JPH05251195A - Static charge eliminator - Google Patents
Static charge eliminatorInfo
- Publication number
- JPH05251195A JPH05251195A JP5016692A JP5016692A JPH05251195A JP H05251195 A JPH05251195 A JP H05251195A JP 5016692 A JP5016692 A JP 5016692A JP 5016692 A JP5016692 A JP 5016692A JP H05251195 A JPH05251195 A JP H05251195A
- Authority
- JP
- Japan
- Prior art keywords
- needle
- electrode
- atmosphere
- voltage
- dust particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Elimination Of Static Electricity (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は静電気除去装置に係わ
り、コロナシャワーを発生する針状電極で生じた塵埃粒
塊や発塵粒子が脱落すると吸い取って、雰囲気が汚染す
ることを防止する静電気除去装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a static eliminator, which removes dust particles or dust particles generated by a needle-shaped electrode that generates a corona shower, and removes static electricity to prevent pollution of the atmosphere. Regarding the device.
【０００２】近年、半導体装置に用いられる素子の集積
度が増大するにつれて、素子を形成するパターンはます
ます微細になってきている。それに対応して、例えば素
子を形成するいわゆるウェーハプロセスが行われるクリ
ーンルームなどの雰囲気の清浄度（クリーン度）もます
ます厳しくなっている。そして、このクリーン度を如何
に維持するかが重要な課題となっている。In recent years, as the degree of integration of elements used in semiconductor devices has increased, the patterns forming the elements have become finer and finer. Correspondingly, the cleanliness (cleanness) of the atmosphere in, for example, a clean room in which a so-called wafer process for forming elements is performed is becoming more and more severe. And how to maintain this cleanliness is an important issue.
【０００３】[0003]
【従来の技術】ウェーハプロセスが行われるクリーンル
ームやクリーンベンチ、あるいは製造装置の中などにお
いて、ウェーハやチップなどが裸で露出する雰囲気は、
一般に厳しい清浄度が求められている。ところが、こう
した雰囲気中では例えばフィルタでろ過された清浄度の
高い空気が絶えず流れているが、雰囲気の中で塵埃が発
生することを避けることは難しい。2. Description of the Related Art In a clean room or a clean bench where a wafer process is carried out, or in a manufacturing apparatus, an atmosphere in which a wafer or a chip is exposed bare is
Generally, strict cleanliness is required. However, in such an atmosphere, for example, air of high cleanliness filtered by a filter constantly flows, but it is difficult to avoid dust generation in the atmosphere.
【０００４】中でも、空気中に絶縁隔離されて浮遊して
いる微細な塵埃粒子は、静電気を帯びるといろいろな個
所に静電的に集塵され、特に微細パターニングを行うプ
ロセスなどの障害となる。そこで、従来から浮遊塵埃の
帯電を防ぐために、雰囲気の中にコロナ放電のシャワー
を浴びせて帯電を除去することが行われている。In particular, fine dust particles that are isolated and floating in the air due to insulation are electrostatically collected at various places when charged with static electricity, which becomes an obstacle to the process of performing fine patterning. Therefore, conventionally, in order to prevent the electrification of the floating dust, a shower of corona discharge is showered in the atmosphere to remove the electrification.
【０００５】コロナ放電は、電場の強さが平等でないと
き、電場の大きいところで部分的に絶縁破壊が起きて現
れる発光放電で、直流と交流のコロナ放電がある。とこ
ろで、一般にコロナ放電によってコロナイオンのシャワ
ーを生じさせる装置はイオナイザとも呼ばれ、大気など
の雰囲気中で電場が集中するように配設した電極に数〜
数十ｋＶの高い電圧を印加するとコロナ放電が起こる。Corona discharge is a light-emission discharge that appears when the electric field strength is not uniform and a partial dielectric breakdown occurs at a large electric field, and includes DC and AC corona discharges. By the way, generally, a device for generating a shower of corona ions by corona discharge is also called an ionizer, and several electrodes are arranged on an electrode arranged so that an electric field is concentrated in an atmosphere such as the atmosphere.
