JPH0763032B2 - Electrostatic processing equipment for objects - Google Patents

Electrostatic processing equipment for objects

Info

Publication number
JPH0763032B2
JPH0763032B2 JP29114089A JP29114089A JPH0763032B2 JP H0763032 B2 JPH0763032 B2 JP H0763032B2 JP 29114089 A JP29114089 A JP 29114089A JP 29114089 A JP29114089 A JP 29114089A JP H0763032 B2 JPH0763032 B2 JP H0763032B2
Authority
JP
Japan
Prior art keywords
electrostatic
electrode
electric field
object according
electrostatic treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP29114089A
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Japanese (ja)
Other versions
JPH02210798A (en
Inventor
閃一 増田
雄飛 福浦
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Individual
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Individual
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Priority to JP29114089A priority Critical patent/JPH0763032B2/en
Publication of JPH02210798A publication Critical patent/JPH02210798A/en
Publication of JPH0763032B2 publication Critical patent/JPH0763032B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Elimination Of Static Electricity (AREA)
  • Accessory Devices And Overall Control Thereof (AREA)
  • Treating Waste Gases (AREA)
  • Electrostatic Separation (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Description

【発明の詳細な説明】 本発明はフアイン・セラミック誘電体を用いた不平等電
界を発生する沿面放電型電界装置による物体の静電的処
理装置に関するものである。
The present invention relates to a device for electrostatically treating an object by means of a creeping discharge type electric field device for generating a non-uniform electric field using a fine ceramic dielectric.

誘電体の表面や内部に電極を設け、これに直流高電圧な
いし交流高圧(正弦波、矩形波、パルス状高電圧を含
む)を印加して気中放電や電気力学的現象など電界に固
有の現象を発生せしめ、これを物体の荷電や除電のため
にイオン源として利用したり、あるいは物体の電気力に
よる附着、あるいは反撥や輸送等の電気力学的操作に利
用する装置(以下電界装置と総称する)はそれ自体公知
である。
Electrodes are provided on the surface or inside of the dielectric material, and high DC voltage or high AC voltage (including sine wave, rectangular wave, pulsed high voltage are applied) is applied to this electrode, which is unique to the electric field such as air discharge and electrodynamic phenomenon. A device that causes a phenomenon to be used as an ion source for charging or discharging an object, or for attachment by an electric force of an object, or for electromechanical operation such as repulsion or transportation (hereinafter collectively referred to as an electric field device). Is known per se.

イオン源としての電界装置の例としては古くは「電気的
瓦斯精製装置」(特許第99242号)があり、また近くは
「静電粉体塗着装置」(特願昭51−103328),「粒子荷
電装置」(特願昭52−106400),「除電装置)(特願昭
52−145838),「管路式除電装置」(特願昭56−15541
9)などがある。また電気力学的操作に利用するための
電界装置の例としては「接触形電界カーテン装置」(特
許第983218号),「接触形電界カーテンを用いた粒子輸
送,供給装置」(特許第973106号),「接触形電界カー
テンを用いて粒子を塗着する方法ならびにその装置」
(特許第1009331号),「接触形電界カーテンを構成す
る方法およびこれを利用した接触形電界カーテン装置」
(特許第981125号),「接触形電界カーテンを用いた静
電粉体塗着用ブース」(特許第1047574号),「帯電粒
子発生装置」(特許第1048666号),「細線型電界装
置」(特公昭57−6385),「単極電界カーテン装置」
(特公昭57−9856),「電界カーテン装置からなる壁」
(特公昭57−24181),「安全型電界カーテン装置」
(特開昭52−108574),「一相露出型接触型電界カーテ
ン装置」(特願昭57−081779)などがある。
As an example of an electric field device as an ion source, there is an old "electrical gas refining device" (patent No. 99242), and nearby are "electrostatic powder coating device" (Japanese Patent Application No. 51-103328), Particle charging device "(Japanese Patent Application No. 52-106400)," static elimination device "(Japanese Patent Application No.
52-145838), "Pipe-type static eliminator" (Japanese Patent Application No. 56-15541)
9) etc. As examples of the electric field device used for electrodynamic operation, there are "contact type electric field curtain device" (patent No. 983218), "particle transport and supply device using contact type electric field curtain" (patent number 973106). , "Method and device for coating particles using contact electric field curtain"
(Patent No. 1009331), "Method for constructing contact type electric field curtain and contact type electric field curtain device using the same"
(Patent No. 981125), "Electrostatic powder coating booth using contact type electric field curtain" (Patent No. 1047574), "Charged particle generator" (Patent No. 1048666), "Thin wire electric field device" ( JP-B-57-6385), "Unipolar electric field curtain device"
(Japanese Patent Publication No. 57-9856), "Wall consisting of electric field curtain device"
(Japanese Patent Publication No. 57-24181), "Safety type electric field curtain device"
(Japanese Patent Application Laid-Open No. 52-108574), "One-phase exposure type contact electric field curtain device" (Japanese Patent Application No. 57-081779), and the like.

しかしこれらすべての電界装置を通じて、電極をその表
面に担持したり、その内部に埋入保持したりする誘電体
には極めて高い値の直流又は交流の電界が加わり、特に
電極附近における電界の集中が著しい。その結果この電
界集中部分にはそれが気中に露出している時は勿論たと
え誘電体中に埋入されている場合も局部的な部分放電が
発生して、この部分の誘電体材料はイオンや電子の衝撃
をうける。この作用は電界装置をイオン源として用いる
場合には当然電極に気中放電を発生せしめるので、益々
著しいものとなる。また電極に交流電圧を印加すると上
記部分放電は特に著しいものとなる。しかるに従来の沿
面放電型電界装置においては、製作の容易さから殆んど
の場合誘電体として合成樹脂ないし合成樹脂で接着せる
成形無機絶縁物が用いられ、この場合上記部分放電によ
るイオン衝撃や電子衝撃によつて合成樹脂等の有機誘電
体材料が局部的に劣化し、特に交流高電圧印加の時はこ
れが急速に樹枝状に進展してトリーイングとよばれる絶
縁欠陥が成長し、遂に比較的短時間内に高電圧が印加さ
れる電極間の絶縁破壊を生ずることをさけ得なかつたの
である。これを防止するため誘電体としてマイカやセラ
ミツク等の無機絶縁物を用いる時は、寿命は若干延長す
るものの電極をその内部に完全に埋入することが困難と
なるのみならず、その構造が緻密でないため、電界効果
を高めるため絶縁部分の間隔や厚味をうすくする時はや
はり低い電圧で直ちに絶縁破壊を生じ、有効な電界装置
を構成することが不可能であつた。また無機誘電体とし
てガラスを用いる時は、この問題は解消するものの、機
械的に脆弱となる上やはり絶縁破壊強度も必ずしも充分
でなく、その上不平等交番電界印加による局部的温度上
昇によつて極めて容易に破かいするという欠点をまぬが
れることが出来なかつたのである。
However, through all of these electric field devices, an extremely high value of DC or AC electric field is applied to the dielectric material that carries the electrode on its surface or is embedded and held inside the electrode, and especially the concentration of the electric field near the electrode is concentrated. Remarkable. As a result, a local partial discharge occurs in this electric field concentrated portion when it is exposed in the air and even when it is embedded in the dielectric, and the dielectric material in this portion is ionized. And receives the shock of electrons. When the electric field device is used as an ion source, this action naturally causes an air discharge in the electrode, and therefore becomes more remarkable. Further, when an AC voltage is applied to the electrodes, the above partial discharge becomes particularly remarkable. However, in a conventional creeping discharge type electric field device, a synthetic resin or a molded inorganic insulator bonded with a synthetic resin is used as a dielectric in most cases because of its ease of manufacture. As a result, the organic dielectric material such as synthetic resin is locally deteriorated, and especially when an AC high voltage is applied, it rapidly develops into a dendritic state and an insulation defect called treeing grows, and finally it is relatively short. It was possible to avoid dielectric breakdown between electrodes to which a high voltage was applied within the time. In order to prevent this, when an inorganic insulator such as mica or ceramic is used as the dielectric, the life is slightly extended, but it is not only difficult to completely embed the electrode inside, but the structure is dense. Therefore, when the distance and thickness of the insulating portion are reduced to enhance the electric field effect, dielectric breakdown occurs immediately even at a low voltage, and it is impossible to construct an effective electric field device. When glass is used as the inorganic dielectric, this problem is solved, but it becomes mechanically fragile and the dielectric breakdown strength is not always sufficient. Moreover, the local temperature rise due to the application of the unequal alternating electric field causes He could not get over the drawback of breaking it very easily.

この様に従来材料として適切なものが得られなかつたが
ために電界装置は著しく短寿命かつ高価なものとなつ
て、その広範な活用の道が閉ざされて居たのである。
In this way, the electric field device has been extremely short-lived and expensive due to the fact that an appropriate material cannot be obtained as a conventional material, and its widespread use has been blocked.

本発明の目的は上記の難点を解決した長寿命で信頼性が
高くかつ安価な電界装置を用いた物体の静電的処理装置
を提供してその装置の本格的な実用化を可能ならしめる
ことにある。
An object of the present invention is to provide an electrostatic treatment apparatus for an object using a long-life, high-reliability and inexpensive electric field apparatus which solves the above-mentioned problems, and to enable full-scale commercialization of the apparatus. It is in.

しかして本発明はこの目的を該誘電体材料として、例え
ば高純度アルミナ磁器等の如く純度の高い機械的・電気
的・化学的かつ熱的に著しく丈夫なセラミツク材料(以
下フアインセラミツクと称す)を使用すると共に、その
焼成前の成形材料に電極を配設しておき、これを電極と
一体として焼成して電界装置を作製することにより、極
めて緻密で機械的・電気的・化学的かつ熱的に丈夫で信
頼性の高いものとして、これを物体の静電的処理装置に
使用することにより達成する。
Therefore, the present invention has this object as the dielectric material, for example, a highly pure mechanically, electrically, chemically and thermally strong ceramic material such as high-purity alumina porcelain (hereinafter referred to as a fine ceramic). Is used, and the electrode is placed on the molding material before firing, and this is fired together with the electrode to produce an electric field device, resulting in extremely precise mechanical, electrical, chemical and thermal properties. It is achieved by using it in an electrostatic treatment device for objects, while being relatively robust and reliable.

その具体的方法としては、たとえば高純度アルミナ磁器
を用いるときは、予め粒径数ミクロン以下に粉砕せるア
ルミナを有機バインダーで結合の上、層状に形成した原
料シート(グリーン・シートと称する)を作製し、その
表面上に適当な金属、例えばタングステン微粉末を分散
せるインクを用いて例えばスクリーン印刷等の厚膜印刷
技術で電極を形成し、かくして形成せる電極付グリーン
シートをそのまま単独に、あるいは複数個積層圧着の上
多層グリーンシートとして、水素炉等の適当なる還元性
ふん囲気内で1500〔℃〕附近の高温度で焼結する等の方
法をとることができる。
As a specific method, for example, when using high-purity alumina porcelain, a raw material sheet (referred to as a green sheet) formed by layering alumina, which is previously ground to a particle size of several microns or less, is bonded with an organic binder. Then, an electrode is formed by a thick film printing technique such as screen printing using an ink in which an appropriate metal, for example, tungsten fine powder is dispersed on the surface, and the green sheet with an electrode thus formed is used alone or in a plurality. As a multilayer green sheet for individual lamination pressure bonding, a method such as sintering at a high temperature of around 1500 [° C] in a suitable reducing atmosphere such as a hydrogen furnace can be used.

この場合積層構造の多層グリーンシートにより電界装置
を構成することにより、電極の一部を一層ないし多層に
フアイン・セラミツク誘電体の内部にサンドイツチ状に
埋入配設することが可能となり、これによつて高度の電
界効果,イオン形成効果を達成したり、あるいは高電圧
印加の電極を全面的に内部埋入することによって露出部
分における電界集中を防止し、安全性を高めることが可
能となる。
In this case, by constructing an electric field device with a multilayer green sheet having a laminated structure, it becomes possible to dispose a part of the electrodes in a single layer or in multiple layers inside the fine ceramic dielectric in a san-gertian pattern. Therefore, by achieving a high degree of electric field effect and ion forming effect, or by embedding a high-voltage-applied electrode entirely inside, it is possible to prevent electric field concentration in the exposed portion and improve safety.

またグリーンシートを貫ぬいて小孔をあけ、ここにも又
上記タングステン微粉体インキ等を充填の上焼成するこ
とにより、単層又は多層のフアイン・セラミツク誘電体
層を貫通してその外側面に設けられた円板状のターミナ
ル導体部と電気的接続を行うことが可能となる。またそ
の表面に配設せる電極をその外側に配置せる円板状ター
ミナル導体部に接続して外部端子との電気的接続を行う
際、これらの各円板状ターミナル導体部と対向する位置
に予じめ配置されている給電端子上に単に載置するだけ
でその接続をはかることも出来る。
In addition, a small hole is formed by penetrating the green sheet, and the tungsten fine powder ink or the like is also filled in the green sheet and fired to penetrate the single-layer or multi-layer fine ceramic dielectric layer to the outer surface thereof. It is possible to make electrical connection with the provided disc-shaped terminal conductor portion. In addition, when the electrodes to be arranged on the surface are connected to the disc-shaped terminal conductors arranged on the outside to make electrical connection with external terminals, the electrodes are preliminarily placed at the positions facing the disc-shaped terminal conductors. It is also possible to make the connection by simply placing it on the power supply terminal that is laid out.

