JPH0474644B2 - - Google Patents
Info
- Publication number
- JPH0474644B2 JPH0474644B2 JP57051624A JP5162482A JPH0474644B2 JP H0474644 B2 JPH0474644 B2 JP H0474644B2 JP 57051624 A JP57051624 A JP 57051624A JP 5162482 A JP5162482 A JP 5162482A JP H0474644 B2 JPH0474644 B2 JP H0474644B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- image
- height
- exposed
- spot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 24
- 238000010894 electron beam technology Methods 0.000 description 14
- 239000010410 layer Substances 0.000 description 12
- 238000005259 measurement Methods 0.000 description 10
- 238000000691 measurement method Methods 0.000 description 6
- 230000005484 gravity Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5162482A JPS58168906A (ja) | 1982-03-30 | 1982-03-30 | 物体の表面高さ測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5162482A JPS58168906A (ja) | 1982-03-30 | 1982-03-30 | 物体の表面高さ測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58168906A JPS58168906A (ja) | 1983-10-05 |
JPH0474644B2 true JPH0474644B2 (cs) | 1992-11-26 |
Family
ID=12892014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5162482A Granted JPS58168906A (ja) | 1982-03-30 | 1982-03-30 | 物体の表面高さ測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58168906A (cs) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6107637A (en) | 1997-08-11 | 2000-08-22 | Hitachi, Ltd. | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55119006A (en) * | 1979-03-09 | 1980-09-12 | Anritsu Corp | Displacement measuring instrument |
JPS56141505A (en) * | 1980-04-04 | 1981-11-05 | Yokogawa Hokushin Electric Corp | Position detector |
-
1982
- 1982-03-30 JP JP5162482A patent/JPS58168906A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55119006A (en) * | 1979-03-09 | 1980-09-12 | Anritsu Corp | Displacement measuring instrument |
JPS56141505A (en) * | 1980-04-04 | 1981-11-05 | Yokogawa Hokushin Electric Corp | Position detector |
Also Published As
Publication number | Publication date |
---|---|
JPS58168906A (ja) | 1983-10-05 |
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