Corona discharge occurs when a high voltage of several tens of kV is applied.
【０００６】電子写真などのコロナ帯電装置で見られる
ように、正負何れかのコロナシャワーを浴びせて絶縁媒
体の表面に帯電させる場合には、細いワイヤを張った電
極を用い、数〜数十ｋＶの高い直流電圧を印加して正負
何れかの帯電を行わせる。When a positive or negative corona shower is used to charge the surface of an insulating medium as seen in a corona charging device such as an electrophotographic apparatus, an electrode with a thin wire is used, and several to several tens of kV are used. A high DC voltage is applied to charge either positive or negative.
【０００７】それに対して、正負何れかの電荷あるいは
正負の電荷が混在して帯電している物体の表面を除電す
る静電気除去装置（帯電除去装置）の場合には、先端を
尖らせた針状の電極を並設して数〜数十ｋＶの高い交流
電圧を印加し、正負のイオンのコロナシャワーを表面に
浴びせて中和させ、帯電を除去する。On the other hand, in the case of a static eliminator (charge eliminator) that eliminates static electricity on the surface of an object charged by positive or negative electric charges or positive and negative electric charges mixed, a needle-like shape with a sharp tip. The electrodes are arranged in parallel and a high AC voltage of several to several tens of kV is applied, and a corona shower of positive and negative ions is applied to the surface to neutralize it, thereby removing the charge.
【０００８】図２は静電気除去装置の一例の一部切欠き
斜視図、図３は針状電極を拡大した側面図である。図に
おいて、１は針状電極、３はコロナシャワー、４は浮遊
塵埃粒子、4aは塵埃粒塊、4bは発塵粒子、７は外枠、８
は高圧ケーブル、９は絶縁部材、10は静電気除去装置で
ある。FIG. 2 is a partially cutaway perspective view of an example of the static eliminator, and FIG. 3 is an enlarged side view of the needle electrode. In the figure, 1 is a needle-shaped electrode, 3 is a corona shower, 4 is floating dust particles, 4a is dust particles, 4b is dusting particles, 7 is an outer frame, 8
Is a high voltage cable, 9 is an insulating member, and 10 is a static eliminator.
【０００９】図２において、静電気除去装置10は、外枠
７に先端部を尖らせた針状電極１が突出するように並べ
られ、その針状電極１の側面を保護するように外枠７が
突出した構成になっている。そして、針状電極１の後端
部は、高圧ケーブル８に連なっており、数〜数十ｋＶの
高い交流電圧が印加されるようになっている。In FIG. 2, the static eliminator 10 is arranged on the outer frame 7 so that the needle-shaped electrode 1 having a sharp tip is projected, and the outer frame 7 is protected so as to protect the side surface of the needle-shaped electrode 1. Has a protruding structure. The rear end of the needle-shaped electrode 1 is connected to the high-voltage cable 8 so that a high AC voltage of several to several tens kV is applied.
【００１０】針状電極１には、耐食性や耐熱性に富んだ
不錆鋼やＷ（タングステン）などの例えば 0.1ｍｍ程度
の細いワイヤが用いられ、外枠７とは例えばエポキシ樹
脂などの絶縁部材９で固着して支持されている。また、
印加電圧が交流なので、針状電極１に接触した際感電す
ることを防ぐために、針状電極１が高圧ケーブル８と図
示してない誘電体を介して容量結合されている構成もあ
る。For the needle-shaped electrode 1, a thin wire of about 0.1 mm, for example, made of non-rust steel or W (tungsten) having high corrosion resistance and heat resistance is used. The outer frame 7 is an insulating member such as epoxy resin. It is fixedly supported at 9. Also,
Since the applied voltage is an alternating current, there is also a configuration in which the needle electrode 1 is capacitively coupled to the high voltage cable 8 via a dielectric (not shown) in order to prevent electric shock when the needle electrode 1 is contacted.
【００１１】針状電極１に交流電圧が印加されると、電
場が集中する尖った先端部でコロナ放電が起こって、Ｎ
2 イオンやＯ2 イオンなどの正負のイオンのコロナシャ
ワー３となって交互に発生する。このコロナシャワー３
を雰囲気中に浮遊して帯電している浮遊塵埃粒子４に浴
びせて除電する。When an AC voltage is applied to the needle electrode 1, corona discharge occurs at the sharp tip where the electric field is concentrated, and N
The positive and negative ions such as 2 ions and O 2 ions are alternately generated as the corona shower 3. This corona shower 3
Is charged in the floating dust particles 4 floating in the atmosphere and charged.
【００１２】こうして構成された静電気除去装置10は、
クリーンルームの天井とかいろいろな製造装置の上壁な
どに取り付けられて、雰囲気内に漂う浮遊塵埃粒子４の
帯電を除去する。The static eliminator 10 thus constructed is
It is attached to the ceiling of a clean room or the top wall of various manufacturing equipment to remove the electrostatic charge of the suspended dust particles 4 floating in the atmosphere.
【００１３】[0013]
【発明が解決しようとする課題】ところで、針状電極１
に交流の高電圧が印加されると、コロナシャワー３によ
る除電が行われる一方で、針状電極１に浮遊塵埃粒子４
が静電的に吸引される作用も起こる。そのために、図３
に示したように浮遊塵埃粒子４が針状電極１に集塵さ
れ、次第に成長すると塵埃粒塊4aとなって脱落し、障害
の原因となることが間々起こる。By the way, the needle-shaped electrode 1
When a high AC voltage is applied to the electrodes, static electricity is removed by the corona shower 3 while the dust particles 4 floating on the needle electrode 1 are discharged.
Also acts to be electrostatically attracted. To that end, FIG.
As shown in (4), the floating dust particles 4 are collected by the needle-shaped electrode 1 and gradually grow to become the dust particle lumps 4a and fall off, often causing trouble.
【００１４】また、針状電極１に絶えず高圧の交流電圧
が印加されていると、針状電極１自体もコロナシャワー
３に曝されて、図３に示したように針状電極１の表面の
微小部分が剥離して発塵粒子4bとなって空気中に浮遊し
たり沈降したりすることが間々起こる。それに対して
は、例えば針状電極１を石英で被覆するなどの対策があ
る。ところが、こうした対策によれば、コロナシャワー
３の効率的な発生が抑えられて除電の効果が半減してし
まう不具合があった。When a high voltage AC voltage is constantly applied to the needle-shaped electrode 1, the needle-shaped electrode 1 itself is also exposed to the corona shower 3, and the surface of the needle-shaped electrode 1 is exposed as shown in FIG. Occasionally, minute portions are separated and become dust particles 4b, which float or settle in the air. For that purpose, there is a countermeasure such as coating the needle electrode 1 with quartz. However, according to such a measure, there is a problem that the effective generation of the corona shower 3 is suppressed and the effect of static elimination is halved.
【００１５】そこで本発明は、静電気除去装置の針状電
極を吸引筒で外嵌し、針状電極で生じた塵埃粒塊や発塵
粒子が脱落すると吸い取って、雰囲気の汚染を防止して
なる静電気除去装置を提供することを目的としている。Therefore, according to the present invention, the needle electrode of the static eliminator is externally fitted with a suction cylinder, and when dust particles or dust particles generated by the needle electrode fall off, they are sucked to prevent pollution of the atmosphere. It is intended to provide an electrostatic eliminator.
【００１６】[0016]
【課題を解決するための手段】上で述べた課題は、針状
電極に電源から交流電圧または直流電圧を印加してコロ
ナシャワーを発生させ、雰囲気中に漂う浮遊塵埃粒子の
帯電を除去する静電気除去装置であって、吸引筒を有
し、 前記吸引筒は、筒状をなして針状電極に外嵌して
おり、かつ排気系に連なって該針状電極の周囲の雰囲気
を後端部方向に吸引するものであるように構成された静
電気除去装置によって解決される。[Means for Solving the Problems] The above-mentioned problems are caused by applying an AC voltage or a DC voltage from a power source to a needle-shaped electrode to generate a corona shower, and to remove electrostatic charge of floating dust particles floating in the atmosphere. A removal device, which has a suction cylinder, wherein the suction cylinder has a tubular shape and is externally fitted to the needle electrode, and is connected to an exhaust system to form an atmosphere around the needle electrode at a rear end portion. This is solved by a static eliminator configured to be directional suction.
