JPS59129686A - Electrostatic type minute body sucker - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrostatic micro-object suction device for freely sucking and detaching micro-objects such as micro-components, materials, seeds, chemicals, pellets, etc.

Conventionally, suction and desorption of such minute objects has been carried out mechanically using a spring mechanism such as a bottle set. It is unsuitable for collecting and removing objects at the same time, and even if objects were to be collected and removed one by one, when the objects were extremely small, it was extremely difficult to collect them with an appropriate knob. In response, a negative pressure suction tube method was proposed in which suction air is generated by sucking air from the tip of the suction tube and bringing it close to the target object, making it possible to more freely suck and detach minute objects. However, this method has the disadvantage that when suctioning many minute objects at the same time, it is necessary to suction a large amount of air, which increases the capacity and power required of the suction pump, resulting in a significant economic disadvantage. there were.

The object of the present invention is to overcome all of the above-mentioned drawbacks and to provide a means for extremely easily, reliably, and economically performing both individual suction and desorption and simultaneous suction and desorption of a large number of items. It is in.

The present invention achieves this object by effectively applying electrostatic force by applying a new method as described below.

First, the principle of the present invention will be explained below using FIGS. 1 to 4. Each of these figures provides a detailed explanation of the invention, while also illustrating longitudinal cross-sectional views of different embodiments of the invention.

In Fig. 1, reference numeral 1 denotes an annular power supply electrode made of a grounded conductor plate with a hole 2 in the center.

A cylindrical insulator 3 having a cavity concentric with the hole 2 faces a disk-shaped metal high-voltage electrode 4 . However, the electric rubber of the high-voltage electrode 4 facing the power supply electrode 1 has a slight volume leakage resistance or surface leakage. Further, the high voltage electrode 4 has a back surface 7
and a protective high resistor 11. is embedded in the cylindrical insulator 9 so that the side surface 8 is completely covered, and a protective high resistance 11. Cable 12. It is connected to the negative terminal of a DC high voltage power supply 14 whose positive terminal is grounded via a switch 13, thereby applying a DC high voltage between the power supply electrode 1 and the high voltage electrode 4 with polarity such that the former is positive and the latter is negative. has been done.

15 is grounded by a conductor casing surrounding the outside of the insulator 3.9. Now, a minute object 17 enters inside the internal cavity 16 of the cylindrical insulator 3, the top of which comes into contact with the lower surface of the high-resistance object layer 6 at a point 18, and the lower part or side of the object 17 contacts the power supply electrode 1 at a point 19. It is assumed that it is in contact with the inner wall of hole 2. In this case, the minute object 17 is generally strongly attracted to the high-resistance object layer 6 as long as the voltage (2) of the DC power source is sufficiently high. For example, when the inner diameter of the hole 2 and the cavity 16 is 4 m, the thickness of the high-resistance object layer 6 is 0.2 run, and the thickness of the top and bottom of the insulator 3 is 2 mJn, and seeds with a diameter of about 3 to 4 stations are to be sucked, .

At V = 1 [KV], the electrostatic attraction force almost exceeds the self-weight of the seed, and at ■≧3KV, the attraction force becomes extremely strong and the seed will not fall even if a considerable impact is applied. . However, when the switch J3 is turned off from the power source 14 and placed on the ground side 9, the seeds immediately fall, allowing them to be freely attached and detached. In order for such attraction by electrostatic force to be possible, the minute object 17 must be a conductor or a high resistance object with slight conductivity, but most of the minute objects targeted in actual applications fall into this category. do. Its suction mechanism is as follows.

Current is now flowing from the power supply electrode 1 to the contact point 19 and to the minute object 17.
and enters the high voltage electrode 4 via the contact point 18 through the high resistance object layer 6. in this case.

The point of contact 18 has the highest electrical resistance in the current path.
With a contact resistance of , most or a considerable part of the applied DC voltage becomes a voltage drop due to this contact resistance. This contact resistance consists of both concentrated resistance due to current concentration at the contact point 18 and boundary resistance caused by the movement of electrons or ions across the adsorbed gas layer at the contact point. As a result of the potential difference generated in the phase part of V near the pole, the lower surface of the surrounding high-resistance object layer 6 and the upper surface of the minute object 17 form one capacitor, which is charged by this large potential difference. Corresponding negative and positive surface charges are attracted, creating a large electrostatic attractive force between them. As a result, the minute object 17 is strongly attracted to the lower surface of the high resistance object layer 6. Therefore, in this case, the minute object 17 must be in complete contact with the inner wall of the hole 2 of the power supply electrode 1 and the lower surface of the high-resistance object layer 6, and the minute object must be a conductor or a high-resistance object through which a small amount of current can flow. The condition for the attraction force generated by the above-mentioned mechanism is that the micro object 17 is not a perfect insulator, and if the micro object 17 is a perfect insulator, no current will flow there, so the contact point 18 Since a large potential difference due to contact resistance is not generated, the electrostatic attractive force cannot be generated. Moreover, even if 17 has a slight conductivity, its electrical resistance is too high.

Its relaxation time τ-ερ (where ε=17 dielectric constant).

(resistivity of ρ=17) becomes too large, and it takes too long for a sufficient voltage to be generated in the capacitor around the contact point 18, and during this time, sufficient attractive force is not developed, so that it is of no practical use. Generally, when the dielectric constant of a minute object is 1, ρ=
When lO13 [Ω-I], τ-1(see), so in practical terms, the value of ρ must be smaller than this, which is the physical property condition of the target object for which electrostatic attractive force can be used. .

The high-resistance object layer 6 has two roles: (1) that of the high-voltage electrode 4; Regarding (1), if the lower surface 5 of the high voltage electrode 4 is exposed, if the conductor shorts it and the power supply electrode 1, sparks will be generated and a fire will occur, or an excessive current will flow and the power supply 14 will be damaged. Risk of damage. Regarding (2).

Protection of power supply 14, reduction of current capacity, contact point 18.

The purpose of this is to prevent temperature rise and burnout due to Zeel heat at No. 19. However, it is unlikely that the electrical resistivity ρl of the high-resistance object layer 6 is completely consistent with the resistivity ρ of the minute object 17. First, a perfect insulator does not generate sufficient attraction force as ρ1→ω. This is because the capacitor around the contact point 18 is not charged. Also, at this time, positive charges are often injected into the lower surface of 6 from 17 through contact point 18.

As a result, the potential of the lower surface approaches the ground potential and the attractive force may disappear altogether. Next, even if 6 has a slight conductivity, if the attraction force is to be generated unless ρ is 1013 [Ω - solder], the surface of the power supply electrode 1 facing the hole 2 will also have a high conductivity similar to that of 6. Even if it is coated with a resistive object layer, there is almost no change in its attractive force. Further, even if the power supply electrode is formed of a resistive material, there is almost no change in its attractive force, and the same safety and current limiting properties as those obtained by using the high-resistance material layer 6 can be ensured. However, the upper limit of the resistivity of the high-resistance material for electrodes to be used is 1013 [Ω-2] or less, preferably 1011 [Ω-σ] or less, and the lower limit is practically 109 (:Ω-α3 or more). It is preferable that

In Fig. 2, an annular electrode 21 supported by a conductor support arm 20 extending from a casing 15 is used as a power supply electrode in place of the annular electrode 40 made of a perforated conductor plate shown in Fig. 1.
The supporting cylindrical insulator 3 is omitted. Since the high-resistance object layer 6 still has a current-limiting protection effect, the protective resistor 11 is also omitted. The high-voltage electrode 4 is formed on the back surface 5 of the high-resistance object layer 6 using a metal vapor deposition film, a conductive paint, or a thick film printing method, and the vicinity of the connecting portion of the 6° 4 and the cable 12 is integrally formed with the insulator 9. Molded inside.

The numbers and names of other elements are exactly the same as those in FIG. 1, and the suction mechanism is also the same, so a description thereof will be omitted.

FIG. 3 is also a modification of the embodiment shown in FIG. 1, in which a bowl-shaped high-voltage electrode n made of a high-resistance material is used instead of the combination of the high-voltage electrode 4 and the high-resistance material layer 6, and this is insulated. Molded inside object 9. Therefore, the safety and current limiting effect of the high-resistance object layer 6 are completely achieved by the high-voltage electrode 2.
2 is included, and 6 is omitted. However, the protective resistor 11 is left in place to limit the current of the high-voltage electrode n at the time of cutting. The lower surface of the electrode n is shaped like a bowl to increase the capacitance between it and the minute object 17 during suction, thereby increasing the suction force. The names and functions of other elements are the same as those in Figure 1.

The suction mechanism is also omitted as there is no difference. In the examples shown in FIGS. 1, 2, and 3, the high-voltage electrode is located at a recessed position relative to the power supply electrode, and these electrodes have a concave and concave shape.

Fig. 4 shows a strip-shaped high-voltage electrode U whose surface is covered with a layer of the present invention and a conductor electrode 5 of the same shape to be grounded, which is different from the previous three examples in terms of its width and is connected to a symbolic small object. 17, and both are embedded inside a cylindrical insulator 26, whose lower ends 27 and 28 are opposite to the symbolic small object 1.
7 protrudes from the lower surface 4 of 26 by a distance smaller than 7. Cable 12. Switch 13. A negative DC high voltage is applied from a DC high voltage power supply 14 via a protective resistor 11 . Now, the minute object 17 is at the lower end 2 of both electrode parts.
7.28, the contact point 18.28 is touched, as already mentioned.
Due to the electrostatic attractive force generated around the capacitor 19 and acting on a portion of the capacitor, the minute object 17 is struck by the gravity, is strongly attracted to the valley 28, and is lifted up.

Next, when switch [3] is placed on the ground side, this suction force disappears and the minute object falls. child. Kaai, first 22.
Denki No. 1, J, 91 bodies 1. . *Almost the same as a rabbit,
If the length of the protrusion is made smaller than the size of the minute object (approximately % or less) as described above, only one minute object can be sucked out from the surface of an aggregate of many minute objects. Also, by increasing the width n and 28, 2.3, 4.・・・
・The number of suction items can be increased. However, if the protrusion length of 28 is increased, minute objects will be attracted to the side as well, and the number of objects to be attracted will be precisely controlled (1) itself will become narrower downward. It is also good to form The ground electrode part is still cylindrical insulator 2.
There is no need to embed it inside 6.

Needless to say, it may be arranged and fixed parallel to the high voltage electrode 24 against the outer wall. In this case, the role of the insulating cylinder is to provide complete insulation between both electrodes and to limit the protruding length of the tip 27 to prevent minute objects from adhering to the sides of the electrodes or to limit them to a certain range. There is no change. Also.

Instead of the combination of a high-voltage electrode array and a high-resistance object layer formed on its surface, the high-voltage electrode may be directly formed with the above-mentioned high-resistance object having a slight conductivity, and the high-resistance object layer may be omitted. Needless to say. Furthermore, it goes without saying that the ground power supply electrode 5 may also be formed of the above-mentioned high-resistance material having a slight electrical conductivity instead of a conductor. There is still no need for two electrodes, and this makes it possible to freely adjust and attract minute objects of different sizes.

Explanation of the principle and structure of the high-resistance suction device by inserting and fixing both legs of the high-resistance object layer used in this example into the insulator, and protruding the U-shaped bottom. It is.

That is, the novel electrostatic micro object suction device according to the present invention has at least a surface area of 10-? ~1O-13 [
It is made of a high-resistance object having an extreme electrical conductivity of about V/CrrL] and has a high-voltage electrode that is insulated and supported by an insulator.

It has a grounded power supply electrode arranged opposite to this with a suitable gap, and has a DC high voltage power supply for applying a DC high voltage between the high voltage electrode and the power supply electrode, and has a DC high voltage power source that applies a DC high voltage between the high voltage electrode and the DC high voltage. It has a switch that intervenes in the path between the power source and the power supply electrode to open and close it, and when the switch is turned on, a high DC voltage is applied between the high voltage electrode and the power supply electrode, and then the small object is Bring both electrodes into contact.

The microscopic object is strongly attracted by the electrostatic attraction force developed at this time, and then the switch is turned off at a predetermined position and time to eliminate the attraction force, thereby detaching the minute object.

In this case, a charge is accumulated in the capacitance between the high-voltage electrode and the grounded power supply electrode and other grounded parts when the switch is turned on, and this charge is retained for a long time even when the switch is turned off. The suction force does not disappear and minute objects are retained without being detached. Therefore, a mechanism is required to ground the high voltage electrode immediately when the switch is turned off. The switch 13 in the examples shown in Figures 1 to 4 has this mechanism. but.

When inserting the switch into the ground terminal side of the high voltage power supply 14, a separate mechanism is required to ground the high voltage output terminal of the high voltage power supply when the switch is turned off.

The novel electrostatic micro object suction device according to the present invention can be applied to all kinds of operations for removing micro parts, materials, and chemicals, and can also be applied to devices for that purpose. An example of this is a seeding device that collects a predetermined number of nine seeds from a seed container and sows them in a predetermined position.

A manual or automatic tweezers device that is used to accurately collect minute parts and place them in a designated location in an electrical circuit or precision machine, or to take out minute contacts one by one and place them on the tip of a metal rod. Alternatively, it can be used as a collection unit for a robot that performs such operations, and it can also be used as a tweezers device for collecting drug pellets, chemical material particles, gemstones, and mineral particles. The following are examples in which several applications of the present invention are considered.

FIG. 5 is a longitudinal sectional view of an electrostatic seeding device constructed by applying the novel electrostatic micro object suction device according to the present invention to a seeding device, and FIG. 6 is a view of this device as seen from below. The off-line view is a vertical cross-sectional view of the main part of the electrostatic suction panel. In the figure, 39 is an electrostatic suction panel, which is arranged in a grid pattern at regular intervals in large groups 31°, 31', 31",
A power supply electrode η consisting of a metal plate having ... is layered one after another as shown, and the mutual contact surfaces of adjacent ones are adhered with an adhesive, and the high-voltage electric 1! /h The peripheral edge 37 of the electrode plate rose is connected to the high resistance plate 35. The gap between the two is molded with an insulating material so as to be located a certain distance (approximately 5-LOB) inside the periphery of the insulating plate 37, and the entire back surface 39 of the insulating plate 37, 34.35. 3
A coated conductor plate (or conductive paint) 41 covers the entire periphery 4o of 6.37, which protects the outer surface of the electrostatic suction panel 30 and maintains it at ground potential to ensure safety. It is secured. however.

The coated conductor plate 41 has a circular hole 42 in a part of the back surface of the insulating plate 37, and a terminal 43 is provided at the center of the hole 42.
The high voltage electrode plate 36 is connected to the high voltage electrode plate 36 by a conductive wire 44. Further, a conductor ring 45 for mitigating the electric field is provided around the periphery of the hole 420. This electrostatic suction panel 3o.

The power supply electrode plate 32 is removably installed and fixed from below inside a grounded lid-like casing 48 having a power supply box 46 and a handle 47 so as to face 4'' outward.
3 is connected to the output terminal 50 of the high voltage power supply 49 via the protective resistor 51, and when the switch 52 is pressed, the high voltage electrode 4jj36
A DC high voltage is applied between the power supply electrode plate 32 and the power supply electrode plate 32 .

Therefore, each large group and cavity group 3+ -33, 31' -3
3', 31"-33".

... each has exactly the same function as 2-16 in Fig. 1, and the seeds that enter into these holes and come into contact with the periphery of each hole and the lower surface of the high-resistance plate 35 are strongly electrostatically It is attracted and held here by the suction force. 49 is a high-voltage power supply consisting of a high-voltage transformer and a rectifier, which generates a low-voltage high-frequency voltage (
For example, 24■.

20 KHz) is supplied through the handle 47, and its output terminal 50 is supplied with a positive or negative DC high voltage. The current output terminal 56 is connected to the power supply box 46 and grounded. Switch 52 t3 Connect conductor wires 59, 60, . Contact 6
1, and when pressed, the contact 61 turns on and the high frequency oscillator 53 operates, and the output terminal 50 of the high voltage power supply 49
．． A high DC voltage is applied between the terminals 56 and 56. If you turn this off again.

The operation of the high-frequency oscillator stops, and at the same time, the high-voltage output terminal 5° is short-circuited to 56 through a mechanism not shown in the figure, and the potential difference between the high-voltage electrode 36 and the power supply electrode is immediately returned to zero, and the attraction force is increased. Since it does not have the effect of causing the seeds to disappear and be sucked down to a predetermined position below, it is necessary to insert the seeds into this interior by some method. Place one on the eight electrode plate 32 and swing the device left and right until one seed is 31-33.
, 31' - 33', 31'' - 33''. Once inserted, a strong electrostatic attraction force works, so the device is reversed again and returned to its original position.
As shown in the figure, there are seedbed groups 64, 64', 64",...
and turn off the switch 52, and place each seed in the seeding hole 65.65' in the seedbed.

65" to complete the seeding operation.

