JPH0473523B2 - - Google Patents
Info
- Publication number
- JPH0473523B2 JPH0473523B2 JP10148385A JP10148385A JPH0473523B2 JP H0473523 B2 JPH0473523 B2 JP H0473523B2 JP 10148385 A JP10148385 A JP 10148385A JP 10148385 A JP10148385 A JP 10148385A JP H0473523 B2 JPH0473523 B2 JP H0473523B2
- Authority
- JP
- Japan
- Prior art keywords
- striped pattern
- grating
- topography
- moiré
- fringes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000691 measurement method Methods 0.000 claims description 4
- 238000012876 topography Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10148385A JPS61260108A (ja) | 1985-05-15 | 1985-05-15 | 3次元計測方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10148385A JPS61260108A (ja) | 1985-05-15 | 1985-05-15 | 3次元計測方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61260108A JPS61260108A (ja) | 1986-11-18 |
JPH0473523B2 true JPH0473523B2 (enrdf_load_html_response) | 1992-11-24 |
Family
ID=14301956
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10148385A Granted JPS61260108A (ja) | 1985-05-15 | 1985-05-15 | 3次元計測方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61260108A (enrdf_load_html_response) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3064895B1 (en) | 2010-09-07 | 2020-04-15 | Dai Nippon Printing Co., Ltd. | Linear illumination device |
US8848267B2 (en) | 2010-09-07 | 2014-09-30 | Dai Nippon Printing Co., Ltd. | Illuminating device using coherent light source |
CN106933014B (zh) | 2010-09-07 | 2020-05-22 | 大日本印刷株式会社 | 光学模块 |
JP5527261B2 (ja) * | 2011-03-15 | 2014-06-18 | 大日本印刷株式会社 | スキャナ装置および物体の三次元形状測定装置 |
JP5892410B2 (ja) * | 2011-10-03 | 2016-03-23 | 株式会社ニコン | 走査型顕微鏡 |
JP5737453B2 (ja) * | 2014-04-16 | 2015-06-17 | 大日本印刷株式会社 | 線状照明装置 |
PL236615B1 (pl) * | 2018-01-22 | 2021-02-08 | Szkola Glowna Gospodarstwa Wiejskiego W Warszawie | Sposób klasyfikacji tuszek drobiu |
-
1985
- 1985-05-15 JP JP10148385A patent/JPS61260108A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61260108A (ja) | 1986-11-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |