JPH0474644B2 - - Google Patents
Info
- Publication number
- JPH0474644B2 JPH0474644B2 JP57051624A JP5162482A JPH0474644B2 JP H0474644 B2 JPH0474644 B2 JP H0474644B2 JP 57051624 A JP57051624 A JP 57051624A JP 5162482 A JP5162482 A JP 5162482A JP H0474644 B2 JPH0474644 B2 JP H0474644B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- image
- height
- exposed
- spot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5162482A JPS58168906A (ja) | 1982-03-30 | 1982-03-30 | 物体の表面高さ測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5162482A JPS58168906A (ja) | 1982-03-30 | 1982-03-30 | 物体の表面高さ測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58168906A JPS58168906A (ja) | 1983-10-05 |
| JPH0474644B2 true JPH0474644B2 (enrdf_load_html_response) | 1992-11-26 |
Family
ID=12892014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5162482A Granted JPS58168906A (ja) | 1982-03-30 | 1982-03-30 | 物体の表面高さ測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58168906A (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6107637A (en) | 1997-08-11 | 2000-08-22 | Hitachi, Ltd. | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59762B2 (ja) * | 1979-03-09 | 1984-01-09 | 安立電気株式会社 | 変位測定装置 |
| JPS56141505A (en) * | 1980-04-04 | 1981-11-05 | Yokogawa Hokushin Electric Corp | Position detector |
-
1982
- 1982-03-30 JP JP5162482A patent/JPS58168906A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58168906A (ja) | 1983-10-05 |