【００１７】[0017]
【作用】本発明においては、静電気除去装置の針状電極
を取り囲むように吸引筒を設け、針状電極のコロナシャ
ワーが発生する先端部周囲の雰囲気を吸引筒から排気路
を通って排気系で吸引するようにしている。In the present invention, the suction cylinder is provided so as to surround the needle electrode of the static electricity removing device, and the atmosphere around the tip portion where the corona shower of the needle electrode is generated is passed from the suction cylinder through the exhaust passage to the exhaust system. I try to inhale.
【００１８】そうすると、雰囲気の中に漂っている浮遊
塵埃粒子が針状電極に付着して成長し、脱落すると吸引
筒から吸い取られて雰囲気を汚染することを防ぐことが
できる。また、針状電極の表面がコロナシャワーに暴露
されて微小な破片状に剥離して生ずる発塵粒子も吸引筒
から吸い取られて雰囲気を汚染することを防ぐことがで
きる。[0018] By doing so, it is possible to prevent the floating dust particles floating in the atmosphere from adhering to the needle electrode and growing, and when falling off, being sucked from the suction cylinder and contaminating the atmosphere. Further, it is possible to prevent dust particles generated by exposing the surface of the needle-like electrode to corona shower and peeling it into fine fragments to contaminate the atmosphere by sucking it from the suction cylinder.
【００１９】[0019]
【実施例】図１は本発明の実施例の説明図で、図１
（Ａ）は下方から見た一部切欠き斜視図、図１（Ｂ）は
要部の拡大断面図である。図において、１は針状電極、
２は電源、３はコロナシャワー、４は浮遊塵埃粒子、4a
は塵埃粒塊、4bは発塵粒子、５は吸引筒、６は排気系、
6aは排気路、７は外枠、８は高圧ケーブル、９は絶縁部
材、10は静電気除去装置である。FIG. 1 is an explanatory view of an embodiment of the present invention.
1A is a partially cutaway perspective view seen from below, and FIG. 1B is an enlarged cross-sectional view of a main part. In the figure, 1 is a needle electrode,
2 is a power source, 3 is a corona shower, 4 is floating dust particles, 4a
Is dust particles, 4b is dust particles, 5 is a suction cylinder, 6 is an exhaust system,
6a is an exhaust passage, 7 is an outer frame, 8 is a high-voltage cable, 9 is an insulating member, and 10 is a static eliminator.
【００２０】図１において、複数個の針状電極１は、後
端部が高圧ケーブル８に接合されて並んでおり、箱形を
なした外枠７の中に絶縁部材９で固着されている。高圧
ケーブル８は電源２に連なって、数〜数十ｋＶの高い交
流電圧が印加されるようになっている。そして、針状電
極１に電圧が印加されれば、先端部からはコロナシャワ
ー３が発生する。In FIG. 1, a plurality of needle-shaped electrodes 1 are arranged with their rear ends joined to a high-voltage cable 8 and arranged side by side, and fixed by an insulating member 9 in a box-shaped outer frame 7. .. The high-voltage cable 8 is connected to the power supply 2 so that a high AC voltage of several to several tens kV is applied. When a voltage is applied to the needle-shaped electrode 1, a corona shower 3 is generated from the tip.
【００２１】針状電極１の針状に尖った先端部は、外枠
７に設けられた筒状の吸引筒５の中心部を通って外部に
突出している。そして、電圧が印加されれば先端部から
コロナシャワー３が発生する。The needle-shaped pointed tip of the needle-shaped electrode 1 projects to the outside through the center of the cylindrical suction cylinder 5 provided in the outer frame 7. When a voltage is applied, the corona shower 3 is generated from the tip.
【００２２】吸引筒５は、外枠７と絶縁部材９の間に設
けられた排気路6aを通って外部の排気系６に連なってお
り、図１（Ｂ）に示したように針状電極１の周囲の雰囲
気を吸引するようになっている。The suction cylinder 5 is connected to an external exhaust system 6 through an exhaust passage 6a provided between the outer frame 7 and the insulating member 9, and as shown in FIG. The atmosphere around 1 is sucked.
【００２３】こうして、本発明になる静電気除去装置10
によれば、雰囲気の中に漂う浮遊塵埃粒子４や針状電極
１の表面に付着して成長した塵埃粒塊4a、針状電極１の
表面が剥離して生じる発塵粒子4bなどが脱落しようとす
ると吸引筒５の中に吸い込まれ、雰囲気の中に漂ったり
沈降したりして雰囲気が汚染することを防ぐことができ
る。Thus, the static eliminator 10 according to the present invention.
According to the above, the floating dust particles 4 floating in the atmosphere, the dust particles 4a adhering to and growing on the surface of the needle-shaped electrode 1, the dust-generating particles 4b generated when the surface of the needle-shaped electrode 1 peels off, etc. Then, it is possible to prevent the atmosphere from being contaminated by being sucked into the suction cylinder 5 and drifting or settling in the atmosphere.
【００２４】こゝでは、針状電極１を１列に並べた構成
を例示したが、吸引筒５をそれぞれの針状電極１に外嵌
させれば、例えば格子状に並べてもよく、種々の変形が
可能である。また、電源２から印加する電圧は、交流に
限らず、除電する対象物によっては、直流や交流・直流
混在の電圧でもよく、パルス状の電圧でもよい。Although the structure in which the needle electrodes 1 are arranged in one row is illustrated here, if the suction cylinders 5 are fitted onto the respective needle electrodes 1, they may be arranged, for example, in a grid pattern, and various needle electrodes may be arranged. Deformation is possible. Further, the voltage applied from the power source 2 is not limited to alternating current, and may be direct current, a mixed voltage of alternating current and direct current, or a pulsed voltage depending on an object to be neutralized.
【００２５】[0025]
【発明の効果】半導体装置の製造工程において、ウェー
ハプロセスが行われるクリーンルームやいろいろな製造
装置の中の雰囲気の清浄度を保つために、雰囲気内に漂
っている塵埃の静電吸着を防ぐことは欠かせないが、静
電気除去装置に起因して再汚染の不具合が生じていた。
ところが、本発明になる針状電極に吸引筒を外嵌した静
電気除去装置によれば、再汚染を起こす塵埃を直ちに吸
い取って雰囲気から取り除くことができる。In the semiconductor device manufacturing process, in order to maintain the cleanliness of the atmosphere in the clean room in which the wafer process is performed and in various manufacturing apparatuses, it is possible to prevent electrostatic attraction of dust floating in the atmosphere. It is essential, but there was a problem of recontamination due to the static eliminator.
However, according to the static electricity eliminator according to the present invention, in which the suction cylinder is externally fitted to the needle-shaped electrode, the dust that causes recontamination can be immediately absorbed and removed from the atmosphere.
【００２６】その結果、今後ますます厳しい清浄度が望
まれる雰囲気を保つことに対して、本発明は寄与すると
ころが大である。As a result, the present invention greatly contributes to maintaining an atmosphere in which even more severe cleanliness is desired in the future.
【図１】 本発明の実施例の説明図で、（Ａ）は下方か
ら見た一部切欠き斜視図、（Ｂ）は要部の拡大断面図で
ある。FIG. 1 is an explanatory view of an embodiment of the present invention, (A) is a partially cutaway perspective view seen from below, and (B) is an enlarged sectional view of a main part.
【図２】 静電気除去装置の一例の一部切欠き斜視図で
ある。FIG. 2 is a partially cutaway perspective view of an example of an electrostatic eliminator.
【図３】 針状電極を拡大した側面図である。FIG. 3 is an enlarged side view of a needle electrode.
