JPH0473632B2 - - Google Patents

Info

Publication number
JPH0473632B2
JPH0473632B2 JP59011587A JP1158784A JPH0473632B2 JP H0473632 B2 JPH0473632 B2 JP H0473632B2 JP 59011587 A JP59011587 A JP 59011587A JP 1158784 A JP1158784 A JP 1158784A JP H0473632 B2 JPH0473632 B2 JP H0473632B2
Authority
JP
Japan
Prior art keywords
pressure
sensitive structure
temperature sensor
strain gauge
receiving surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59011587A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60154677A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59011587A priority Critical patent/JPS60154677A/ja
Publication of JPS60154677A publication Critical patent/JPS60154677A/ja
Publication of JPH0473632B2 publication Critical patent/JPH0473632B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP59011587A 1984-01-25 1984-01-25 圧覚センサ Granted JPS60154677A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59011587A JPS60154677A (ja) 1984-01-25 1984-01-25 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59011587A JPS60154677A (ja) 1984-01-25 1984-01-25 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60154677A JPS60154677A (ja) 1985-08-14
JPH0473632B2 true JPH0473632B2 (cs) 1992-11-24

Family

ID=11782031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59011587A Granted JPS60154677A (ja) 1984-01-25 1984-01-25 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60154677A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018074230A1 (ja) * 2016-10-18 2018-04-26 ソニーセミコンダクタソリューションズ株式会社 チップモジュールおよびその信号処理方法、並びに、電子機器

Also Published As

Publication number Publication date
JPS60154677A (ja) 1985-08-14

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