JPH0378055U - - Google Patents

Info

Publication number
JPH0378055U
JPH0378055U JP13973789U JP13973789U JPH0378055U JP H0378055 U JPH0378055 U JP H0378055U JP 13973789 U JP13973789 U JP 13973789U JP 13973789 U JP13973789 U JP 13973789U JP H0378055 U JPH0378055 U JP H0378055U
Authority
JP
Japan
Prior art keywords
target
electrode structure
mounting surface
earth
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13973789U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13973789U priority Critical patent/JPH0378055U/ja
Publication of JPH0378055U publication Critical patent/JPH0378055U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例によるターゲツト電
極構造を示す断面構成図、第２図は前記ターゲツ
ト電極構造が採用されたスパツタリング装置の概
略断面構成図、第３図及び第４図は従来のターゲ
ツト電極構造を示す断面構成図である。 １１……基板、１２……ターゲツト、１６……
背板電極、２３……アースシールド部材。

Claims (1)

  1. 【実用新案登録請求の範囲】 基板と対向して配置されたターゲツト部の電極
    構造であつて、 ターゲツト載置面がターゲツトよりも小さくな
    るように形成された背板電極と、前記ターゲツト
    の側壁及びターゲツト載置面から突出したターゲ
    ツト裏面のアースシールドを行うアースシールド
    部材とを備えたターゲツト電極構造。
JP13973789U 1989-11-30 1989-11-30 Pending JPH0378055U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13973789U JPH0378055U (ja) 1989-11-30 1989-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13973789U JPH0378055U (ja) 1989-11-30 1989-11-30

Publications (1)

Publication Number Publication Date
JPH0378055U true JPH0378055U (ja) 1991-08-07

Family

ID=31686763

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13973789U Pending JPH0378055U (ja) 1989-11-30 1989-11-30

Country Status (1)

Country Link
JP (1) JPH0378055U (ja)

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