本発明に使用するフアインセラミツク誘電体材料は純度
90%以上の高純度アルミナ磁器が好適であるが、それ以
外でも機械的,電気的,化学的,熱的に丈夫な材料であ
ればいかなるフアインセラミツク材料を用いても良い。
また電界装置を多層構造で形成する時は高純度アルミナ
磁器層と比較的純度が低く安価なアルミナ磁器層を複合
使用したり、種類・性質の異なるフアインセラミツク材
料を層別ないし場所別に複合使用したり、あるいは更に
フアインセラミツク材料とそれ以外の誘電体材料(合成
樹脂・マイカ・ガラス・FRP)を層別ないし場所別に複
合使用して、より安価にしたり、よりその性能を高める
こともできる。
The fine ceramic dielectric material used in the present invention is pure
High-purity alumina porcelain having a purity of 90% or higher is suitable, but any other fine ceramic material may be used as long as it is mechanically, electrically, chemically and thermally durable.
When forming an electric field device with a multi-layer structure, a high-purity alumina porcelain layer and an inexpensive alumina porcelain layer with a relatively low purity are used in combination, or fine ceramic materials of different types and properties are used in layers or places. Alternatively, it is possible to further reduce the cost and improve its performance by using fine ceramic materials and other dielectric materials (synthetic resin, mica, glass, FRP) in different layers or locations. .

本発明による電界装置の表面は、生地のまま使用しても
よいが、その表面に適当な釉薬をほどこしてその平滑
化,電気伝導性の附与等表面性質の改善をほどこしても
よく、またテフロン層,シリコン層,その他適当な材料
の表面層を附着せしめてその表面性質の改善をほどこす
こともできる。
The surface of the electric field device according to the present invention may be used as it is, but the surface may be treated with an appropriate glaze to improve its surface properties such as smoothing and imparting electric conductivity. A Teflon layer, a silicon layer, or a surface layer of another suitable material may be attached to improve the surface properties.

また、本発明に使用する電極材料としては、その素地材
としてのフアインセラミツク材料と共に焼結する際これ
とのなじみが良く、これと出来る限り近い熱膨張係数を
有する高融点の金属であることが好ましく、素地が高純
度アルミナ磁器のときはタングステンがもつとも適して
いる。しかし各種のフアインセラミツク材料に応じて適
当な凡ゆる金属材料を選定使用することが出来る。また
そのグリーンシートへの附着に当つては金属粉末分散イ
ンキのスクリーン印刷等の手法による厚膜電極を形成し
てもよいが、場合によつては線状,板状,箔状に予め形
成せる金属電極を附着してもよい。また蒸着等により附
着せる薄膜電極を用いることも出来る。更に電極材料と
しては必ずしも金属材料に限定されることなく、カーボ
ン繊維,半導電性セラミツク材料等適当な凡めるものが
使用できることは云うまでもない。また電極材料はその
酸化を防いだり表面を保護したり、あるいははんだづけ
を容易ならしめるため、その上にニツケル等適当な金属
をめつきしてもよく、更に電極自体の上に薄く釉薬やア
ルミナ絶縁膜その他の表面層をほどこしてもよい。
Further, the electrode material used in the present invention is a metal having a high melting point, which is well compatible with the fine ceramic material as the base material when it is sintered and has a coefficient of thermal expansion as close as possible to this. Is preferred, and tungsten is also suitable when the base material is high-purity alumina porcelain. However, any appropriate metal material can be selected and used according to various fine ceramic materials. In addition, when attaching to the green sheet, a thick film electrode may be formed by a method such as screen printing of metal powder dispersed ink, but in some cases, it may be formed in advance in a linear shape, a plate shape, or a foil shape. A metal electrode may be attached. It is also possible to use a thin film electrode attached by vapor deposition or the like. Further, it is needless to say that the electrode material is not necessarily limited to a metal material, and an appropriate material such as carbon fiber or semiconductive ceramic material can be used. In addition, the electrode material may be plated with a suitable metal such as nickel in order to prevent its oxidation, protect the surface, or facilitate soldering. Furthermore, thin glaze or alumina insulation may be applied on the electrode itself. A membrane or other surface layer may be applied.

また本発明による新規の電界装置の幾何学形状は、平板
状のみならず任意の曲面状(球面状,半筒状,多角形
状,段階状等)に形成使用でき、これを行うに当つては
柔軟性に富む電極附グリーンシートの段階でこれを所望
の形状に成形の上焼成すればよい。
In addition, the geometrical shape of the novel electric field device according to the present invention can be formed and used not only in a flat plate shape but also in an arbitrary curved surface shape (spherical shape, semi-cylindrical shape, polygonal shape, step shape, etc.). At the stage of the flexible electrode-attached green sheet, it may be formed into a desired shape and then fired.

本発明による電界装置の応用領域は、物体の荷電や除電
装置,物体の電気力学的操作装置の凡ゆるものに及ぶと
共に、本願冒頭に例示せる特許ぼよび特許出願のすべて
を包含し、更に今後出現すべき電界装置の応用方法なら
びに応用装置のすべてを包含する。
The field of application of the electric field device according to the present invention covers all of the charging and discharging devices for objects, the electrodynamic operation device for objects, and includes all patents and patent applications exemplified at the beginning of the present application. It includes all application methods and application devices of electric field devices that should appear.

以下本発明の特徴を実施例及び図面によつて更に詳細に
説明する。
The features of the present invention will be described in more detail below with reference to examples and drawings.

第1A図乃至第1F図はイオン源としての電界装置に本発明
を実施せる例で、本発明によつて長方形のフアイン・セ
ラミツク誘電体板上に長手方向に細長いコロナ放電極群
を配設し、その下方の誘電体板内部に該コロナ放電極群
全体と対向する大きさをもつた一枚の誘電電極を埋入焼
成せる装置の作製方法を示す。該誘電体板は上下2枚の
グリーンシート素材をもつて作製する。第1A図は上部グ
リーンシートの上面を示す斜視図で、長方形の上部グリ
ーンシート1の上面2に、長手方向にスクリーン印刷の
手法を用いてタングステン微粉末を分散せるインクを幅
約1〔mm〕、厚味約100〔μm〕、間隔約5〔mm〕に印
刷して複数本の平行コロナ電極3,4,5を形成し、更にこ
れを同様の方法で印刷せる共通導線6に接続の上、ター
ミナル導線7を更に印刷接続する。
1A to 1F show an example of carrying out the present invention in an electric field device as an ion source.According to the present invention, a long thin corona discharge electrode group is arranged in a longitudinal direction on a rectangular fine ceramics dielectric plate. A method of manufacturing an apparatus in which a single dielectric electrode having a size facing the entire corona discharge electrode group is embedded and fired inside the dielectric plate thereunder will be described. The dielectric plate is manufactured with two upper and lower green sheet materials. FIG. 1A is a perspective view showing the upper surface of the upper green sheet. On the upper surface 2 of the rectangular upper green sheet 1, the ink for dispersing the fine tungsten powder by the screen printing method in the longitudinal direction has a width of about 1 mm. , Thickness of about 100 [μm], spacing of about 5 [mm] to form a plurality of parallel corona electrodes 3, 4 and 5, and connect them to a common conductor 6 that can be printed by the same method. , The terminal conductor 7 is further connected by printing.

第1B図は該上部グリーンシート1の下面8を示す斜視図
で、電極3,4,5が占める上面の全面積と対向する下面8
上の面に、同じスクリーン印刷の手法を用いてタングス
テン微粉末を分散せるインクを印刷して長方形の面状の
誘導電極9を形成する。第1C図は下部シート10の上面11
を示す斜視図、同シート10の中央に直径約1〔mm〕の穴
12を同シート10を貫通してうがち、この穴にタングステ
ン微粉末を分散せるインクを充填してシート10を貫通す
る導体を形成し、更に穴12を中心として直径約10〔mm〕
の円板状の接触用導体部13を同じくタングステン微粉末
分散のインクでスクリーン印刷して形成する。また同様
の方法でシート10の左端の端縁にターミナル導線7と接
続するターミナル導線7aを画く。第1D図は下部シート10
の下面14を示す斜視図でタングステン微粉末分散のイン
クを充填せる上記の穴12を中心として直径約10〔mm〕の
円板状のターミナル導体部15を同じくタングステン微粉
末分散のインクでスクリーン印刷して形成する。また下
面14の左端に別の直径約10〔mm〕の円板状ターミナル導
体部16を同じくタングステン微粉末分散のインクでスク
リーン印刷により形成し、これをターミナル導線7aに同
様のインクで印刷せるターミナル導線17により接続す
る。次に上記各シート1,10を重ねて熱圧着成形の上水素
炉内で焼成すると面状誘導電極9は両シート1,10間にサ
ンドウイツチ状に気密に挾まれた状態で焼結され、上下
シートが一体化して焼結された誘電体板18内に埋入され
る。そして該誘導電極9は円板状ターミナル導体部13と
融合し、穴12を通じて導通の上誘電体板18の裏面の円板
状ターミナル導体部15に接続される。また誘電体板18の
表面のコロナ電極群3,4,5は貫通導線6、ターミナル導
線7,7aを介して誘電体板18の裏面の円板状ターミナル導
体部16に接続される。第1E図はこの様にして作製せるイ
オン源としての電界装置の面表を示す斜視図で、部分的
に上部シートによるセラミツク板を切りとつて、下部シ
ートによるセラミツク板部分と誘導電極9が示されてい
る。第1F図はこの電界装置の横断面図を示す。但し電極
3,4,5、導線6,7,7a,17およびターミナル導体部15,16の
表面にはタングステンの酸化を防ぐためニツケルを鍍金
し、これにより15,16への外部導線のハンダづけも容易
となる。いま図には省略して画かれていないターミナル
導体部16,15を介して高周波高流高圧電源19より、コロ
ナ電極群3,4,5と面状誘導電極9との間に高周波交流高
電圧をフアインセラミツク誘電体層20を介して印加する
(但し安全のため3,4,5は接地してある)と、3,4,5の端
縁から高周波コロナ放電が誘電体板18の表面に沿つて発
生し、豊富な正負イオンを含むプラズマを形成する。し
たがつてこれを帯電物体の近傍に近づけると、その電荷
と逆極性のイオンがこのプラズマから該帯電物体に向つ
て供給され、これを迅速に除電する。すなわち除電器と
して使用することが出来る。この場合高周波交流高圧電
源19の代りにパルス高圧電源を用い、くり返しパルス電
圧を印加してもよいことは、いうまでもない。
FIG. 1B is a perspective view showing the lower surface 8 of the upper green sheet 1, and the lower surface 8 facing the entire area of the upper surface occupied by the electrodes 3, 4 and 5.
An ink for dispersing fine tungsten powder is printed on the upper surface by the same screen printing method to form a rectangular planar induction electrode 9. FIG. 1C shows the upper surface 11 of the lower sheet 10.
A perspective view showing the hole in the center of the sheet 10 with a diameter of about 1 mm
12 gargles through the sheet 10 and fills the hole with an ink that disperses tungsten fine powder to form a conductor that penetrates the sheet 10. Further, with the hole 12 as the center, a diameter of about 10 (mm)
The disk-shaped contact conductor portion (13) is formed by screen-printing with the same fine tungsten powder dispersion ink. In the same manner, the terminal conductor 7a connected to the terminal conductor 7 is drawn on the left edge of the sheet 10. Figure 1D shows lower sheet 10
In the perspective view showing the lower surface 14 of the above, the disk-shaped terminal conductor portion 15 having a diameter of about 10 mm around the hole 12 for filling the ink of the tungsten fine powder dispersion is screen-printed with the ink of the tungsten fine powder dispersion. To form. Further, another disc-shaped terminal conductor portion 16 having a diameter of about 10 (mm) is formed on the left end of the lower surface 14 by screen printing with the same fine tungsten powder dispersion ink, and this is printed on the terminal conducting wire 7a with the same ink. Connect with a conductor 17. Next, when the above-mentioned sheets 1 and 10 are stacked and thermocompression-molded and fired in a hydrogen furnace, the planar induction electrode 9 is sintered in a sandwiched state between the sheets 1 and 10 in an airtight manner, The sheets are embedded in an integrally sintered dielectric plate 18. Then, the induction electrode 9 is fused with the disk-shaped terminal conductor portion 13 and is connected to the disk-shaped terminal conductor portion 15 on the back surface of the conductive upper dielectric plate 18 through the hole 12. Further, the corona electrode groups 3, 4, 5 on the front surface of the dielectric plate 18 are connected to the disc-shaped terminal conductor portion 16 on the back surface of the dielectric plate 18 via the through conductors 6 and the terminal conductors 7, 7a. FIG. 1E is a perspective view showing a surface of an electric field device as an ion source that can be produced in this manner. The ceramic plate partly cut off by the upper sheet to show the ceramic plate part and the induction electrode 9 by the lower sheet. Has been done. FIG. 1F shows a cross-sectional view of this electric field device. However, electrode
Nickel plating is applied to the surfaces of 3,4,5, conductors 6,7,7a, 17 and terminal conductors 15,16 to prevent oxidation of tungsten, which makes it easy to solder external conductors to 15,16. Becomes From the high frequency high current high voltage power supply 19 via the terminal conductors 16 and 15 which are not shown in the figure, a high frequency AC high voltage is applied between the corona electrode groups 3 and 4 and the planar induction electrode 9. Is applied through the fine ceramic dielectric layer 20 (however, 3,4,5 are grounded for safety), a high frequency corona discharge is generated from the edges of 3,4,5 on the surface of the dielectric plate 18. Generated along with the formation of a plasma containing abundant positive and negative ions. Therefore, when it is brought close to the charged object, ions having a polarity opposite to that of the charge are supplied from the plasma toward the charged object, and the charge is rapidly eliminated. That is, it can be used as a static eliminator. In this case, needless to say, a pulse high voltage power source may be used instead of the high frequency alternating current high voltage power source 19 to repeatedly apply the pulse voltage.

