operation of the Embodiment The operation of this embodiment having the above-mentioned structure is as follows. That is, the current from the AC 100V power supply is supplied to the ionizer power supply transformer 2a and the DC pulse power supply 2
Converted into DC pulse current via the ionizer electrode 3
Shed on. Then, corona discharge is generated from the ionizer electrode 3, and the air around the ionizer electrode is ionized. The charged substance is discharged by irradiating the charged substance with the ionized air 8.
【００１６】このようなイオン発生中に、交流１００Ｖ
電源から加熱用高耐圧絶縁トランス７を介して加熱用ニ
クロム線５に電流を流すと、加熱用ニクロム線５が発熱
し、イオナイザー電極３の下端が加熱される。すると、
熱泳動力の作用によりイオナイザー電極３の微粒子の付
着が軽減される。During such ion generation, 100 V AC
When a current is passed from the power source to the heating nichrome wire 5 through the heating high-voltage insulating transformer 7, the heating nichrome wire 5 generates heat and the lower end of the ionizer electrode 3 is heated. Then,
Adhesion of fine particles on the ionizer electrode 3 is reduced by the action of the thermophoretic force.
【００１７】（３）実施例の効果 以上のような本実施例の効果は以下の通りである。すな
わち、イオン発生中にイオナイザー電極３の下端が加熱
用ニクロム線５によって加熱されているので、イオナイ
ザー電極３の先端への不純物の付着を防止できる。した
がって、付着した不純物がイオナイザー電極から飛散し
てクリーンルーム内が汚染されることがなく、除電性能
が向上する。また、この付着物をイオナイザー電極から
取り除くためのメインテナンス回数を減らすことができ
る。(3) Effects of the Embodiment The effects of this embodiment as described above are as follows. That is, since the lower end of the ionizer electrode 3 is heated by the heating nichrome wire 5 during ion generation, it is possible to prevent impurities from adhering to the tip of the ionizer electrode 3. Therefore, the adhered impurities are not scattered from the ionizer electrode to contaminate the inside of the clean room, and the charge removal performance is improved. Further, the number of maintenances for removing the deposits from the ionizer electrode can be reduced.
【００１８】（４）実験データ 本実施例による加熱するイオナイザー電極３と、従来の
加熱しないイオナイザー電極３との比較実験を以下に説
明する。まず、各部材の規格と加熱条件は以下の通りで
ある。まず、イオナイザーを作動させるためにイオナイ
ザー電極３に印加する電圧は１５ｋＶとし、運転時間は
４８時間とする。また、断熱材６としては、セラミック
接着剤を使用する。そして、本実施例におけるイオナイ
ザー電極３下端の露出部分の長さと、イオナイザー電極
３に巻いた断熱材６の幅およびイオナイザー電極３上方
の露出部分の長さは、図４に示すように、３ｍｍ，１１
ｍｍ，２５ｍｍとする。また、イオナイザー電極３を加
熱する加熱用ニクロム線５は５Ωのものを用い、この加
熱用ニクロム線５には、交流１００Ｖ電源からの電流
を、加熱用高耐圧絶縁トランス７によって７Ｖ，１．３
Ａに調整して流すこととする。(4) Experimental Data A comparative experiment between the heated ionizer electrode 3 according to this embodiment and the conventional non-heated ionizer electrode 3 will be described below. First, the specifications and heating conditions of each member are as follows. First, the voltage applied to the ionizer electrode 3 for operating the ionizer is 15 kV, and the operation time is 48 hours. A ceramic adhesive is used as the heat insulating material 6. The length of the exposed portion at the lower end of the ionizer electrode 3, the width of the heat insulating material 6 wound around the ionizer electrode 3 and the length of the exposed portion above the ionizer electrode 3 in this embodiment are 3 mm, as shown in FIG. 11
mm and 25 mm. The heating nichrome wire 5 for heating the ionizer electrode 3 is 5 Ω, and the heating nichrome wire 5 is supplied with a current from an AC 100V power source by the heating high-voltage insulating transformer 7 at 7V, 1.3V.
Adjust to A and flush.
【００１９】以上のような条件によって実験をおこなう
と、まず、従来の加熱しないイオナイザー電極３の場
合、図５に示すように、イオナイザー電極３の先端には
放射状に不純物が付着する。一方、本実施例による加熱
したイオナイザー電極３の場合、図６に示すように、イ
オナイザー電極３の先端に不純物はほとんど付着しな
い。When the experiment is conducted under the above conditions, first, in the case of the conventional non-heated ionizer electrode 3, as shown in FIG. 5, impurities are radially attached to the tip of the ionizer electrode 3. On the other hand, in the case of the heated ionizer electrode 3 according to this embodiment, as shown in FIG. 6, almost no impurities adhere to the tip of the ionizer electrode 3.
【００２０】（５）その他の実施例 本発明は、以上のような実施例に限定されるものではな
く、各部材の形状および材質等は適宜変更可能である。
たとえば、イオナイザー電極３に巻く絶縁材４と断熱材
６は、セラミック接着剤であってもよいし、ガラス繊維
を用いてもよい。そして、イオナイザー電極３の材質
を、トリウムタングステンではなく、ニッケルコーティ
ングしたタングステンにすれば、放電によるイオナイザ
ー電極３の磨耗およびイオナイザー電極３の飛散による
クリーンルーム内の金属汚染を減少させることができ
る。(5) Other Examples The present invention is not limited to the above examples, and the shape and material of each member can be changed as appropriate.
For example, the insulating material 4 and the heat insulating material 6 wound around the ionizer electrode 3 may be a ceramic adhesive or glass fiber. Then, when the material of the ionizer electrode 3 is made of tungsten coated with nickel instead of thorium tungsten, abrasion of the ionizer electrode 3 due to discharge and metal contamination in the clean room due to scattering of the ionizer electrode 3 can be reduced.
【００２１】さらに、加熱装置は電源に接続したニクロ
ム線に限定されず、イオナイザー用の電極を加熱できる
装置であればよい。Further, the heating device is not limited to the nichrome wire connected to the power source, and may be any device capable of heating the electrode for the ionizer.
【００２２】[0022]
【発明の効果】以上のような本発明によれば、イオン発
生用のイオナイザー電極に加熱装置を設けるという簡単
な構成によって、イオナイザー電極の先端への付着物を
減少させることができ、クリーンルーム内の汚染防止が
可能な優れたクリーンルーム用イオナイザーを提供する
ことができる。According to the present invention as described above, it is possible to reduce the deposits on the tip of the ionizer electrode by a simple structure in which the ionizer electrode for ion generation is provided with a heating device, and the ionizer electrode in the clean room can be reduced. An excellent clean room ionizer capable of preventing contamination can be provided.
【図１】本発明のクリーンルーム用イオナイザーを示す
側面図FIG. 1 is a side view showing an ionizer for a clean room according to the present invention.
【図２】本発明のクリーンルーム用イオナイザーにおけ
るイオナイザー電極および加熱装置を示す分解斜視図FIG. 2 is an exploded perspective view showing an ionizer electrode and a heating device in the clean room ionizer of the present invention.
【図３】本発明のクリーンルーム用イオナイザーにおけ
るイオナイザー電極および加熱装置を示す斜視図FIG. 3 is a perspective view showing an ionizer electrode and a heating device in the clean room ionizer of the present invention.
【図４】本発明のクリーンルーム用イオナイザーにおけ
るイオナイザー電極と、ガラス繊維の長さを示す斜視図FIG. 4 is a perspective view showing the length of the glass fiber and the ionizer electrode in the clean room ionizer of the present invention.
【図５】従来のクリーンルーム用イオナイザー作動実験
におけるイオナイザー電極の先端を示す拡大図FIG. 5 is an enlarged view showing the tip of an ionizer electrode in a conventional clean room ionizer operation experiment.
【図６】本発明のクリーンルーム用イオナイザー作動実
験におけるイオナイザー電極の先端を示す拡大図FIG. 6 is an enlarged view showing the tip of an ionizer electrode in a clean room ionizer operation experiment of the present invention.
１…本体ケース ２…直流パルス電源 ２ａ…イオナイザー電源供給トランス ３…イオナイザー電極 ４…ガラス繊維 ５…加熱用ニクロム線 ６…断熱用ガラス繊維 ７…加熱用高耐圧絶縁トランス ８…イオン化された空気 1 ... Main body case 2 ... DC pulse power supply 2a ... Ionizer power supply transformer 3 ... Ionizer electrode 4 ... Glass fiber 5 ... Nichrome wire for heating 6 ... Glass fiber for heat insulation 7 ... High voltage insulation transformer for heating 8 ... Ionized air
Claims (2)
イザー電極を有し、前記イオナイザー電極から放電させ
ることによりイオンを発生させ、帯電した物体の電荷を
中和させるクリーンルーム用イオナイザーにおいて、 前記イオナイザー電極端部に、前記イオナイザー電極を
加熱するための加熱装置を備えたことを特徴とするクリ
ーンルーム用イオナイザー。1. A clean room ionizer having a power source and an ionizer electrode connected to the power source, wherein ions are generated by discharging from the ionizer electrode to neutralize the charge of a charged object, the ionizer electrode end An ionizer for a clean room, characterized by comprising a heating device for heating the ionizer electrode.
の周囲に巻いた加熱用コイルおよび前記加熱用コイルに
接続された加熱用電源を有することを特徴とする請求項
１記載のクリーンルーム用イオナイザー。2. The ionizer for a clean room according to claim 1, wherein the heating device has a heating coil wound around the ionizer electrode and a heating power source connected to the heating coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16351093A JP3537843B2 (en) | 1993-03-19 | 1993-07-01 | Clean room ionizer |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5-60281 | 1993-03-19 | ||
| JP6028193 | 1993-03-19 | ||
| JP16351093A JP3537843B2 (en) | 1993-03-19 | 1993-07-01 | Clean room ionizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06325894A true JPH06325894A (en) | 1994-11-25 |
| JP3537843B2 JP3537843B2 (en) | 2004-06-14 |
Family
ID=26401349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16351093A Expired - Lifetime JP3537843B2 (en) | 1993-03-19 | 1993-07-01 | Clean room ionizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3537843B2 (en) |
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| JP2008507848A (en) * | 2004-07-23 | 2008-03-13 | 株式会社ニコン | Extreme UV reticle protection |
| JP2010170937A (en) * | 2009-01-26 | 2010-08-05 | Techno Ryowa Ltd | Discharge electrode for ionizer |
| CN102738711A (en) * | 2012-06-28 | 2012-10-17 | 武汉常阳新力建设工程有限公司 | Transmitting device for negative-ion generator arranged on indoor top |
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