JPH047558Y2 - - Google Patents
Info
- Publication number
- JPH047558Y2 JPH047558Y2 JP9404085U JP9404085U JPH047558Y2 JP H047558 Y2 JPH047558 Y2 JP H047558Y2 JP 9404085 U JP9404085 U JP 9404085U JP 9404085 U JP9404085 U JP 9404085U JP H047558 Y2 JPH047558 Y2 JP H047558Y2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- oil
- analysis
- gas
- analysis chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004458 analytical method Methods 0.000 claims description 69
- 239000012535 impurity Substances 0.000 claims description 38
- 238000009792 diffusion process Methods 0.000 claims description 21
- 239000000344 soap Substances 0.000 claims description 12
- 238000001816 cooling Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 description 42
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 238000011088 calibration curve Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000010926 purge Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 208000033962 Fontaine progeroid syndrome Diseases 0.000 description 4
- 238000007872 degassing Methods 0.000 description 4
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004817 gas chromatography Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 2
- 238000005339 levitation Methods 0.000 description 2
- 238000004445 quantitative analysis Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001010 compromised effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012929 ultra trace analysis Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9404085U JPH047558Y2 (enrdf_load_stackoverflow) | 1985-06-20 | 1985-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9404085U JPH047558Y2 (enrdf_load_stackoverflow) | 1985-06-20 | 1985-06-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622153U JPS622153U (enrdf_load_stackoverflow) | 1987-01-08 |
| JPH047558Y2 true JPH047558Y2 (enrdf_load_stackoverflow) | 1992-02-27 |
Family
ID=30652244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9404085U Expired JPH047558Y2 (enrdf_load_stackoverflow) | 1985-06-20 | 1985-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047558Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007139569A (ja) * | 2005-11-17 | 2007-06-07 | Nohmi Bosai Ltd | ガス検出装置 |
-
1985
- 1985-06-20 JP JP9404085U patent/JPH047558Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007139569A (ja) * | 2005-11-17 | 2007-06-07 | Nohmi Bosai Ltd | ガス検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS622153U (enrdf_load_stackoverflow) | 1987-01-08 |
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