第2図は第1F図のイオン源電界装置21をローラー22を通
過後のゴムベルト23のまさつ帯電電荷の除電の利用せる
例で、帯電したゴムベルト表面のごく近くにイオン源電
界装置21が捜入配設され、コロナ電極群3,4,5により形
成されるプラズマから、図においては負イオンが吸引さ
れてゴムベルト表面の正電荷を中和する。24は保護用の
高抵抗である。
FIG. 2 shows an example in which the ion source electric field device 21 of FIG. 1F is used to remove the static charge of the rubber belt 23 after passing through the roller 22. The ion source electric field device 21 is located very close to the charged rubber belt surface. In the figure, negative ions are attracted from the plasma formed by the corona electrode groups 3, 4 and 5 that are inserted and arranged to neutralize the positive charges on the surface of the rubber belt. 24 is a high resistance for protection.

第3図は第1A図、第1B図に示す上部シートと第1C図、第
1D図に示す下部シートを重ねて第1E図の形状に積層圧着
の上これを長手方向を軸として細線状コロナ放電極3,4,
5,…を有する上面を内側として曲げて中空円筒26を構成
の上、焼結してイオン源を構成したものである。円筒内
表面に軸方向に平行かつ等間隔に配列された細線状コロ
ナ放電極3,4,5,…とフアインセラミツク中空円筒26の内
部に埋入して円筒面状に形成された誘導電極9との間
に、それぞれターミナル導体部15,16を介して図の如く
高周波交流電圧電源19より高周波交流高電圧を印加する
と、中空円筒26の内面に沿つてコロナ放電極群3,4,5,…
より高周波コロナ放電が発生してプラズマイオン源を形
成する。したがつてこの様な中空円筒状電界装置を電気
抵抗の高い粉粒体の空気輸送管路の途中に挿入する時
は、管路内壁とのまさつにより強力に帯電した粉粒体の
電気を上記中空円筒26の内面に生じたプラズマが供給す
る逆極性のイオンにより中和除電することができる。
FIG. 3 shows the upper sheet shown in FIGS. 1A and 1B, and FIG. 1C and FIG.
The lower sheet shown in Fig. 1D is overlaid and laminated in the shape shown in Fig. 1E, and then the thin wire corona discharge electrode 3, 4,
The hollow cylinder 26 is formed by bending the upper surface having 5, ... As an inner side, and is then sintered to form an ion source. The fine linear corona discharge electrodes 3, 4, 5, ... Arranged parallel to the inner surface of the cylinder in the axial direction at equal intervals and the induction electrode formed in the cylindrical surface by being embedded inside the fine ceramic hollow cylinder 26. When a high-frequency AC high voltage is applied from the high-frequency AC voltage power source 19 via the terminal conductors 15 and 16 to the corona discharge electrode 9, the corona discharge electrode groups 3, 4, 5 along the inner surface of the hollow cylinder 26. , ...
A higher frequency corona discharge is generated to form a plasma ion source. Therefore, when inserting such a hollow cylindrical electric field device in the middle of the air transportation pipeline of the powder with high electrical resistance, the electricity of the powder that is strongly charged by the inner wall of the pipeline is Neutralization and neutralization can be performed by the ions of opposite polarity supplied by the plasma generated on the inner surface of the hollow cylinder 26.

第4図は第3図の装置の変形で、細線状コロナ放電極3,
4,5,…を中空円筒26の内面に、円筒軸と直交する方向に
配列したものである。
FIG. 4 is a modification of the device shown in FIG.
Are arranged on the inner surface of the hollow cylinder 26 in a direction orthogonal to the cylinder axis.

第3図、第4図の円筒状電界装置はまた高抵抗液体のパ
イプ輸送の途中に挿入して、パイプとのまさつにより帯
電せる液体の除電に用いることも出来る。
The cylindrical electric field device shown in FIGS. 3 and 4 can also be inserted in the middle of pipe transportation of a high-resistance liquid and used for static elimination of a liquid charged by the pressure of the pipe.

第5図は第1E図、第1F図に示す板状イオン源電界装置18
を荷電装置として使用せる例で、接地せる非コロナ電極
29に対向して、その電界装置18をコロナ放電極3,4,5,…
が非コロナ電極29に向かう如くに続縁支持し、該コロナ
放電極3,4,5,…と埋入誘導電極9の間に高周波交流電圧
電源19により高周波交流高電圧を印加して、コロナ放電
極3,4,5よりプラズマを形成せしめた上で、コロナ放電
極3,4,5を負の直流高圧電源30に接続すると、プラズマ
より負イオンが接地非コロナ電極29に向つて走行し、電
界装置18,非コロナ電極29の間の荷電空間31に直流電界
とイオン電流を生ずる。いま荷電しようとする物体、た
とえば粉粒体又は液滴32をここに導入すると負イオンの
射突をうけて直ちに負に荷電されて、帯電物体33として
外部に供給される。第6図は第5図を示す所の本発明に
よる荷電用イオン源電界装置18を接地非コロナ電極29上
におかれた絶縁フイルム36の表面に負電荷をのせるのに
利用せる例で、これによりフイルム36を非コロナ電極29
上に電気力により強力に附着せしめる。電界装置18は矢
印37の方向に移動され、これによりフイルム36の全表面
に均一に電荷をのせることができる。この状態で直流高
圧電源30をとり外して、この部分を接地すると、電界装
置18は除電器として働き、フイルム36の表面電荷を除去
してフイルム36の非コロナ電極29からの脱着を可能なら
しめる。
FIG. 5 shows a plate ion source electric field device 18 shown in FIGS. 1E and 1F.
In the example of using a battery as a charging device, a non-corona electrode that is grounded
The electric field device 18 is connected to the corona discharge electrode 3,4,5, ...
Are supported toward the non-corona electrode 29, and a high-frequency AC high voltage is applied between the corona discharge electrodes 3, 4, 5, ... When plasma is formed from the discharge electrodes 3, 4, and then the corona discharge electrodes 3, 4, 5 are connected to the negative DC high-voltage power supply 30, negative ions from the plasma travel toward the grounded non-corona electrode 29. A DC electric field and an ionic current are generated in the charging space 31 between the electric field device 18 and the non-corona electrode 29. When an object to be charged, such as a powder or granular material or a droplet 32, is introduced here, it is immediately charged negatively by being bombarded with negative ions and supplied to the outside as a charged object 33. FIG. 6 shows an example in which the charging ion source electric field device 18 according to the present invention shown in FIG. 5 is used to apply a negative charge to the surface of the insulating film 36 placed on the ground non-corona electrode 29. As a result, the film 36 is attached to the noncorona electrode 29
Attach it strongly by electric force on top. The electric field device 18 is moved in the direction of the arrow 37, so that the entire surface of the film 36 can be uniformly charged. When the DC high-voltage power supply 30 is removed in this state and this part is grounded, the electric field device 18 functions as a static eliminator, removes the surface charge of the film 36, and allows the film 36 to be detached from the non-corona electrode 29. .

第7図は第5図の荷電用イオン源電界装置18を粉体塗着
装置として利用せる例である。すなわち接地懸垂せる被
塗着物38の前面に電界装置18を配置し、交流高圧電源19
によつて、コロナ放電極3,4,5によりプラズマを電界装
置18の対向表面上に形成の上、直流高圧電源30によつ
て、該プラズマより負イオンを38に向つて走行せしめ、
上方よりパイプ39及び三角形フイーダー40の細隙41をへ
て粉体を上方より電界装置18の表面に供給すると、直ち
に負イオンの射突により負に荷電され、電気力により被
塗着物38に向つて運ばれてその表面に塗着される。
FIG. 7 shows an example in which the charging ion source electric field device 18 of FIG. 5 is used as a powder coating device. That is, the electric field device 18 is arranged in front of the adherend 38 to be suspended by the ground, and the AC high-voltage power supply 19
Thus, by forming a plasma on the facing surface of the electric field device 18 by the corona discharge electrodes 3, 4, and by the DC high-voltage power supply 30, let the negative ions travel from the plasma toward 38,
When the powder is supplied to the surface of the electric field device 18 from above through the pipe 39 and the slit 41 of the triangular feeder 40 from above, it is immediately negatively charged by the bombardment of negative ions and is directed toward the adherend 38 by electric force. It is carried and applied to the surface.

【図面の簡単な説明】[Brief description of drawings]

第1A図は本発明の物体の静電的処理装置に用いる電界装
置の製造過程における原料シートの上面を示す斜面図、
第1B図は同原料シートの下面を示す斜面図、第1C図は他
の原料シートの上面を示す斜面図、第1D図は他の原料シ
ートの下面を示す斜面図、第1E図は第1A図と第1C図の原
料シートを二枚重合して、一部分を欠如せる状態の斜面
図、第1F図は第1E図の横断面図、第2図は本発明の処理
装置の実施例の断面図、第3図及び第4図は夫々他の実
施例の斜面図、第5図は本発明の実施例を示す粉体の荷
電処理装置の断面図、第6図及び第7図は本発明の他の
実施例を示す粉体の処理装置の断面図及び斜面図、 3,4,5……線状電極 9……面状電極 18……電界装置 23……ゴムベルト 25……円筒状誘電体 26,26a……円筒状電界装置 30……直流高圧電源 31……荷電空間 32……荷電粉体粒子 34……感光用ローラ 38……被塗物 42……円環状電界装置 45……ハンドガン
FIG. 1A is a perspective view showing the upper surface of a raw material sheet in the manufacturing process of an electric field device used in the electrostatic processing apparatus for an object of the present invention,
FIG. 1B is a perspective view showing the lower surface of the raw material sheet, FIG. 1C is a perspective view showing the upper surface of another raw material sheet, FIG. 1D is a perspective view showing the lower surface of another raw material sheet, and FIG. 1E is FIG. 1A. Fig. 1 and Fig. 1C, two raw material sheets are polymerized to be partially cut away, Fig. 1F is a transverse sectional view of Fig. 1E, and Fig. 2 is a sectional view of an embodiment of the processing apparatus of the present invention. FIGS. 3, 3 and 4 are perspective views of other embodiments, FIG. 5 is a cross-sectional view of a powder charging apparatus showing an embodiment of the present invention, and FIGS. 6 and 7 are present inventions. Cross-sectional view and oblique view of a powder processing apparatus showing another embodiment of the present invention, 3,4,5 ... Linear electrode 9 ... Flat electrode 18 ... Electric field device 23 ... Rubber belt 25 ... Cylindrical dielectric Body 26,26a …… Cylindrical electric field device 30 …… DC high voltage power supply 31 …… Charging space 32 …… Charging powder particles 34 …… Photosensitive roller 38 …… Coating object 42 …… Circular electric field device 45 …… Handgun

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 B03C 3/00 A 3/45 Z 3/62 B41J 29/00 C01B 13/11 J H01T 14/00 7522−5G (56)参考文献 特開 昭56−120507(JP,A) 特公 昭55−37483(JP,B2)─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical display location B03C 3/00 A 3/45 Z 3/62 B41J 29/00 C01B 13/11 J H01T 14/00 7522-5G (56) Reference JP-A-56-120507 (JP, A) JP-B-55-37483 (JP, B2)

Claims (21)

