JPH047652U - - Google Patents

Info

Publication number
JPH047652U
JPH047652U JP4633790U JP4633790U JPH047652U JP H047652 U JPH047652 U JP H047652U JP 4633790 U JP4633790 U JP 4633790U JP 4633790 U JP4633790 U JP 4633790U JP H047652 U JPH047652 U JP H047652U
Authority
JP
Japan
Prior art keywords
faraday cage
shielding plate
front surface
utility
target chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4633790U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4633790U priority Critical patent/JPH047652U/ja
Publication of JPH047652U publication Critical patent/JPH047652U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第1図はこの考案の一実施例の縦断面図、第2
図は他の実施例の要部縦断面図、第3図は従来例
の縦断面図である。 1……ターゲツトチヤンバ、3……サプレツサ
電極、4……フアラデーケージ、40……プラテ
ン、15……遮蔽板。

Claims (1)

    【実用新案登録請求の範囲】
  1. フアラデーケージを覆うターゲツトチヤンバか
    ら内方に向かつて突出しイオンの通過孔を有する
    環状の遮蔽板を、フアラデーケージの前面に近接
    して設けたイオン注入装置。
JP4633790U 1990-04-27 1990-04-27 Pending JPH047652U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4633790U JPH047652U (ja) 1990-04-27 1990-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4633790U JPH047652U (ja) 1990-04-27 1990-04-27

Publications (1)

Publication Number Publication Date
JPH047652U true JPH047652U (ja) 1992-01-23

Family

ID=31561333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4633790U Pending JPH047652U (ja) 1990-04-27 1990-04-27

Country Status (1)

Country Link
JP (1) JPH047652U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48103324U (ja) * 1972-03-02 1973-12-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48103324U (ja) * 1972-03-02 1973-12-04

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