１ 針状電極 ２ 電源 ３
コロナシャワー ４ 浮遊塵埃粒子 4a 塵埃粒塊 4b
発塵粒子 ５ 吸引筒 ６ 排気系 6a 排気路 ７ 外枠 ８ 高圧ケーブル ９ 絶縁部材 10
静電気除去装置1 Needle electrode 2 Power supply 3
Corona shower 4 Floating dust particles 4a Dust particles 4b
Dust particles 5 Suction cylinder 6 Exhaust system 6a Exhaust path 7 Outer frame 8 High-voltage cable 9 Insulation member 10
Static eliminator
Claims (2)
たは直流電圧を印加してコロナシャワー(3) を発生さ
せ、雰囲気中に漂う浮遊塵埃粒子(4) の帯電を除去する
静電気除去装置であって、吸引筒(5) を有し、 前記吸引筒(5) は、筒状をなして前記針状電極(1) に外
嵌しており、かつ排気系(6) に連なって該針状電極(1)
の周囲の雰囲気を後端部方向に吸引するものであること
を特徴とする静電気除去装置。1. A corona shower (3) is generated by applying an AC voltage or a DC voltage from a power source (2) to a needle-shaped electrode (1) to remove electrostatic charges of suspended dust particles (4) floating in the atmosphere. A static eliminator having a suction tube (5), the suction tube (5) having a tubular shape and fitted onto the needle electrode (1), and being attached to the exhaust system (6). The needle electrodes (1) in a row
A device for removing static electricity, characterized in that the atmosphere around is sucked toward the rear end.
ており、 前記吸引筒(5) は、前記針状電極(1) のそれぞれに外嵌
している請求項１記載の静電気除去装置。2. A plurality of the needle-shaped electrodes (1) are arranged in parallel, and the suction cylinder (5) is fitted onto each of the needle-shaped electrodes (1). Static eliminator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5016692A JPH05251195A (en) | 1992-03-09 | 1992-03-09 | Static charge eliminator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5016692A JPH05251195A (en) | 1992-03-09 | 1992-03-09 | Static charge eliminator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05251195A true JPH05251195A (en) | 1993-09-28 |
Family
ID=12851624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5016692A Pending JPH05251195A (en) | 1992-03-09 | 1992-03-09 | Static charge eliminator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05251195A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996013086A1 (en) * | 1994-10-20 | 1996-05-02 | Joshua Shaw | Improvements in or in relation to negative air ion generators |
| AU692312B2 (en) * | 1994-10-20 | 1998-06-04 | Joshua Shaw | Improvements in or in relation to negative air ion generators |
| JP2002305096A (en) * | 2001-04-06 | 2002-10-18 | Kazuo Okano | Suction type ionizer |
| JP2003038969A (en) * | 2001-07-31 | 2003-02-12 | Alpha Technotool:Kk | Document shredder with destaticizer |
| JP2015092502A (en) * | 2009-04-24 | 2015-05-14 | イオン システムズ，インコーポレイティド | Clean corona gas ionization for static charge neutralization |
| JP2021064562A (en) * | 2019-10-16 | 2021-04-22 | シャープ株式会社 | Ion generation device and electrical equipment |
-
1992
- 1992-03-09 JP JP5016692A patent/JPH05251195A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996013086A1 (en) * | 1994-10-20 | 1996-05-02 | Joshua Shaw | Improvements in or in relation to negative air ion generators |
| AU692312B2 (en) * | 1994-10-20 | 1998-06-04 | Joshua Shaw | Improvements in or in relation to negative air ion generators |
| JP2002305096A (en) * | 2001-04-06 | 2002-10-18 | Kazuo Okano | Suction type ionizer |
| JP2003038969A (en) * | 2001-07-31 | 2003-02-12 | Alpha Technotool:Kk | Document shredder with destaticizer |
| JP2015092502A (en) * | 2009-04-24 | 2015-05-14 | イオン システムズ，インコーポレイティド | Clean corona gas ionization for static charge neutralization |
| JP2021064562A (en) * | 2019-10-16 | 2021-04-22 | シャープ株式会社 | Ion generation device and electrical equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20000411 |