FIG. 10 is a longitudinal sectional view of another electrostatic seeding device using the present invention, which is a convex electrostatic particle suction device group 66, 66'' having the structure shown in FIG.

66" are arranged in a grid pattern at predetermined intervals.
7, this is the power supply box 469. The handle 4749' is a DC high voltage power supply consisting of a transistor high frequency oscillator, a step-up transformer, and a rectifier.
9,70. A low DC voltage (for example, 12V) is supplied through the contact 61 of the switch 52, and when the switch 52 is turned on, a high DC voltage is generated between its output terminals 50 and 56. Among these, 56 is grounded, and 50 is a protective resistor 51.
and each electrode protruding type electrostatic suction via the conductor 71. In this state, when the inch 52 that is attached to the seeds in the seed box is turned off from above, the input power to the high voltage power supply 67 is cut off, and at the same time, the output terminal 50.5 is cut off by a mechanism not shown in the figure.
6 is short-circuited, the electrostatic attraction disappears immediately, and the seeds fall into the predetermined seeding hole, completing the seeding operation.

FIG. 11 is a longitudinal sectional view showing another structure of the novel convex electrostatic particle suction device according to the present invention. 26 is an insulating cylinder housed in a grounded metal cylindrical casing 73, and there is a conductor 74 on its axis, the upper end of which is connected to the output terminal of a high voltage power source via a high voltage cable 75 that is partially inserted into 26. Its lower end is connected to a spring-type contactor 77 installed at the tip of a chevron-shaped projection 76 at the lower end of the insulator cylinder. 78 is an insulating cap that fits into the chevron-shaped protrusion, the lower part of which is sandwiched in a conical shape, and a high-voltage electrode array whose entire surface is covered with a high-resistance object is inserted and fixed at the center of the lower end. A conductor rod 79 is disposed above the shaft and protrudes from the upper surface of the recess and comes into contact with the spring type contact 77, so that a high DC voltage is applied to the high voltage electrode array. Reference numeral 80 denotes a metal cylindrical cage which accommodates the base cylindrical portion of the insulator cap 78 and is bonded thereto, which is fitted with another metal cylindrical casing 73 above through a screw groove 81;
It is fixed to this and grounded. 82 is a grounded power supply electrode fixed to the tip of a strip-shaped spring 83, and a base portion 830 is fixed near the lower end of the metal cylindrical casing 80 so as to be parallel to the cylindrical axis thereof. 85 is fitted onto the outside of the metal cylindrical casing 80 via a screw groove 86.

It is a metal cylinder with a narrowed lower end, and its lower end 87 contacts the spring 83 in such a way as to press and bend it inward.By rotating 80, the lower end 87 moves up and down, thereby changing the inclination of the spring 83 and connecting it to the power supply electrode. The distance between 82 and the high voltage electrode array can be freely changed. Therefore, when the size of the small object to be symbolized varies, this can be handled by adjusting the distance between the electrodes accordingly. In this case, if both the power supply electrode 82 and the high-voltage electrode array are shaped so that their tips 88 are narrowed as shown in Figure 2, it is particularly suitable for collecting one minute object. The metal cylindrical casing 73 is inserted and fixed into the conical top of the textile cap 78. Rod-shaped electrodes 91', 91'' are made up of four high-resistance objects arranged at an angle of 90° to surround the metal cylindrical casing 73.

9 (1, 91///I), each supported at its base by a ring 109 made of a high-resistance object.

It is connected to a conductor ring 106 via a conductive wire 105 passing through the inside of the conductor ring 106 .

In Fig. 17, a ring electrode 21 as shown in Fig. 2 is used as a ground power supply electrode, and this is supported by a support rod 110 and arranged concentrically with and surrounding a high voltage electrode 90 made of a high resistance object. The conductor ring 106 is connected to the conductor ring 106 through the conductor ring 110 and grounded.

In FIG. 18, the insulator head 99 has an upper part 100 so that its distance from the end can be adjusted.

Any of the heads shown in Figs. 15 to 18 can be used by screwing into the head 990 shown in Fig. 14.
Since the suction mechanism is obvious, a description thereof will be omitted.

