JPH0475778B2 - - Google Patents

Info

Publication number
JPH0475778B2
JPH0475778B2 JP28116586A JP28116586A JPH0475778B2 JP H0475778 B2 JPH0475778 B2 JP H0475778B2 JP 28116586 A JP28116586 A JP 28116586A JP 28116586 A JP28116586 A JP 28116586A JP H0475778 B2 JPH0475778 B2 JP H0475778B2
Authority
JP
Japan
Prior art keywords
electrode
rod
discharge
shaped
drum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28116586A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63134052A (ja
Inventor
Motoyasu Koyama
Hideaki Teraoka
Takao Akagi
Shinji Yamaguchi
Takashi Sakamoto
Akira Nanba
Isao Okagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP28116586A priority Critical patent/JPS63134052A/ja
Publication of JPS63134052A publication Critical patent/JPS63134052A/ja
Publication of JPH0475778B2 publication Critical patent/JPH0475778B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP28116586A 1986-11-25 1986-11-25 シ−ト状物のプラズマ処理装置 Granted JPS63134052A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28116586A JPS63134052A (ja) 1986-11-25 1986-11-25 シ−ト状物のプラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28116586A JPS63134052A (ja) 1986-11-25 1986-11-25 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS63134052A JPS63134052A (ja) 1988-06-06
JPH0475778B2 true JPH0475778B2 (OSRAM) 1992-12-01

Family

ID=17635256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28116586A Granted JPS63134052A (ja) 1986-11-25 1986-11-25 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS63134052A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351437A (ja) * 2005-06-17 2006-12-28 National Institute Of Advanced Industrial & Technology 表面処理装置及び表面処理方法
JP5138342B2 (ja) * 2007-11-14 2013-02-06 株式会社イー・エム・ディー プラズマ処理装置
JP4786723B2 (ja) * 2009-01-23 2011-10-05 三菱重工業株式会社 プラズマｃｖｄ装置とプラズマｃｖｄ装置用電極

Also Published As

Publication number Publication date
JPS63134052A (ja) 1988-06-06

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees