JPH0475952U - - Google Patents

Info

Publication number
JPH0475952U
JPH0475952U JP11993590U JP11993590U JPH0475952U JP H0475952 U JPH0475952 U JP H0475952U JP 11993590 U JP11993590 U JP 11993590U JP 11993590 U JP11993590 U JP 11993590U JP H0475952 U JPH0475952 U JP H0475952U
Authority
JP
Japan
Prior art keywords
thin film
sample
brought
stage
optical means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11993590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11993590U priority Critical patent/JPH0475952U/ja
Publication of JPH0475952U publication Critical patent/JPH0475952U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
JP11993590U 1990-11-16 1990-11-16 Pending JPH0475952U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11993590U JPH0475952U (cs) 1990-11-16 1990-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11993590U JPH0475952U (cs) 1990-11-16 1990-11-16

Publications (1)

Publication Number Publication Date
JPH0475952U true JPH0475952U (cs) 1992-07-02

Family

ID=31867865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11993590U Pending JPH0475952U (cs) 1990-11-16 1990-11-16

Country Status (1)

Country Link
JP (1) JPH0475952U (cs)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60196644A (ja) * 1984-03-21 1985-10-05 Toshiba Corp 付着力評価方法
JPS63238448A (ja) * 1987-03-27 1988-10-04 Hitachi Ltd 薄膜評価装置
JPS64445A (en) * 1987-03-16 1989-01-05 Resuka:Kk Apparatus for testing adhesion of film
JPH02236142A (ja) * 1989-03-08 1990-09-19 Nec Corp 付着力測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60196644A (ja) * 1984-03-21 1985-10-05 Toshiba Corp 付着力評価方法
JPS64445A (en) * 1987-03-16 1989-01-05 Resuka:Kk Apparatus for testing adhesion of film
JPS63238448A (ja) * 1987-03-27 1988-10-04 Hitachi Ltd 薄膜評価装置
JPH02236142A (ja) * 1989-03-08 1990-09-19 Nec Corp 付着力測定装置

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