FIG. 19 shows a pin stent for collecting minute objects by applying the novel electrostatic particle suction device according to the present invention. A vertical cross-sectional view of the electrostatic tweezers, and FIG. 20 shows a side view thereof. 116 is a casing made of a conductive cylinder, and has a removable cap 117 at the upper end, and inside the casing are a dry battery 11B, a sister high-frequency oscillator 1, sequentially from above.
19. Step-up transformer 120. Cockloft type multi-stage rectifier 1
21 is connected, and the DC high voltage (relative to the casing 116) generated at its output terminal 122 is applied to the protective resistor 123.
．． When contact 124 is pressed and switch 125 is pressed, switch contact 126. Contact 127. Conductor 128 and the first
1. A high DC voltage is supplied to a conductor passing through an insulator head 128 having the same shape as that shown in FIG. 99. However, 120°121,
123 is molded in an insulator 132, and 128 is embedded in an insulator 134 having a recess into which the screw of the upper chevron-shaped protrusion 133 of 129 fits. The switch 125 is supported by a strip-shaped spring 135 and is normally in an OFF state, and a contact 137 supported by another spring 136 contacts the switch 127 to short-circuit it to the casing 116 . 125. Press 126 to 124 and 12
74 and spring 136 is pushed by arm 138 and separates from 127. Hi, 139 is 11 of dry battery 118.
There is a separate switch that turns the input to 9 on and off, and it is turned on only when in use. 140 is a conductive ring adhesively fixed to the insulator head at the base of 33, which contacts the lower end of the casing 116, and is fixed to 140 so that a power supply electrode 141 extends downward parallel to the high voltage electrode 131.

A DC high voltage is applied between both electrodes, and the tip 142
, 143 to attract a minute object 144 that is brought into contact with it. Next, when the switch 125 is released, the DC high voltage between the two electrodes immediately disappears, and the electrode 144 falls. Reference numeral 145 uses a screw to freely adjust the distance between the tips 142 and 143 of both electrodes.

In this electrostatic pinsent, power supply parts 118, 119,
120, 121, and 123 are placed outside the casing 116, and a DC high voltage is applied to the contact 1 using a cable.
It goes without saying that you can lead to 24.

[Brief explanation of the drawing]

Figures 1, 2, 3, and 4 are longitudinal sectional views showing the principle of the present invention and various embodiments thereof. Figure 5 is a longitudinal cross-sectional view of an example of a seeding device in which the present invention can be implemented, Figure 6 is a view of this from below, and the off view is a vertical cross-sectional view of an electrostatic suction panel that is the main part thereof. FIG. 8 is a diagram showing how to load seeds into this sowing device,
FIG. 9 is a diagram showing a method of dropping seeds into seed holes in a nursery bed from this seeding device capable of sucking seeds and sowing them. FIG. 10 shows a longitudinal sectional view of another embodiment of a seeding device to which the present invention is applied. FIG. 11 is a longitudinal sectional view of another embodiment of the present invention, FIG. 12 is a side view of the high voltage electrode, FIG.
Fig. 14 is a longitudinal cross-sectional view of another embodiment of the present invention, Fig. 5, Fig. 17, and Fig. 18 are longitudinal cross-sectional views showing different configuration examples of the insulator head of Fig. 14, and Fig. 16 is a longitudinal sectional view of another embodiment of the present invention. The figure is a view of the electrode section in FIG. 15 viewed from below. Figure 19 is a longitudinal sectional view of an electrostatic type Vincent to which the present invention is applied, and Figure 20 is a side view thereof. The main elements in the diagram are listed below. 1, 21.25.32.82.91.91', 9i
",91":91"" 25:2...113,
141......Feeding electrode 3, 9.2
6.34.37. 132. 134・・・・・・・・・
Insulator 4.24, i', 36...
・N high voltage electrode 6.23 ・・・・・・High resistance object layer 12.75 ・・・・・・・・・Cable 13
, 52. 125. 139...Switch 14, 49, 49'...
...DC high voltage power supply 15, 48.73.116...
......Casing high voltage electrodes 51, 123...Protection resistor 53,119 ......Low voltage high frequency oscillator 63...・・・・・・・・・・・・Seed 64
・・・・・・・・・・・・ Nursery 65, 65', 65
”・・・・・・・・・・・・Seeding hole 68 ・・・・・・
・・More than low voltage DC power supply

Claims (1)

[Scope of Claims] (1) It is made of a high-resistance object with at least a surface portion having extremely low conductivity, and has a high-voltage electrode insulated and supported by an insulator, and is placed opposite to this with a small gap. a grounded power supply electrode, and a DC high voltage power source for applying a DC high voltage between the high voltage electrode and the power supply electrode,
It has a switch that intervenes in the path of the high voltage electrode - DC high voltage power source - feeding electrode to open and close it, and after turning on the switch and applying the DC high voltage power between the high voltage electrode and the feeding electrode, By bringing both electrodes into contact with a small symbolic object, strongly attracting it by the electrostatic attraction force generated at this time, and then turning off the switch at a predetermined position and time to dissipate the attraction force. An electrostatic micro-object suction device characterized by attaching and detaching the micro-object. (2) The resistivity of the high resistance object is 109 to io 13
The electrostatic micro object suction device according to claim 0, characterized in that the range is (Ω-α). (3) The high-voltage electrode is made of a conductor whose surface is covered with a layer of the high-resistance material. An electrostatic micro object suction device according to claims (1) and (2). (4) The electrostatic micro-object suction device according to claims (1) and (2), wherein the entire high-voltage electrode is made of the high-resistance object. (5) Similar to the high-voltage electrode, the power supply electrode is also an electrode having at least a surface portion made of the high-resistance material, as described in claims (1) to (4) above. Electrostatic micro object suction device. (6) The high-voltage electrode and the power supply electrode are bridged when the switch is turned off, and the connection between the two is broken when the switch is turned on.
An electrostatic micro object suction device according to claims (1) to (5). (7) A place characterized in that the power supply electrode is exposed to the outside and the high voltage electrode is drawn inward and disposed,
A concave electrostatic micro object suction device according to claims (1) to (6). (8) The power supply electrode is a plate-shaped electrode having a hole. The electrostatic type % type % (9 ) The electrostatic micro-object suction device according to claim (7), wherein the power feeding electrode is an annular electrode, and the high voltage electrode is disposed at the back thereof. QO The power supply electrode and the high voltage electrode are supported by an insulating support, and among the 9 electrodes, at least the high voltage electrode is fixed to the tip of the insulator support, and both 9 electrodes are projected outward with approximately the same protrusion length. Claims (1) characterized in that:
) to (6). . ,) an electrostatic micro-object suction device as described in the desired range αO for both chambers; An electrostatic micro object suction device according to claims (1) to α0, characterized in that it is comprised of a combination of a step-up transformer and a rectifier circuit. The electrostatic micro object suction device according to claim Q, which is a rectifier circuit. An electrostatic micro object suction device according to claims (1) to 03, characterized in that it comprises a plurality of electrostatic suction elements each comprising a pair of the power supply electrode and the high voltage electrode. The electrostatic micro-object suction device described in the claims (1) to α→, where the feature is 0. αQ The electrostatic micro-object suction device described in the patent claims (1) to α An electrostatic seeding device that is equipped with a device that sucks a predetermined number of seeds from a seed container into a predetermined position, and then attaches and detaches the seeds to a predetermined sowing position to sow the seeds.Q7) Power supply The electrode is a plate-shaped electrode having holes on lattice points at regular intervals, and an insulator layer having holes concentrically and with the same diameter as the holes is provided on the plate-shaped electrode, and the high resistance There is a plate-shaped high-voltage electrode that exposes the layer of the object toward the hole, and a concave electrostatic attraction element is configured such that there is a plate-shaped insulating layer behind it that spreads the electrode, and this is attached to the main casing. 06) The electrostatic seeding device according to claim 06), which is used by being attached to the main body casing. 08) The electrostatic seeding device is characterized in that the recessed electrostatic suction element is detachably attached to the main body casing. The electrostatic seeding device according to the patent claim α. Two power supply electrodes and high voltage electrodes are supported by insulating pillars, and at least the high voltage electrode is fixed to the tip of the insulating pillar among the two electrodes, and A convex electrostatic attraction element consisting of both electrodes protruding outward with the same protrusion length is attached to the main casing on grid points at regular intervals, with the tips of both electrodes facing outward. An electrostatic seeding device according to claim αQ, characterized in that the convex electrostatic suction element is detachably attached to a main body casing. An electrostatic seeding device according to claim 0 [phase]. ■υ Equipped with an electrostatic micro-object suction device described in patent claims (1) to $0, thereby suctioning micro-objects. , electrostatic tweezers that are characterized by being able to be attached and detached at a predetermined position and time.