【特許請求の範囲】[Claims] 【請求項1】面状誘電体の一側面に線状電極を設け、該
面状誘電体の内部に面状電極を全面的に埋設して、それ
を前記線状電極と互いに対向して、沿面放電型電界装置
を形成し、該沿面放電型電界装置の沿面放電発生面を被
処理物体に向けてなる沿面放電型の物体の静電的処理装
置において、該面状誘電体を高純度アルミナ磁器で形成
し、その面状誘電体の他側面にその内部に埋設された面
状電極と導通するターミナル導体部を露出して設け、該
面状誘電体の他側面に線状電極と導通するターミナル導
体部を露出して設けることを特徴とする物体の静電的処
理装置。
1. A linear electrode is provided on one side surface of a planar dielectric, and the planar electrode is entirely embedded in the planar dielectric, and the planar electrode is opposed to the linear electrode. In a surface discharge type electrostatic treatment apparatus for a surface discharge type electric field device in which a surface discharge generation surface of the surface discharge type electric field device is directed toward an object to be processed, the planar dielectric is made of high purity alumina. A terminal conductor portion, which is made of porcelain and is electrically connected to the planar electrode embedded inside the exposed surface of the planar dielectric, is provided so as to be exposed, and the linear electrode is electrically connected to the other side surface of the planar dielectric. An electrostatic treatment device for an object, characterized in that a terminal conductor portion is exposed.
【請求項2】特許請求の範囲第1項に記載せる物体の静
電的処理装置に於いて、線状電極と面状電極のうち少な
くとも一方が半導電性セラミック材料で形成されている
ことを特徴とする物体の静電的処理装置。
2. The electrostatic treatment apparatus for an object according to claim 1, wherein at least one of the linear electrode and the planar electrode is made of a semiconductive ceramic material. A device for electrostatically treating a featured object.
【請求項3】特許請求の範囲第1項に記載せる物体の静
電的処理装置に於いて、電源が高周波交流電源であるこ
とを特徴とする物体の静電的処理装置。
3. The electrostatic processing apparatus for an object according to claim 1, wherein the power supply is a high frequency AC power supply.
【請求項4】特許請求の範囲第1項に記載せる物体の静
電的処理装置に於いて、電源が極短パルス高圧電源であ
ることを特徴とする物体の静電的処理装置。
4. The electrostatic processing apparatus for an object according to claim 1, wherein the power source is an ultra-short pulse high voltage power supply.
【請求項5】特許請求の範囲第4項に記載せる物体の静
電的処理装置に於いて、沿面放電型電界装置が排ガス通
路(196)内に空間を隔てて複数個その流れの方向に沿
って設けられており、又被処理物が排ガス通路(196)
内を流れる排ガスであることを特徴とする物体の静電的
処理装置。
5. The electrostatic processing apparatus for an object according to claim 4, wherein a plurality of creeping discharge type electric field devices are provided in the exhaust gas passage (196) with a space therebetween in the flow direction. It is installed along with the exhaust gas passage (196).
An electrostatic treatment device for an object, which is exhaust gas flowing inside.
【請求項6】特許請求の範囲第4項に記載せる物体の静
電的処理装置に於いて、沿面放電型電界装置が一段式電
気集塵装置のガス通路内の平板状集塵極と相対して設け
られていることを特徴とする物体の静電的処理装置。
6. The electrostatic treatment apparatus for an object according to claim 4, wherein the creeping discharge type electric field device is opposed to the flat plate type dust collecting electrode in the gas passage of the one-stage type electrostatic precipitator. An electrostatic treatment device for an object, which is characterized by being provided with.
【請求項7】特許請求の範囲第4項に記載せる物体の静
電的処理装置に於いて、沿面放電型電界装置が二段式電
気集塵装置の補集部の前段に設けられた荷電部に設けら
れていることを特徴とする物体の静電的処理装置。
7. The electrostatic treatment apparatus for an object according to claim 4, wherein a creeping discharge type electric field device is provided in front of a collecting section of the two-stage electrostatic precipitator. An electrostatic treatment device for an object, which is provided in a section.
【請求項8】特許請求の範囲第1項に記載の物体の静電
的処理装置において、被処理物体が除電処理されるゴム
ベルト(23)であることを特徴とする物体の静電的処理
装置。
8. The electrostatic processing apparatus for an object according to claim 1, wherein the object to be processed is a rubber belt (23) which is subjected to static elimination processing. .
【請求項9】特許請求の範囲第1項に記載の物体の静電
的処理装置において、面状誘電体の形状が曲面からなる
円筒状であり、又プラズマ発生面が円筒状誘電体(25)
の外周面であることを特徴とする物体の静電的処理装
置。
9. The electrostatic processing apparatus for an object according to claim 1, wherein the planar dielectric has a cylindrical shape with a curved surface, and the plasma generating surface has a cylindrical dielectric (25 )
The electrostatic processing apparatus for an object, which is an outer peripheral surface of the object.
【請求項10】特許請求の範囲第1項に記載の物体の静
電的処理装置において、誘電体の形状が曲面からなる円
筒状であり、又プラズマ発生面が円筒状誘電体(25)の
内周面であることを特徴とする物体の静電的処理装置。
10. The apparatus for electrostatically treating an object according to claim 1, wherein the dielectric has a cylindrical shape with a curved surface, and the plasma generation surface has a cylindrical dielectric (25). An electrostatic treatment device for an object, which is an inner peripheral surface.
【請求項11】特許請求の範囲第1項に記載の物体の静
電的処理装置において、線状電極(3)が直流高圧電源
(30)と結合されており、被処理物体が被荷電粉体粒子
(32)であり、又プラズマ発生面が該被荷電粉体粒子の
荷電空間(31)を介して、接地された非コロナ電極に向
けられていることを特徴とする物体の静電的処理装置。
11. The electrostatic treatment apparatus for an object according to claim 1, wherein the linear electrode (3) is connected to a high voltage DC power supply (30), and the object to be treated is a powder to be charged. The electrostatic particles of the body, which are body particles (32) and whose plasma generating surface is directed to the grounded non-corona electrode through the charged space (31) of the powder particles to be charged. Processing equipment.
【請求項12】特許請求の範囲第1項に記載の物体の静
電的処理装置において、電界装置が負の直流高圧電源
(30)に接続された線状電極(3)を有する円筒状電界
装置(26)と、接地された線状電極(3)を有する他の
円筒状電界装置(26a)とからなり、プラズマ発生面が
各円筒状電界装置(26、26a)の外周面に形成され、被
処理物体が接地された感光用ローラ(34)の表面である
ことを特徴とする物体の静電的処理装置。
12. Electrostatic treatment device for an object according to claim 1, characterized in that the electric field device has a linear electrode (3) connected to a negative DC high-voltage power supply (30). The device (26) and another cylindrical electric field device (26a) having a grounded linear electrode (3), and a plasma generating surface is formed on the outer peripheral surface of each cylindrical electric field device (26, 26a). An electrostatic treatment apparatus for an object, wherein the object to be processed is the surface of a photosensitive roller (34) which is grounded.
【請求項13】特許請求の範囲第1項に記載の物体の静
電的処理装置に於いて、電界装置の線状電極が直流高圧
電源(30)に接続され、被処理物体が該接地非コロナ電
極(29)に着脱せしめられるフイルム(36)であること
を特徴とする物体の静電的処理装置。
13. The electrostatic processing apparatus for an object according to claim 1, wherein the linear electrode of the electric field device is connected to a direct current high voltage power source (30), and the object to be processed is not grounded. An electrostatic treatment device for an object, which is a film (36) which can be attached to and detached from a corona electrode (29).
【請求項14】特許請求の範囲第1項に記載の物体の静
電的処理装置に於いて、線状電極が直流高圧電源と結合
されており、被処理物体が粉体塗料であり、又プラズマ
発生面が該粉体塗料の通路を介して、接地された被塗物
に向けられていることを特徴とする物体の静電的処理装
置。
14. An electrostatic treatment apparatus for an object according to claim 1, wherein the linear electrode is connected to a DC high voltage power source, the object to be treated is powder coating material, and An electrostatic treatment apparatus for an object, wherein a plasma generating surface is directed to an object to be grounded through the passage of the powder coating material.
【請求項15】特許請求の範囲第1項記載の静電的処理
装置に於いて、電界装置がハンドガン(45)の先端の開
口部に同軸に設けられた円環状電界装置(42)であり、
その電界装置を構成する線状電極が直流高圧電源(30)
と結合され、被処理物体が該ハンドガン内を通る粉体塗
料であり、又プラズマ発生面が被塗面(38)に向けられ
ていることを特徴とする物体の静電的処理装置。
15. The electrostatic processing device according to claim 1, wherein the electric field device is an annular electric field device (42) coaxially provided in an opening at the tip of the handgun (45). ,
The linear electrodes that compose the electric field device are DC high voltage power supplies (30)
And an object to be treated is a powder coating which passes through the inside of the hand gun, and a plasma generating surface is directed to the surface to be coated (38).
【請求項16】特許請求の範囲第1項に記載の物体の静
電的処理装置に於いて、誘電体と一体的に形成された電
極が、その内部に埋設された面状電極(9)であり、該
面状電極(9)が直流電源(30)と接続され、被処理物
体が接地せるマグネット(262)に付着されている着色
トナーであることを特徴とする物体の静電的処理装置。
16. An electrostatic treatment device for an object according to claim 1, wherein an electrode integrally formed with a dielectric is embedded inside the planar electrode (9). And electrostatic treatment of an object, characterized in that the planar electrode (9) is a colored toner attached to a DC power source (30) and attached to a magnet (262) for grounding the object to be processed. apparatus.
【請求項17】特許請求の範囲第16項に記載の物体の静
電的処理装置に於いて、面状誘電体が一体的に形成され
た電極がその内部に埋設された面状電極(9)とその表
面に設けられた線状電極(3)、(4)、(5)である
ことを特徴とする物体の静電的処理装置。
17. The electrostatic processing apparatus for an object according to claim 16, wherein the electrode integrally formed with the planar dielectric is embedded in the planar electrode (9). ) And linear electrodes (3), (4) and (5) provided on the surface thereof, the electrostatic treatment apparatus for an object.
【請求項18】特許請求の範囲第1項に記載の物体の静
電的処理装置に於いて、不平等電界装置が面状誘電体内
に埋設された面状電極と面状誘電体の表面に設けられて
いる複数の線状電極、及びその上面の不平等電界形成面
に、載置されている接地せる金属ペンで画かれるシート
母材(261)であることを特徴とする物体の静電的処理
装置。
18. The electrostatic processing apparatus for an object according to claim 1, wherein the unequal electric field device is provided on the surface of the planar electrode and the planar dielectric embedded in the planar dielectric. A plurality of linear electrodes provided, and an electrostatic field of an object characterized by being a sheet base material (261) drawn on a non-uniform electric field forming surface of the upper surface thereof, which is drawn by a metal pen grounded. Processing equipment.
【請求項19】特許請求の範囲第1項に記載せる物体の
静電的処理装置に於いて、面状誘電体が積層され、かつ
その表面にターミナル導体部が設けられていることを特
徴とする物体の静電的処理装置。
19. An electrostatic treatment apparatus for an object according to claim 1, wherein planar dielectrics are laminated and a terminal conductor portion is provided on the surface thereof. Electrostatic treatment device for moving objects.
【請求項20】特許請求の範囲第19項に記載せる物体の
静電的処理装置に於いて、ターミナル導体部が、面状誘
電体の貫通孔に充填されたインクを介して電極に接続さ
れていることを特徴とする物体の静電的処理装置。
20. An electrostatic processing device for an object according to claim 19, wherein the terminal conductor portion is connected to the electrode through the ink filled in the through hole of the planar dielectric. An electrostatic treatment device for an object characterized by being.
【請求項21】特許請求の範囲第19項に記載せる物体の
静電的処理装置に於いて、インクがタングステン微粉末
分散のインクであることを特徴とする物体の静電的処理
装置。
21. An electrostatic treatment apparatus for an object according to claim 19, wherein the ink is an ink of tungsten fine powder dispersion.
JP29114089A 1989-11-10 1989-11-10 Electrostatic processing equipment for objects Expired - Lifetime JPH0763032B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29114089A JPH0763032B2 (en) 1989-11-10 1989-11-10 Electrostatic processing equipment for objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29114089A JPH0763032B2 (en) 1989-11-10 1989-11-10 Electrostatic processing equipment for objects

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57155618A Division JPS5944797A (en) 1982-09-07 1982-09-07 Electrostatic processor for article

Publications (2)

Publication Number Publication Date
JPH02210798A JPH02210798A (en) 1990-08-22
JPH0763032B2 true JPH0763032B2 (en) 1995-07-05

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ID=17764965

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Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JPH0763032B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07309606A (en) * 1994-05-10 1995-11-28 Amtex:Kk Ozonizer
KR100348408B1 (en) * 1999-08-05 2002-08-10 주식회사제4기한국 A device of dissolveing harmfull gas by using plasma
JP2002117956A (en) * 2000-10-04 2002-04-19 Sharp Corp Ion generator and air cleaner and air conditioner with the same
JP2002033066A (en) * 2000-07-17 2002-01-31 A & D Co Ltd Electron gun
JP2006302625A (en) * 2005-04-19 2006-11-02 Matsushita Electric Works Ltd Plasma treatment device and method
JP4723989B2 (en) * 2005-11-29 2011-07-13 トッパン・フォームズ株式会社 Static eliminator
JP5405296B2 (en) * 2007-03-05 2014-02-05 オーニット株式会社 Low temperature plasma generator
JP5626899B2 (en) * 2011-05-17 2014-11-19 株式会社日立製作所 Atmospheric pressure plasma processing equipment
KR102014139B1 (en) * 2012-02-06 2019-08-26 엘지전자 주식회사 Electric precipitator
JP2014058430A (en) * 2012-09-19 2014-04-03 Murata Mfg Co Ltd Ozone generator
JP2020034180A (en) * 2018-08-27 2020-03-05 国立大学法人埼玉大学 Combustion furnace of harmful exhaust gas processing device using alternating electric fields

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4976165A (en) * 1972-11-22 1974-07-23
JPS557564A (en) * 1978-06-30 1980-01-19 Sumitomo Precision Prod Co Ltd Ozonizer
FR2430847A1 (en) * 1978-07-13 1980-02-08 Saint Gobain HEATING AND / OR ALARM GLASS
JPS56120507A (en) * 1980-02-23 1981-09-21 Senichi Masuda Ozonizer

Also Published As

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